Woosung LOVD 36

VACUUM COMPONENTS
Total Vacuum Solutions

We are one of the leading company of vacuum pump distributor including
pump & system assembly, maintenance and services needed by those
related with in domestic and overseas as well. The range of our
customers are reaching to the research, technical and industrial
organization and has good reputations in our products, favorable terms
and services.
As above mentioned, our various products including Dry pump, Rotary

pump, ISP series, Glove box, Liquid ring pump, vacuum system and
components of vacuum pumps with durability, efficiency, strength &
reliable competitive price and good services. For further information, you
are being invited to our web site: www.woovac.com
In order to diversify our existing market, we are effort and in the anxious
to develope our business activity by supplying our high quality products
on favorable terms.
Hoping for a business connection in the future and having an opportunity

to be of service to you. We would appreciate of your highly concerning and
attention to us with your favorable reply.
CONTENTS Oil Rotary Pumps
Dry Pumps
4
9
Water Ring Pumps 16
Booster Pumps 18
Diffusion Pumps 20
Booster Pump Systems 21
Diffusion Pump Systems 22
Vacuum Systems 23
System Layout 24
Vacuum Gauges 28
Mass Flow Controller 34
Vacuum Pump Accessories 35
Vacuum Valves 36
Vacuum Accessories 43
Woosung Vacuum System Line-up 51
OIL ROTARY PUMPS
WSVP Series
GH
I J
Outlet port Inler port Inlet oil cap
Gas ballast valve Oil gauge
C Oil drain
D K E
A 4-™H B
Technical Data
MODEL WSVP 9018 WSVP 9030 WSVP 9060
Displacement speed 60Hz 180 300 600
(§/min) 50Hz 150 250 500
Ultimate pressure With gas ballast 1ø10-2 1ø10-2 1ø10-2
(Torr) Without gas ballast 5ø10-4 5ø10-4 5ø10-4
Inlet port ™32 ™32 ™46
Outlet port PF 1 PF 1 1/4 PF 1 1/2
Power requirements(Kw) 0.4 0.75 0.75
Rotational speed(R.P.M) 600 600 600
WOOSUNG VACUUM CO., LTD.
Oil capacity(§) 1.8 2.2 4

Weight(including motor) kg 32(50) 35(60) 51(80)
Outside Dimension (UNIT : mm)

MODEL A B C D E F G H I J K L
WSVP 9018 488 285 342 450 200 ™32 35 25 135 88 ™171 ™13
WSVP 9030 545 310 365 515 274 ™32 40 30 145 100 ™171 ™13
WSVP 9060 610 350 424 580 310 ™46 50 35 171 110 ™210 ™13
4 WOOSUNG VACUUM CO., LTD.

OIL ROTARY PUMPS
WSSR-V Series
J H I
C
K
K
L
L
E F D G
B 4-M A
Technical Data
MODEL WSSR-V1.5K WSSR-V2.5K WSSR-V4.8K WSSR-V7.5K WSDR-15K
Displacement speed 1500 2500 4800 7500 15000
( §/min)
Ultimate pressure 5ø10-3 5ø10-3 5ø10-3 5ø10-3 5ø10-3
(Torr)
Inlet port VG50 VG80 VG80 VG100 VG150
Outlet port VG50 VG50 VG65 VG100 VF125
Motor power(Kw) 2.2 3.7 7.5 11 22
Rotational speed of pump (R.P.M) 410 410 410 380 370
Oil filling( §) 5 8 17 29 55
Weight(include motor) kg 236 324 555 791 1064(1245)
V-Belt(Size/Qty) 3V-590/3 3V-640/3 3V-810/4 3V-970/5 C-121/6
Cooling water( §) - 5 5 7 -

MODEL A B C D E F G H I J K L M
WSSR-V1.5K 565 570 744 360 170 200 90 235 200 190 470 528 ™14
WSSR-V2.5K 668 600 808 450 180 210 95 277 220 205 510 569 ™20
WSSR-V4.8K 803 714 1034 580 230 242 105 326 290 251 675 750 ™20
WSSR-V7.5K 900 816 1187 670 280 268 125 364 318 296 765 857 ™20
http://www.woovac.com 5
OIL ROTARY PUMPS
MVP Series (6~90m3/h)
L
E N M
D G H
I
F
B J 4-S
K
A
Technical Data
Description UNIT MVP6 MVP12 MVP24 MVP36 MVP60 MVP90
m3/h 6 12 24 36 60 90
60Hz
Displacement §/min 100 200 400 600 1000 1500
speed m3/h 5 10 20 30 50 75
50Hz
§/min 80 170 335 500 830 1250
Gas ballast C Torr 5ø10-4 5ø10-4 5ø10-4 5ø10-4 5ø10-4 5ø10-4
Ultimate pressure Gas ballast ∞ Torr 5ø10-3 5ø10-3 5ø10-3 5ø10-3 5ø10-3 5ø10-3
Gas ballast ± Torr 5ø10-2 5ø10-2 5ø10-2 5ø10-2 5ø10-2 5ø10-2
Water vapour tolerance Torr 40 40 25 25 40 40
Oil filling § 1.1 1.2 2.0 2.3 4.5 6.5
Inlet port DN 25KF 25KF 25KF 25KF 40KF 40KF
Outlet port DN 25KF 25KF 25KF 25KF 40KF 40KF
Motor power(single/3-Ph.) kW 0.4 0.4 0.75 0.75 1.5 2.2
Rotational speed 60Hz R.P.M 1750 1750 1750 1750 1750 1750
of pump 50Hz R.P.M 1450 1450 1450 1450 1450 1450
Noise level(without gas ballast) dB 50 50 52 52 56 56
Weight kg 21 22.5 38 41 68 84

MODEL A B C D E F G H I J K N S M L
MVP6 170 120 261 24 40 247 45 130 253 94 240 244 ™9 210 454
MVP12 170 120 261 24 40 247 45 155 253 94 240 269 ™9 210 479
MVP24 210 140 297 40 50 282 55 180 288 147 310 309 ™12 234 543
MVP36 210 140 297 40 50 282 58 210 288 147 310 342 ™12 234 576
MVP60 250 185 387 30 50 368 80 255 370 305 550 428 ™14 281 709
MVP90 280 185 441 30 50 412 85 295 415 355 600 479 ™14 312 791

OIL ROTARY PUMPS
MVP Series (144~324m3/h)
E D L
G H
I
C
F
B J
A K 4-S
Features
UExcellent ultimate vacuum and pumping speed.
UImproved anti-suckback system to protect the pump in the event of sudden stop.
UInternational standard clamp and flange.
ULow noise level and low vibration level.
UConstant pressure oil circulating system.
UConvenient gas ballast valve control.
UPossible to attach external oil cooling device.
USimple repairing and maintenance.
Technical Data
Description Unit MVP144 MVP216 MVP324
60Hz m /h
3
144 216 324
Displacement speed §/min 2400 3600 5400
50Hz m /h 3
120 180 270
§/min 2000 3000 4500
Ultimate With gas ballast Torr 5ø10-3 5ø10-3 5ø10-3
pressure Without gas ballast Torr 5ø10-4 5ø10-4 5ø10-4
Inlet port mm ISO63 ISO63 ISO63
Outlet port mm ISO40 ISO40 ISO40
Motor power kW 3.7 5.5 7.5
Rotational speed of pump 60Hz R.P.M 1750 1750 1750
50Hz R.P.M 1450 1450 1450

Oil filling § 11 16 17
Cooling water (less than 20…) §/min - - 6
Weight kg 172 290 358

MODEL A B C D E F G H I J K S L
MVP144 320 230 501 40 65 414 193 175 465 348 740 ™14 974
MVP216 400 305 575 58 75 490 195 200 528 375 805 ™18 1101
MVP324 400 305 645 58 75 560 203 250 598 433 895 ™18 1179
OIL ROTARY PUMPS
WOVP Series
Technical Data
ITEM Displacement Moter Ultimate Rotational Speed Noise
Speed(§/min) Power Pressure (R.P.M) Level(dB(A)) Oil filling Weight
MODEL 60Hz 50Hz kw mbar 60Hz 50Hz 60Hz 50Hz L kg
WOVP-0020 200 167 0.4 2.0 1,740 1,450 59 57 0.5 20
WOVP-0030 300 249 0.75 2.0 1,740 1,450 60 58 0.5 22
WOVP-0040 400 333 0.9 2.0 3,480 2,870 62 60 0.5 20
WOVP-0060 600 500 1.2 0.5 1,740 1,450 67 64 1 47
WOVP-0130 1,300 1,080 2.2 0.5 1,740 1,450 68 65 2 66
WOVP-0200 2,000 1,670 3.0 0.5 1,740 1,450 68 65 2 75
WOVP-0320D 3,200 2,670 3.7 0.5 1,740 1,450 75 72 7 124
WOVP-0350 3,500 2,920 5.5 0.5 1,740 1,450 77 74 7 164
WOVP-0430D 4,300 3,580 5.5 0.5 1,740 1,450 77 74 7 145
WOVP-0500 5,000 4,170 7.5 0.5 1,740 1,450 77 74 7 184
WOVP-0600 5,000 5,000 8.6
6,000 0.5 1,740 1,450 78 75 7 188
WOVP-0800 9,300 7,400 15 0.5 1,160 980 78 76 19 504
WOVP-1200 13,000 10,400 18.5 0.5 1,160 980 79 77 19 703

MODEL W D H A B C E F G I J K L M N O P Q
WOVP-0020 385 217 72 72 198

WOVP-0030 415 300 200 55 232 82 135 82 190 144 ˆ» 25 3 G1-˘» 214 218 - 3øM8
WOVP-0040 385 217 72 72 198

WOVP-0060 590 290 280 50 187 155 181 150 270 220 G1-˘» 15 39 G1-˘» 203 342
111 3øM8
WOVP-0130 650 410 313 50
200 145 295 145
296 246 G1-˘» 15 11 G1-˘» 295
-
340
3øM8
WOVP-0200 700 225 175 295 175 93
390
WOVP-0320D 895 535 413 138
304 245 340 311
395 325 G2» 43 12 G1-ˆ» 365
-
570
3øM10
WOVP-0430D 960 364 245 340 311 -
630
WOVP-0350 1012 521 422 145 440 284 360 - 420 310 G2» 60 27 G2» 225 550462 3øM8
WOVP-0500 1000 555 410 145 455 325 360 325 415 320 G2» 55 29 G2» 380 610
-
3øM10
WOVP-0600 -
WOVP-0800 1485 860 600 240
649 500 575 500
625 485 G3» 37 37 G3» 620
340 -
3øM12
WOVP-1200 1680 757 567 575 567 1030 -

