Mitutoyo General Catalog

Linear scale Move to other products

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List of products
KA Counter SERIES 174 KM Counter SERIES 174 KC Counter SERIES 174

SPC Caliper Depth gage Height gage Micrometer Inside micrometer Micrometer head Indicator Test indicator
AT715 Linear Scales SERIES 539 AT115 Linear Scales SERIES 539 AT102 Linear Scales SERIES 539 KLD Counter SERIES 174 Accessories for Display Unit

10 Gage head 11 Gauge Block 12 Reference gage 13 Surface plate 14 Miscellaneous

AT111 Linear Scales SERIES 539 AT112 Linear Scales SERIES 539 AT181 Linear Scales SERIES 539

Linear scale
16 Digimatic scale unit 17 Profile projector 18 Microscope 19 Contracer 20 Surftest 21 Formtracer 22 Roundtest 23 Hardness tester 24 CMM 25 Flexible measuring
AT503/543 Linear Scales SERIES 539 AT553 Linear Scales SERIES 539 AT212 Linear Scales SERIES 539 AT332 Linear Scales SERIES 539 AT303/343/353 Linear Scales SERIES 539 PSU-200 Pulse Signal Conversion Interface SERIES 539 AT202 Linear Scales SERIES 539 AT211 Linear Scales SERIES 539

gage

26 Vision measuring

system

ST34C Linear Scales SERIES 579

ST322/323 Linear Scales SERIES 579

ST422 Linear Scales SERIES 579

27 Detailed shape

measuring system

28 Laser scan micrometer 29 DIY tools

Linear Scale
Digital Readout System

The Mitutoyo Linear Scale is a digital readout system that accurately detects and displays the displacement of machine tools or measuring equipment. The optimum system, to meet your specific application, can be selected from a wide range of scale

sizes and a wide variety of counters. High-precision Linear Scales and their interface units for the feedback system of NC machine tools, and custom-tailored scale for special applications are also available.

Scale Units
LINEAR SCALES

AT715 AT115 AT102 AT111 AT112 AT181

Display Units

Economy Type Environmental Resistance Slim Spars Ranging from 100mm up to 1800mm

KA Counter
Standard Type

Economy Type Slim Spars Ranging from 100mm up to 1500mm

KM Counter
Multi-function Type

Standard-size Spars Ranging from 100mm up to 6000mm

KC Counter

Slim Spars Ranging from 100mm up to 1500mm

Multi-function Type available with data output unit

Super Slim Spars Ranging from 50mm up to 1020mm

KLD Counter
Special purpose Type with Limit Signal Output

Plunger Type Ranging from 100mm up to 600mm

322

Functions Zero-setting Zero-set remote controller Preset Resolution setting Counting direction setting mm/inch conversion 1/2 calculation ABS/INC coordinate selection Lower digit blanking out Memory backup Expansion/contraction coefficient setting Zero approach machining (ABS mode) Zero approach machining (INC mode) Bolt-hole circle machining Touch-signal probe Scale reference point setting Addition/subtraction Maximum/minimum value hold Diameter display Addition of 2-scale data Direct data entry with Digimatic gage Cutting tool selection Coordinate data copy One-touch macro keys Part-program setting Programmable remote controller Linearity error compensation Pitch error compensation Lost motion compensation Smoothing RS-232C Interface Unit Limit signal output via RS-232C BCD Code Out Digimatic Code Out GP-IB Interface Limit signal output
: Provided as standard, : Optional accessory, :Not available *: Only available for AT100 series *: Only available for 3-axis counter

KA Counter * *

KM Counter

KC Counter

KLD Counter

APPLICATIONS OF LINEAR SCALES

Lathe Electrical discharge machine Planer

Milling machine

Drilling machine

Surface grinder

Milling machine

Milling machine

Milling machine

Horizontal boring machine

323

LINEAR SCALES

KA Counter
SERIES 174 Standard Type

174-173

174-173

FEATURES
High cost performance 2/3-axis counter with new 10coordinate function and existing KL counter functions The KA counter can be used as the standard counter or a lathe counter by modifying parameters. Both the existing AT100 series optical scales and the new AT715 electromagnetic induction scale can be connected.
LINEAR SCALES

