Nor Cal

INTRODUCTION
This catalog contains general information about our company, product line, and facilities. For specific information on our products, such
as dimensions and pricing, refer to the appropriate product catalog. The contents of each is described on this catalogs back cover. If you
wish to receive any of these catalogs, or a binder containing all of them along with additional information, please call our corporate office
at 800-824-4166 or 530-842-4457. They will be sent to you within a few days free of charge.
Tom Deany
Senior Vice President
& General Manager
Craig Hill
President
It is the goal of
Nor-Cal Products to be the
BEST IN CLASS
manufacturer of vacuum
equipment, producing the
highest quality components
at competitive prices, while
meeting our customers'
required delivery schedule.
We will strive for technical
and market leadership
by adding industry-driven
products to our catalog and
providing innovative
customer services.
GENERAL-LIT 4/02
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 800-824-4166 or 530-842-4457 FAX 530-842-9130 Email [email protected]
NOR-CAL PRODUCTS
Manufacturing, Sales and Corporate Offices, Yreka, California
A Source of Experience
Nor-Cal Products' origin dates back to 1948
when the company's predecessor began designing
and manufacturing stainless steel vacuum pumping stations for the dairy industry. With the
development of the ion pump by Varian Associates
ten years later, the vacuum industry began a
rapid growth that has never slowed.
In response to the demand for the machining
and metal forming required for vacuum applications, our company underwent a reorganization
and Nor-Cal Products was formed in 1962.
Since the vacuum industry's infancy we have kept
abreast of the latest technologies and equipment
in order to supply our customers with reliable
vacuum components at a reasonable price.
fittings, valves, foreline traps, feedthroughs,

manipulators and heater jackets. OEM and custom products, such as vacuum chambers, still
make up a large portion of our annual sales.
Our 85,000 square foot corporate headquarters
and manufacturing facility are located in Yreka,
California. Approximately 200 employees
manufacture nearly all of our products there
and manage a worldwide network of sales
representatives and stocking distributors.
In 1997 Nor-Cal Products established a 4,000
square foot research and development facility
in San Diego, California. The staff is currently
developing downstream pressure control devices
for semiconductor processes.
Nor-Cal was mainly an

OEM manufacturer for
companies like Varian, UTI,
Edwards High Vacuum and
Perkin-Elmer until 1978
when we produced a thirtypage catalog of standard
components. Our latest
catalog has more than 200
pages of standard products
including high vacuum and
ultra high vacuum flanges,
Research and Development, San Diego, California
GENERAL-LIT 4/02
MARKETS
Markets Served
Over the years our customer base has been drawn from all
segments of the vacuum industry. Our components are used
in almost every phase of semiconductor processing. We are
a preferred supplier to several semiconductor and compound
semiconductor equipment manufacturers and supply mechanical
contractors during fab construction. Industrial and academic
researchers are frequent purchasers of standard, modified standard
and custom components for physical, chemical and electrochemical experiments. Other customers who have come to value our
experience are involved with thin film deposition, surface
analysis, laser devices and aerospace.
Surface science research end station at Advanced Light Source, Berkeley, California
Semiconductor process equipment in the service chase of a 200mm fab
Thin film deposition systems
Heated forelines and pump exhaust lines in semiconductor subfab
GENERAL-LIT 4/02
SALES & MARKETING

Sales and Marketing
Our corporate sales, marketing and technical
support personnel provide prompt, honest
answers to your technical questions and can
recommend components for your particular
vacuum application.
Our experience with semiconductor process
equipment allows us to provide customers with
comprehensive solutions to extend downstream
preventative maintenance intervals and increase
throughput dramatically.
Back L to R: Denise Wilson, Sales Representative; Tim Nilsson, Vice President of Marketing
Steve Greuel, UHV Product Manager; Monica Sorcelli, Sales Representative
Front L to R: Diana Tudor, Sales Manager; Juanita Peterson, Sales Representative
Randy Michels, Thermal Applications Product Manager
Nor-Cal Products sales representatives and

stocking distributors are located throughout
the United States, Canada, the Pacific Rim
and Europe. Their locations, territories and
contact information can be found in the
General Information section of our binder
catalog, on our website, or you may call
our corporate sales offices at 1-800-824-4166.
Our Website
Nor-Cal Products' website features our catalog of over four thousand
standard components in Adobe Acrobat PDF format. Download the complete
catalog or just the sections you need. These searchable catalogs make it
easy to locate components quickly.
Other website features:
Track your Nor-Cal UPS or FedX shipments by your company's
purchase order number or your Nor-Cal Products order number
Request free catalogs in print or on CD
Make inquiries about
custom components
Download CAD
drawings of our
components
Left to Right: Per Cederstav, Senior Product Manager

Sean Mallory, Vice President Semiconductor Business Development
Access the latest new

product information,
technical data and pricing
Locate the Nor-Cal
representative in your area
and link to their website
www.n-c.com
GENERAL-LIT 4/02
ENGINEERING
Engineering
Nor-Cal's engineering staff can design custom
components from customer specifications,
sketches or drawings and oversee production with
in-house tooling and equipment. Our customers
benefit from the combined experience of our engineers, whose input during the design phase often
results in cost savings during production and a
superior product. For our customers who do not
have drafting personnel available and require a
complex assembly, we will provide complete CAD
drawings for approval upon receipt of order.
Nor-Cal's engineering department uses the latest
versions of AutoCad drafting and Inventor solid
modeling software. You may Email drawings direct
to our engineering department at [email protected].
Acceptable file formats are DXF, DWG, and IGES,
SAT and STEP. You may also download drawings
of our most commonly used standard components
from our website.
Left to Right: Chris Thackeray, Design Engineer;

Duane Petry, Engineering Manager; Preston Rosenbaum, Product Development Manager
Research & Development

In addition to developing new standard products
and improving existing ones, our Research and
Development departments design and test
customer specified products for equipment
manufacturers. Both our in-house and
San Diego R&D facilities have prototype
machining capabilities. Additionally, the San
Diego lab performs pressure, conductance and
thermal characterization as well as software and
electronic development and testing.
3D modeling of Throttling Pendulum Valve
using Inventor, state-of-the-art AutoCad program
Soldering Printed Circuit Boards (PCBs)
Inventor 3-D CAD model of

GenesisTM modular valve system
Checking wave forms on IQ Series Intellisys Throttling Valves
GENERAL-LIT 4/02
CLEANING
Cleaning
All stainless steel parts are
passivated in a light acid solution to remove weld scale and oxide.
A biodegradable detergent is used to
remove machine lubricants before the
parts are washed and rinsed with deionized
water. Special cleaning recipes can be provided to
our customer's specifications.
Nor-Cal offers tumbling, bead blasting, chem
cleaning and electropolishing of vacuum components in-house. Tumbling in ceramic media
deburrs components, such as weld fittings, while
providing a uniform finish. Glass shot cleans,
hones, polishes and peens while removing scale.
Some customers request bead blast on exterior
surfaces with electropolish on the interior.
Electropolishing is by far the most desirable
cleaning process for stainless steel vacuum
Chem cleaning vacuum chambers
components. This electrochemical

