BASIC VACUUM

PRACTICE
 Why is a Vacuum Needed?

To move a particle in a (straight) line over a large distance

(Page 5 manual)
Why is a Vacuum Needed?
Atmosphere (High)Vacuum

Contamination
Clean surface
(usually water)

To provide a clean surface

HOW DO WE CREATE A
VACUUM?
 VACUUM PUMPING METHODS
VACUUM PUMPS
(METHODS)

Gas Transfer Entrapment

Vacuum Pump Vacuum Pump

Positive Displacement Kinetic Adsorption

Vacuum Pump Vacuum Pump Pump

Reciprocating Rotary Drag Fluid Entrainment Ion Transfer Cold Trap

Displacement Pump Pump Pump Pump Pump

Diaphragm Liquid Ring Gaseous Ejector Bulk Getter Getter

Pump Pump Ring Pump Pump Pump Pump

Piston Rotary Turbine Liquid Jet Diffusion Getter Ion Sublimation

Pump Piston Pump Pump Pump Pump Pump Pump

Multiple Vane Sliding Vane Axial Flow Gas Jet Diffusion Self Purifying Evaporation
Rotary Pump Rotary Pump Pump Pump Ejector Pump Diffusion Pump Ion Pump

Rotary Radial Flow Vapor Jet Fractionating Sputter Ion

Plunger Pump Pump Pump Diffusion Pump Pump

Dry Roots Molecular

Cryopump
Pump Pump Drag Pump

Turbomolecular
Condenser
Pump
 BAROMETER

Mercury: 13.58 times

heavier than water:
10.321 Column is 13.58 x shorter :
mm 10321 mm/13.58=760 mm
(= 760 Torr)
760 29,9
mm in

WATER MERCURY

(Page 12 manual)
 PRESSURE OF 1 STANDARD
ATMOSPHERE:

760 TORR, 1013 mbar

AT SEA LEVEL, 0O C AND 45O LATITUDE

 Pressure Equivalents
Atmospheric Pressure (Standard) =

0 gauge pressure (psig)

14.7 pounds per square inch (psia)
29.9 inches of mercury
760 millimeter of mercury
760 torr
760,000 millitorr or microns
101,325 pascal
1.013 bar
1013 millibar
THE ATMOSPHERE IS A MIXTURE OF GASES

PARTIAL PRESSURES OF GASES CORRESPOND TO THEIR RELATIVE VOLUMES

PERCENT BY PARTIAL PRESSURE

GAS SYMBOL VOLUME TORR PASCAL

Nitrogen N2 78 593 79,000

Oxygen O2 21 158 21,000
Argon A 0.93 7.1 940
Carbon Dioxide CO2 0.03 0.25 33
Neon Ne 0.0018 1.4 x 10-2 1.8
Helium He 0.0005 4.0 x 10-3 5.3 x 10-1
Krypton Kr 0.0001 8.7 x 10-4 1.1 x 10-1
Hydrogen H2 0.00005 4.0 x 10-4 5.1 x 10-2
Xenon X 0.0000087 6.6 x 10-5 8.7 x 10-3
Water H2 O Variable 5 to 50 665 to 6650

(Page 13 manual)
VAPOR PRESSURE OF WATER AT
VARIOUS TEMPERATURES

T (O C) P (mbar)
100 (BOILING) 1013
25 32
0 (FREEZING) 6.4
-40 0.13
-78.5 (DRY ICE) 6.6 x 10 -4
-196 (LIQUID NITROGEN) 10 -24

(Page 14 manual)
(Page 15 manual)
Vapor Pressure of some Solids

(Page 15 manual)
 PRESSURE RANGES

RANGE PRESSURE

ROUGH (LOW) VACUUM 759 TO 1 x 10 -3 (mbar)

HIGH VACUUM 1 x 10 -3 TO 1 x 10 -8 (mbar)

ULTRA HIGH VACUUM LESS THAN 1 x 10 -8 (mbar)