Dimensions
260 Unit: mm

SPECIFICATIONS
Inch/Metric Order No. 100V AC 120V AC 110V AC 230V AC 240V AC * 240V AC ** 220V AC *** 220V AC **** Scale input ports Resolution Display Functions 174-173 174-175 174-173A 174-175A 174-173B 174-175B 174-173D 174-175D 174-173E 174-175E 174-173F 174-175F 174-173DC 174-175DC 174-173K 174-175K 2 3 0.001mm, 0.005mm, .0001, .0005 (changeable) 7-digit LED and a negative [-] sign Zero-setting, preset, counting direction setting, mm/inch conversion, 1/2 calculation, ABS/INC coordinate selection, diameter display, addition of 2-scale data, zero approach machining, bolt-hole circle machining, pitch machining, touch-signal probe input (See page 317 for more details.) 100V-240V AC, 50/60Hz 0C to 40C 0C to 40C 1.1kg 1.2kg

206

43

167

Mount screw x2 (M5)

Power supply Operating temperature Mass

OPTIONAL ACCESSORIES
Order No. 938140 935094 09CAB217 09CAB231 Description Touch signal probe (shank diameter: 20mm) Touch signal probe (shank diameter: 32mm) RS232C code out unit Digimatic micrometer head adapter

* for UK/** For Australia/*** For China/**** For Korea

324

80

KM Counter
SERIES 174 Multi-function Type

174-113

SPECIFICATIONS
Metric Order No. 100V AC 120V AC 230V AC 240V AC* 240V AC** Scale input ports Resolution Display Functions Power supply Operating temperature Dimensions (WxDxH) Mass
*For UK/**For Australia

FEATURES
174-111 174-113 174-115 174-111A 174-113A 174-115A 174-111D 174-113D 174-115D 174-111E 174-113E 174-115E 174-111F 174-113F 174-115F 1 2 3 0.0005mm, 0.001mm, 0.002mm, 0.005mm, 0.01mm 8-digit LED and a negative [-] sign (See page 323.) 100-120V/200-240V AC, 50/60Hz 0C to 40C 335x203x158mm 3.3kg 3.4kg 3.5kg

Inch/Metric Order No. 100V AC 120V AC 230V AC 240V AC* 240V AC** Scale input ports Resolution
*For UK/**For Australia

174-112 174-114 174-116 174-112A 174-114A 174-116A 174-112D 174-114D 174-116D 174-112E 174-114E 174-116E 174-112F 174-114F 174-116F 1 2 3 .00002", .00005", .0001", .0002", .0005", .001", 0.0005mm, 0.001mm, 0.002mm, 0.005mm, 0.01mm

325

LINEAR SCALES

Frequently used functions can be registered to one-touch macro keys for easy use with various applications, including milling, turning, and grinding. Suitable for use with a variety of machine tools. A Mitutoyo SPC gage, such as the Digimatic Micrometer, Digimatic Caliper, etc., can be connected for direct data entry. This function facilitates turning operation. Zero-setting remote controller is optional.

KC Counter
SERIES 174 Multi-function Type available with data output unit

174-125

SPECIFICATIONS
Metric Order No. 100V AC 120V AC 230V AC 240V AC* 240V AC** Scale input ports Resolution
LINEAR SCALES

FEATURES
174-121 174-123 174-125 174-121A 174-123A 174-125A 174-121D 174-123D 174-125D 174-121E 174-123E 174-125E 174-121F 174-123F 174-125F 1 2 3 0.0005mm, 0.001mm, 0.002mm, 0.005mm, 0.01mm 8-digit LED and a negative [-] sign (See page 323.) 100-120V/200-240V AC, 50/60Hz 0C to 40C 335x203x158mm 3.5kg 3.6kg 3.7kg

In addition to having the same functions of the KM Counter, the KC Counter allows connection to an external devices, such as a printer, personal computer, etc., with the optional data output unit. All the data output units are factory-installed-option. Specify the type of Interface Unit or Code Out Unit required when ordering a KC Counter.