process benefits the finished part
in a number of ways simultaneously.
Deburring, passivation and stress
relieving are achieved while the
machine produced surface
roughness is eroded.
Electropolishing attacks the
microscopic peaks of the surface
more rapidly than the valleys, thereby
maintaining critical dimensions
while improving surface finishes. Normally .0003 to .0004
inch is removed to lower the
micro-finish from 32 to 8 RMS.
Electropolishing results in a
90% friction decrease over a
similar microfinish achieved
mechanically, while surface area
is reduced by a similar amount.
This is most important for vacuum
chambers because it produces
faster pumpdown and higher
conductance.
In addition to the improved
mechanical properties of the
surface, iron is removed electrochemically. This leaves the
Electropolishing vacuum chamber
Valve assembly in Class 1000 clean room
surface rich in chromium and nickel, which have extremely low vapor pressures. The result is the lowest
outgassing rates possible from stainless steel.
Chem cleaning is typically used for production
parts such as valve bodies or "process critical"
parts fabricated for semiconductor equipment
manufacturers. The component is immersed in a
series of controlled chemical baths before deionized water rinse and filtered hot air dry. Chem
cleaned parts are immediately packaged in sealed
clean room bags.
Semiconductor and UHV applications require
that our valves and manipulators be assembled
in a 3000 square foot, Class 1000 clean room.
All components receive a secondary cleaning
and thorough inspection to make absolutely
sure they are free of dust, machine oils
and other contaminants.
GENERAL-LIT 4/02
MANUFACTURING
Proven Performance
An independent study ranked Nor-Cal Products
number one in price and availability out of the
five major vacuum component manufacturers.
Orders for stock items received in the morning can
be shipped that afternoon. Guaranteed overnight
delivery is available throughout the continental
United States from our corporate headquarters,
and also from our five stocking distributors
locations. Exceptional service has won us many
loyal customers who have had an assembly line
down and been surprised to find that we would
weld, clean, leak check and ship a non-stock item
the same day without an expedite charge.
Over the years Nor-Cal has added in-house
capabilities, such as chem cleaning and
electropolish, in order to eliminate dependence
on outside suppliers. Additionally, this has
allowed us to shorten lead times and reduce
overall manufacturing costs.
Materials
Nor-Cal Products uses only the highest grade
materials for the manufacturing of vacuum components. Vapor pressure, corrosion resistance and
permeability are important considerations taken
into account during the material selection process.
We start with select grade 304 stainless steel
tubing, spheres or roll-ups to fabricate the vacuum
vessel. If required, 304L, 316 or 316L can be
supplied. Normally our standard material is in the
low carbon range for 304. Flanges and baseplates
are made from 304 that has been specially treated
to remove impurities inherent in 300 series steels.
Flanges 4.50 inches OD and smaller are made from
304 electroslag remelt (ESR) bar stock. ESR is a
refining process that produces stainless steel with
higher purity, fewer inclusions and more
uniform grain structure to eliminate
microscopic leak paths. Larger
flanges are made from Argon Oxygen
Decarburization (AOD) 304 stainless
steel. This material is certified to meet
ASTM-240 and has less than .01%
sulfur to prevent sulfur stringers.
Grain size is 3 to 6 per ASTM E-112.
Maximum inclusion size is 2.5 per
ASTM E-45. As specials, 304L and
316L material can be supplied in
AOD or roll-forged rings.
CNC Machining Center with dual spindles, live tooling and robotic gantry
GENERAL-LIT 4/02
MANUFACTURING
Machining
Machining procedures are consistent with good
UHV practices. Machine coolant is sulfur free to
reduce outgassing. All Nor-Cal components are
designed to minimize entrapments, which cause
virtual leaks under vacuum. State-of-the-art
CNC machining equipment is available to
produce parts with consistently high quality.
Most valve and trap body ports and weld fittings
are die-formed using the pulled-port method.
A ball is pulled through a smaller opening resulting in a crevice-free, smooth, tapered opening.
This eliminates sharp inside corners that can
entrap contaminants, and allows faster
pumpdown and lower outgassing.
GTAW fusion welding is used exclusively for a
vacuum-tight metal bond. Purging with an inert
gas reduces or eliminates oxygen entrainment
and carbide precipitation, which cause outgassing.
Whenever possible, welds are made on the inside
or are full penetration to eliminate entrapments
and virtual leaks.
GTAW Fusion Welding
Production Scheduling
Production scheduling and capacity planning
at Nor-Cal employ a lean manufacturing technique
that combines bottleneck management and
KANBAN with traditional MRP. Small lot sizes
and standardized routings maximize scheduling
flexibility and increase visibility of jobs in
the manufacturing stream, while reducing
manufacturing cycle time.
GENERAL-LIT 4/02
QUALITY ASSURANCE
Quality Assurance
After extensive audits, Nor-Cal Products received Semitech
SSQA Preferred Supplier status from two large semiconductor
equipment manufacturers.
An ongoing effort is made to control and improve manufacturing
processes. Periodic defect analysis results in process improvements with narrower acceptable limits on subsequent production
runs. Our goal is to reach six-sigma process capability.
Our quality system is ISO compliant, SSQA certified and
MIL-Q-9858 and MIL-I-45208 approved.
Every weld is leak checked with a helium mass spectrometer
to insure a leak rate of 10-9 std. cc/sec or less. Our chamber
qualification test benches can be used on components requiring
lower leak rates. They were developed for customers who request
residual gas analyzer (RGA) scans of their chambers after a
24 hour vacuum bake. A test bench contains vacuum pumps,
gauges, RGA, quartz heaters, nitrogen back fill and a leak
detector. Once water and other background are eliminated
by the 150C bakeout, we can provide the customer
with customized scans to detect the slightest
contamination in the chamber.
Whatever the sensitivity of
our customers application,
we can guarantee that
contaminants will be
within acceptable limits.
A coordinate measuring
machine (CMM) is used for
in-process and final mechanical
inspections of vacuum chambers
and other complex or close
tolerance parts. CMM printouts
of chamber final inspections
can be furnished upon request.
Calibrati
ng
TM Adap
Intellisys
Mechanical inspection of process chamber with Coordinate Measuring Machine (CMM)
tive Press
ure Contr
ollers
Chamber Qualification Test Bench
Quality Statement
Nor-Cal Products, Inc. is dedicated to continual
improvement of our manufactured and purchased
goods through the implementation of a carefully
planned quality program. Quality improvements
at Nor-Cal have been mandated and implemented
with the full support of senior management.
parts with on-time delivery, competitive

pricing and the best possible customer service.
Nor-Cals use of statistical methods in
manufacturing, training programs and
continuous improvement of equipment are
evidence of our commitment to this goal.
It is our belief that quality is built into a product.

We will eliminate defects by reducing the variables
in all processes relating to manufacturing.
We will strive to meet our primary goal of 100%
customer acceptance by manufacturing defect-free
While management takes the ultimate responsibility for Nor-Cal quality, service and productivity,
each employee can take credit for his or her contribution to our success, and is responsible for the
implementation of quality in their particular area.
We are all participants in the creation of a quality

ethic. Senior management fosters an atmosphere
of cooperation not only throughout Nor-Cal,
but also with customers as well as suppliers.
Our purpose is to create a team dedicated to the
improvement of quality by finding creative solutions to our industries' manufacturing problems.
Building quality into Nor-Cal

components is our most important task.
GENERAL-LIT 4/02
STANDARD COMPONENTS
Intellisys Adaptive
Pressure Control Components
Sample Transfer
& Positioning Devices
Intellisys adaptive pressure controllers and throttle

valves reduce time to pressure setpoint,
while increasing tool throughput with
over 100,000 control resolution steps
and a 20 times valve speed increase.
Non-sealing butterfly valves are
available with or without
on-board control. Throttling pendulum valves
provide unequalled pressure control as well
as isolation for large bore
high vacuum pumps.
Heated and unheated
Capacitance Diaphragm
Gauges and Heater Jackets
are available as options.
Our Series II sample transfer and manipulation devices

offer the researcher a series of complimentary components that are manufactured for demanding UHV
bakeouts and environments. They are guaranteed to
be free from defects in materials and workmanship for
five years. Each standard component can readily be
customized to meet specific requirements with options
such as sample heating and cooling, special lengths
or stepper motor drivers. Standard components
include XYZ precision manipulators, magnetic linear/
rotary feedthroughs, rotary
motion feedthroughs,
differentially pumped
rotary seals, sample
transfer systems,
alignment gimbals
and rotary wobble sticks.
Isolation Valves
Nor-Cal offers vacuum isolation valves for a broad
range of sizes, pressures and applications. Our pneumatically actuated poppet valves are the standard in the
semiconductor equipment industry because of their
robust design and edge-welded AM 350 stainless steel
bellows which provide full-opening conductance.
Genesis valves were designed specifically for
semiconductor equipment that require million-cycle
reliability, small footprint and low-cost soft start and
heating options. Copper seal bonnet and manual
all-metal valves are available for UHV applications.
Additionally, Nor-Cal provides traditional linear as
well as low-particulate pendulum style gate valves for
isolation of high vacuum pumps and UHV chambers.
Viewports
Crystal Deposition Monitors,
Feedthroughs & Sensors
Nor-Cal thin film monitors, crystal sensors and
feedthroughs, represent those most commonly
used for thermal deposition processes. A variety
of feedthrough configurations with KF or CF flanges
are available for single or dual crystal sensors, with
or without water-cooling and pneumatic shutters.
Custom feedthroughs and bakeable sensors are also
available on request. Our standard monitor measures
film thickness and rate or frequency from two
independent channels. The two channels can be
used to monitor different films or average readings
to provide
more uniform
deposition
measurement.
The monitor is
expandable to
six channels.
Controllers are
also available.
Foreline Traps
We have more than 25 years experience manufacturing foreline traps for the vacuum industry. They range
in complexity from sealed coaxial traps, which prevent mechanical pump oil from backstreaming to the
chamber, to the three-stage LPCVD TEOS trap, which
incorporates a stainless steel gauze filter media with a
10 micron fiberglass particle filter for
the removal of silicon dioxide.
We have the largest selection
of standard traps, which utilize
woven metal, polyester or
fiberglass gauze; molecular
sieve; a liquid nitrogen reservoir
or water-cooled coils to remove
contaminants from the vacuum
system or chamber.
Electrical & Liquid

Feedthroughs
Our electrical feedthroughs are manufactured from
ultra-high vacuum grade materials, such as high
alumina ceramic insulators, OFHC copper and
nickel conductors, and 304 stainless steel flanges.
Types include thermocouple, instrumentation,
medium current, high current, BNC, and MHV feedthroughs. Liquid and liquid nitrogen feedthroughs
are available with or without industry standard
Cajon VCR or Swagelok fittings.
Zero-length viewports are offered with fully annealed