DRY PUMPS
Carbon Vane Pumps
WVS Series
Technical Data
MODEL WVS-3 WVS-5 WVS-6 WVS-8 WVS-9 WBS-30A WBS-50A WBS-60A WBS-80A WBS-90B
Displacement 60Hz 280 480 685 1115 1350 280ø2 480ø2 685ø2
speed(§/min) 50Hz 1115ø2 1350ø2
235 405 575 935 1130 235ø2 405ø2 575ø2
Max. vacuum mmHg 610 650 650 650 650 650 650 650 650 650
Normal vacuum mmHg 450 450 450 450 450 450 450 450 450 450
Normal pressure ∏f/≤ 0.6 0.6 0.6 0.6 0.6 0.6 0.6 0.6 0.6 0.6
Motor Kw 0.4 0.75 1.5 1.5(6P) 2.2(6P) 0.75 1.5 2.2 4 5.5
Rotational speed 60Hz 1740 1740 1740 1160 1160 1740 1740 1740 1140
1160
of pump(R.P.M) 50Hz 1450 1450 1450 980 980 1450 1450 1450 950
Weight kg 24 33 44 73 97 40 56 75 115 165
Ambient … 0≠40 0≠40

MODEL W D H A B C E F G I J K L M N O P
WVS-3 500 230 255 45 200 230 205 308 4-™9 388 40 90 40 32 71 50 RC˙»
WVS-5 560 250 265 45 200 230 220 308 4-™9 388 40 95 40 32 80 50 RC˙»
WVS-6 650 270 310 45 225 255 260 380 4-™9 460 40 110 40 50 90 50 RC˙»
WVS-8 720 300 360 50 225 285 300 430 4-™9 510 40 130 40 60 100 70 RC1»
WVS-9 764 354 375 60 270 300 322 467 4-™11 567 50 118 62 60 112 80 RC1»
WBS-30A 482 90 325 270 170 90 97 28 4-™9 224 110 65 30 35 225 287 ˙»
WBS-50A 559 90 325 280 170 90 112 28 4-™9 234 130 65 30 35 270 332 ˙»
WBS-60A 646 505 305 202 90 90 282 28 4-™9 225 243 86 30 46 280 381 ˙»
WBS-80A 695 600 350 240 115 115 315 28 4-™9 300 278 102 30 46 292 416 1»
WBS-90B 1070 450 390 120 350 400 340 340 4-™11 800 100 190 120 700 - 50 1»
DRY PUMPS
Oil Free Scroll Pumps
ISP Series ·Principle of compression

As the orbiting scroll orbits as shown in the
illustration from the No.1 position to the No.4
position, crescent shaped gas pockets are
gradually reduced.
At the last stage compressed gas is exhausted
through the center port.
Application
USynchrotron Facility UHigh Vacuum pumping System
USputtering equipment. Vaccum deposition USurface modification. Electron beam process
equipment. Ion plating equipment UVacuum furnace. Heat treatment furnace
UGas recavery devices ULaboratory use
UVacuum equipment UVacuum packaging machine
ULeak detectors UOthers
UDevice handling system
Technical Data
MODEL ISP-50 ISP-90 ISP-250C ISP-500C ISP-1000
Displacement speed §/min(60/50Hz) 60/50 108/90 300/250 600/500 1200/1000
Ultimate pressure Pa(Torr) 15˚1.1ø10-1˝ ¬5˚3.7ø10 ˝ ¬1.6˚1.2ø10 ˝
-2 -2
¬˚1 7.5ø10-3˝
Motor power Kw 0.1 0.15 0.4 0.6 1.4
single-phase 200-230V 100, 115/200, 230 -
Voltage V
three-phase - 200, 208, 230/380, 415, 460
Noise level dB(A) 48 52(at air flush 57) 58(at air flush 66) 60(at air flush 68) 60(at air flush 74)
single-phase 12 14 25 44 -
Weight kg
three-phase - 23 38 60
Leak tightness Pa§§/s 1ø10 Pa m /s
-7 3 ¬1ø10 -2
Water vapor g/day - 5(at air flush) 25(at air flush)

Air flush §/min - 7(at air flush) 10(at air flush)
Inlet connection 25 40 40
NW
Outlet connection 16 25 40
Cooling system Air-Cooled
Ambient temperature … 5-40 10-40
Dimensions(LøWøH) mm 400 ø 252 ø336 443 ø
317ø155ø227 308ø182ø225 (370ø252ø336) (372ø298ø397) 467ø390ø421
328 ø 372

DRY PUMPS
DVSL Series
Application
UVacuum Chuck UVacuum Drying
UVacuum Transport UVacuum Packing
UVacuum Forming UCryopump Regeneration
UDeairator ULeak Test
UGas Substitution URoughing for TMP
DVSL-501C
MODEL DVSL-100C DVSL-500C (Fluore rubber seal)
Displacement speed 60Hz 120 520
(§/min) 50Hz 100 430
Ultimate pressure Pa(Torr) ¬20(1.5ø10-1) 30(2.2X10-1) 100(7.5X10-1)
Motor power Kw 0.3 1.1
Voltage V Single phase 100, 115/220, 230 Three phase 200, 208, 230/380, 415, 460
Noise level dB(A) 59(1m, 60‘) 64(at air flush 70)
Weight kg 15 36
Water vapor g/day 100 250
Inlet connection NW 25(Inside RC ¸) 25(Inside RC ˆ)
Outlet connection 16 25
Cooling system Air-Cooled
Dimensions(LøWøH) mm 350ø220ø237 491ø317ø280
Standard equipment Air Flush Air Flush, Caster, Hour counter
⁄Option : Water Separator & Silencer
GVS Series
Application
UVacuum Chuck UVacuum Drying
UVacuum Transport UVacuum Packing
UVacuum Forming ULeak Test
UDegassing
UGas Substitution
MODEL GVS-250 GVS-500B GVS-501B GVS-1000

Displacement speed §/min(60/50Hz) 255/208 505/423 1046/876
Ultimate pressure Pa(Torr) 750(5.6) 500(3.7)
Motor power kW 0.75 1.2 2.2
Single Phase Three Phase Three Phase

Voltage V AC100(50/60Hz), AC200(50/60Hz), AC200(50/60Hz),
AC115(60Hz) AC220(60Hz) AC220(60Hz)
Noise level dB(A) 61 64 72
Weight kg 39 65
Water vapor g/day 250(at Air Flush) 500(at Air Flush)
Air flush §/min 10(at Air Flush) 10(at Air Flush) ÿ
Dimensions W320øL570øH289 W317øL568øH289 W322øL901øH280
Inlet connection Rc 1
Outlet connection Rc 1/2
Coolong System Air-Cooled
⁄Option : Control Box, Hour Meter, Filter
DRY PUMPS
Dry Screw Vacuum Pump
WSDP Series
Á Í
Ë
È Î
Á Seals Í Lip Seal
Ë Oil Seal Î Screw
È Timing Gear Set
Features
Applications UPMS
Chemicals Food Processing UShorter Discharge Time / High Performance
-Organic Chemical Plants -Oil Deodorizations UMaximum Resistance to Heat and Corrosion
-Petrochemical Plants -Dryer UInterchangeable with Mechanical Seal and Lip Seal
-Fine Chemical Plants -Concentrations UISO Standard motor
-Polymer : Polymerizations, Pharmaceutical UHigh Stiffness Gear with High Accuracy
Dryer, Extruder -Raw Material Processing UExcellent durability
-Inorganic Chemicals -Dryer, Refinery ULow Operation cost / Low maintenance cost
Technical Data
MODEL Units WSDP-150 WSDP-300 WSDP-400 WSDP-800
Description
Nominal capacity (50/60Hz) M3/Hr 120/150 270/330 360/400 720/800
Ultimate Pressure (50/60Hz) Torr 0.5/0.3 0.1/0.05 0.1/0.03 0.05/0.01
Power Kw 7.5 11 15 22
Rotational Speed (50/60Hz) rpm 2900/3500
Suction mm 40 50 65 100
Port Size
Discharge mm 40 40 50 80
Gear Oil liters 1.3 1.6 2 7
Cooling Water l/min 2 3.5 7 28
Weight kg 230 350 430 1150
Technical Data
MODEL Units WVDP-100 WVDP-200 WVDP-400 WVDP-800 WVDP-1500 WVDP-3000

Description
Nominal 50Hz M3/Hr 80 160 360 720 1200 2400
capacity 60Hz 100 200 400 800 1500 3000
Ultimate 50Hz Torr 0.03 0.01
Pressure 60Hz 0.007 0.005
Power Kw 5.5 7.5 11 19 30 55
Rotational Speed (50/60Hz) rpm 2900 / 3500
Port Size Suction mm 40 50 65 100 125 150
Discharge 40 40 50 65 80 100
Gear Oil liters 1.3 1.6 2 4 7 9
Cooling Water l/min 2 3.5 7 10 28 36
Weight kg 230 350 430 630 1150 1450
⁄Option : Cooler, Separator, Temperature Switch, N2 Purging Line, Control Panel.
DRY PUMPS
Dry Screw Vacuum Pump
Dimension
MODEL A B C D E F G H J L Port Size(mm)
SUC DIS
WSDP-150 1350 1050 465 465 710 359 ™22 490 863 460 40 40
WSDP-300 1520 1300 590 590 766 443 ™22 658 895 492 50 40
WSDP-400 1573 1360 620 620 785 492 ™22 668 995 512 65 50
WSDP-800 1750 1550 715 715 873 556 ™22 750 1275 643 100 65
⁄These Dimensions are subject to change without notice for quality improvement
Accessories
1. Accessories before WSDP
- Precondenser, Butterfly Valves for Vacuum Regulation