Display Functions Power supply Operating temperature Dimensions (WxDxH) Mass

*For UK/**For Australia

Inch/Metric Order No. 100V AC 120V AC 230V AC 240V AC* 240V AC** Scale input ports Resolution
*For UK/**For Australia

174-122 174-124 174-126 174-122A 174-124A 174-126A 174-122D 174-124D 174-126D 174-122E 174-124E 174-126E 174-122F 174-124F 174-126F 1 2 3 .00002", .00005", .0001", .0002", .0005", .001", 0.0005mm, 0.001mm, 0.002mm, 0.005mm, 0.01mm

326

SYSTEM DIAGRAM
Digimatic Gages 09CAA335 09CAA384 938140 935094 902329 Linear Scale

KC Counter

937326

Interface and Code Out Units

936551 Digimatic BCD Limit Signal 936552 PLC

RS-232C 937327

GP-IB

937328

965004

936937 (1m) 965014 (2m)

936553

DP-1VR Personal Computer

Data Output Units for KC Counter (Factory-installed-option)

Order No. 09CAA402 09CAA412 09CAA424 09CAA430 09CAA452 09CAA462 09CAA472 Description RS-232C Interface Unit Parallel BCD Code Out Unit (1-axis) Parallel BCD Code Out Unit (2-axis) Parallel BCD Code Out Unit (3-axis) GP-IB Interface Unit Digimatic Code Out Unit Limit Signal Output Unit

RS-232C Interface Unit

OPTIONAL ACCESSORIES
GP-IB Interface Unit Order No. 09CAA335 09CAA384 938140 935094 902329 937326 937327 937328 965004 936551 936552 936553 936937 965014 Description Zero-set remote controller Programable remote controller Touch-signal probe (shank diameter: 20mm) Touch-signal probe (shank diameter: 32mm) Touch-signal probe (shank diameter: .5") External load box (1-axis) External load box (2-axis) External load box (3-axis) External load foot switch (for all axes) External zero-set box (1-axis) External zero-set box (2-axis) External zero-set box (3-axis) SPC cable (1m) SPC cable (2m)
Unit: mm 335 3 187 13

Parallel BCD (3-axis) Code Out

Digimatic Code Out

Dimensions

Limit Signal Output

150

Note: The dimensions are compatible between KM Counter and KC Counter.

327

LINEAR SCALES

KLD Counter
SERIES 174 Special Purpose Type with Limit Signal Output

4-step limit setting type

8-step limit setting type

FEATURES
A 1-axis counter dedicated to sending signals when a linear scale displacement value and a preset limit value coincide. Three types of limit settings are available: 2 steps, 4 steps, and 8 steps. For controlling a vertical position of an EDM or a grinding machine. Can be connected to a personal computer or a sequencer by installing an RS-232C Interface Unit or a BCD Code Out Unit. (Both interface units are optional accessories.)

Dimensions
332 235

Unit: mm

LINEAR SCALES

SPECIFICATIONS
Inch/Metric Order No. 100V AC 120V AC 230V AC 240V AC Limit signal output Scale input ports Resolution 174-141 174-143 174-145 174-141A 174-143A 174-145A 174-141D 174-143D 174-145D 174-141E 174-143E 174-145E 1-step 4-step 8-step 1 0.0005mm, 0.001mm, 0.002mm, 0.005mm. 0.01mm .00002", .00005", .0001", .0002", .0005", .001" 9-digit LED and a negative [-] sign Digital switch Digital switch Ten-keyboard (See page 323.) 100-120V/200-240V AC, 50/60Hz 0C to 40C 332x165.5x235mm (13.07"x6.52"x9.25") 4.5kg (9.9 lbs.)
332 235

Display Limit value setting method Functions Power supply Operating temperature Dimensions (WxDxH) Mass

OPTIONAL ACCESSORIES
Order No. 907569 907570 965004 937326 936551 938140 935094 902329 Description RS-232C Interface Unit BCD Code Out Unit External load foot switch External load box External zero-set box Touch-signal probe (shank dia.: 20mm) Touch-signal probe (shank dia.: 32mm) Touch-signal probe (shank dia.: 1/2")

328

166

166

Accessories for Display Unit

Zero-set Remote Controller External Load Foot Switch

09CAA335

965004

FEATURES
Allows the displayed value to be remotely zero set.

