Sps His Gas Midas O3 Dts en 1219

MIDAS -M ®
OZONE (O3)
Smart Sensor Specifications
Bringing new visibility, reliability, and

ease-of-use to gas detection in semiconductor
processing and industrial manufacturing.
GAS MEASURED OZONE (O3)
Cartridge Part Number MMS-U2
Sensor Technology 3 electrode electrochemical cell
Measuring Range O3 0 ppm to 0.4 ppm
Default Alarm 1 0.05 ppm (rising)
Default Alarm 2 0.1 ppm (rising)
Accuracy <±10% of measured value

Exposure to O3 0.2 ppm for 5 minutes
Response Time (t62.5) Typical 13 seconds
Sensor Cartridge Life Expectancy 24 months under typical application conditions
Operating Temperature 0ºC to 40ºC (32ºF to 104ºF)
Effect of Temperature
Zero <±0.0018 ppm/ºC
Sensitivity <±0.8% of measured value/ºC
Operating Humidity (continuous) 20% RH to 75% RH
Effect of Humidity
Zero Abrupt changes will cause a short term drift
Sensitivity <±1% of measured value/% RH
Operating Pressure 70 kPa to 110 kPa
Effect of Position No effect in typical application
Long Term Drift

Zero No drift
Sensitivity <5% of measured value/6 months
Calibration Gas Ozone (0.1 ppm to 0.3 ppm, default 0.2 ppm)
Challenge Gas (Bump Test) Nitrogen Dioxide (1 ppm)
Warm Up Time <10 minutes
Storage Temperature 5°C to 25°C (41°F to 77°F)
The sensor data listed is based on the test data under normal lab test conditions
(20°C to 25°C, 0% RH to 60% RH, normal atmosphere pressure); observed performance
may vary based on the actual monitoring system and the sampling conditions employed.
NOTE: The O3 sensor should not be used with SO2 sensor in same Midas®-M unit.
NOTE: The abrupt pressure change due to flow load change can cause false gas
readings or false alarms.
Midas®-M Ozone (O3) Specifications
OTHER DETECTABLE GASES
The following additional gases can be detected with this sensor cartridge. Sensor
performance and characteristics will be representative of the data as tabulated
above. Consult the Technical Manual to set up the Midas®-M transmitter with the
designated identification code for each of the following gas types:
DETECTABLE GAS CHEMICAL FORMULA MEASURING RANGE
CROSS SENSITIVITIES
Each Midas-M sensor is potentially cross sensitive to other gases and this may
cause a gas reading when exposed to other gases than those originally designated.
The table below presents typical readings that will be observed when a new sensor
cartridge is exposed to the cross sensitive gas (or a mixture of gases containing the
cross sensitive species).
NOTE: The cross sensitivity data shown below does not form part of the product
specification and is supplied for guidance only. Values quoted are based on
tests conducted on a small number of sensors and any batch may show
significant variation.
CHEMICAL CONCENTRATION READING

GAS/VAPOR
FORMULA APPLIED (ppm) (ppm O3)
Ammonia NH3 100 -3
Arsine AsH3 0.2 0
Carbon Dioxide CO2 5000 0
Carbon Monoxide CO 100 0
Chlorine Cl 2 1 1.2
Chlorine Dioxide ClO2 1 1.5
Chlorine Trifluoride ClF3 1 1 (Theoretical)
Fluorine F2 0.1 0.1
Hydrazine N2H4 3 -3
Hydrogen H2 500 -0.05
Hydrogen Chloride HCl 4 0.4 (Overrange)
Hydrogen Fluoride HF 6 0.4 (Overrange)
Hydrogen Sulphide H2S 20 1.6
Nitric Oxide NO 100 1
Nitrogen N2 100% 0
Nitrogen Dioxide NO2 10 6
Sulphur Dioxide SO2 4 0.4 (Overrange)

HONEYWELL SAFETY PRODUCTS Mainland China Manuals and other information about this
Honeywell Industrial Safety Gas Detectors product are available at:
Americas Building#1, 555 Huanke Road Zhang Jiang www.honeywellanalytics.com/en/products/
Honeywell Analytics Hi-Tech Park Pudong New Area Shanghai Midas-M
405 Barclay Boulevard 201203, China
Lincolnshire, IL 60069 Tel: 021-80386800
Tel: +1 847 955 8200 Fax: 021-60246070
Toll free: +1 800 538 0363 [email protected]
Fax: +1 847 955 8208
[email protected] Taiwan
Honeywell Taiwan Ltd
Europe, Middle East, and Africa 6F-2, No.8, ZiQiang S. Road, Jubei City,
Life Safety Distribution AG (LSD) 30264 Taiwan
Javastrasse 2 Tel: +886-3-5169284
8604 Hegnau Fax: +886-3-5169339
Switzerland [email protected]
Tel: +41 (0)44 943 4300
Fax: +41 (0)44 943 4398
[email protected]
Asia Pacific, India

Honeywell Analytics Asia Pacific, Co., Ltd.
7F SangAm IT Tower
434 Worldcup Buk-ro, Mapo-gu
Seoul 03922
South Korea
Tel: +82 (0)2 6909 0300
Fax: +82 (0)2 2025 0388
India Tel: +91 124 4752700 HIS_GAS_Midas_O3_DTS_EN_1219
[email protected] © 2019 Honeywell International Inc.

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MIDAS -M ®

Bringing new visibility, reliability, and

Sensor Technology 3 electrode electrochemical cell

Measuring Range O3 0 ppm to 0.4 ppm

Default Alarm 1 0.05 ppm (rising)

Default Alarm 2 0.1 ppm (rising)

Accuracy <±10% of measured value

Sensor Cartridge Life Expectancy 24 months under typical application conditions

Operating Temperature 0ºC to 40ºC (32ºF to 104ºF)

Effect of Position No effect in typical application

Long Term Drift

Challenge Gas (Bump Test) Nitrogen Dioxide (1 ppm)

Warm Up Time <10 minutes

Storage Temperature 5°C to 25°C (41°F to 77°F)

DETECTABLE GAS CHEMICAL FORMULA MEASURING RANGE

CHEMICAL CONCENTRATION READING

Arsine AsH3 0.2 0

Carbon Dioxide CO2 5000 0

Carbon Monoxide CO 100 0

Chlorine Dioxide ClO2 1 1.5

Chlorine Trifluoride ClF3 1 1 (Theoretical)

Fluorine F2 0.1 0.1

Hydrogen H2 500 -0.05

Hydrogen Chloride HCl 4 0.4 (Overrange)

Hydrogen Fluoride HF 6 0.4 (Overrange)

Hydrogen Sulphide H2S 20 1.6

Nitric Oxide NO 100 1

Nitrogen Dioxide NO2 10 6

Sulphur Dioxide SO2 4 0.4 (Overrange)

Asia Pacific, India

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