7056 glass, for a large, distortion-free viewing area, or
fused silica to provide superior UV radiation transmission. Special materials and coatings, such as sapphire
and anti-reflective (AR) coating are also available.
Thermal Products
Silicone foam and fiberglass insulated heaters with
thermostat or PID control are available to heat our
components to temperatures up to 200C.
Typical applications are
downstream from CVD or
metal etch systems, where
unreacted by-products
condense on the inside of
the vacuum lines, valves
and other components.
Our thermal engineers
can provide entire turn-key
heater/control systems
for the process tool manufacturer or fab installation.
Flanges and Weld Fittings

Our flanges are made from ESR or AOD 304 stainless
steel material, which is specially processed to reduce
impurities, grain size and microscopic leak paths.
They are available in all commonly used high and
ultra-high vacuum flange types, including ASA, KF,
ISO, CF and wire seal flanges. We also offer EVAC
flanges with metal seals to convert a high vacuum
KF flange into an ultra-high vacuum connection.
Weld fittings are available with or without flanges.
Fittings without flanges are typically sold to mechanical contractors for use during the fit up phase of new
fab construction. They are available with tumbled,
bead-blasted or electropolished finishes.
All standard components can be modified for your specific application.
GENERAL-LIT 4/02
CUSTOM PRODUCTS & SERVICES

A list of the standard products offered by Nor-Cal Products is on the back cover of this catalog. Almost half of our annual sales are for modified standard and
custom components. This page describes a few of our custom products and services that you may not be aware of.
Traps
Valves
Weldments
We have years of experience designing and building custom foreline traps to protect pumps and
eliminate buildup of condensable by-products in
forelines and exhaust lines. Examples of these
include water-cooled and particle traps for LPCVD,
PECVD, metal CVD, MOCVD and metal etch.
Others are particle traps for crystal growers, liquid
traps for reclamation of photo resist and oil reclamation traps for industrial applications. Often
times our customers see a 200%
increase in preventative
maintenance intervals
after installing one
of these traps.
Our valves are offered with a number of options,

making it easy for our customers to specify
nonstandard O-rings, actuators, fittings and air
solenoids. We also provide customer specified
valves with special port configurations, pumpouts,
materials and other features.
Because we manufacture tees, elbows and other

weld fittings in-house, Nor-Cal can fabricate
exhaust weldments for semiconductor equipment
from a single piece of tubing. Welds and other
manufacturing steps are eliminated, improving
cleanliness and fit while reducing cost. We have
demonstrated as much as 30% savings to our
customers using this technique.
Chambers
We have developed a
reputation at national
laboratories, universities
and UHV equipment
manufacturers for being
the premier vacuum chamber
fabricator. The quality,
appearance and performance
of our chambers are unequaled.
Some of the chambers we make
include load locks, sample
preparation chambers, analysis
chambers, monochrometers, beam line
collimators, reactors and coating chambers. We frequently
supply cylindrical and rectangular chambers with doors, stands
and water jackets. Our engineering staff can design a chamber
from customer sketches or specifications and supply complete
manufacturing drawings for customer approval.
Thermal Products
The experience gained designing heaters
for our standard products has allowed us to
provide thermal products for special applications.
We have drawn from a number of heating technologies (silicon, fiberglass, cartridge, strip, band,
tubular and thick film) in order to provide the most
cost-effective solutions. Examples
include heated traps, internal
heaters for vacuum chambers,
gas delivery systems and
ion pump heaters.
Comprehensive Downstream Solutions

Our experience coupled with a broad product offering allows us to integrate
components, providing comprehensive solutions to semiconductor fabs
and equipment manufacturers. To improve overall system performance
and achieve customer defined goals, a thorough evaluation of the system
is conducted. A cost of ownership model can be provided showing
payback as a result of increased tool utilization and decreased
planned and unplanned maintenance costs.
TM
Foreline traps, thermal products, Intellisys pressure

TM
control valves, Genesis soft start valves and
foreline weldments can be provided as turnkey
foreline modules. Thermal and vacuum
characterization can be performed at Nor-Cal
before the assembly is supplied, leak checked,
blanked off and clean room packaged.
System Integration
On request, Nor-Cal can assemble an entire system
including chamber, frame, pumps, gauges, valves,
manipulators and other components to customer
specifications. Our vacuum technicians can
complete a thorough qualification of system
performance, including time to base pressure
and RGA scan, before the system is back filled
with nitrogen and shipped to the customer.
GENERAL-LIT 4/02
ORDER INFORMATION / WARRANTY

Warranty
Return Policy
Order Information
Products manufactured by Nor-Cal Products, Inc.

(hereinafter referred to as Nor-Cal) are warranted
against defects in material and workmanship for
a period of twelve (12) months from the date of
shipment from Nor-Cal to the buyer. Any modification to the product by the buyer or their agent voids
this warranty. Liability under this warranty is
expressly, limited to replacement or repair (at
Nor-Cals option) of defective parts. Nor-Cal may
at any time discharge its warranty as to any of its
products by refunding the purchase price and taking back the products. This warranty applies only
to parts manufactured, and labor provided, by
Nor-Cal under valid warranty claims received by
Nor-Cal within the applicable warranty period and
shall be subject to the terms and conditions hereof.
Merchandise may be returned at the sole discretion

of Nor-Cal Products, but not more than 60 days
after shipment. A fee may be charged for restocking the item. An RMA number must be obtained
from Nor-Cal before returning any merchandise.
How to place an Order

To place an order, request catalogs or obtain
information about our products and services call
800-824-4166 or 530-842-4457. You may also
send Email requests to [email protected] or send
us a Fax at 530-841-9189.
Expendable items such as tubes, heaters,

sources, bellows, etc., by their nature may not
function for one year; if such items fail to give
reasonable service for a reasonable period of time,
as determined solely by Nor-Cal, they will be
repaired or replaced by Nor-Cal at its election.
All warranty replacement or repair of parts shall
be limited to equipment malfunctions which, in
the sole opinion of Nor-Cal, are due or traceable
to defects in original materials or workmanship.
Malfunctions caused by abuse or neglect of the
equipment are expressly not covered by this
warranty. Nor-Cal expressly disclaims responsibility for any loss or damage caused by the use of
its products other than in accordance with proper
operating and safety procedures. Reasonable care
must be taken by the user to avoid hazards.
In-warranty repaired or replacement parts are
warranted only for the remaining unexpired portion
of the original warranty period applicable to the
parts which have been repaired or replaced.
After expiration of the applicable warranty period,
the buyer shall be charged at Nor-Cals then current
prices for parts and labor plus transportation.
Except as stated herein, Nor-Cal makes no
warranty, expressed or implied (either in fact or
by operation of law), statutory or otherwise: and,
except as stated herein, Nor-Cal shall have no
liability for special or consequential damages
of any kind or from any cause arising out of the
sale, installation, or use of any of its products.
Statements made by any person, including
representatives of Nor-Cal, which are inconsistent
or in conflict with the terms of this warranty shall
not be binding upon Nor-Cal unless reduced to
writing and approved by an officer of Nor-Cal.
Cancellations
Any request by customers for cancellation in total
or part of any purchase order must be approved at
the sole discretion of Nor-Cal Products and shall
be subject to the following conditions:
1. Nor-Cal must receive written notice of Request
for Cancellation, stating the reasons therefore.
2. Customer shall be liable for payment of the
following charges to Nor-Cal in the event
of cancellation.
A) For all charges incurred (including over
head, G&A, and profit) prior to the date that
notice of cancellation is received by Nor-Cal for
all parts peculiar to customers requirements.
Upon payment by customer of these charges
such parts become the property of the customer,
Nor-Cal will store said parts for a reasonable
period of time pending the receipt of customers
instruction for disposition. Such storage is at
the customers risk and may be subject to
storage charges if stored by Nor-Cal for longer
than 30 days from the cancellation date; plus:
B) Charges to convert modified standard
parts for return to Nor-Cals inventory; plus
C) A restocking charge of up to 25% of the
purchase price of the cancelled item.
Minimum Orders
The minimum order that will be processed
for domestic orders is $40.00. The minimum
international order is $100.00.
Terms of Payment
Terms are net 30 days from the date of invoice
once credit has been approved. Otherwise
terms are COD. Visa, Mastercard or
American Express charges are accepted.
Establishing Credit
Contact our sales department to
establish credit with Nor-Cal Products.
Discounts
OEM and quantity discounts are available to
qualified customers.
FOB Point
All shipments are FOB Yreka, California
unless quoted otherwise.
Method of Shipment
Shipments will be UPS Surface, Prepay and Add,
unless quoted otherwise.
Prices and Dimensions
In order to meet the changing needs of our
customers we periodically make design revisions
in our standard product line. As a result, the
dimensions, pricing and specifications in all
catalog sections are subject to change without
notice. International pricing may also vary.
The following registered

