Fomblin

Fomblin® PFPE Lubes

for Vacuum Applications

SPECIALTY
POLYMERS
Fomblin® PFPE: Vacuum Pump Oils
Fomblin® Y grades are perfluorinated polyether inert • Good lubricant properties
fluids for use as lubricants in vacuum pumps. Fomblin® • No flash or fire point
PFPE fluids are a mixture of fluorinated polymers
• Non-toxicity
obtained by a photochemical process that begins with
hexafluoropropylene. Since the Fomblin® PFPE chemical • Excellent compatibility with metals, plastics, elastomers
chain contains only carbon, fluorine and oxygen atoms, • Good aqueous and non-aqueous solvent resistance
these fluids have exceptional properties such as: • High dielectric properties
• Low vapor pressure • Low surface tension
• Chemical inertness • Good radiation stability
• High thermal stability • Environmentally acceptable

Y LVAC RP Grades
Y LVAC Grades Anti-rust Additivated Y HVAC Grade
Application 06/6 14/6 16/6 25/6 06/6RP 14/6RP 25/6E 140/13
Rotary pumps
– sealing & lubricant fluid • • • • • •
Turbomolecular pumps
– lubrication • •
Roots pumps
– lubrication • • •
Diffusion pumps
– working fluid •
 Fomblin® Y LVAC Grades
Y LVAC Grades
Typical Properties Units 06/6 14/6 16/6 25/6
Average molecular weight amu 1,800 2,500 2,700 3,300
3
Density at 20 °C (68 °F) g/cm 1.88 1.89 1.89 1.90

Kinematic viscosity at 20 °C (68 °F) cSt 64 148 168 276

Viscosity index 71 97 110 113

Vapor pressure

at 25 °C (68 °F) torr 8·10 –7 1·10 –7 9·10 –8 6·10 –8

at 100 °C (212 °F) torr 3·10 –3 2·10 –4 2·10 –4 6·10 –5

Pour point °C – 50 – 45 – 45 – 35
°F – 58 – 49 – 49 – 31

Heat of vaporization at 200 °C (392 °F) cal/g 11 8 8 7

Surface tension at 20 °C (68 °F) dyne/cm 21 22 22 22

Evaporation loss (22 hrs; 149 °C for 14/6, 16/6, and

% by wt. 2.8 2.6 3.9 0.6
25/6, 120 °C for 06/6)

Fomblin® Y LVAC – Fomblin® Y LVAC –

kinematic viscosity vs. temperature vapor pressure vs. temperature
1,000 1
Fomblin® Y LVAC 06/6
Fomblin® Y LVAC 14/6
Fomblin® Y LVAC 16/6 10 –1
Fomblin® Y LVAC 25/6

10 –2
100
Vapor pressure [torr]
Kin. viscosity [cSt]

10 –3

10 –4

10
10 –5

Fomblin® Y LVAC 06/6

10 –6 Fomblin® Y LVAC 14/6
Fomblin® Y LVAC 16/6
Fomblin® Y LVAC 25/6
1 10 –7
20 40 60 80 100 120 140 160 180 200 20 40 60 80 100 120 140 160 180 200
Temperature [°C] Temperature [°C]

Fomblin® PFPE Lubes for Vacuum Applications /3

 Fomblin® Y LVAC RP Grades
Additivated Grades for Anti-Rust and Anti-Wear
Rust Preventive formulation (LVAC RP) was studied to time to guarantee the physical properties and the vacuum
reduce or prevent rusting when huge amount of water performance of the grade.
vapors has to be pumped or when metal surfaces
of the pump are exposed to moisture. An optimum Anti-rust property evaluation
concentration of additive in Fomblin® Y LVAC grades was • Fog chamber (method ASTM B117)
studied to provide protection against rust and at the same • Conditions: temperature = 45 °C, humidity = 90 %

Sample Fluid Fog Chamber Time Corrosion Degree Fog Chamber Time Corrosion Degree
Cast iron Y LVAC 40 mins 5 1 hour >5

