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    CMP1b Microza Filtration

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    mohamedalizarrouk766
    The document provides information on Pall Microza filtration systems for treating CMP wastewater. [1] The systems remove suspended solids from spent slurry wastewater to produce a clear permeate that can be discharged or further treated. [2] Key features include continuous operation, automation, high uptime of over 99%, and a small footprint. [3] Options include buffer tanks, pumps, pH adjustment, and post-treatment of permeate and concentrate.

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    CMP1b Microza Filtration

    Uploaded by

    mohamedalizarrouk766
    9 views2 pages
    The document provides information on Pall Microza filtration systems for treating CMP wastewater. [1] The systems remove suspended solids from spent slurry wastewater to produce a clear permeate that can be discharged or further treated. [2] Key features include continuous operation, automation, high uptime of over 99%, and a small footprint. [3] Options include buffer tanks, pumps, pH adjustment, and post-treatment of permeate and concentrate.

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    les technique de filtration

    Original Title

    CMP1b_Microza_Filtration

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    The document provides information on Pall Microza filtration systems for treating CMP wastewater. [1] The systems remove suspended solids from spent slurry wastewater to produce a clear permeate that can be discharged or further treated. [2] Key features include continuous operation, automation, high uptime of over 99%, and a small footprint. [3] Options include buffer tanks, pumps, pH adjustment, and post-treatment of permeate and concentrate.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    9 views2 pages

    CMP1b Microza Filtration

    Uploaded by

    mohamedalizarrouk766
    The document provides information on Pall Microza filtration systems for treating CMP wastewater. [1] The systems remove suspended solids from spent slurry wastewater to produce a clear permeate that can be discharged or further treated. [2] Key features include continuous operation, automation, high uptime of over 99%, and a small footprint. [3] Options include buffer tanks, pumps, pH adjustment, and post-treatment of permeate and concentrate.

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    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    of 2

    Wastewater: CMP Custom Crossflow Systems Data Sheet CMP1b

    Pall Microza1 Filtration


    Systems for CMP Wastewater

    Description Specifications
    Pall Microza Hollow Fiber Filtration Technical Data Performance Data
    Systems remove all suspended solids • Design Influent: Spent oxide or metal • Permeate Recovery: > 98% of
    from spent slurry wastewater. The clear slurry wastewater incoming wastewater
    filtration permeate may be discharged to • Design TSS: Typically <3 g/L • Permeate Turbidity: < 0.2 NTU
    sewage or, where required, treated to (3,000 ppm or 0.3% by weight) • Uptime: > 99%2
    remove varying amounts of dissolved • Operation Mode: Continuously fed • Module Lifetime: > 2 years
    constituents, e.g., copper in copper batch • Cleaning Frequency: typically < 2/year
    CMP wastewater. The retained solids • Automation: Full automation via PLC • Operator Labor: < 15 min/day
    may be transferred to an existing sludge and Touch Panel HMI • Chemical Dosage: none3
    treatment system, or to a dedicated • Typical Footprint (w/o buffer tank): 1 Microza is a trademark of Asahi Kasei Corporation
    system for final dewatering. Pall can 2 m x 4 m for 8 m3/hr / 35 gpm; 2 (Volume of treated wastewater)
    Uptime = x 100%
    also provide fully automated turnkey 4 m x 8 m for 14 m3/hr / 62 gpm; (Volume of available wastewater)

    installations for reclaiming or recycling of 2.7 m x 12 m (two tiered design) for Not including chemical cleaning.
    3 Except for occasional chemical cleaning.
    the permeate for cooling towers, for raw 28 m3/hr / 125 gpm
    water, for water suitable for RO make-up,
    or for water suitable for recycling back
    to the CMP process.
    Options
    Recommended Options Additions • Permeate Post Treatment: System
    to Base System • N+1 Redundant Pumps: Add for processing permeate to desired
    • Buffer Tank System: Provides holding redundancy to transfer, feed, recir- quality: e.g., by ion exchange, reverse
    capacity for changing feed flow rates culation and reverse filtration and osmosis or activated carbon.
    and optimizes Microza Systems’ concentrate transfer pumps. • A comprehensive copper CMP
    uptime. Typically 2+ hours holding • CIP Tank System: For off-line wastewater treatment infrastructure
    capacity above volume required for preparation of cleaning solutions. can be supplied to produce copper
    normal processing. • Chemical Dosing Stations: For free permeate and dewatered solids.
    • Transfer Pump System: For transfer of automatic addition of chemicals for pH For a typical PFD, see the CMP
    wastewater from buffer tank to Microza adjustment and chemical cleaning. section of the Pall Microelectronics
    System. • Concentrate Post Treatment: System catalog at www.pall.com/micro.
    • pH Adjustment: For optimizing for storage, coagulation/ destabilization • Service Contract: Routine on-site
    treatment of mixed oxide and metal and final dewatering of concentrated system maintenance and remote
    wastewater. wastewater for solids disposal. monitoring to ensure optimized
    performance

    Flow Schematic for Pall Microza CMP Base


    System with Buffer Tank and Transfer Pump Options

    Wastewater from
    CMP Tools RF Permeate
    Process Permeate Permeate
    Rinse
    Pre-Filters
    Transfer
    (Guard
    Filter)
    F

    Feed Retentate
    Module Rack 1

    Module Rack 2

    Buffer Tank
    Reverse
    Batch Filtration
    Microza

    Microza

    Tank (RF) Tank

    Transfer Feed Recirculation RF/Permeate


    Pump Pump Pump Pump

    Concentrate Drain Pump

    25 Harbor Park Drive Visit us on the Web at www.pall.com/micro


    Port Washington, New York 11050
    Pall Corporation has offices and plants throughout the world.

    1.800.360.7255 toll free (only in US)


    1.516.484.3600 phone
    1.516.625.3610 fax
    [email protected]
    © Copyright 2007, 2004, Pall Corporation. Pall and are trademarks of Pall Corporation. ® Indicates a Pall
    trademark registered in the USA. is a service mark of Pall Corporation.

    CMP1b

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