trademarks appear in this catalog:
Alumelis a registered trademark of Hoskins Mfg. Co.
Cajon is a registered trademark of The Cajon Co.
Chromel is a registered trademark of Hoskins Mfg. Co.
Conflat is a registered trademark of Varian Associates
Kalrez is a registered trademark of DuPont Dow Elastomers
Kovar is a registered trademark of Westinghouse Electric Corp.
Microdot is a registered trademark of Microdot Corp.
OFHC is a registered trademark of American Metals Climax, Inc.
Omicron is a registered trademark of Omicron Corp. GmbH
Pyrex is a registered trademark of Corning Glass Works
Swagelok is a registered trademark of Crawford Fittings Co.
Teflon is a registered trademark of DuPont Dow Elastomers
VCR is a registered trademark of The Cajon Co.
Viton is a registered trademark of DuPont Dow Elastomers
GENERAL-LIT 4/02
NEW PRODUCTS
Utility Hat
Load Lock Chamber
The utility hat is used for mounting feedthroughs to the chamber when X and Y
movements of the sample will cause
excessive flexing and abrading of utility
lines. The utility hat can be mounted
between the Precision Rotary Feedthrough and the traveling flange on top
of the XYZ to provide X and Y movement
of utility lines with the sample. Additionally, the utility hat can be used on top
of a Differentially Pumped Rotary Seal to
allow 3600 polar rotation of utility lines
along with the sample.
Nor-Cals electropolished load lock

chamber offers a convenient method to
introduce samples into a UHV chamber.
Features include a six inch CF flange for
mounting to a gate valve, a six inch OD
hinged door with a 7056 glass viewport
and three 2.75 inch CF flanged ports for
attaching a linear feedthrough, pump
and other accessories, such as
vacuum gauges.
Thin Film Coating

Instrumentation
Nor-Cals new thin film coating crystal feedthroughs, sensors, monitors and accessories represent those most commonly
used in thermal deposition processes.
Custom feedthroughs are available with a
variety of flanges in all sizes.
Crystal Feedthroughs
Single and Dual Crystal Sensors
Multi-channel Deposition Monitors
Gold and Aluminum Alloy Quartz Crystals
Coaxial Cables, Oscillators, Connectors
and Replacement Parts
Series II Manipulators
Nor-Cal Products is proud to introduce
these new complimentary devices for
sample transfer and manipulation in ultrahigh vacuum systems. Combined with our
vacuum chambers, load locks, gate valves,
all-metal valves, feedthroughs, viewports
and roughing accessories, we can provide
a complete turn-key research system.
Each standard component can readily be
customized to meet our customers specific requirements, such as sample heating
and cooling, special lengths or
stepper motor drivers.
These components come with our strong

assurance of their quality a FIVE YEAR
GUARANTEE against defects in materials
and workmanship.
XYZ Precision Manipulator

Magnetic Linear/Rotary Feedthroughs
Rotary Motion Feedthroughs
Differentially Pumped Rotary Seals
Sample Transfer System
Alignment Gimbals
Rotary Wobble Sticks
Prices subject to change without notice. - International product pricing will vary.
CHAMBER-LIT 4/02
CUSTOM CHAMBERS & WELDMENTS

General Information
Engineering Services
Nor-Cal Products has earned a reputation

as a world-class manufacturer of high
and ultra-high vacuum chambers. The
quality, appearance and performance of
our chambers are unequaled. We supply
one-off chambers designed from customer specifications for university or
national laboratory research projects, as
well as production quantity chambers that
are built-to-print for equipment manufacturers. Thin-film deposition and
compound semiconductor processing are common applications
for our high-vacuum,
o-ring sealed chambers
that commonly
operate at pressures
down to 1x10-9 Torr.
Vacuum fired 316L
material and metal seals
are recommended for ultrahigh vacuum surface science
chambers that operate at
pressures in the 1x10-11
Torr range. Nor-Cal can
provide cylindrical and
rectangular chambers up to about five foot
square with doors, stands, water jackets
and Mumetal shields. (Consult the factory
for exact capabilities.) We offer a complete line of vacuum chamber accessories
that include load locks, sample transfer
and positioning devices, liquid and
electrical feedthroughs, viewports
and roughing components.
As an indication of commitment to quality and

customer satisfaction, Nor-Cals engineering
staff thoroughly reviews each custom vacuum
component for manufacturability before the
production process begins. All customers
benefit from the combined experience of our
engineers, whose input during the design and
production phase often results in cost savings
and a superior product. Questions regarding
design, specifications and testing are directed
back to the customer for final approval.
CAD Design
Our engineers design from customer specifications, sketches

or drawings and oversee custom component production using
existing tooling and facilities. For our customers who do not
have drafting personnel available and require a complex
assembly, we can provide complete CAD drawings
for approval upon receipt of order. Nor-Cal engineering and R&D departments use the latest versions
of AutoCAD and Autodesk Inventor software.
You may email drawings direct to our engineering department
at [email protected]. Acceptable exchange file formats are DXF,
IGES, SAT and STEP versions. Direct formats are DWG, IDW,
IPT and IAM. You may also download drawings of our most
commonly used standard components from our web site.
Ultra High Vacuum
Research System
Manufacturing
Weldments
GTAW Fusion Welding
Because we manufacture tees, elbows and

other weld fittings in-house, Nor-Cal can also
fabricate exhaust weldments and other
special assemblies for semiconductor
equipment from a single piece of tubing.
Welds and other manufacturing
steps are eliminated, improving
cleanliness and fit while reducing
cost. We have demonstrated as
much as 30% savings to
our customers using
this technique.
Machining procedures are consistent with

good UHV practices. Machine coolant is
sulfur-free to reduce outgassing. All NorCal components are designed to minimize
entrapments that cause virtual leaks under
vacuum. State-of-the-art CNC machining
equipment is available to produce parts
with consistently high quality.
GTAW fusion welding
is used exclusively for a
vacuum-tight metal bond.
Purging with an inert gas
reduces or eliminates
oxygen entrainment and
carbide precipitation that
cause outgassing.
Whenever possible welds
are made on the inside or
are full penetration to
eliminate entrapments
and virtual leaks.
Chamber Fabrication
CHAMBER-LIT 4/02
CUSTOM CHAMBERS
Materials
Nor-Cal Products uses only the highest
grade materials for the manufacturing of
vacuum chambers. Vapor pressure,
corrosion resistance and permeability are
important considerations taken into account
during the material selection process. We
start with select grade 304 stainless steel
tubing, spheres or roll-ups to fabricate the
vacuum vessel. If required 304L, 316 or
316L can be supplied. Normally our standard material is in the low carbon range for
304. Flanges and baseplates are made from
304 that has been specially treated to remove impurities inherent in 300 series
steels. Flanges 4.50 inches OD and smaller
are made from 304 electroslag remelt (ESR)
bar stock. ESR is a refining process that
produces stainless steel with higher purity,
fewer inclusions and more uniform grain
structure to eliminate microscopic leak
paths. Larger flanges are made from Argon
Oxygen Decarburization (AOD) 304 stainless
steel. This material is certified to meet
ASTM-240 and has less than .01% sulfur to
prevent sulfur stringers. Grain size is 3 to 6
per ASTM E-112. Maximum inclusion size is
2.5 per ASTM E-45. As specials 304L and
316L material can be supplied
in AOD or
roll-forged
rings.
UHV Research Chamber
Chamber Fabrication
GTAW Fusion Welding
Manufacturing
Machining procedures are consistent with good UHV practices. Machine
coolant is sulfur-free to reduce outgassing. All Nor-Cal components are
designed to minimize entrapments that cause virtual leaks under
vacuum. State-of-the-art CNC machining equipment is available to
produce parts with consistently high quality.
Ultra High Vacuum

Research System
GTAW fusion welding is used exclusively for a vacuum-tight metal bond.

Purging with an inert gas reduces or eliminates oxygen entrainment and
carbide precipitation that cause outgassing. Whenever possible welds
are made on the inside or are full penetration to eliminate entrapments
and virtual leaks.
CHAMBER-LIT 4/02
CUSTOM CHAMBERS
Cleaning
All stainless steel parts are passivated in
a light acid solution to remove weld scale
and oxide. A biodegradable detergent is
used to remove machine lubricants before
the parts are washed and rinsed with
deionized water in an ultrasonic tank.
Additionally, parts receive a final methanol
wipe. Nor-Cal offers bead blasting,
chem cleaning and electropolishing
of vacuum chambers in-house.
Glass shot cleans, hones, polishes and
peens while removing scale. Some customers request bead blast on the exterior of the
chamber with electropolish on the interior.
Electropolishing is by far the most desirable
cleaning process for stainless steel vacuum
chambers. It is an electrochemical process
that benefits the finished part in a number of
ways simultaneously. Deburring, passivation and stress relieving are achieved while
the machine produced surface roughness is
eroded. Electropolishing attacks the microscopic peaks of the surface more rapidly
than the valleys, thereby maintaining critical dimensions while improving surface
finishes. Normally .0003 to .0004 inches
would be removed to lower the microfinish
from 32 to 8 RMS. Electropolishing results
in a 90% friction decrease over a similar
microfinish achieved mechanically, while
surface area is reduced by a similar amount.
This is most important for vacuum chambers because it produces faster pumpdown
and higher conductance. In addition to the
improved mechanical properties of the surface, iron is removed electrochemically.
This leaves the surface rich in chromium and
nickel which have extremely low vapor pressures. The result is the lowest outgassing
rates possible from stainless steel.
Chem Clean Line
Chem cleaning is available for medium size