Low carbon steel Y LVAC 40 mins 4 1 hour 5

Cast iron Y LVAC RP 24 hours 0 96 hours 1–2

Low carbon steel Y LVAC RP 24 hours 0 96 hours 2

Rating
0 – No corrosion 3 – Small areas of corrosion covering from 1 % to 5 % of the surface
1 – Not more than three small spots of corrosion 4 – Small areas of corrosion covering from 6 % to 10 % of the surface
2 – Small areas of corrosion covering up to 1 % of the surface 5 – Small areas of corrosion covering more than 10 % of the surface

In addition to its rust protection, Fomblin® LVAC RP shows Anti-wear property evaluation
exceptional anti-wear properties as well. • 4 ball wear test (ASTM D2266)
• Conditions:
speed = 1,200 rpm, load 40 kg, time = 60 min.

Anti-wear evaluation of oil

40 kg
Grade T = 75 °C Diff T = 150 °C Diff
1,200 rpm
Fomblin® Y LVAC 25/6 1.1 mm – 0.85 mm –

Fomblin® Y LVAC 25/6E 0.96 mm – 13 % 0.74 mm – 13 %

4 \ Fomblin® PFPE Lubes for Vacuum Applications

 Y LVAC RP Grades
Typical Properties Units 06/6RP 14/6RP 25/6E
Average molecular weight amu 1,800 2,500 3,300
3
Density at 20 °C (68 °F) g/cm 1.88 1.89 1.90

Kinematic viscosity at 20 °C (68 °F) cSt 73 165 305

Viscosity index 71 97 113

Vapor pressure

at 25 °C (68 °F) torr 5·10 –6 3·10 –7 1·10 –7

at 100 °C (212 °F) torr 3·10 –3 2·10 –4 6·10 –5

Pour point °C – 50 – 45 – 35
°F – 58 – 49 – 31

Heat of vaporization at 200 °C (392 °F) cal/g 11 8 7

Surface tension at 20 °C (68 °F) dyne/cm 21 22 22

Evaporation loss
% by wt. 3.1 2.9 0.9
(22 hrs; 149 °C for 14/6RP and 25/6E, 120 °C for 06/6RP)

Fomblin® PFPE anti-rust additivated grades maintain the

same viscosity and vapor pressure behavior than not
additivated ones. As the following charts show:
Fomblin® Y LVAC RP – Fomblin® Y LVAC RP –
kinematic viscosity vs. temperature vapor pressure vs. temperature
1,000 1
Fomblin® Y LVAC 06/6RP
Fomblin® Y LVAC 14/6RP 10 –1
Fomblin® Y LVAC 25/6E
10 –2
Vapor pressure [torr]
Kin. viscosity [cSt]

100
10 –3

10 –4

10 –5
10
10 –6
Fomblin® Y LVAC 06/6RP
–7
10 Fomblin® Y LVAC 14/6RP
Fomblin® Y LVAC 25/6E
1 10 –8
20 40 60 80 100 120 140 20 40 60 80 100 120 140 160 180 200
Temperature [°C] Temperature [°C]

Fomblin® PFPE Lubes for Vacuum Applications /5

 Fomblin® Y HVAC Fluids
Perfluoropolyether Fluids for Diffusion Pumps Y HVAC Grade
There are several advantages to using Fomblin® Y HVAC Typical Properties 140/13 Units
fluid in diffusion pumps:
Average molecular weight 6,600 amu
• Will not polymerize when exposed to oxygen, ionizing
Density at 20 °C (68 °F) 1.92 g/cm3
radiation or accelerated subatomic particles. The system
stays free of varnish and deposits from fluid decomposition Kinematic viscosity
• Non-flammable at 20 °C (68 °F) 1,508 cSt
• Resistant to oxidation of explosion and hot fluid can be at 100 °C (212 °F) 32
exposed repeatedly to air without harm to the fluid
at 200 °C (392 °F) 5
while running the pumps
• Inert to most reactive chemicals, the fluid can be used Pour point – 23 °C
– 9.4 °F
in direct contact with materials such as UF6, F2, PCI3,
BF3, without harm to the fluid Refractive index at 20 °C (68 °F) 1.304 n20 D

Specific heat at 38 °C (100 °F) 0.24 cal/g

Fomblin® Y HVAC fluid has been specially developed in
order to combine narrow molecular weight range and Surface tension at 25 °C (77 °F) 20 dyne/cm
controlled viscosity with an extremely low vapor pressure. Heat of vaporization at 200 °C (392 °F) 5 cal/g
Thus, they provide superior performance in high vacuum
applications, especially systems exposed to aggressive
gases.