- Suction Cartridge Filter, Vacuum breaking Valves, etc
2. Accessories on WSDP
- Suction Check Valve, Suction Flange, Sealing Gas Connection
- Cooling Gas Connection, Control Box
3. Accessories after WSDP
- After Condenser, Discharge Silencer (Water Cooled)
- Discharge Separator, Gas Cooler
DRY PUMPS
Semiconductor
Dry Pump Series
DD105 Series
Plan
DD105 DD1205 DD605/DD2005
Technical Data
Description Units DD105 DD605 DD1005 DD1205 DD1805 DD2005
Theoretical Displacement m3/hr 120 606 1008 1200 2016 2460
Nominal Pumping speed m3/hr 105 480 714 900 1115 2020
Ultimate pressure with full CVD purge Torr ¬5.0ø 10 -3 ¬6.0ø 10 -4 ¬5.0ø 10 -4
Maximum intake pressure in Torr 760 20 10 10
continuous operation
Maximum exhaust pressure 1.5
Nitrogen supply pressure bar 4 to 8
Internal purge-gas pressure 3
Nitrogen consumption - ETCH 12
Nitrogen consumption - CVD slm 50
Exhaust flush purge (optional) 100
Exhaust hot N2 purge (optional) … ¬180
Nitrogen connection inch ¸±NPTF with ˘±NPT Tube Connector
Cooling water flow L/min 1.8 to 2.8
Cooling water temp … 15 to 30
Cooling water pressure bar 3.5 to 9

With ‚P√1 bar
Cooling water connection inch ˆ±NPTF with ¸±Tube Connector
Intake port DN 63 ISO-K DN 100 ISO-K DN 160 ISO-K
Exhaust port mm DN 40 KF
Dimensions - WxLxH 400ø987ø596 400ø987ø840 400ø1153ø1065 720ø1150ø1150
Weight Kg 278 435 578 965
Maximum ambient temperature … 40
Minimum ambient temperature … 10
Typical power consumption Kw 4.0 5.0 6.0 9.0
Typical Motor power Kw 5.0 7.4 9.0 15.9
Supply Voltage - Multi-Voltage Motor V/™/Hz 200-208-230 / 460-480 V (æ10%).3™,60Hz
200-208 / 380-415V (æ5%).3™,50Hz
Short Circuit Interrupt Capacity (SCIC) kA 100
1.1 + 5 for
PEPE oil quantity in gear box Liters 1.1 1.1 + 1 for blower 1.14 + 2 for blower blowers
Ferquency Converter NO NO YES NO YES NO
The DuraDry models with the optional external heat exchanger require an additional 0.3 liters of PFPE oil.

DRY PUMPS
Semiconductor
Dry Pump Series
DD255 Series
Plan
DD255 DD1055 DD1855/DD3555
Technical Data
Description Units DD255 DD1055 DD1855 DD2055 DD3055 DD3555
Theoretical Displacement m3/hr 225 606 1613 2873 2460 3694
Nominal Pumping speed m3/hr 200 540 1210 1853 2020 3660
Ultimate pressure Torr ¬5.0ø 10 -3 ¬5.0ø 10 -4
Maximum exhaust pressure 1.5
Nitrogen supply pressure bar 4 to 8
Internal purge-gas pressure 3
Nitrogen consumption - ETCH 12
Nitrogen consumption - CVD slm 50
Exhaust flush purge (optional) 100
Exhaust hot N2 purge (optional) … ¬180
Nitrogen connection inch ¸±NPTF with ˘±NPT Tube Connector
Cooling water flow L/min 1.8 to 2.8
Cooling water temp … 15 to 30
Cooling water pressure bar 3.5 to 9
With ‚P√1 bar
Cooling water connection inch ˆ±NPTF with ¸±Tube Connector

Intake port DN 63 ISO-K DN 100 ISO-K DN 160 ISO-K
Exhaust port mm DN 40 KF
Dimensions - WxLxH 400ø987ø596 400ø987ø840 400ø1153ø1065 700ø1310ø1130 700ø1310ø1490 700X1310ø1600
Weight Kg 278 435 578 714 871 1014
Maximum ambient temperature … 40
Minimum ambient temperature … 10
Typical power consumption Kw 4.0 5.0 6.0 7.0 8.0 9.0
Typical Motor power Kw 5.0 7.4 9.0 11.9 14.3 15.9
Supply Voltage - Multi-Voltage Motor V/™/Hz 200-208-230 / 460-480 V (æ10%).3™,60Hz
200-208 / 380-415V (æ5%).3™,50Hz
Short Circuit Interrupt Capacity (SCIC) kA 100
1.4 + 1 for 1.4 + 2 for 1.1 + 3 for 1.1 + 4 for 1.1 + 5 for
PEPE oil quantity in gear box Liters 1.1 blowers blowers blowers blowers blowers
Ferquency Converter NO YES YES YES YES YES
The DuraDry models with the optional external heat exchanger require an additional 0.3 liters of PFPE oil.
WATER RING PUMPS
Water Ring Pumps
WWVP Series
<Single Stage Pump WWVP-1> <Two Stage Pump WWVP-2>
Single Stage Water Ring Pumps RUltimate Pressure(at 15…)

Displacement RUltimate Rotational Motor Cooling Water Inlet Outlet Weight
MODEL Speed Pressure Speed Power Capacity Port Port
(§/min) Torr(pa) (R.P.M) (kw) (§/min) (mm) (mm) (kg)
WWVP-1-100 1000 50(6.7ø103) 1750 2.2 7 40A 40A 70
WWVP-1-170 1700 50(6.7ø103) 1750 3.7 9 40A 40A 86
WWVP-1-300 3000 50(6.7ø103) 1750 5.5 10 50A 50A 130
WWVP-1-400 4000 50(6.7ø103) 1750 7.5 14 50A 50A 137
WWVP-1-500 5000 50(6.7ø103) 1750 11 20 80A 80A 187
WWVP-1-700 7000 50(6.7ø103) 1750 15 30 80A 80A 215
WWVP-1-900 9000 50(6.7ø103) 1750 19 34 80A 80A 223
WWVP-1-1100 11000 50(6.7ø103) 1750 22 38 125A 125A 348
WWVP-1-1500 15000 50(6.7ø103) 1750 30 42 125A 125A 390
WWVP-1-1800 18000 50(6.7ø103) 1150 37(6P) 60 150A 150A 510
WWVP-2-2000 20000 50(6.7ø103) 1150 45(6P) 65 150A 150A 675
WWVP-1-2500 25000 50(6.7ø103) 880 55(8P) 85 200A 200A 1085
WWVP-1-3400 34000 50(6.7ø103) 1150 75(6P) 95 200A 200A 1015
Two Stage Water Ring Pumps RUltimate Pressure(at 15…)

WWVP-2-045 450 17(2.3ø10 ) 3400

3
1.5 6 25A 25A 50
WWVP-2-085 850 17(2.3ø103) 1750 2.2 7 40A 40A 87
WWVP-2-150 1500 17(2.3ø103) 1750 3.7 9 40A 40A 107
WWVP-2-250 2500 17(2.3ø103) 1750 5.5 10 40A 40A 132
WWVP-2-300 3000 17(2.3ø103) 1750 7.5 14 40A 40A 143
WWVP-2-400 4000 17(2.3ø103) 1750 11 20 50A 50A 195
WWVP-2-550 5500 17(2.3ø103) 1750 15 30 50A 50A 213
WWVP-2-700 7000 17(2.3ø103) 1750 19 34 50A 50A 255
WWVP-2-800 8000 17(2.3ø103) 1750 22 38 80A 80A 390
WWVP-2-1000 10000 17(2.3ø103) 1750 30 42 80A 80A 570
WWVP-2-1200 12000 17(2.3ø103) 1150 37(6P) 60 80A 80A 685
WWVP-2-1300 13000 17(2.3ø103) 1150 45(6P) 65 80A 80A 720
WWVP-2-2000 20000 17(2.3ø103) 880 55(8P) 85 100A 100A 1150
WWVP-2-2800 28000 17(2.3ø103) 1150 75(6P) 95 100A 100A 1078

WATER RING PUMPS
Direct Type Pump
WWVP-D Series
Liquid level when Operating Principle of

pump is at rest. Liquid Ring Vacuum Pump
Technical Data RUltimate Pressure(at 15…)
WWVP-D-100 1000 50(6.7ø10 ) 1750 2.2(4P)
3
7 40A 40A 65
WWVP-D-170 1700 50(6.7ø103) 1750 3.7(4P) 9 40A 40A 75
Ejector
Gas(Air) ejector is operated with gases or B A = Suction medium 40
30
A
compresser. The operating principles of a Gas(Air) B = Atmospheric air as
Motive medium. 20 ¯¯fl¡« ∫…Ó±
ejector is that the pressure energy in the motive Po
Po = Suction pressure 10
gas(air) is converted into velocity energy in the P = Discharge pressure of the EJECTOR ¤ø√
Ì‘ØÆ (m /min)
air ejector 5
∫…Ó±
nozzle, and this high velocity jet of gas(air)
3
P C ¯¯fl¡ 100A
“‰ø¬ 22kw
entrains the vapor of gas being pumped.
(AIR)
÷Ì¯¯μ
ÿ Especially, Air ejector is installed at suction side of 1
¯¯fl¡ ¤ø√ - 735mmHg
EJECTOR ¤ø√ - 753mmHg
waterring vacuum pump, it can prevent cavitation of 760700500300 200 100 50 20 10 700
vacuum pump at max, vacuum deg. and produce max. INSTALATION FOR ¯¯μ(Torr)
vacuum deg. up to 20 Torr. VACUUM PUMP AIR EJECTOR
B
Steam under pressure discharge at high velocity through
a nozzle and entrainsthe suction liquid or slurry.
c
A
b d
a
Connection, Dimension & Approx Weight

ITEM / TYPE DSE20 DSE25 DSE40 DSE50 DSE65 DSE80
A 15A 20A 25A 32A 40A 50A
Connection B 20A 25A 40A 50A 65A 80A
C 20A 25A 40A 50A 65A 80A
a 130 190 235 285 380 460
Dimension b 50 60 70 75 95 110
d 70 80 85 100 120 125
Approx Weight kg 3 4 8 12 17 26
BOOSTER PUMPS
Booster Pumps
GMa / GMb
Direction of flow
UGMa/b=vertical or GLa/b=horizontal
UBlower up to size 16.13 HV alternatively vertical to the bottom or horizontal to the right.
UBlower up to size GMb 17.15 HV vertical to the bottom.
Drive
Direct coupling with motor or via spur gear, con-verter operation, narrow v-belt drive restricted to the smaller
pressure differentials.
Fields of application
UConveying of air and neutral gases.
UVacuum from 10 mbar to approx. 200 mbar for HV-blowers
-2
available in 19 sizes for theoretical nominal suction volume flow from 180 to 97.000 m /h 3
UThe max. admissible differential pressure depends on the thermal load.