chambers and can be used as a final step
after electropolish. The chamber is immersed in a series of controlled chemical
baths before deionized water rinse and filtered hot air dry. Chem cleaning results in
the cleanest surface possible for ultra high
vacuum components.
Electropolish
CHAMBER-LIT 4/02
CUSTOM CHAMBERS
System Integration
On request Nor-Cal can assemble an entire
system including chamber, frame, pumps,
gauges, valves, manipulators and other
components to customer specifications.
After completion our vacuum technicians
can complete a thorough qualification of
system performance, including time to
base pressure and RGA scan, before the
system is back filled with nitrogen and
shipped to the customer.
Inspection
Nor-Cal uses the most up-to-date equipment and procedures for the inspection
of vacuum chambers. Every weld is leak
checked with a helium mass spectrometer
to insure leak rates of 10-9 std. cc./sec.
or less. Mechanical inspection is accomplished with a coordinate measuring
machine (CMM). We can provide our
customers with CMM inspection reports
of their chambers on request.
Qualification of UHV System
Our chamber qualification test bench is

available to customers who request
residual gas analyzer (RGA) scans of their
chamber after a 24 hour vacuum bake.
The test bench contains vacuum pumps,
gauges, RGA, quartz heaters, nitrogen
back fill and a leak detector. Once water
and other background are eliminated by
the 150C bakeout we can provide the
customer with customized scans to detect
the slightest contamination in the chamber.
Whatever the sensitivity of our customers
application, we can guarantee that contaminants will be within acceptable limits.
Chamber
Qualification
Test Bench
Process chamber
mechanical inspection
with Coordinate
Measuring Machine
(CMM)
CHAMBER-LIT 4/02
CUSTOM CHAMBERS
Specifying Ports
Specifications
When specifying chamber ports, first dimension the main chamber body.
Secondly, dimension levels with one or more targets from one end of the chamber.
This provides the machinist and inspector with a common reference point for all
levels. Once targets are established either on the centerline of the chamber or
referenced from the centerline at each level, ports may be specified.
Cylindrical chamber bodies and ports

can be made from tubing if they are less
than 12 inches OD. Standard tube sizes
from .75 to 12 inches OD, their respective
wall thickness and per foot price are listed
in our Weld Fittings catalog. The sizes
shown are stocked by Nor-Cal, so they are
readily available for use in custom vacuum
chambers. If, however, a portion of a
chamber needs to be a diameter or
wall thickness other than a standard tube,
a roll-up may be ordered. Roll-ups are
cylinders formed to our specifications.
Hemispheres may also be ordered to meet
customers requirements.
Each port requires the following information:

1. Distance from the target
to the face of the flange.
2. The polar angle, if any, between
the vertical axis of the chamber
and the centerline of the port.
3. The azimuthal angle.
Establish 00 on one
of the axes when
viewing the chamber
along its centerline.
Indicate the clockwise
degree of angle from
00 to the centerline
of the port.
4. The tube OD.
HEIGHT
5. The flange type
and size. Be sure
L2
to specify rotatable
or non-rotatable,
and if tapped flanges or
blank-offs are required.
P = Polar Angle
Bolt Pattern Orientation

Our components are manufactured
with the primary axis straddling
adjacent bolt holes on the
mounting flange (American
Standard). Most components
can be furnished with the
axis passing through a bolt
hole axis (European
Standard) on request.
LENGTH
L1
A = Azimuthal Angle
Standard tolerances for machined dimensions are .005 inch, although tolerances
of .002 inch are commonly held on critical flange dimensions. Standard tolerance
for any welded dimension, such as a port
length or chamber height, is .020 inch.
Closer tolerances on welded dimensions
necessitate secondary machining of critical
surfaces. Standard tolerance for polar and
azimuthal angles is 1/2.
L = Level
European
American
A
A/2
Primary Axis
CHAMBER-LIT 4/02
SURFACE ANALYSIS CHAMBERS

Specifications
Nor-Cal has designed a standard vacuum

chamber which incorporates the features
required by many of our surface science
customers at an affordable price. The
chamber's geometry offers maximum
flexibility, making it suitable for many types
of studies and experiments. Seventeen
ports can accommodate viewports, doors,
feedthroughs, manipulators or analytical
instruments. This design can be used
as a platform and modified to meet your
own specific requirements.
SIDE VIEW
304 stainless steel construction

Electropolished inside and out
Bakeable to 4500C.
Leak checked to 10-9 standard cc/sec.
Seventeen CF flanged accessory ports
Oversized 1.75 inch tubing on all
2.75 inch CF ports
14.62 inch female wire seal or
14.00 inch CF flanged pumping port
15
16
TOP VIEW
14
12
13
7
14
18
A
4
11
15.50
11
13
10
10.00
8.00
6.00
18
17
Order Information
Model
Number
SAC-12WS
SAC-12CF
Pumping
Port Flange
12
Surface Analysis Chambers

Price
14.62 FWS
14.00 CF
Dimensions in inches
Port
Number
Flange
Type
Port
OD
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
6.00 CF
8.00 CF
2.75 CF
8.00 CF
6.00 CF
4.50 CF
2.75 CF
2.75 CF
4.50 CF
2.75 CF
8.00 CF
2.75 CF
2.75 CF
2.75 CF
4.50 CF
2.75 CF
14.62 FWS or 14.00 CF
2.75 CF
4.00
6.00
1.75
6.00
4.00
2.50
1.75
1.75
2.50
1.75
6.00
1.75
1.75
1.75
2.50
1.75
12.00
1.75
Length
Flange Face to Target
7.50
7.50
7.25
8.50
7.25
8.50
8.25
6.50
9.50
7.25
8.50
9.00
6.50
9.00
10.00
7.75
8.00
7.25
Target
X
X
X
A
A
A
A
A
A
CL
C
C
C
C
C
C
X
CL
CHAMBER-LIT 4/02
STAINLESS STEEL BELL JARS

Nor-Cal offers stainless steel baseplates,
feedthrough collars and bell jars as standard items. Used in conjunction with our
other chamber accessories, an entire bell
jar system can be ordered without the
expense of design or custom fabrication.
Any of the bell jar components shown may
be altered to meet the customers specific
requirements. Our sales staff can quickly
estimate the additional cost or savings.
Baseplates come in a variety of sizes with

smooth faced ASA flanges to bolt directly
to the vacuum pump. They may also be
furnished with other types and sizes of
flanges. If feedthroughs are required, a
feedthrough collar with varying numbers
of 2.75 inch CF flanges may be inserted
between the baseplate and bell jar. NW
flanges can also be provided. A dovetail
O-ring groove on the base of the collar
effects a seal with the baseplate when the

Viton O-ring provided is compressed.
The feedthrough collar can be used with a
glass bell jar and L-gasket or our stainless
steel bell jar with 7056 glass viewport.
Like the collar, the bell jar is provided with
a Viton O-ring and has a dovetail groove
in its base. Bead-blasted finish is standard. Water cooled jackets are available
upon request.
Stainless Steel Bell Jars with O-Ring Seal

Model
Number
Lifting Lug
Standard
Nominal Size
A
BJ-1200
BJ-1200-EP*
BJ-1800
BJ-1800-EP*
BJ-2400
BJ-2400-EP*
VP-400
12.00
12.00
18.00
18.00
24.00
24.00
14.00
14.00
20.00
20.00
26.00
26.00
12.00
12.00
30.00
30.00
30.00
30.00
6.00
6.00
12.00
12.00
12.00
12.00
One Viton O-Ring is included with all of the above.

*Electropolished finish.
Price
Feedthrough Collars with O-Ring Seal

Model
Number
Number of
2.75 CF Ports
12.00
12.00
18.00
18.00
24.00
24.00
6
6
8
8
12
12
14.00
14.00
20.00
20.00
26.00
26.00
FCO-1200-6
FCO-1200-6-EP*
FCO-1800-8
FCO-1800-8-EP*
FCO-2400-12
FCO-2400-12-EP*
1.5
Nominal Size
A
A
3.0
6.0
One Viton O-Ring is included with all of the above.