Fomblin® Y HVAC – Fomblin® Y HVAC –

kinematic viscosity vs. temperature vapor pressure vs. temperature
10,000 1
Fomblin® Y HVAC 140/13
10 –1

10 –2

10 –3
1,000
10 –4
Vapor pressure [torr]
Kin. viscosity [cSt]

10 –5

10 –6
100
10 –7

10 –8

10 –9
10
10 –10

10 –11

10 –12
Fomblin® Y HVAC 140/13
1 10 –13
20 40 60 80 100 120 140 160 180 200 20 40 60 80 100 120 140 160 180 200
Temperature [°C] Temperature [°C]

6 \ Fomblin® PFPE Lubes for Vacuum Applications

Usage Applications
In most cases the Fomblin PFPE fluid can be used in the
®
Fomblin® Y HVAC fluids are suggested for applications
diffusion pumps without any modification to the pump. requiring the highest quality vacuum such as in
The major advantage in changing to Fomblin® PFPE fluid scanning electron and transmission microscopes, mass
is the reduction in contamination of the vacuum apparatus spectrometers, particle accelerators, ion implantation,
due to their very low backstreaming characteristics plasma and vapor deposition processes. In addition, it
and elimination of solid deposit formation. Fomblin® Y is suggested for pumps handling reactive gases such as
HVAC fluids need adequate heating power in order to UF6, F2, oxygen, ozone and tritium, as the fluid can be
obtain optimum pumping speed and vacuum stability. used in direct contact with these gases without reaction
Working in the appropriate temperature range, the use and fluid degradation.
of a cooling baffle is not critical with regard to ultimate
pressure value, but best stability performance have been Miscibility
obtained with a single water cooled baffle. Low ultimate
Fomblin® PFPE and mineral and hydrogenated synthetic
pressure is a typical benefit. It is recommended that fluid
oils are not miscible. In order to switch to Fomblin® PFPE,
temperature be kept below 280 °C for long fluid life. Under
the diffusion pump must be cleaned as thoroughly as
recommended operating procedures, Fomblin® PFPE
possible before filling to ensure that no traces of solvent
fluids will not decompose. However, gross pump misuse
are present which may affect vacuum performance. The
above 290 °C could result in partial decomposition and
procedure for cleaning diffusion pumps working with
release of toxic gases. Improved safety can be obtained
PFPE fluids is as follows:
by absorbing the gases in a glass tube filled with granular
calcium oxide at the end of the vacuum system. 1. Dismantle pump and extract inner bell,
2. Drain existing oil,
Total Fomblin® Vacuum Technology 3. Wash three times with Galden® SV55 solvents.
The Roughing Pump All solvent to remain in pump for several minutes
each time before draining,
To obtain maximum benefit from the use of Fomblin®
PFPE in the diffusion pump, it is desirable to minimize 4. Dry all metal parts in an oven to remove traces of
backstreaming of hydrocarbon vapors from the mechanical solvent.
roughing pump. This can only be assured by changing
the fluid in the roughing pump to the appropriate Fomblin®
Y LVAC fluid, such as Y LVAC 06/6, 14/6, or 25/6. If
hydrocarbon oil is used in the mechanical pump, it is
desirable to insert an efficient trap (cryogenic, copper wool,
alumina, zeolite) in the inlet line to the roughing pump.

Vacuum System Cleaning

Galden® SV55 are excellent non-CFC cleaner solvent for
pumping systems using PFPE-based fluids and greases.
 Specialty Polymers
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