Technical Data
Theoretical suction volume at Mech. max. adm. Oil filling quantities for Motor rating at Speed System Total weight
Size: 50 Hz 60 Hz differential pressure GMa/b GLa/b 50 Hz voltage Stage + drive
[ m3/h ] [ m3/h ] [ mbar ] [ liter ] [ liter ] [ kW ] [ 1/min ] [V] [ kG ]
10.0 HV 180 215 130 0,9 0,7 0,75 3000 230/400 80
10.1 HV 240 295 140 0,9 0,7 1,1 3000 230/400 90
10.2 HV 365 440 130 0,9 0,7 1,5 3000 230/400 105
11.3 HV 500 600 140 1,1 0,8 2,2 3000 230/400 125
11.4 HV 730 880 130 1,1 0,8 3 3000 400/690 170
12.5 HV 1000 1200 130 1,5 1,1 4 3000 400/690 225
12.6 HV 1400 1700 130 1,5 1,1 5,5 3000 400/690 275
13.f7 HV 2010 2420 110 2,5 2,1 7,5 3000 400/690 330
13.8 HV 2840 3420 100 2,5 2,1 11 3000 400/690 445
14.9 HV 3850 4700 80 7 3,5 11 3000 400/690 545
15.10 HV 5500 6650 80 12 5,4 15 3000 400/690 680
15.11 HV 7350 8950 80 12 5,4 18,5 3000 400/690 960
16.12 HV 5330 6400 110 11 7,6 18,5 1500 400/690 1310
16.f13 HV 8000 9600 75 11 7,6 18,5 1500 400/690 1460
16.13 HV 9535 11440 75 11 7,6 22 1500 400/690 1500
17.15 HV 15685 18825 60 18,5 - 30 1470 400/690 2020

BOOSTER PUMPS
Booster Pumps
WSBP Series
Features
UNo mechanical friction and noise, which to avoid the high-frequency transmission of power
UCompared with the rigid coupling, Magnetic drive is low noise, crash, and start running smoothly
UMagnetic drive can effectively protect the motor from electrical overload when Booster pump starting
UThe sealing structure in inner structure keeps little distance with outer magnet, so it can protect the pump from
friction and lubricant contamination, that the pump will works long-term without any leakage
UThe structure without oil seal will not affect the ultimate pressure. The pump does not require lubrication, which
can clean up the environment.
Technical Data
Description Unit WSBP30C WSBP70C WSBP WSBP WSBP WSBP WSBP WSBP
150C 300C 600C 1200C 1800C 2500C
Displacement speed(60/50Hz) M3 / Hr 120/100 300/250 600/500 1200/1000 2400/2000 4800/4000 7200/6000 10800/9000
Ultimate pressure Pa(Torr) 3ø10-2(2ø10-4)
Permissible ambient temperatures … 5~40
Motor Power(60/50Hz) Kw 0.75 1.1 2.2 3.7 7.5 11 15 18.5
Rotation speed(60/50Hz) rpm 3500/2825 3500/2825 3500/2840 3500/2890 3500/2890 3500/2890 3500/2890 3500/2890
Oil Filing for Gear box § 0.8 0.8 2.8 2.8 7.5 7.5 10.5 10.5
Inlet Port mm 50 80 100 150 200 250 250 250
Port Size
Outlet Port mm 40 50 100 150 200 200 320 320
Cooling Water Supply §/min - - - - 8 10 12 12
Weight(with motor) kg 80 80 180 245 575 800 1150 1400
⁄WSBP30C - Atmospheric & Magnetic drive, WSBP 70C ~ 2500 - Decompression & Magnetic drive
DIFFUSION PUMPS
Diffusion Pumps
WSD Series Structure & Working Principle

UOil Steam ejected toward lower drection and gas
molecule are capured in the jet vapour stream and then
discharging out after condensation.
UIt is consist of pump body, diffusion pump oil, boiler
heater and jet stack assernbly.
The water cooling pipe winds around the pump body in
order to put condensed vaporize steam back to the
liquids
UInstall outlet for the purpose of discharging out
condensed gas molecules from lower wall of pump body
to the backing pump
UPump body usually has jar and cylinder types and are
stainless steel material mostly.
Attain to a higher vacuum is to install a cold trap at inlet
side.
Technical Data
Model Unit WSD-3Z WSD-4Z WSD-6Z WSD-8Z WSD-10Z WSD-14Z WSD-22Z WSD-28Z
Pumping Without Baffle 360 570 1200 1950 3000 5500 13000 18500
Speed With Baffle
§/sec 220 310 600 1100 1650 3030 7200 10200
Ultimate Pressure with Baffle Torr 1.0ø10-7 1.0ø10-7 (1.3ø10-5)
Heater Power 220Vø1’, 220Vø1’, 220Vø1’, 220Vø1’, 220Vø1’, 220Vø1’, 220Vø1’, 220Vø3’,
450W 700W 1Kw 1.5Kw 1.8Kw 4.5Kw 9Kw 15Kw
Warm up-Time min 20 20 20 25 25 30 35 40
Oil Filling cc 100 150 340 500 820 1600 5000 9000
Cooling Water Cooling
Oil Backstream mg/≤.min 7.5ø10-4 2.0ø10-4
Cooling Water Flow §/min 1 1.5 3 4 5 7 11 15
Inlet Size NW80 VG100 VG150 VG200 VG250 VG350 VG550 VG700
Outlet Size NW25 VG25 VG50 VG50 VG80 VG100 ISO160 VG200
Weight kg 6 10 20 30 41 120 180 270
⁄Option : Oil Level Vieving Port, Diffusion Oil, Bimetal, Quick Cooling unit
BOOSTER PUMP SYSTEMS
Booster Pumping System
Feature
UHigh Capacity system which is assembled by Compact Structure
UEasy installation and transportation
UConvenient operation function unit
WBSD(Dry Type) Series

MODEL WBSD-5K WBSD-10K WBSD-20K WBSD-40K WBSD-80K WBSD-160K
Booster Pump (1˜) GMa10.1HV GMa11.3HV GMa12.5HV GMa13.f7HV GMa14.9HV GMa16.f13HV
Booster Pump (2˜) - - - - GMa13.f7HV GMa14.9HV
Backing Pump DVSL 500 WDP 200 WDP 450 WDP 850
Pumping Speed 60Hz 215 600 1200 2420 4700 9600
(m3/h) 50Hz 180 500 1000 2010 3850 8000
Ultimate Pressure 5.3ø10-4 Torr (7.2ø10-2 Pa)
Package Power (Kw) 1.9 13.2 19 29.5 40.5 59
Inlet Port (A) 80 100 100 150 200 300
Outlet Port (A) NW40 40 50 80 80 80
Weight (Kg) 132 465 585 890 1325 2185
WBSO(Oil Type) Series

MODEL WBSO-5K WBSO-10K WBSO-20K WBSO-40K WBSO-80K WBSO-160K
Booster Pump (1˜) GMa10.1HV GMa11.3HV GMa12.5HV GMa13.f7HV GMa14.9HV GMa16.f13HV
Booster Pump (2˜) - - - - GMa13.f7HV GMa14.9HV
Backing Pump MVP-36 MVP144 MVP216 MVP324 MVP540
Pumping Speed 60Hz 215 600 1200 2420 4700 9600
(m3/h) 50Hz 180 500 1000 2010 3850 8000
Ultimate Pressure 1ø10-4 Torr (1.3ø10-2 Pa)
Package Power (Kw) 1.85 5.9 14 29.5 40.5 51.5
Inlet Port (A) 80 100 100 150 200 300
Outlet Port (A) NW40 ISO40 ISO40 ISO100 ISO100 ISO100
DIFFUSION PUMP SYSTEMS
Diffusion Pump System
WSD S - Series
Feature
UEasy transportation and movement
UMultiple use
UEasy preservation
UAvailable upon request
UAvailable in manual & automatic
Application
ULaboratory use
UExhausting for a minor vacuum
UUltra vacuum use
Technical Data
MODEL WSD-4S WSD-6S WSD-8S WSD-10S
Ultimate pressure Torr 10-6
Oil rotary pump §/min 200 300 600 1000

Oil diffusion pump §/sec 570 1200 1950 3000
High vacuum valve Inch 4 6 8 10

Low vacuum valve Inch 1 1 2 4
Foreline valve Inch 1 1 2 4
Cold trap Inch 4 6 8 10
Water baffle Inch 4 6 8 10
Power(220V, 3P, 60Hz) Kw 1.5 3 5 7.5
Cooling water(20…1kg/cm2) §/min 3 5 8 10
Operation method Type Manual & Pneumatic
Option Vacuum Gauge, chamber, Valve, etc

VACUUM SYSTEMS
PLC Leak Test Machine
Technical Data
UVacuum Chamber : 2 chamber 1050(W)ø850(H)ø200(D)
UVacuum Pump : Booster + Oil Rotary Pump
UVacuum Pressure : 0.001 Torr
UN2 Charge : 40 kg/≤
ULeak Rate as He Gas : 5ø10-9 pa.©/sec
UCycle time : 70 sec / 2 chamber
UConstruction Material for : SUS304
the chamber
UHe Recovery : 90%
ULeak Detector : Heliot 710
UControl : Full Auto, PLC, Touch Panel
UHe Tank : 500§, Max pressure : 50 kg/≤
UPower Supply : 380V 50/60Hz three phase

UConsumption : about 25Kw
SYSTEM LAYOUT
Exhaust Vacuum System
Description U OIL ROTARY VACUUM PUMP [ RESEVER TANK