FEATURES
Connected to the optional EXT.LOAD connector of KS or KC Counter, the foot switch can output the displayed data in this order X-Y-Z (on 3-axis model).

Programmable Remote Controller

Touch-signal Probes

09CAA384

FEATURES
Makes it easy to perform such operations as datum point setting (detecting the workpiece edge and setting the counter display to zero), workpiece centering, and dimentional measurement (detecting the workpiece end point and holding the counter display).

FEATURES
The programming function of KM/KC Counter facilitates the repeated machining of multiple workpieces. The Programmable Remote Controller can be used to edit the programs by deleting or inserting machining operations.

SPECIFICATIONS
Shank diameter 20mm 32mm .5" Order No. 938140 935094 902329 Contact point diameter 10 0.002mm 10 0.002mm .2" Connecting cable length 3m 3m 9.8 feet

329

LINEAR SCALES

AT715 Linear Scales

SERIES 539 Economy Type Environmental Resistance Slim Spars

Unit: mm (inch) 22 (.87")

FEATURES
Due to the employment of an electromagnetic induction system, environmental resistance against coolant is greatly improved when compared to the conventional optical system. Thanks to an absolute scale, there is no need to set reference point at every power-on so that productivity can be enhanced. Offers high-performance and high cost-to-performance ratio DRO system for manual machine tools in combination with the KA counter. The best solution for the digitalization of conventional milling machines in combination with the KA counter.
Technical Data
Detecting method: Electromagnetic induction method Sectional dimensions: 22x54mm Maximum response speed: 50m/min. Dust/water protection level: Conforming to IP55 Operating temperature: 0C to 45C

SPECIFICATIONS
Effective range Lo 100mm (4) 150mm (6) 200mm (8) 250mm (10) 300mm (12) 350mm (14) 400mm (16) 450mm (18) 500mm (20) 600mm (24) 700mm (28) 750mm (30) 800mm (32) 900mm (36) 1000mm (40) 1100mm (44) 1200mm (48) 1300mm (52) 1400mm (56) 1500mm (60) 1600mm (64) 1700mm (68) 1800mm (72) Order No. 539-801 539-802 539-803 539-804 539-805 539-806 539-807 539-808 539-809 539-811 539-813 539-814 539-815 539-816 539-817 539-818 539-819 539-820 539-821 539-822 539-823 539-824 539-82 5 Signal cable length 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 5m 5m 5m 5m 5m 5m 5m 5m 5m Mass 0.70kg 0.75kg 0.80kg 0.85kg 0.90kg 0.95kg 1.00kg 1.05kg 1.10kg 1.20kg 1.30kg 1.35kg 1.40kg 1.50kg 1.65kg 1.75kg 1.85kg 1.95kg 2.05kg 2.15kg 2.25kg 2.35kg 2.45kg

LINEAR SCALES

Accuracy at 20C

(7+13Lo/1000)m* *Lo=Effective range (mm)

OPTIONAL ACCESSORIES
Order No. 09AAB674A 09AAB674B 09AAB674C Description Extension cable for AT series & AT715 (2m) Extension cable for AT series & AT715 (5m) Extension cable for AT series & AT715 (7m)

330

54 (2.13")

AT115 Linear Scales

SERIES 539 Economy Type Slim Spars

Unit: mm (inch) 22 (.87")

FEATURES
Suitable for milling machines, XY tables, jigs, etc. Dimensionally compatible with AT111 linear scale units. Provided with scale reference points at a 50mm pitch over the entire scale. Even after the power is turned off, the datum point for machining can be easily determined by using these reference points.
Technical Data
Sectional dimensions: 22x52mm Scale grating pitch: 20m Scale reference point pitch: 50mm Maximum response speed: 50m/min. Dust/water protection level: Conforming to IP-53 Operating temperature: 0C to 45C