Price
Bell Jar Baseplates

B
Model
Number
4.0
ASA
C
BP-1200
BP-1200-EP*
BP-1800
BP-1800-EP*
BP-2400
BP-2400-EP*
Nominal
Size
ASA
Flange
12.00
12.00
18.00
18.00
24.00
24.00
ASA-9-400N
ASA-9-400N
ASA-11-800N
ASA-11-800N
ASA-11-800N
ASA-11-800N
14.00
14.00
20.00
20.00
26.00
26.00
3.83
3.83
7.76
7.76
7.76
7.76
Price
Replacement Viton O-Rings

Model Number
Price
1200-OR
1800-OR
2400-OR
CHAMBER-LIT 4/02
SAMPLE TRANSFER & MANIPULATION

Nor-Cal Products offers the researcher complimentary devices
for sample transfer and positioning in ultra-high vacuum systems.
Combined with our vacuum chambers, load locks, gate valves,
all-metal valves, feedthroughs, viewports and roughing accessories,
we can provide a complete turn-key research system. Each standard
component can readily be customized to meet our customers
specific requirements, such as sample heating and cooling, special
lengths or stepper motor drivers. All of Nor-Cals sample transfer
and manipulation devices are made from the highest quality materials and lubricants to withstand repeated UHV bakeouts. Our Series II
Manipulators come with our strong assurance of their quality
a materials and workmanship FIVE YEAR GUARANTEE.
Terminology
MANIPULATOR (X,Y,Z)
POLAR ROTATION
A manipulator is a 3-axis (X,Y,Z) positioning
The polar axis is the
device. For most applications, the instrument
same as the Z axis. Rotation about the
hardware is mounted outside the vacuum
polar axis is commonly achieved by mounting
chamber, with a welded bellows providing a
a rotary feedthrough at the center of the travelflexible vacuum curtain. The X axis passes in
ing flange of a manipulator or translator.
front of the vertical, mechanical structure, or
This degree of freedom can also be achieved
backframe, with the Y axis moving to and
with a differentially pumped
away from the backframe. The Z axis is perrotary seal.
pendicular to the X and Y axes and moves up
and down directly against the vacuum presZ Axis
sure differential. The polar axis is the same as
the Z axis.
Tilt Motion
The limit of X and Y travel is normally a
circular pattern. The range is indicated
as a vector sum. This means a .50 inch
range of X and Y allows the polar axis
Traveling
to be moved anywhere inside a 1.00 inch
Flange
diameter circle. The sum of the X and Y
vectors is limited to .50 inch. Square
pattern XY stages are available as
options on some models.
TRANSLATOR (Z)
A translator is a single axis
Base Flange
positioning device, utilizing
(Underneath)
a bellows as a vacuum seal.
They are also referred to as a Azimuthal Rotation
Z only stage. This axis is
normally perpendicular to the
Azimuthal
chamber. This causes the
Axis
Z axis to work directly against the
force from the pressure differential.
Polar Rotation
XY STAGE
Polar Axis
The XY stage provides the X and Y axes
only. No Z motion is available.
X Axis
AZIMUTHAL AXIS
The azimuthal axis is perpendicular
to the polar axis. Sample azimuthal
rotation refers to rotation of the sample
about an axis normal to the sample face
and perpendicular to the polar axis.
FLIP MOTION
Flip motion is the changing of an axis
normal to the sample face from parallel
(or coaxial) to the polar axis to coaxial
with the azimuthal axis. The range of
this change of axis may be 90, 180
or full 360.
TILT MOTION
Tilt refers to changing the polar axis
with respect to the X, Y and Z axes.
This is usually done at the traveling flange
of a 3-axis manipulator
Y
or other exterior mounting stage.
Axis
Tilt range is often limited by the
bellows ID and the OD of the
probe passing through the bellows.
The maximum angle practical is about 7.
When used in this manner, translation in X,
Y and (slightly) Z will occur with adjustment of the tilt angle. Tilt stages are
available in single or dual axis units.
Flip
Motion
CHAMBER-LIT 4/02

Load Lock
Model Number
4.00" OD
Price
LL-600-ADV-150-3
3.25"
6.00" door
with Viewport
1.50" OD
3.50"
2.75"
5.25"
Nor-Cals load lock chambers

are provided with a six inch
CF flange for mounting to
the gate valve, a six inch
Add-A-Door with 7056
glass viewport, a
2.75 inch CF flange
for attachment
of the linear
feedthrough,
and two 2.75
inch CF flanges
for pumping.
Standard finish is
electropolished.
Custom sizes can be
supplied upon request.
8.00"
Sample Transfer System

Model
Number
Sample
OD
Minimum
Port OD
STS-050
STS-100
STS-200
STS-300
0.50
1.00
2.00
3.00
1.50
1.50
2.50
4.00
Sample
mount
Polar rotation
Polar axis
Price
Ceramics for electrical or

thermal isolation
Flip
Locking
Azimuthal rotation fingers
3 each
Transfer axis
Sample
dock
Dock
locking
fingers
Nor-Cals sample transfer system allows

sample plate transfer from a rotary/linear
feedthrough to the sample dock mounted
inside the chamber. Systems are available
for sample sizes ranging from 0.5 inches
to 3.0 inches. Each system includes a
dock assembly custom fitted to place
the sample on target in your particular
chamber, a transfer fork assembly which
mounts to a rotary/linear device and two
stainless steel sample plates.
Linear-rotary shaft
Clamp
Transfer fork
Sample
platen
Sample
clips
Finger location
during transfer
Finger location in
lock position
Sample
STS Sample Transfer Systems are

manufactured and protected under the
following patent: 5,705,128.
CHAMBER-LIT 4/02

This hinged, Viton sealed
door is quickly bolted to an
existing Conflat flanged
chamber port. The door is
opened easily by turning a
knurled knob. These doors
are available for 2.75 to 10.00
inch OD flanges with a solid
metal door (Model AD). They
are also available with a 7056
glass viewport (ADV) or a
quartz viewport (ADVQ) for
4.5 to 10 inch OD flanges.
Existing
Port
Add-A-Door
Add-A-Doors
Model Number
Flange Type
AD-275
AD-450
AD-600
AD-800
AD-1000
2.75 CF
4.50 CF
6.00 CF
8.00 CF
10.00 CF
1.380
2.435
3.917
5.875
7.875
.500
.687
.781
.875
.968
Price
Open Diameter
D
Add-A-Doors with Viewport - 7056 Glass

Model Number
Flange Type
ADV-450
ADV-600
ADV-800
ADV-1000
4.50 CF
6.00 CF
8.00 CF
10.00 CF
D
2.435
3.917
5.875
7.875
1.49
2.65
3.88
5.60
.69
1.00
1.20
1.30
Price
View
Diameter
V
B
Open Diameter
D
Add-A-Doors with Viewport - Fused Silica

Model Number
Flange Type
ADVQ-450
ADVQ-600
ADVQ-800
ADVQ-1000
4.50 CF
6.00 CF
8.00 CF
10.00 CF
D
2.435
3.917
5.875
7.875
1.40
2.69
3.88
5.38
.74
1.02
1.21
1.28
Price
View
Diameter
V
B
Open Diameter
D
100
Fused Quartz
90
80
% Transmission
Viewport
Optical
Transmission
Curves
70
60
50
40
30
20
Fused Silica
7056 Glass
10
0
.10
.20
.30
.40
.50 .60
.80
1.0
2.0
3.0
4.0
5.0 6.0
8.0 10.0
Wavelength in Microns
CHAMBER-LIT 4/02

Magnetic Linear/Rotary Feedthrough
8.04" + stroke
11.04" + stroke (-LT)
6.87" (-LT)
Model Number
3.5"
MLR-275-050-24
24 inch stroke
MLR-275-050-36
36 inch stroke
Light-touch Magnet Assembly Option
(Add -LT to model number)
.5"
3.47"
Magnet assembly
2.75" diameter
mounting flange
Adjustable
linear limits
MLR Linear Rotary Feedthroughs are manufactured

and protected under the following patent: 5,514,925
Price
Add
Nor-Cals magnetic linear/rotary feedthroughs utilize

polished ID stainless tubing and eight stainless steel bearings
for smooth actuation and a trouble-free life. Increase linear force
and sensitivity with heavy-duty linear driver magnets
and full-bearing support by adding
the light-touch option to the
basic model.
SPECIFICATIONS:
Description
OPTIONS:
Rare Earth magnets

24 or 36 inch linear travel
3600 continuous rotation
2.75 inch CF mounting flange
Bakeout temperature 2000C maximum
with magnets removed
Torque is 150 oz. inch minimum

Linear force is 4 lbs. standard
Adjustable stops
0.5 inch OD stainless steel tubular probe
00 to 3600 rotary indication is standard
Light-touch magnet assembly

utilizes dynamically loaded
fullbearing support to increase
tactile feedback and heavy-duty
magnets to increase linear
force to 20 lbs.
Alignment Gimbals
Model Number
Price
4.50"
7.20" Typ.
6.60" Typ.
AG-275-150
Micrometer Option
(add -M1 or -M2 to model number)
2.75 Flange detail tapped
2.63"
5.50
2.75 Flange tapped
SPECIFICATIONS:
Add/each
OPTIONS:
1.5 inch ID bellows

Micrometer adjustment provides
repeatability of alignment (1 or 2 axes)
2.75 inch tapped CF flanges
Knob adjust on two axes
50 range
Roller bearing pivots
suitable for horizontal
mounting of payloads
Alignment gimbals are mounted

between the linear feedthrough flange
and the load lock to compensate for
droop in long linear feedthrough probes.
(Shown here with micrometer option -M2)
CHAMBER-LIT 4/02