V INLET FILTER \ DRAIN BALL VALVE
W PNEUMATIC BALL VALVE ] DIGITAL INDICATOR
X BUTERFLY VALVE ^ CONTROL BOX
Y VACUUM GAUGE _ FRAME
Z PRESSURE TRANSMITTER
Description U OIL ROTARY VACUUM PUMP Z VACUUM SWITCH

V INLET FILTER [ BALL VALVE
W RECEVER TANK \ BELLOWS TUBE
X DRAIN BALL VALVE ] CONTROL BOX
Y VACUUM GAUGE

SYSTEM LAYOUT
Watering Vacuum System
Description U WATER RING VACUUM PUMP [ PNEUMATIC BALL VALVE

V RECEVER TANK \ SEPARATE TANK
W VACUUM GAUGE ] STRAINER
X CHECK VALVE ^ CONTROL BOX
Y FLEXIBLE _ FRAME
Z BUTERFLY VALVE
Description U WATER RING VACUUM PUMP \ SEPARATE TANK

V RECEVER TANK ] SOLENOID VALVE
W VACUUM GAUGE ^ HEAT EXCHANGER
X PRESSURE TRANSMITTER _ CHILLER
Y CHECK VALVE ` DIGITAL INDICATOR
Z PNEUMATIC BALL VALVE a CONTROL BOX
[ FLEXIBLE b FRAME
SYSTEM LAYOUT
Diffusion Pumping System
Description U DIFFUSION VACUUM PUMP ^ MAIN VALVE

V OIL ROTARY VACUUM PUMP _ LEAK VALVE
W BOOSTER VACUUM PUMP ` ROUGHING VALVE
X HOLDING PUMP a FORLINE VALVE
Y WATER BAFFLE b HOLDING LINE VALVE
Z SPACE CHAMBER c BELLOWS TUBE
[ BUTTERFLY VALVE d OIL MIST TRAP
\ GAUGE SENSOR e FRAME
] MAIN VALVE
Booster Pumping System Air Conditioner Vacuum System
Description U OIL ROTARY VACUUM PUMP \ COUPLER

V BOOSTER VACUUM PUMP ] VACUUM HOSE
W INLET FILTER ^ SPRING BALANCER
X OIL MIST TRAP _ HANGER
Y RECEVER TANK ` CARRIER
Z VACUUM VALVE a FRAME
[ VACUUM VALVE

SYSTEM LAYOUT
Exhaust Vacuum System
Description U OIL ROTARY VACUUM PUMP \ PNEUMATIC ANGLE VALVE

V OIL ROTARY VACUUM PUMP ] PNEUMATIC ANGLE VALVE
W BOOSTER VACUUM PUMP ^ VACUUM TRANSMITTER
X BOOSTER VACUUM PUMP _ HEAT EXCHANGER
Y DIFFUSION VACUUM PUMP ` WATER ROTATION PUMP
Z OIL MIST TRAP a PNEUMATIC ANGLE VALVE
[ OIL MIST TRAP b FRAME
Vacuum & Leak Test System
Description U TURBO VACUUM PUMP [ OIL MIST TRAP

V OIL ROTARY VACUUM PUMP \ BELLOWS TUBE
W OIL ROTARY VACUUM PUMP ] LEAK VALVE
X BOOSTER VACUUM PUMP ^ LEAK DIRECTOR
Y INLET FILTER _ CONTROL BOX
Z PNEUMATIC ANGLE VALVE ` FRAME
VACUUM GAUGES

VACUUM GAUGES
Indicator
KP 100 Pirani KM 700
KVC 100 Pirani Gauge Indicator KVC 700 Digital Manometer Indicator
Controller Controller
USensor type : Pirani USensor type : Manometer
UMeasurement Range : 20Torr≠1mTorr UMeasurement Range : 1Torr≠1500Torr
UUnit : mTorr UStandards Analog Output & Relay 2-Set Points
UOptional : RS232, 485
Pirani Gauge UUnit : Torr & kPa
UGas Calibration : Air or N2
UBake Out Temp : 100… in Air or Vacuum Sensor
UCable : Multi Conductor Shield Cable UOutput Signal : 4≠20mA
UFitting : 1/8 NPT UMaterial : All Part 316 or 304S.S
UAdaptor Fitting Available UCable Connector : 9Pin D-Sub Connector
UNW16KF, NW25KF, 15mm O.D, 19mm O.D UFitting : 1/8 NPT, NW16, NW25, 15m O.D, 1.33»CF, 1/4»VCR
Monitering Software
Function
UAvailable connection of Max. 16 Gauges Dimension
URealtime monitoring
UStorage of monitoring data
UZoom in & out at a part of graph you want to check
UPrint
VACUUM GAUGES
Controller
KP 120 KVC 2300
KVC 2300 Digital SHIM

KP 120 Digital Pirani Vacuum Vacuum Gauge Controller
Gauge Controller Controller
Controller USensor type : SHIM Gauge
UMeasurement Range : 1000Torr≠1.0E-03Torr
UMeasurement range : 20Torr≠1.0E-03Torr UStandards Analog Output & Relay 2-Set Points
UUnit : Torr & Pascal
USensor conection : Pirani UInput power : Freevoltage(80Vac ~ 230Vac)
UInput power : Free voltage (80Vac≠230Vac) UOptional : RS232, RS422/485
UStandard analog output & Relay 2-setpoints SHIM Gauge
UUnit : Torr & Pascal UGas Calibration : Air or N2
UBake Out Temp : 100… in Air or Vacuum
UOptional : RS232 or RS422/485 UCable : 9pin D-Sub Connector, Multi Conductor Shield Cable
UCable length : 3m (Standard), 50m (Maximum)
UFitting : 1/8 NPT, NW16, NW25, 15m O.D, 1.33»CF, 2.75»CF, 1/4»VCR
Pirani gauge UGauge axis must be horizontal to provide accurate measurement
above 1 Torr
USensor type : Thermal conductive
UBake Out Temp : 100… in Air vacuum KVC 3300
UCable : 9pin D-Sub Connector, Multi Conductor
Shield Cable
UCable length : 3m(standard), 50m(Maximum)
UFitting : 1/8NPT, NW16, NW25, 15m, 0.D,
1.33±CF, 2.75±CF, 1/4±VCR
Dimension(KVC 2300, 3300, KP120)

KVC 3300 Digital SHIM

Vacuum Gauge Controller
Controller
USensor type : SHIM Gauge
UMeasurement Range : 1000Torr≠1mTorr
UStandards Analog Output & Relay 2-Set Points
UUnit : mTorr
UInput power : Freevoltage(80Vac ~ 230Vac)
UOptional : RS232, RS422/485
SHIM Gauge
UBake Out Temp : 100… in Air or Vacuum
UCable : 9pin D-Sub Connector, Multi Conductor Shield Cable
UCable length : 3m (Standard), 50m (Maximum)
UFitting : 1/8 NPT, NW16, NW25, 15m O.D, 1.33»CF, 2.75»CF, 1/4»VCR
UGauge axis must be horizontal to provide accurate measurement
above 1 Torr

VACUUM GAUGES
Module / Controller
KVC 350 KVC 4000
KVC 350 SHIM Gauge KVC 4000 Multi Low

Compact Module Vacuum Gauge Controller
·Specifications Controller
UChannel : Standard 2chØSHIM Gauge
UMeasurement Range : 1000Torr≠1.0E-03Torr Max. 4chØSHIM Gauge
UAnalog Output : 1V/decade, 0≠6 Vdc UGreen LED
UInput Power : +24Vdc, 2Watts max UUnit : Torr & Pa
UStandard Analog output
UFitting : 1/8»NPT, 15mm O.D, NW16KF, NW25KF, UCable length : 3m ~50m
1.33»CF, 2.75»CF, 1/4»VCR UPower input : 100Vac / 230Vac(by user selection)
UGauge axis must be horizontal to provide accurate 250Watts, 50 or 60Hz
measurement above 1 Torr UOptional : Relay 6-setpoint
RS232 or 485 Interface
SHIM Gauge
UMeasurement Range : 1000Torr ~ 1.0E~03 Torr
UAnalog Output : 1V/decade, 0 ~ 6 Vdc
UMaximum Cable Length : ~ 50m(170ft)
UFitting : 1/8±NPT, 15mm 0.D, NW16KF
NW25KF, 1.33±CF, 2.75±CF, 1/4±VCR
KVC 450
Controller Dimension
KVC 450 SHIM Gauge

Compact Module
Specifications
UMeasurement Range : 1000Torr≠1.0E-03Torr
UAnalog Output : 1V/decade, 0≠6 Vdc
UInput Power : +24Vdc, 2Watts max
UStandard 2-Set Point
UOptional : RS 232, RS 485
UFitting : 1/8»NPT, 15mm O§D, NW16KF, NW25KF,
1.33»CF, 2.75»CF, 1/4»VCR
UGauge axis must be horizontal to provide accurate
measurement above 1 Torr
VACUUM GAUGES
KVC 5000 / KC 470
KVC 5000 KC 470
KVC 5000 Penning Vacuum Gauge KC 470 CHEON Gauge

Controller
UChannel : 1chØPG & 2chØSHIM Gauge
UGreen LED Specification
UUnit : Torr & Pa/Standard Analog output
UPower input : 100Vac / 230Vac(by user selection)
UMeasurement range : 1000Torr≠1.0E-08Torr
250Watts, 50 or 50Hz USensor type : Combined Penning,
UOptional : Relay 6-setpoint, RS232 OR 485 Interface Pirani and absolute Silicon sensor
UInput power : +24Vdc
Penning Vacuum Gauge UStandard analog output & Relay 2-setpoints
Pressure Range
UMaximum Measurement Limit : 1.0E-08 Torr UMini 4-digit display windows
UMinimum Measurement Limit : 1.0E-03 Torr UOptional : RS485
UMaximum Cable length : 3m(10ft.) ~ 60m(200ft.)
UAnalog Output : 1V/decade, 0 ~ 7VDC
Low Vacuum Gauge
SHIM Gauge Pressure Range
UMeasurement Range : 1.0E-03 ~ 1000Torr Dimension
UAnalog Output : 1V/decade, 0 ~ 6VDC
UCable length : 3meter (Standard), 50meter (Maximum)
UFitting : 1/8NPT, NW16KF, NW25KF, 15m 0.D,
1.33±CF, 2.75±CF, 1/4±VCR
UGauge axis must be horizontal to provide accurate measurement above 1Torr