SPECIFICATIONS
Effective range Lo 100mm (4") 150mm (6") 200mm (8") 250mm (10") 300mm (12") 350mm (14") 400mm (16") 450mm (18") 500mm (20") 600mm (24") 700mm (28") 750mm (30") 800mm (32") 900mm (36") 1000mm (40") 1100mm (44") 1200mm (48") 1300mm (52") 1400mm (56") 1500mm (60") Order No. 539-271 539-272 539-273 539-274 539-275 539-276 539-277 539-278 539-279 539-281 539-283 539-284 539-285 539-286 539-287 539-288 539-289 539-290 539-291 539-292 Signal cable length 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 3.5m 5m 5m 5m 5m 5m 5m Mass 1.0kg 1.0kg 1.0kg 1.1kg 1.1kg 1.1kg 1.2kg 1.2kg 1.2kg 1.3kg 1.3kg 1.3kg 1.4kg 1.4kg 1.8kg 1.8kg 1.9kg 1.9kg 2.0kg 2.0kg

52 (2.05")

OPTIONAL ACCESSORIES

Accuracy at 20C

(5+5L0/1000)m* *L0= Effective range (mm)

Order No. 09AAA720A 09AAA720B 09AAA720C

Description Extension cable for AT115 (2m) Extension cable for AT115 (5m) Extension cable for AT115 (7m)

331

LINEAR SCALES

AT102 Linear Scales

SERIES 539 Standard-size Spars

SPECIFICATIONS
Unit: mm (inch)

Effective range L0 100mm (4") 150mm (6") 200mm (8") 250mm (10") 300mm (12") 350mm (14") 400mm (16") 450mm (18") 500mm (20") 600mm (24") 700mm (28") 750mm (30") 800mm (32") 900mm (36") 1000mm (40") 1100mm (44") 1200mm (48") 1300mm (52") 1400mm (56") 1500mm (60") 1600mm (64") 1700mm (68") 1800mm (72") 2000mm (80") 2200mm (88") 2400mm (96") 2500mm (100") 2600mm (104") 2800mm (112") 3000mm (120") 3250mm (130") 3500mm (140") 3750mm (150") 4000mm (160") 4250mm (170") 4500mm (180") 4750mm (190") 5000mm (200") 5250mm (210") 5500mm (220") 5750mm (230") 6000mm (240")

37.5 (1.476") 37.5 (1.476")

80 (3.15") 95.5 (3.76")

Up to 3m

Over 3m

FEATURES
Enhanced vibration-resistance and durability. The innovative rubber lips keep out contaminants on a machine shop.

An armored signal cable is used to connect the scale unit to the DRO counter for safe operation in harsh shop environment. The signal cable outlet can be positioned on either side of the detecting head so the signal cable can be connected from either direction.
Technical Data
Scale grating pitch: 20m Scale reference point pitch: 50mm Maximum response speed: 72m/min. for scales up to 3000mm 50m/min. for 3250mm scale and over Dust/water protection level: Conforming to IP-53 Operating temperature: 0C to 45C

OPTIONAL ACCESSORIES
(Common to AT102, AT111 and AT112)

Order No. Standard type 539-111 539-112 539-113 539-114 539-115 539-116 539-117 539-118 539-119 539-121 539-123 539-124 539-125 539-126 539-127 539-128 539-129 539-130 539-131 539-132 539-133 539-134 539-135 539-136 539-137 539-138 539-138 539-140 539-141 539-142 539-143 539-144 539-145 539-146 539-147 539-148 539-149 539-150 539-151 539-152 539-153 539-154

Order No. High-accuracy type 539-111-10 539-112-10 539-113-10 539-114-10 539-115-10 539-116-10 539-117-10 539-118-10 539-119-10 539-121-10 539-123-10 539-124-10 539-125-10 539-126-10 539-127-10 539-128-10 539-129-10 539-130-10 539-131-10 539-132-10 539-133-10 539-134-10 539-135-10 539-136-10

Signal cable length 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 5m 5m 5m 5m 5m 5m 5m 5m 5m 5m 5m 7m 7m 7m 7m 7m 10m 10m 10m 10m 10m 10m 15m 15m 15m 15m 15m 15m