XYZ Precision Manipulator
Model Number
4.13"
.0001" divisions
Price
7.52" .50"
PMXYZ-600-1.87-2
Support Tube Option
Add
(Add -ST.25 or -ST.38 to model number)
SPECIFICATIONS
1.87 inch ID bellows
.50 inch X and Y travel, circular
pattern, pre-loaded micrometer
stage coupling, .0001 inch micrometer
divisions (with large micrometers)
2 inch Z travel, Acme drive,
.10 inch /turn
2 inch diameter drive knob
Dual .75 inch OD hardened
stainless steel Z guide rods
6.00 inch CF base flange,
clearance holes, with 5 mini flanges
2.75 inch CF traveling flange, tapped
Bakeout temperature,
2000C maximum fully assembled
Hardened X and Y cross roller guides
Traveling flange
2.75" diameter
tapped
Z adjust
Aluminum stage construction

Operates in any orientation
Only UHV materials exposed to vacuum
10.23"
8.76" to 10.76"
7.52" .50"
Base flange
6" diameter with
5 mini ports
OPTIONS
Support tube with .75 inch OD and end
bearing support increases rigidity on
longer .25 and .38 inch OD rotary shafts
3/8 Precision Rotary Motion Feedthrough

4.7"
Model Number
9.0" to 24"
Price
PRM-275-038-24
Custom Shaft Length Option
(Specify length in inches when ordering)
3600
3.13"
.375" O.D. shaft
SPECIFICATIONS
OPTIONS
2.75 inch conflat mounting flange

0.10 resolution
(10 graduations on dial)
150 oz. inch maximum torque
Position lock
.375 inch OD shaft, 24.00 inch
long from flange face to tip
Custom
shaft lengths
available from
9 to 23 inches
Drum dial
.75"
Position lock
Typically used for polar rotation

on top of an XYZ manipulator
1/4 Precision Rotary Motion Feedthroughs

Model Number
PRM-133
PRM-275
Flange
.25"
1.33 CF
2.75 CF
1.75"
SPECIFICATIONS
Price
Bakeable to 200 C
750 RPM maximum
50 oz. in. maximum torque
3600 graduations on knob
Locking screw
3.27"
1.33"
or 2.75"
3.26"
8-32 tapped hole for attachment
CHAMBER-LIT 4/02

Utility Hat
Model Number
Price
UH-175-2-133-4
450
5.00"
Utility feedthroughs can be mounted to the

base flange of the XYZ Manipulator or to a
utility hat. The utility hat is the preferred
method when x and y movements of the
sample will cause excessive flexing and
abrading of utility lines in vacuum. The
utility hat can be mounted between the
Precision Rotary Feedthrough and the
traveling flange on top of the XYZ to provide X and Y movement of utility lines with
the sample. Additionally, the utility hat can
be used on top of a Differentially Pumped
Rotary Seal to allow 3600 polar rotation of
utility lines along with the sample.
4.40"
450
2.2
Typical
.75 OD
Four Plcs
The standard utility hat comes with a 1.75 inch tube,

two 2.75 inch CF flanges and four 1.33 inch CF ports
for mounting feedthroughs. Standard finish is
electropolished. Custom sizes can be supplied
upon request.
Utility hat shown

with differentially pumped rotary seal
Differentially Pumped Rotary Seals

Model
Number
RS-150
RS-150-W
RS-250
RS-250-W
RS-400
RS-400-W
ID
1.53
1.53
2.53
2.53
4.03
4.03
OD
2.75
2.75
4.50
4.50
6.00
6.00
A
4.50
5.13
5.75
6.38
7.75
8.50
B
2.99
3.38
3.64
4.20
4.57
8.25
C
F
1st Stage
Roughing
Port
D
3.18
4.95
3.58
6.11
4.34
9.28
E
2.75
2.75
4.50
4.50
6.02
6.02
F
.49
.49
.49
.49
.37
.37
G
.13
.37
.03
.41
.06
.54
H
600
60 0
45 0
45 0
45 0
45 0
Payload*
Vertical Horizontal
54 lbs.
30 lbs.
54 lbs.
30 lbs.
90 lbs.
38 lbs.
90 lbs.
38 lbs.
144 lbs.
66 lbs.
144 lbs.
66 lbs.
Price
* Standard maximum payloads with center of gravity within 10% of the RS ID from the RS centerline
when vertical, within one ID of the RS from the RS flange face when horizontal,
and certain other size restrictions are met - consult factory.
SPECIFICATIONS
D
Vernier
Scale
Graduated
Dial
2nd Stage
High Vacuum
Rotating Flange
Port
Fixed
Flange
C
1.00
1.00
1.36
1.36
1.68
1.68
OPTIONS
Manually operated worm drive (-W).

Rotational and stationary
flanges, tapped
Digital counters, stepper motors and
Two stage differentially pumped. other sizes available on request
Base pressures 10-11 Torr range
3600 vernier scale, standard
T wrench for adjustment, standard
B
Graduated Dial
CHAMBER-LIT 4/02

Linear Motion Thimbles
B
Model
Number
Minimum - Maximum
B
ID
LMT-133
LMT-275
1.75
3.25
1.800 - 2.800
3.060 - 5.060
.54
1.43
Price
SPECIFICATIONS
Bakeable to 3500C
Available with 1.33 and
2.75 inch CF flanges
3600 graduations laser
engraved on the barrel
Heavy-Duty Push-Pull
Linear Motion Feedthroughs
Model
Number
Minimum - Maximum
A
HLM-275-2
HLM-275-3
HLM-275-4
1.1 - 3.1
1.4 - 4.4
1.7 - 5.7
A
2.75" CF Flange
Price
1.30"
6.75
8.07
9.38
SPECIFICATIONS
Four
10-32
holes
Bakeable to 2500C.
20 lbs. maximum lateral load
Welded bellows seal
Position lock
NW Bulkhead Clamps
Model
Number
NW-16-BCP
NW-25-BCP
NW-40-BCP
NW-50-BCP
Number of
Screws
2.00
2.37
2.94
3.75
1.50
1.89
2.44
3.25
.361
.387
.366
.404
6
6
6
8
Bulkhead clamps provide a simple means of

fastening an NW flange to a baseplate. Each
aluminum clamp is sold with stainless steel socket
head cap screws and washers for attachment.
Leave .075 inch minimum between the bottom of
the tapped hole and the inside of the chamber wall.
Through Hole
Diameter
.90
1.26
1.84
2.35
Price
C
A
Aluminum
10-32 x 5/8" Screws
Bulkhead Clamps
NW Flange
Bulkhead or Baseplate
NW Centering Ring
CHAMBER-LIT 4/02

Wobble Sticks
Model
Number
C
WBL-133
WBL-275
WBL-NW-16
WBL-NW-40
Flange
Flex
Angle
1.33 CF
2.75 CF
NW-16
NW-40
22
300
220
300
0
Min.-Max.
C
6.00
10.00
6.00
10.00
.12
.25
.12
.25
3.00- 3.50
3.75 - 6.00
3.00 - 3.50
3.75 - 6.00
Price
SPECIFICATIONS
Bakeable to 4500C
Available with CF
and NW flanges
Welded bellows
Mating flange
may restrict
flex angle
Simple means
of positioning
samples in vacuum
Rotary Wobble Sticks

Push knob for pincer release
(pincer option)
1.50" minimum
Rotary position lock
Model Number
Clearance required for

full 44 working angle
Price
RWS-275-4
RWS-275-8
Single Jaw Pincer Option
(Add -PS to model number)
2.63"
1.16"
44
Linear limit adjust
Linear position lock
Chamber flange
Sample
hook
35
.85"
Sample Plate
Pincer Option
Inexpensive alternative
for sample introduction
and manipulation
SPECIFICATIONS
2.75 inch conflat mounting flange

220 angular range
4.00 or 8.00 inch Z stroke
3600 probe rotation via
rotary motion feedthrough
Independent bellows for Z and theta
Rotational and Z travel position lock
Tip prefitted with hook
OPTIONS
Single-jaw pincer
Double-jaw Omicron
and other pincers upon request
CHAMBER-LIT 4/02
VIEWPORTS
Viewport Optical Transmission Curves
Fused Silica
Fused Quartz
7056 Glass
100
90
80
% Transmission
Nor-Cal Products offers a complete line

of viewports for vacuum chambers with
NW, ISO and CF flanges. CF flanged
viewports are available with fully annealed
7056 glass or fused quartz. Special materials and coatings, such as sapphire and
anti-reflective (AR) coating, are available
on request. Glass provides a large distortion free viewing area at low cost. Quartz
provides superior ultraviolet radiation
transmission and resistance to thermal
shock. Glass CF flanged viewports can
withstand repeated bakeout cycles to
4000C and vacuum pressures to 10-11 Torr.
Quartz CF flanged viewports should not be
baked above 2000C. NW and ISO flanged
viewports can withstand 2000C bakeouts
and pressures to 10-9 Torr.
70
60
50
40
30
20
10
0
.10
.20
.30
.40
.50 .60
.80
1.0
2.0
3.0
4.0
5.0 6.0
8.0 10.0
Viewport Weld Stubs - 7056 Glass