VACUUM GAUGES
KVC 900
KVC 900 Multi Ionization Vacuum GaugeØs Specification.
UChannel : Max.2chØIG & 2chØSHIM Gauge
UGreen LED
UUnit : Torr & Pa
UStandard Degas & Analog output
UEmission current : 0.1, 1, 10mA
UPower input : 100Vac / 230Vac(by user selection)
250Watts, 50 or 60Hz
UOptional : Relay 6-setpoint
RS232 or 485 Interface
Additional IG
Remote I/O
B-A Ionization Vacuum Gauge

Pressure Range
UMaximum Measurement Limit : 1.0E-10 Torr
UMinimum Measurement Limit: 1.0E-03 Torr
UAvailable Cable length: 3m(10ft.) ~ 60m(200ft.)
UAnalog Output : 1V/decade, 0~7VDC
Low Vacuum Gauge

SHIM Gauge Pressure Range
UMeasurement Range : 1.0E-03~1000Torr
UAnalog Output : 1V/decade, 0~6VDC
UCable length : 3meter(Standard), 50meter(Maximum)
UFitting : 1/8NPT, NW16KF, NW25KF, 15m 0.D,
1.33±CF, 2.75±CF, 1/4∞VCR
UGauge axis must be horizontal to provide accurate measurement
above 1 Torr
Mass Flow Controller
MFC
Mass flow controller / meter
Applications
UTotal Industry
UPrecision Gas Blending & Analyzing
UGas Injection on Surface treatment Indusry (PVD, CVD, Reactor, etc)
USemiconductor Indusry
UComponent Leak Detection
UResearch and Development
UHigh ressure Industry
UOptical Fiber
UFuel Cell
UReactor System
UGas mixing System
ULaboratory
Specifications
Moadel M2030VA M3030VA M2100VA M3100VA

Range (N2) 5sccm ~ 30slpm 30 ~ 100slpm
ResponseTime ¬3 sec ¬3 sec
Accuracy æ1% FS æ1% FS
Repeatability æ0.25% FS æ0.25% FS
In / out signal 0~5Vdc 0~5Vdc or 0~5Vdc 0~5Vdc or
4~20mA 4~20mA
Supply Power æ15Vdc, 350mA aæ15Vdc, 350mA
Max operating pressure ¬90 bar a¬90 bar
Max operating Temp 0~50… 0~50…
Leak rate 1x10-9 atm§cc/sec 1x10-9 atm§cc/sec
Control Range 5~100% for max range 5~100% for max range

VACUUM PUMP ACCESSORIES
Oil Mist Trap
TMF Series WSO Series
Technical Data
MODEL •ÿØÆ(L/min) Filter Element ™A B C D E
TMF-12 200 ™62ø(26+50L) 95 NW25 NW25 100 136
TMF-36 600 ™80ø(35+71L) 120 NW25 NW25 130 166
TMF-90 1500 ™120ø(45+190L) 160 NW40 NW40 160 210
Dimensions
™A
™B
C
E
F
Socket ¸±DRAIN
TMF-36 ≠
WSO 200 1500 ≠
WSO 2500 7500
Technical Data
Filter Element
MODEL •ÿØÆ(L/min) No ˆÆ ™A ™B C D E F
WSO-200 200 ™75ø75 1 115 90 20A NW25 107 165
WSO-600 600 ™100ø95 1 148 122 25A NW25 143 180
WSO-1000 1000 ™100ø145 1 148 122 40A NW40 191 260
WSO-1500 1500 ™100ø195 1 148 122 40A NW40 240 310
WSO-2500 2500 ™100ø145 3 300 270 Socket 2± VG65 275 370
WSO-4500 4500 ™100ø145 5 380 350 Socket
1/2± VG80
2 278 393
WSO-7500 7500 ™100ø195 5 380 350 Socket 3± VG100 328 445
WSO-15000 15000 ™100ø300 7 450 400 VF125 VG125 440 595
VACUUM VALVES
Angle / In-Line Valves
Angle Valves Angle Valves

(Manually Operated) (Pneumatically Actuated-Double)
Specification Specification
Model Number MBK-016-A MBK-025-AMBK-040-AMBK-050-AMBK-063-A Model Number PSK-016-A PSK-025-A PSK-040-A PSK-050-A
Port Type NW16KF NW25KF NW40KF NW50KF NW63KF Port Type NW16KF NW25KF NW40KF NW50KF
Stroke (mm) 13 13 20 25 26 Stroke (mm) 13 13 20 25
A 54.6 51.5 61 86 88 A 54.6 51.5 61 86
B ™58 ™58 ™76 ™89 ™99 B ™58 ™58 ™76 ™89
C 142 137 162 191 204 C 154 149 187 231
D 165 160 193 234 259 D 1/8±PT 1/8±PT 1/8±PT 1/8±PT
In-Line Valves In-Line Valves

(Manually Operated) (Pneumatically Actuated-Double)
Model Number MBK-016-L MBK-025-L MBK-040-L MBK-050-L Model Number PSK-016-L PSK-025-L PSK-040-L PSK-050-L
Port Type NW16KF NW25KF NW40KF NW50KF Port Type NW16KF NW25KF NW40KF NW50KF
Stroke (mm) 13 13 20 25 Stroke (mm) 13 13 20 25
A 101.6 106.7 130.0 117.8 A 101.6 106.7 130.0 117.8
B ™58 ™58 ™76 ™89 B ™58 ™58 ™76 ™89
C 121 124 150 174 C 124 128 169 204
D 143 147 207 209 D 155 160 207 250
E 166 170 238 252 E 1/8±PT 1/8±PT 1/8±PT 1/8±PT

VACUUM VALVES
Right Angle Valves
LV-M Series LV-A Series

(Right-Angle Valves) (Right-Angle Valves)
Features Features
UCompact structure UCompact structure
ULow cost ULow cost
UBody material : Stainless steel(Niplating:Option) UBody material : Stainless steel(Niplating:Option)
USeal material : NBR(Option:viton) USeal material : NBR(Option:viton)
UInter-lock control
(mounted with a magnet in the cyclinder) WOOSUNG VACUUM CO., LTD.
Dimensions Dimensions
MODEL A B C D E F G H N-™ Weight(kg) MODEL A B C D E F Air inlet portWeight(kg)
LV-1M 55 48.6 70 90 98.5 124 20 66 4-10 1.5 LV-1A 55 48.6 70 90 98.5 169.5 PT˚ 1.6
LV-2M 75 76.5 100 120 134 159.5 30 66 4-10 3.4 LV-2A 75 76.5 100 120 134 218.5 PT˚ 3.8
LV-3M 95 114.3 135 160 187 226.5 45 123 4-12 7.8 LV-3A 95 114.3 135 160 187 283 PT¸ 8.6
LV-4M 110 139.8 160 185 212 251.5 58 123 8-12 11.5 LV-4A 110 139.8 160 185 212 333 PT¸ 13.2
LV-6M 130 216.3 210 235 286 326.5 85 142 8-12 21.5 LV-6A 130 216.3 210 235 286 449 PTˆ 30.5
LV-8M 175 267.4 270 300 371 454 115 225 8-15 45.2 LV-8A 175 267.4 270 300 371 649 PTˆ 54
LV-10M 200 318 320 350 529 605 180 225 12-15 60.5 LV-10A 200 318 320 350 419 657 PTˆ 70
LV-14M 260 406 420 450 738 805 230 250 12-15 106 LV-14A 260 406 420 450 529 822 PTˆ 118
LV-18M 350 510 535 575 738 - - - 16-19 243 LV-18A 350 510 535 575 700 1210 PTˆ 229
LV-22M 450 612 640 680 830 - - - 16-19 298 LV-22A 450 612 640 680 830 1490 PTˆ 281
LV-26M 450 690 750 800 940 - - - 20-23 425 LV-26A 450 690 750 800 930 1715 PTˆ 415
VACUUM VALVES
Circular Gate Valve
Specification
Material Actuator
UBody : 300 Series sst <Pneumatic>
UGate : 300 Series sst UAir Pressure 70 to 100psig
UAir Cylinder : Aluminum (High size 80 to 100psig)
UBellows : AM-350 UAir controll Pilot check Valve
UPosition Indicators 20mA.
Sealing 110/220 V AC or 24V DC
UBonnet Seal : Gasket / Viton <Pneumatic>
UGate Seal : Viton UHand Wheel Type
Mounting Position : Any Temperature
(High size : vertical & horizontal) UBody : 250… (open)
UGate : 150…
Cycles Until First Service UActuator : 60…
UCycles : 100,000
UService : 1 Year Leak Rate
UBody : 1ø10-8-9 mbar.§/ sec
UGate : 1ø10 mbar.§/ sec
Retangular Gate Valve
Â Ê Á Ë È
R - 25 ø 550 - 6 1
Â Type
- R : Rectangular gate valve
- D : Door gate valve

Specification Ê Slit Hight(mm)
UBody Material : Aluminum + Hard Anodized
UGate Seal Plate : Aluminum + Hard Anodized Á Slit Width(mm)
UVacuum Side Seal Material : Viton O-Ring
TOther Sealing Material On Request Ë Body material
ULeak Rate : Å 2ø10-8 std.cc/sec - 3 : SUS304
UOperate Pressure : 35~90 psi - 6 : Alumonum 6061
UBody Temperature : ¬150…
UOperation Type : Pneumatic È Seal material
UElectric Power With Positon Sensor : DC24V - 1 : Viton
UMount Position : Actuator Downward, Verical Stroke - 2 : Silicon
UCycle Until First Service : √ 3 Milion - 3 : Other sealing matenal on request

VACUUM VALVES
Circular Gate Valves
VACUUM VALVES
Circular Gate Valves
Pneumatic Manual

VACUUM VALVES
Flange Dimension
VACUUM VALVES
SHV-E / UVCR-A Series
SHV-E Series UVCR-A Series
Features Features
UBody material is SUS and allowable usage in UBody material is SUS and allowable usage in
high vacuum range for small leakage late. Ultra-High vacuum as bellows inside type
UHigh operate in high vacuum condition and and compact structure.
high pressure condition. UIt can use to valve for gas injection as
UAllowable various valve as like vacuum pneumatic valve.
valve, leak valve ULow cast.
Technical Specification Technical Specification