LINEAR SCALES

Accuracy at 20C
Order No. 09AAA033A 09AAA033B 09AAA033C Description Extension cable (2m) Extension cable (5m) Extension cable (7m) Effective range L0 100 to 2000mm 2200 to 3000mm 3250 to 6000mm Standard type (5+5L0/1000)m (5+5L0/1000)m (5+8L0/1000)m High-accuracy type (3+3L0/1000)m

332

AT111 Linear Scales

SERIES 539 Slim Spars

SPECIFICATIONS
Effective range L0
Unit: mm (inch) 22 (.87")

Technical Data
Scale grating pitch: 20m Scale reference point pitch: 50mm Maximum response speed: 72m/min. Dust/water protection level: Conforming to IP-53 Operating temperature: 0C to 45C

Accuracy at 20C
Effective range L0 100 to 1500mm Standard type (5+5L0/1000)m High-accuracy type (3+3L0/1000)m

100mm (4") 150mm (6") 200mm (8") 250mm (10") 300mm (12") 350mm (14") 400mm (16") 450mm (18") 500mm (20") 600mm (24") 700mm (28") 750mm (30") 800mm (32") 900mm (36") 1000mm (40") 1100mm (44") 1200mm (48") 1300mm (52") 1400mm (56") 1500mm (60")

Order No. Standard type 539-201 539-202 539-203 539-204 539-205 539-206 539-207 539-208 539-209 539-211 539-213 539-214 539-215 539-216 539-217 539-218 539-219 539-220 539-221 539-222

Order No. High-accuracy type 539-201-10 539-202-10 539-203-10 539-204-10 539-205-10 539-206-10 539-207-10 539-208-10 539-209-10 539-211-10 539-213-10 539-214-10 539-215-10 539-216-10 539-217-10 539-218-10 539-219-10 539-220-10 539-221-10 539-222-10

Signal cable length 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 5m 5m 5m 5m 5m 5m

LINEAR SCALES

AT112 Linear Scales

SERIES 539 Super Slim Spars SPECIFICATIONS
Effective range L0 50mm (1.5") 70mm (2.5") 120mm (4.5") 170mm (6.5") 220mm (8.5") 270mm (10.5") 320mm (12.5") 370mm (14.5") 420mm (16.5") 470mm (18.5") 520mm (20") 570mm (22") 620mm (24") 670mm (26") 720mm (28") 770mm (30") 820mm (32") 920mm (36") 1020mm (40") Order No. Standard type 539-251 539-252 539-253 539-254 539-255 539-256 539-257 539-258 539-259 539-260 539-261 539-262 539-263 539-264 539-265 539-266 539-267 539-268 539-269 Order No. High-accuracy type 539-251-10 539-252-10 539-253-10 539-254-10 539-255-10 539-256-10 539-257-10 539-258-10 539-259-10 539-260-10 539-261-10 539-262-10 539-263-10 539-264-10 539-265-10 539-266-10 539-267-10 539-268-10 539-269-10 Signal cable length 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m

Unit: mm (inch) 15.4 (.606")

44.5 (1.752")

Technical Data
Scale grating pitch: 20m Scale reference point pitch: 50mm Maximum response speed: 72m/min. Dust/water protection level: Conforming to IP-53 Operating temperature: 0C to 45C

Accuracy at 20C
Effective range L0 50 to 1020mm Standard type (5+5L0/1000)m High-accuracy type (3+3L0/1000)m

52 (2.05")

333

AT181 Linear Scales

SERIES 539 Plunger Type (High Water-proof Design)

SPECIFICATIONS
Unit: mm (inch) 42 (1.65)

Effective range L0 100mm (4") 150mm (6") 200mm (8") 250mm (10") 300mm (12") 350mm (14") 400mm (16") 450mm (18") 500mm (20") 550mm (22") 600mm (24")

Technical Data
Scale grating pitch: 20m Scale reference point pitch: 50mm Maximum response speed: 50m/min. Dust/water protection level: Conforming to IP-54 Operating temperature: 0C to 45C

OPTIONAL ACCESSORIES
Order No. 09AAA033A 09AAA033B 09AAA033C Description Extension cable (2m) Extension cable (5m) Extension cable (7m)