(Page 17 manual)
 GAS FLOW
CONDUCTANCE

(Page 24 manual)
Viscous and Molecular Flow

Viscous Flow Molecular Flow

(momentum transfer (molecules move
between molecules) independently)
 FLOW REGIMES
Viscous Flow:
Distance between molecules is small; collisions between
molecules dominate; flow through momentum transfer;
generally P greater than 0.1 mbar

Transition Flow:
Region between viscous and molecular flow

Molecular Flow:
Distance between molecules is large; collisions between
molecules and wall dominate; flow through random motion;
generally P smaller than 10-3 mbar

(Page 25 manual)
 MEAN FREE PATH

MOLECULAR DENSITY AND MEAN FREE PATH

1013 mbar (atm) 1 x 10-3 mbar 1 x 10-9 mbar

# 3 x 10 19 4 x 10 13 4 x 10 7
mol/cm3 (30 million trillion) (40 trillion) (40 million)

MFP 2.5 x 10-6 in 2 inches 31 miles

6.4 x 10-5 mm 5.1 cm 50 km
 FLOW REGIMES

Mean Free Path

Viscous Flow: is less than 0.01
Characteristic Dimension

Mean Free Path

Transition Flow: is between 0.01 and 1
Characteristic Dimension

Mean Free Path

Molecular Flow: is greater than 1
Characteristic Dimension
 Conductance in Viscous
Flow

Under viscous flow conditions doubling the

pipe diameter increases the conductance
sixteen times.
The conductance is INVERSELY related to
the pipe length

(Page 28 manual)
 Conductance in Molecular
Flow

Under molecular flow conditions doubling

the pipe diameter increases the conductance
eight times.
The conductance is INVERSELY related to
the pipe length.
 Series Conductance
RT = R1 + R2
SYSTEM
1 = 1 + 1
CT C1 C2
C1
1 = C 1 + C2
CT C1 x C2 C2
CT = C1 x C2
C1 + C2 PUMP

(Page 29 manual)
 GAS LOAD

Permeation
Outgassing
Real
Leaks
Diffusion Virtual
Backstreaming

GAS LOAD (Q) IS EXPRESSED IN:

mbar liters per second
 Pumpdown Curve
10+1

10-1
Volume
Pressure (mbar)

10-3

10-5 Surface Desorption

10-7
Diffusion
10-9
Permeation
10-11 1
10 10 3 10 5 10 7 10 9 10 11 10 13 10 15 10 17
Time (sec)
Roughing Pumps

2
(Page 39 manual)
 VACUUM PUMPING METHODS
VACUUM PUMPS
(METHODS)

Gas Transfer Entrapment

Vacuum Pump Vacuum Pump

Positive Displacement Kinetic Adsorption

Vacuum Pump Vacuum Pump Pump

Reciprocating Rotary Drag Fluid Entrainment Ion Transfer Cold Trap

Displacement Pump Pump Pump Pump Pump

Diaphragm Liquid Ring Gaseous Ejector Bulk Getter Getter

Pump Pump Ring Pump Pump Pump Pump

Piston Rotary Turbine Liquid Jet Diffusion Getter Ion Sublimation

Pump Piston Pump Pump Pump Pump Pump Pump

Multiple Vane Sliding Vane Axial Flow Gas Jet Diffusion Self Purifying Evaporation
Rotary Pump Rotary Pump Pump Pump Ejector Pump Diffusion Pump Ion Pump

Rotary Radial Flow Vapor Jet Fractionating Sputter Ion

Plunger Pump Pump Pump Diffusion Pump Pump

Dry Roots Molecular

Cryopump
Pump Pump Drag Pump

Turbomolecular
Condenser
Pump
 PUMP OPERATING RANGES
Ultra High
High Vacuum Rough Vacuum
Vacuum
Rotary Vane Mechanical Pump
Rotary Piston Mechanical Pump
Dry Mechanical Pump
Sorption Pump
Blower/Booster Pump
Venturi Pump
High Vac. Pumps
Ultra-High Vac. Pumps

10-12 10-10 10-8 10-6 10-4 10-2 1 10+2

P (mbar)
 VACUUM SYSTEM USE
9 1 Chamber
8
2 High Vac. Pump
1 3 Roughing Pump
7
8 3a Foreline Pump
4 Hi-Vac. Valve
5 5 Roughing Valve
4
6 Foreline Valve
7
7 Vent Valve
2 8 Roughing Gauge
6 9 High Vac. Gauge