MODEL SHV-25E MODEL UVCR-8A
ITEM ITEM
Operating Pressure Range(Pa) 1.33ø10 ≠2ø10
-6 5
Compressed Air(kg/≤) 4≠5
Leak Rate(Pa.§/sec) ºø10-8 Operating Pressure Range(Pa) 1.33ø10-8≠2ø105
Orifice ™8 Leak Rate(Pa.§/sec) ºø10-8
Post Seal Viton Auto Switch DC 24V
Temperature Rate 0…≠55… Post Seal Viton
Supply Voltage AC 220V(50Hz/60Hz) DC 24V Metal Welded Bellows SUS-316L
Power Consumption 15W Connection Flange VCR 1/2
Weight(kg) 0.98 Weight(kg) 0.5

VACUUM ACCESSORIES
Clamp / Ring
KF Quick Clamp KF Center Ring
UBody Material : Aluminum UCenter Ring Material : Stainless(SUS-304)
UO-Ring Material : Viton
Connection Type A(mm) B(mm) C(mm) D(mm) Flange Type A(mm) B(mm) C(mm) D(mm) E(mm) Fmm)
KF 16 KCCR-16 45 61 22 16 KF 16 KCCR-16 16 17 20 8 18 3.9
KF 25 KCCR-25 55 72 32 16 KF 25 KCCR-25 25 26 30 8 28 3.9
KF 40 KCCR-40 72 90 48 18 KF 40 KCCR-40 40 41 44 8 42 3.9
KF 50 KCCR-50 96 123 63 25 KF 50 KCCR-50 50 52 57 8 55 3.9
KF Bored Flange KF Blank Flange
UMaterial : Stainless(SUS-304) UMaterial : Stainless(SUS-304)
Connection Type A(mm) B(mm) C(mm) Connection Type A(mm) B(mm) C(mm)
KF 16 KCCBF-16 20 15.5 5 KF 16 KCCBFB-16 17.2 30 5
VACUUM ACCESSORIES
Flauge / Tube
KF Flange KF Metal Bellows Tube
UMaterial : Stainless(SUS-304) UMaterial : Stainless
Flange Type A(mm) B(mm) C(mm) D(mm) E(mm) Flange Type A(mm) B(mm) C(mm) D(mm) E(mm)
KF 16 KCCF-16 30 17.2 16 20 30 KF 25 KHBT-25 18 37 26 40 150 to 1000
KF 25 KCCF-25 40 26.2 25 28 30 KF 40 KHBT-40 18 55 40 55 150 to 1000
KF 40 KCCF-40 55 41.2 40 45 30 KF 50 KHBT-50 18 72 54 75 150 to 1000
KF 50 KCCF-50 75 52.2 50 55 30
£
KF 90 Elbows KF Tees

Flange Type A(mm) B(mm) Flange Type A(mm) D1(mm) D2(mm)
KF 16 KFEL-16 40 16 KF 16 KHN-16 35 8 12
KF 25 KFEL-25 50 25 KF 25 KHN-25 40 12 20
KF 40 KFEL-40 65 40 KF 40 KHN-40 45 16 25
KF 50 KFEL-50 75 50 KF 50 KHN-50 50 16 25

VACUUM ACCESSORIES
Adaptor
KF 4-Way Crosses
Technical Specification
Flange Type A(mm) B(mm) C(mm) D(mm)
KF 16 KFCA-16 38.1 19.05 30 76.2
KF 25 KFCA-25 51.4 25.4 40 102.8
KF 40 KFCA-40 61 38.1 55 122
KF 50 KFCA-50 80 50.8 75 160
KF-KF Conical Reducing KF Quick-Disconnect

Adaptor Adaptor

Adaptor Type A(mm) B(mm) C(mm) Flange Type A(mm) B(mm) C(mm)
KF 25 KA-16 40 30 40 KF 16 QDA-6 6.5 33.4 30
KF 40 KA-16 55 30 40 KF 16 QDA-12 13 36.5 30
KF 40 KA-25 55 40 40 KF 16 QDA-19 19.4 44.5 30
KF 50 KA-16 75 30 40 KF 25 QDA-12 13 36.5 40
KF 50 KA-28 75 40 40 KF 25 QDA-19 19.3 44.5 40
KF 50 KA-40 75 55 40 KF 25 QDA-25 25.7 50.8 40
KF 40 QDA-12 13 36.5 55
KF 40 QDA-19 19.3 44.5 55
KF 40 QDA-25 25.7 50.8 55
KF 40 QDA-38 38.4 60.3 55
KF 50 QDA-38 38.4 60.3 75
KF 50 QDA-50 51 60.3 75
VACUUM ACCESSORIES
Nipples
ISO Full Nipples £

ISO 90 Elbows

Model No. A(mm) B(mm) C(mm) Model No. A(mm) B(™) C(™)
ISO 16 N 30 19.0 76 ISO 16 EL 30 19.0 38
ISO 25 N 40 25.4 103 ISO 25 EL 40 25.4 51
ISO 40 N 55 38.1 125 ISO 40 EL 55 38.1 55
ISO 50 N 75 50.8 163 ISO 50 EL 75 50.8 81
ISO 63 N 95 63.5 200 ISO 63 EL 80 63.5 95
ISO 80 N 110 76.3 200 ISO 80 EL 100 76.3 110
ISO 100 N 130 101.6 250 ISO 100 EL 130 101.6 130
ISO 160 N 180 152.4 300 ISO 160 EL 160 152.4 180
ISO Tees ISO 4-Way Crosses


Model No. A(mm) B(™) C(™) D(mm) Model No. A(mm) B(™) C(™) D(mm)
ISO 16 TA 38 19.0 30 76 ISO 16 XA 38 19.0 30 76
ISO 25 TA 40 25.4 51 80 ISO 25 XA 60 25.4 40 120
ISO 40 TA 55 38.1 55 110 ISO 40 XA 62 38.1 55 124
ISO 50 TA 75 50.8 81 150 ISO 50 XA 75 50.8 81 150
ISO 63 TA 80 63.5 95 160 ISO 63 XA 80 63.5 95 160
ISO 80 TA 100 76.3 110 200 ISO 80 XA 100 76.3 110 200
ISO 100 TA 130 101.6 130 260 ISO 100 XA 130 101.6 130 260
ISO 160 TA 160 152.4 180 320 ISO 160 XA 160 152.4 180 320

VACUUM ACCESSORIES
Clamps
Single Wall Clamp Double Wall Clamp

Model No. Material A B(mm) C(mm) Fit Flange Model No. Material A B Quantity Fit Flange
ISO 63-100SWC304 SUS304 M8 35 23 ISO 63
ISO 80
ISO 100
ISO 63-100 DWCA Aluminum 45 M8 4
4
4
ISO 63
ISO 80
ISO 100
ISO 63-250SWC304 SUS304 M10 35 23 ISO 160

ISO 200
ISO 250
6
6
ISO 160
ISO 200
ISO 250
ISO 320-500SWC304 SUS304 M12 50 30 ISO 320

ISO 400
ISO 500
8
12
ISO 320
ISO 400
ISO 500
ISO 63-100SWCA Aluminum M8 35 23.5 ISOISOISO 1008063

ISO 160-250SWCA Aluminum M10 35 23.5 ISOISOISO 200250160
ISO 320-500SWCA Aluminum M12 50 30 ISO 320
ISO 400
ISO 500
Double Claw Clamp

Model No. Material A B Quantity Fit Flange
4 ISO 63
4 ISO 80
ISO 63-250 DCC316 SUS316 61.5 M10 4
4
6
ISO 100
ISO 160
ISO 200
6 ISO 250
ISO 320-500 DCC316 SUS316 76 M12 8

8
12
ISO 320
ISO 400
ISO 500
ISO 630-DCC316 SUS316 86 M12 12 ISO 630
VACUUM ACCESSORIES
Nipples
CF Half Nipple CF Nipples

Flange Type(CF) ITEM No. Flange Type(CF)
ITEM No. mm inch L(mm) mm inch L(mm)
CF-HN40 34 1˜ 40 CF-HN80 34 1˜ 80
CF-HN60 70 2˙ 60 CF-HN120 70 2˙ 120
CF-HN80 86 3¸ 80 CF-HN160 86 3¸ 160
CF-HN100 114 4ˆ 100 CF-HN200 114 4ˆ 200
CF-HN110 152 6 110 CF-HN220 152 6 220
CF-HN130 203 8 130 CF-HN260 203 8 260
CF-HN170 253 10 170 CF-HN340 253 10 340
CF-HN190 305 12 190 CF-HN380 305 12 380
CF-HN250 336 13˘ 250 CF-FN500 336 13˘ 500
£
CF 90 Elbows CF Tees

ITEM No. Flange Type Tube O.D.(mm) B(mm) ITEM No. Flange Type Tube O.D.(mm) B(mm)
CF-RE16 1˜› 19 29 CF-TE16 1˜› 19.0 29
CF-RE35 2˙› 38.1 62 CF-TES35 2˙› 38.1 62
CF-RE50 3¸› 50.8 84 CF-TEL35 2˙› 38.1 66
CF-RE63 4ˆ› 63.5 104 CF-TES50 3¸› 50.8 85
CF-RE100 6› 101.6 162 CF-TEL50 3¸› 50.8 101
CF-RE150 8› 152.4 240 CF-TES63 4ˆ› 63.5 86
CF-RE200 10› 203.2 318 CF-TEL63 4ˆ› 63.5 105
CF-RE250 12› 254.0 395 CF-TES100 6› 101.6 110
CF-TEL100 6› 101.6 225
CF-TES150 8› 152.4 140
CF-TEL150 8› 152.4 166
CF-TE200 10› 203.2 191
CF-TE250 12› 254.0 255