Order No. Standard type 539-301 539-302 539-303 539-304 539-305 539-306 539-307 539-308 539-309 539-310 539-311

Order No. High-accuracy type 539-301-10 539-302-10 539-303-10 539-304-10 539-305-10 539-306-10 539-307-10 539-308-10 539-309-10 539-310-10 539-311-10

Signal cable length 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m 3m

70 (2.76)

Accuracy at 20C
Effective range L0 100 to 600mm Standard type (5+5L0/1000)m High-accuracy type (3+3L0/1000)m

PSU-200
LINEAR SCALES

SERIES 539 Pulse Signal Conversion Interface SPECIFICATIONS

Order No. Number of axes Number of deviation Functions 539-005 1 4, 8, 10, 20, 40, 80, 100 or 200 (switchable) Division setting, Min. edge interval setting, LED for alarm indication, Alarm output mode switching, LED for origin detection, LED for low-level power supply voltage warning 5VDC 5% on the power terminal 200mA (except the scale) 0C to 40C Approx. 620g (1.4 lbs.)
100 Unit: mm

Power supply Consumption Operating temperature Mass

Dimensions

FEATURES
Applicable with Linear Scales with the sinusoidal signal output. Quadrature signal output (conforming to EIA standard RS422A). Alarm function for detecting broken wires or short circuits in the detector, over-speed and fluctuation errors in the input signal from the detector.

15

175 mounting hole pitch

7.5 190

28

334

2-5

Linear Scales for Numerical Motion Control System

Fig.1

Fig.2

Fig.3

Fig.4

The Linear Scales for the Numerical Motion Control System are high-accuracy linear measurement systems for a wide range of applications. These types of linear scales are designed to be integrated into precision machines and instruments including measuring machines and instruments, as well as machine tools, optics, data equipment, industrial robots, etc. Two types of linear scales for the Numerical Motion Control System are available: the AT series have the high-accuracy glass scale and the detector head encased together in an aluminum casing for improved durability and resistance against vibration;

the ultra-portable and lighter ST series have the scale and the detector head separately.

APPLICATIONS
High-speed, high-accuracy installation of electronics in industrial robots (Fig.1) Positioning dicing saw in semiconductor production process (Fig.2) Positioning IC tip for wire-bonding (Fig.3) Improving seek-time of disk drive system (Fig.4)

AT202 Linear Scales

SERIES 539 Sealed Type Linear Encoder FEATURES
LINEAR SCALES

Sealed type incremental linear scales suitable for feedback system of NC machine tools. Direct connection with NC machine tools are possible.
Technical Data
Resolution: 0.5m or 1m Effective range L0: 100mm - 3000mm (30 sizes) Accuracy (at 20C): (3+3L0/1000)m (standard type) Max. response speed: 72m/min. Dust/Water protection level: Conforming to IP-53

AT211 Linear Scales

SERIES 539 Sealed Type Linear Encoder FEATURES
AT211-B

AT211-A

High-resolution, high-accuracy sealed type linear scales. Most ideal for feedback control in positioning a semiconductor manufacturing system, CNC machine tool, etc. Two types of models are available: the AT211-A, the multiplepoint installation type designed for improved resistance against vibration and shock, and the AT211-B, which attaches to a machine at both ends. The AT211-B is compatible with the AT111 slim type in size.
Technical Data
Resolution: 0.1m, 0.2m, 0.5m, 1m, 2.5m, or 5m Effective range L0: 100mm - 1500mm (20 sizes) Accuracy (at 20C): (3+3L0/1000)m (standard type) Max. response speed: 5.4 - 120m/min. (depending on resolution)

335

AT212 Linear Scales

SERIES 539 Super Slim Sealed Type Linear Encoder FEATURES
Super slim sealed type incremental linear scales suitable for feedback system of NC machine tools (dimensions are equivalent to that of the AT112 linear scales). Direct connection with NC machine tools are possible.
Technical Data
Resolution: 0.5m or 1m Effective range Lo: 50mm - 1020mm (19 sizes) Accuracy (at 20C): (3+3Lo/1000)m (standard type) Maximum response speed: 50m/min. Dust/water protection level: Conforming to IP53