3a 3
(Page 44 manual)
Rotary Vane, Oil-Sealed
Mechanical Pump

(Page 45 manual)
Pump Mechanism
How the Pump Works

(Page 46 manual)
OIL BACKSTREAMING

PRESSURE LEVELS: LESS THAN 0.2 mbar

The Molecular Sieve/Zeolite
Trap

(Page 48 manual)
Dry Vacuum Pumps
Blower/Booster Pump

(Page 61 manual)
One Stage Roots Blower
Pump Assembly
 VACUUM SYSTEM USE
1 Chamber
12 2 Foreline
11 3 Roughing Valve
4 Roughing Gauge
1 3 4 5 Roughing Pump
6 Foreline
7 Foreline Valve
9 2 8 Foreline Gauge
9 High Vacuum Valve
10 Booster/Blower
10 11 Vent Valve
12 High Vacuum Gauge
7 6
8
5
(Page 62 manual)
Sorption Pump Components

(Page 54 manual)
Vapor Pressure

(Page 56 manual)
Cryo-condensation
Cryo-sorption

(Page 55 manual)
HIGH VACUUM PUMPS

3
(Page 63 manual)
 VACUUM PUMPING METHODS
VACUUM PUMPS
(METHODS)

Gas Transfer Entrapment

Vacuum Pump Vacuum Pump

Positive Displacement Kinetic Adsorption

Vacuum Pump Vacuum Pump Pump

Reciprocating Rotary Drag Fluid Entrainment Ion Transfer Cold Trap

Displacement Pump Pump Pump Pump Pump

Diaphragm Liquid Ring Gaseous Ejector Bulk Getter Getter

Pump Pump Ring Pump Pump Pump Pump

Piston Rotary Turbine Liquid Jet Diffusion Getter Ion Sublimation

Pump Piston Pump Pump Pump Pump Pump Pump

Multiple Vane Sliding Vane Axial Flow Gas Jet Diffusion Self Purifying Evaporation
Rotary Pump Rotary Pump Pump Pump Ejector Pump Diffusion Pump Ion Pump

Rotary Radial Flow Vapor Jet Fractionating Sputter Ion

Plunger Pump Pump Pump Diffusion Pump Pump

Dry Roots Molecular

Cryopump
Pump Pump Drag Pump

Turbomolecular
Condenser
Pump
 PUMP OPERATING RANGES
Ultra High Rough Vacuum
High Vacuum
Vacuum
Roughing Pumps
Liquid Nitrogen Trap
Diffusion Pump
Turbo Pump
Cryo Pump
Ion Pump
Tit. Subl. Pump

10-12 10-10 10-8 10-6 10-4 10-2 1 10+2

P (Torr)
 VACUUM SYSTEM USE
9
8
1 Chamber
1 2 High Vac. Pump
7
8 3 Roughing Pump
3a Fore Pump
5 4 Hi-Vac. Valve
4
5 Roughing Valve
8
6 Foreline Valve
22 7 Vent Valve
8 Roughing Gauge
6
9 High Vac. Gauge
3
3a
Oil Diffusion Pump
Pump Construction

(Page 66 manual)
How the Pump Works
How the Pump Works
First stage vapors are
separated from others
 Pumping Speed
1 2 3 4
Pumping Speed (Air)

Critical Point

1. Compression Ratio Limit

2. Constant Speed
3. Constant Q (Overload)
4. Mechanical Pump Effect

10-10 10--3 10--1

Inlet Pressure (Torr)
Maximum Tolerable Foreline
Pressure

(Page 73 manual)
LN2 reservoir with baffles

(Page 78 manual)
How the LN2 Trap Works
Approximate Vapor
Gas Pressure (mbar)

Water (H2O) 10-22

Argon (A) 500
Carbon Dioxide (CO2) 10 -7
Carbon Monoxide (CO) >760
Helium (He) >760
Hydrogen (H2) >760
Oxygen (O2) 350
Neon (Ne) >760
Nitrogen (N2) 760
Solvents <10 -10