VACUUM ACCESSORIES
Gasket
CF 4 Way Crosses
ITEM No. Flange Type Tube O.D.(mm) B(mm)
CF-FW16 1˜› 19.0 29
CF-FW35 2˙› 38.1 62
CF-FW50 3¸› 50.8 85
CF-FWS63 4ˆ› 63.5 86
CF-FWL63 4ˆ› 63.5 105
CF-FWS100 6› 101.6 110
CF-FWL100 6› 101.6 225
CF-FWS150 8› 152.4 140
CF-FWL150 8› 152.4 166
CF-FW200 10› 203.2 191
CF-FW250 12› 254.0 255
Metal Gasket Welded Bellows

ITEM No. A B ITEM No. A(mm) B(mm) C(mm) D(mm)
CF16 15 21.3 WB1-01 23 12.7 23 4
CF32 37 48.2 WB6-02 29.7 19 29.7 4
CF50 51 61.6 WB12-03 34.8 22 34.8 4

CF63 68.4 82.3 WB17-04 39 26 39 4
CF100 106.5 120.5 WB21-05 42 29.5 42 4
CF150 157.3 171.3 WB30-06 48 35 48 4
CF200 208.6 222.6 WB35-07 52 39.6 52 4
CF250 258.0 273.0 WB40-08 58.6 43.4 58.6 4
WB45-09 63.5 44.5 63.5 4
WB47-10 68.2 55.5 68.2 4
WB49-11 74.5 61.8 74.5 4
WB51-12 80.9 65 80.9 4
WB54-13 87.2 71.4 87.2 4
WB56-14 95.2 79.3 95.2 4
WB58-15 101 85 101 4
WB61-16 107 92 107 4
VACUUM ACCESSORIES
Flanges
CF Non Rotatable Bored Flanges CF Double side Flanges
Dimensions§Specification Dimensions§Specification
Flange Type(CF) A(mm) B(mm) C(mm) D(mm) F(mm) Hole N-™ Flange Type(CF) A(mm)B(mm)D(mm) F(mm) Hole
N-™
ITEM
ITEM NO.
NO. mm inch mm inch
CF 16NO 34 1˜ 34 19.2 15.0 7.3 27.0 6-4.4 CF 16DS-1 34 1˜ 34 Blank 7.3 27.0 6-4.4
CF 35NO 70 2˙ 70 40 38.5 12.7 58.7 6-6.6 CF 16DS-2 34 1˜ 34 10.0 7.3 27.0 6-4.4
CF 50NO 86 3¸ 86 55 53 16.0 72.4 8-8.4 CF 16DS-3 34 1˜ 34 19.2 7.3 27.0 6-4.4
CF 63NO 114 4ˆ 114 63.8 61.0 17.5 92.1 8-8.4 CF 35DS-1 70 2˙ 70 Blank 12.7 58.7 6-6.6
CF 100NO 152 6 152 102.0 97.0 20.0 130.3 16-8.4 CF 35DS-2 70 2˙ 70 10 12.7 58.7 6-6.6
CF 150NO 203 8 203 150.5 148.5 22.0 181.0 20-8.4 CF 35DS-3 70 2˙ 70 20 12.7 58.7 6-6.6
CF 200NO 253 10 253 203.5 198.5 25.0 231.8 24-8.4 CF 35DS-4 70 2˙ 70 30 12.7 58.7 6-6.6
CF 250NO 305 12 305 255.5 250 28.0 284.0 32-8.4 CF 35DS-5 70 2˙ 70 38.5 12.7 58.7 6-6.6
CF 336NO 336 13˘ 336 274.5 268.5 28.5 306.3 30-10.5 CF 50DS-1 86 3¸ 86 Blank 16.0 72.4 8-8.4
CF 50DS-2 86 3¸ 86 10 16.0 72.4 8-8.4
CF 50DS-3 86 3¸ 86 20 16.0 72.4 8-8.4
CF 50DS-4 86 3¸ 86 30 16.0 72.4 8-8.4
CF 50DS-5 86 3¸ 86 40 16.0 72.4 8-8.4
CF 50DS-6 86 3¸ 86 51.0 16.0 72.4 8-8.4
CF 63DS-1 114 4ˆ 114 Blank 17.5 92.1 8-8.4
CF Rotatable Bored Flanges CF 63DS-2 114 4ˆ 114 30 17.5 92.1 8-8.4

CF 63DS-3 114 4ˆ 114 40 17.5 92.1 8-8.4
Dimensions§Specification CF 63DS-4 114 4ˆ 114 50 17.5 92.1 8-8.4
Flange Type(CF) CF 63DS-5 114 4ˆ 114 63.8 17.5 92.1 8-8.4
ITEM
NO. mm inch A(mm) B(mm) C(mm) D(mm) F(mm) Hole N-™ CF 100DS-1 `152 6 152 Blank 20.0 130.3 16-8.4
CF 16RO 34 1˜ 34 19.2 15.0 7.3 27.0 6-4.4 CF 100DS-2 152 6 152 102.0 20.0 130.3 16-8.4
CF 35RO 70 2˙ 70 40 38.5 12.7 58.7 6-6.6 CF 150DS-1 203 8 203 Blank 22.0 181.0 20-8.4
CF 50RO 86 3¸ 86 55 53 16.0 72.4 8-8.4 CF 150DS-2 203 8 203 153.5 22.0 181.0 20-8.4
CF 63RO 114 4ˆ 114 63.8 61.0 17.5 92.1 8-8.4 CF 200DS-1 253 10 253 Blank 25.0 231.8 24-8.4
CF 100RO 152 6 152 102.0 97.0 20.0 130.3 16-8.4 CF 200DS-2 253 10 253 203.5 25.0 231.8 24-8.4
CF 150RO 203 8 203 150.5 148.5 22.0 181.0 20-8.4 CF 250DS-1 305 12 305 Blank 28.0 284.0 32-8.4
CF 200RO 253 10 253 203.5 198.5 25.0 231.8 24-8.4 CF 250DS-2 305 12 305 255.5 28.0 284.0 32-8.4
CF 250RO 305 12 305 255.5 250 28.0 284.0 32-8.4 CF 336DS-1 336 13˘ 336 Blank 28.5 306.3 30-10.5
CF 336RO 336 13˘ 336 274.5 268.5 28.5 306.3 30-10.5 CF 336DS-2 336 13˘ 336 274.5 28.5 306.3 30-10.5

WOOSUNG VACUUM SYSTEM LINE-UP
HEAD OFFICE
133-13, Namioecheon 1-gil, Nami-myeon, Seowon-gu
Cheongju-si, Chungcheongbuk-do, 362-813 Korea
~
TEL : +82-43-260-4310 2 FAX : +82-43-260-4313
http://www.woovac.com E-mail : [email protected]
SEOUL OFFICE
27-123, 198, Gurojungang-ro, Guro-gu, Seoul, 152-864 Korea
TEL : +82-2-2675-3073 FAX : +82-2-2631-5207
DAEJEON OFFICE
#3-114, 160, Daehwa-ro, Daedeok-gu, Daejeon, 306-754 Korea
TEL : +82-42-670-4100 FAX : +82-42-670-4108
POHANG STANDARD VACUUM

66-3, Hyeongsangangnam-ro 418beon-gil, Yeonil-eup, Nam-gu,
Pohang-si, Gyeongsangbuk-do, 790-884 Korea
TEL : +82-54-282-1617 FAX : +82-54-282-3436
USome parts of contents in this catalogue may be changed without prior notice for better design and quality of products.
UAll rights reserved.
UNo part of this catalogue may be reproduced or copied in any from without prior permission from WOOSUNG VACUUM Co., LTD.
UEdited & published in 2014. 10.

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VACUUM COMPONENTS

Total Vacuum Solutions

As above mentioned, our various products including Dry pump, Rotary

Hoping for a business connection in the future and having an opportunity

Oil capacity(§) 1.8 2.2 4

Outside Dimension (UNIT : mm)

4 WOOSUNG VACUUM CO., LTD.

Outside Dimension (UNIT : mm)

MVP Series (6~90m3/h)

Outside Dimension (UNIT : mm)

6 WOOSUNG VACUUM CO., LTD.

MVP Series (144~324m3/h)

50Hz R.P.M 1450 1450 1450

Outside Dimension (UNIT : mm)

Outside Dimension (UNIT : mm)

WOVP-0020 385 217 72 72 198

WOVP-0040 385 217 72 72 198

8 WOOSUNG VACUUM CO., LTD.

Carbon Vane Pumps

Outside Dimension (UNIT : mm)

Oil Free Scroll Pumps

ISP Series ·Principle of compression

Water vapor g/day - 5(at air flush) 25(at air flush)

10 WOOSUNG VACUUM CO., LTD.

MODEL GVS-250 GVS-500B GVS-501B GVS-1000

Single Phase Three Phase Three Phase

Dry Screw Vacuum Pump

MODEL Units WVDP-100 WVDP-200 WVDP-400 WVDP-800 WVDP-1500 WVDP-3000

Dry Screw Vacuum Pump

- Precondenser, Butterfly Valves for Vacuum Regulation

DD105 DD1205 DD605/DD2005

Cooling water pressure bar 3.5 to 9

14 WOOSUNG VACUUM CO., LTD.

DD255 DD1055 DD1855/DD3555

Cooling water connection inch ˆ±NPTF with ¸±Tube Connector

Water Ring Pumps

<Single Stage Pump WWVP-1> <Two Stage Pump WWVP-2>

Single Stage Water Ring Pumps RUltimate Pressure(at 15…)

Two Stage Water Ring Pumps RUltimate Pressure(at 15…)

WWVP-2-045 450 17(2.3ø10 ) 3400

16 WOOSUNG VACUUM CO., LTD.

Direct Type Pump

Liquid level when Operating Principle of

Connection, Dimension & Approx Weight

UThe max. admissible differential pressure depends on the thermal load.

18 WOOSUNG VACUUM CO., LTD.

WSD Series Structure & Working Principle

Booster Pumping System

WBSD(Dry Type) Series

WBSO(Oil Type) Series

Diffusion Pump System

Oil rotary pump §/min 200 300 600 1000

High vacuum valve Inch 4 6 8 10

22 WOOSUNG VACUUM CO., LTD.

PLC Leak Test Machine

UPower Supply : 380V 50/60Hz three phase

Exhaust Vacuum System

Description U OIL ROTARY VACUUM PUMP [ RESEVER TANK

Description U OIL ROTARY VACUUM PUMP Z VACUUM SWITCH