AT332 Linear Scales

SERIES 539 Sealed Type Linear Encoder FEATURES
Sealed type absolute linear scales suitable for feedback system of high-speed NC machine tools. Direct connection with FANUC NC controller is possible.
Technical Data
Resolution: 0.5m Effective range Lo: 100mm - 3000mm (30 sizes) Accuracy (at 20C): (3+3Lo/1000)m (standard type) Maximum response speed: 110m/min. Dust/water protection level: Conforming to IP53

AT303/343/353 Linear Scales

LINEAR SCALES

SERIES 539 Sealed Type Linear Encoder FEATURES

Sealed type absolute linear scales with very fine resolution up to 0.05m. Direct connection with NC machine tools are possible. - AT303: Supports Mitutoyo standard serial interface - AT343: Supports Mitsubishi Electric high-speed serial interface - AT353: Supports Fanuc high-speed serial interface
Technical Data
Resolution: 0.05m Effective range Lo: 100mm - 3000mm (30 sizes) Accuracy (at 20C): (3+3Lo/1000)m (standard type) Maximum response speed: 120m/min. Dust/water protection level: Conforming to IP53

AT503/543 Linear Scales

SERIES 539 Sealed Type Linear Encoder FEATURES
Sealed type absolute linear scales suitable for feedback system of high-speed NC machine tools. Direct connection with FANUC NC controller is possible.
Technical Data
Resolution: 0.05m Effective range Lo: 100mm - 1500mm (20 sizes) Accuracy (at 20C): (3+3Lo/1000)m (standard type) Maximum response speed: 120m/min. Dust/water protection level: Conforming to IP53

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AT553 Linear Scales

SERIES 539 Sealed Type Linear Encoder FEATURES
New slim spar design sealed type absolute linear scales with very fine resolution up to 0.05m. Two types are available: the AT553-SC, a high-rigid type, and the AT553-HC, a high-accuracy type. Direct connection with FANUC NC controller is possible.
AT553-HC

Technical Data
Resolution: 0.5m Effective range Lo: 100mm - 2200mm (high-rigid type) 100mm - 1000mm (high-accuracy type) Accuracy (at 20C): (3+3Lo/1000)m (high-rigid type) (2+2L/1000)m (high-accuracy type) Maximum response speed: 150m/min. Dust/water protection level: Conforming to IP53

AT553-SC

ST34C Linear Scales

SERIES 579 Exposed Type Linear Encoder FEATURES
High-resolution, high-accuracy and portable model designed for exposed installation. Outputs two-phase sine wave signal (signal pitch 4m) and two-phase pulse signal simultaneously. High-reliability with stable signal output. Equipped with a compact interface box.
Technical Data
Resolution: 0.02m, 0.05m, or 0.1m Effective range Lo: 10mm - 1000mm (14 sizes) Accuracy (at 20C): 0.5m (up to 300mm), 1m (from 350mm up to 500mm), 2m (from 600mm up to 1000mm) Maximum response speed: 720mm/s (depending on resolution)

ST322/323 Linear Scales

SERIES 579 Exposed Type Linear Encoder FEATURES
Ultra compact design exposed type incremental linear scales adopting very thin and compact detector head. Suitable for installation on various testing equipment, compact/ high-density mounting devices.
Technical Data
Resolution: 1m or 2m (ST322), 2.5m or 5m (ST323) Effective range Lo: 50mm - 350mm (7 sizes) Accuracy (at 20C): 3m Maximum response speed: 600mm/s (ST322), 1500mm/s (ST323)

ST422 Linear Scales

SERIES 579 Exposed Type Linear Encoder FEATURES
Compact design exposed type incremental linear scales. Maximum of up to 5000mm/s high response speed. Provided with alarm LED error indication with fault detection signal output for over speed and sinusoidal signal anomaly errors.
Technical Data
Resolution: 0.2m, 0.5m, 1m, or 5m Effective range Lo: 10mm - 1000mm (18 sizes) Accuracy (at 20C): 1m (up to 300mm), 2m (from 350mm up to 500mm), 3m (from 600mm up to 1000mm) Maximum response speed: 5000mm/s (depending on resolution)

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LINEAR SCALES