(Page 79 manual)
 Turbomolecular Pump
INLET FLANGE ROTOR BODY

STATOR BLADES
HIGH PUMPING SPEED

HIGH COMPRESSION

BEARING

EXHAUST

HIGH FREQ. MOTOR

BEARING

(Page 81 manual)
Rotor - stator assembly

(Page 82 manual)
 Pump Operation
Molecule V

Moving Wall with Speed V

Principle of the Turbomolecular Pump

(Page 83 manual)
Roughing through the turbo

6
7 1 Chamber
1 2 Turbo Pump
4 3 Roughing Pump
4 Vent Valve
5 5 Roughing Gauge
22 6 High Vac. Gauge

(Page 91 manual)
Pumping by Cryocondensation
Cryosorption in charcoal

(Page 98 manual)
Charcoal placement
Gauges

5
(Page 123 manual)
 Gauge Operating Ranges
Ultra High
High Vacuum Rough Vacuum
Vacuum
Bourdon Gauge
Capacitance Manometer
Thermocouple Gauge
Pirani Gauge
Hot Fil. Ion Gauge
Cold Cathode Gauge
Residual Gas Analyzer
McLeod Gauge
Spinning Rotor Gauge

10-12 10-10 10-8 10-6 10-4 10-2 1 10+2

P (mbar)
Bourdon Gauge
How the gauge works
Heat Transfer Gauges

Thermocouple gauge
and
Pirani Gauge
Thermocouple Gauge
How the gauge works
Ionization gauges
Ionization current is the
measure of vacuum
Residual Gas Analyzer

QUADRUPOLE
HEAD

CONTROL UNIT
How the RGA works
 RELATIVE INTENSITY
RGA SPECTRUM

NORMAL (UNBAKED)
H2 O SYSTEM

(A)
H2 N2,, CO
CO2

MASS NUMBER (A.M.U.)

 RGA SPECTRUM

N2
RELATIVE INTENSITY

SYSTEM WITH
AIR LEAK
H2 O
(B)
O2
H2 CO2

MASS NUMBER (A.M.U.)

LEAK DETECTION

9
(Page 249 manual)
Introduction
Problems that appear to be
Leaks
Permeation
Diffusion
Real
Leaks
Outgassing Virtual
Backstreaming
Trapped Volumes
Vented Screw
 Double O ring sealed shafts

Atmosphere Vacuum
(760 torr)
 Differential Pumping

Atmosphere Vacuum
(1013 mbar)

To Pump 1 mbar
PERMEATION LEAKS

Permeation “leaks” are different

than real leaks because the only way
to stop them is to change to a less
permeable material
One standard cubic
centimeter/sec
(std. cc/sec)
Leak rate of 1 x 10-1 std cc/sec
Leak rate of 1 x 10-3 std
cc/sec
 Leak Rates over Time

LEAK RATES
10 -1 STD CC/SEC --- 1 CC/10 SEC
10 -3 STD CC/SEC --- 3 CC/HOUR
10 -5 STD CC/SEC --- 1 CC/DAY
10 -6 STD CC/SEC --- 1 CC/2 WEEKS
10 -7 STD CC/SEC --- 3 CC/YEAR
10 -9 STD CC/SEC --- 1 CC/30 YEARS
Why Helium is used
 HELIUM
• Helium is very light and small
• Low concentration in air (0.0005%)
• Permits dynamic testing
• Permits non-destructive testing
• Helium is safe
 CONVENTIONAL LEAK DETECTOR

1 Test Piece
1 2 Test Port
3 High Vac. Pump
2 4 Roughing Pump
12 5 Fore Pump
10 11
9 6 RoughingValve
7 6 7 Test Valve
8 8 Pump Valve
3 9 Spectrometer Tube
5 4 10 Cold Trap
11 Roughing Gauge
12 Vent Valve
 Ion Separation in Magnetic
Field
Ion Gauge Ion Source

To Pre-Amplifier
Magnetic Field
Deflects He Ions
90O, other ions
more or less than Lighter ions:
90O. more

Collector
He ions pass
Heavier ions: through slit and
less are collected
Tracer probe leak detection
technique