Model
Number
Flange
OD
VP-250
VP-400
VP-600
4.47
5.97
7.97
2.88
2.88
2.88
2.50
4.00
6.00
View Diameter
V
Price
2.37
3.83
5.83
Weld stub viewports are provided with a

tube for welding onto an existing chamber.
They are available with Viton O-ring sealed
7056 glass or fused quartz. Maximum
bakeout temperature is 2000C.
VP and VPQ
Viewport Weld Stubs - Fused Quartz

Model
Number
Flange
OD
VPQ-250
VPQ-400
VPQ-600
4.47
5.97
7.97
2.88
2.88
2.88
2.50
4.00
6.00
View Diameter
V
Price
2.37
3.83
5.83
CHAMBER-LIT 4/02
VIEWPORTS
Nor-Cals zero length view ports have an innovative design which

places the viewing glass inside the centering ring. The clear, polished
quartz can be removed for cleaning or replacement. Zero length view
ports are available for NW-40, NW-50 or other ISO-KF compatible
flanges of the same size. Also available are 7056 glass viewports in a
one-piece assembly. This viewport replaces a blank off cap and uses
a standard NW centering ring assembly and clamp for sealing.
NW Zero Length Viewports - Fused Quartz

NW ZERO LENGTH VIEWPORTS
NW Clamp
NW Viewport
Model
Number
Flange
Type
V
View Diameter
ZV-NW-40A
ZV-NW-50A
ZV-NW-40
ZV-NW-50
NW-40
NW-50
NW-40
NW-50
1.26
1.63
1.26
1.63
Price
NW Butt Weld Flange
ZV-NW-40A and ZV-NW-50A
NW Viewports-7056 Glass
Model
Number
Flange
Type
View Diameter
V
VP-NW-16
VP-NW-25
VP-NW-40
VP-NW-50
NW-16
NW-25
NW-40
NW-50
.385
.385
.554
.554
.62
.62
1.49
1.49
Price
Outer Flange
Bearing Washer
Quartz Glass
Inner O-ring
Outer O-ring
VP-NW-40 and 50
VP-NW-16 and 25
Retainer Ring
ZV-NW-40 and ZV-NW-50
CHAMBER-LIT 4/02
VIEWPORTS
CF Zero Length Viewports - 7056 Glass
Model
Number
Flange
OD
View Diameter
V
ZV-075
ZV-100
ZV-150
ZV-200
ZV-250
ZV-300
ZV-400
ZV-500
ZV-600
ZV-800
1.33
2.12
2.75
3.38
4.50
4.62
6.00
6.75
8.00
10.00
.62
.62
1.49
1.49
2.66
2.66
3.97
3.97
5.60
5.60
Price
CF Zero Length Viewports - Fused Silica

Model
Number
Flange
OD
View Diameter
V
ZVQ-150
ZVQ-200
ZVQ-250
ZVQ-300
ZVQ-400
ZVQ-500
ZVQ-600
ZVQ-800
2.75
3.38
4.50
4.62
6.00
6.75
8.00
10.00
1.40
1.40
2.69
2.69
3.88
3.88
5.37
7.78
Price
V
ISO Viewports - 7056 Glass

Model
Number
ZV-ISO-63-OF
ZV-ISO-80-OF
ZV-ISO-100-OF
ZV-ISO-160-OF
ZV-ISO-200-OF
Flange
OD
View Diameter
V
ISO-63-OF
ISO-80-OF
ISO-100-OF
ISO-160-OF
ISO-200-OF
1.49
1.49
2.66
3.97
5.60
Price
CHAMBER-LIT 4/02
ELECTRICAL FEEDTHROUGHS
Nor-Cals extensive line of electrical

feedthroughs are manufactured from
ultra-high vacuum grade materials such
as high alumina ceramic insulators, OFHC
copper and nickel conductors, and 304
stainless steel flanges. These robust
ceramic to metal feedthroughs have
electrical ratings for operation with one
side in dry atmosphere while the opposite
end is in a stable vacuum. They are used in
ultra high vacuum systems with CF flanges
or high vacuum systems with NW flanges.
CF feedthroughs can be baked to 450 0C
and NWs to 2040C with maximum system
pressure of 1 x 10-4 Torr. Our product line
consists of the most commonly required
feedthroughs for general vacuum applications. Customs designs or modified
standards can readily be supplied.
Thermocouple Feedthroughs
Model Number
Flange
TC-NW-16-1
TC-NW-25-1
TC-NW-40-1
TC-NW-50-1
TC-075-1
TC-150-1
NW-16
NW-25
NW-40
NW-50
1.33 CF
2.75 CF
2.4
2.0
1.9
1.9
2.4
1.9
3.0
3.4
3.5
3.5
3.0
3.5
4.0
4.4
4.5
4.5
4.0
4.5
Price
Thermocouple feedthroughs carry

instrumentation signals while providing
electrical isolation and hermetic sealing.
They are leak free in high and ultra high
vacuum environments and are composed
of only inorganic materials. The insulators
are made of high purity, high strength,
low-loss alumina ceramic.
SPECIFICATIONS
Vacuum rated to 10-10 Torr

Type K thermocouple
Chromel / Alumel material

Yellow plug color
Plugs, screws and nuts for vacuum and atmosphere lead attachment included
Bakeable to 4500 with plug disconnected
CF
Engaged
A
NW
Engaged
A
CHAMBER-LIT 4/02
8-Pin Instrumentation Feedthroughs
Model Number
Flange
IFT-NW-16-8P
IFT-NW-25-8P
IFT-NW-40-8P
IFT-NW-50-8P
IFT-075-8P
IFT-150-8P
NW-16
NW-25
NW-40
NW-50
1.33 CF
2.75 CF
1.32
.92
.82
.82
1.32
.87
1.18
1.58
1.68
1.68
1.18
1.63
Price
A
SPECIFICATIONS
.51
Multipin instrumentation feedthroughs

are typically used to transmit signal
voltages and currents. Such applications
as electron beam evaporation, electron
microscopy and surface science analysis
utilize these feedthroughs to control
processes.
.032 OD
NW
CF

Current 2 Amps
Voltage 500 V DC
Internal pressure 250 PSIG @ 200C
External pressure 250 PSIG @ 200C
Conductor.032 OD nickel wire
Use with vacuum connector IFT-VC
(See page 25).
.032 OD
.51
Copper Medium Current Feedthroughs

Model
Number
Flange
Number
Feedthroughs
MCF-NW-16-1
MCF-NW-25-1
MCF-NW-40-1
MCF-NW-40-2
MCF-NW-40-3
MCF-NW-40-4
MCF-NW-50-1
MCF-NW-50-2
MCF-NW-50-3
MCF-NW-50-4
MCF-075-1
MCF-150-1
MCF-150-2
MCF-150-3
MCF-150-4
NW-16
NW-25
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
1.33 CF
2.75 CF
2.75 CF
2.75 CF
2.75 CF
1
1
1
2
3
4
1
2
3
4
1
1
2
3
4
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.21
3.18
3.18
3.18
3.18
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.05
4.08
4.08
4.08
4.08
Price
A
.25
1.0
These electrical feedthroughs transmit

either high voltage, high current or a
combination of both. They are used for
sample heating, in-vacuum coating,
electron beam evaporation, sputtering
and other high vacuum applications.
High-purity, high-strength, low-loss
alumina ceramic surfaces maximize strike
and creep distances. The air-side ceramic
surfaces have a high temperature glass
coating which reduces surface roughness
and contamination.
NW
CF
.25
.875
Typ
SPECIFICATIONS

Voltage rating 12KV DC
Current 150 Amps
Conductor OFHC copper rod

Use with vacuum connector MCF-VC
(See page 25)
CHAMBER-LIT 4/02
Water Cooled Copper Medium Current Feedthroughs
A
NW
.25
1.0
CF
.25
.875
Typ
Model
Number
Flange
Number
Feedthroughs
MCF-NW-16-1W
MCF-NW-25-1W
MCF-NW-40-1W
MCF-NW-40-2W
MCF-NW-40-3W
MCF-NW-40-4W
MCF-NW-50-1W
MCF-NW-50-2W
MCF-NW-50-3W
MCF-NW-50-4W
MCF-075-1W
MCF-150-1W
MCF-150-2W
MCF-150-3W
MCF-150-4W
NW-16
NW-25
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
1.33 CF
2.75 CF
2.75 CF
2.75 CF
2.75 CF
1
1
1
2
3
4
1
2
3
4
1
1
2
3
4
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.21
3.18
3.18
3.18
3.18
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.05
4.08
4.08
4.08
4.08
Price
These watercooled electrical feedthroughs

transmit power and coolants simultaneously. They conduct higher current loads
than solid rod conductors of equal size
when properly cooled. Grounding of system
is necessary for safety.
SPECIFICATIONS
Voltage rating 3 KV DC
Current 600 Amps
Conductor OFHC copper tube
Nickel Medium Current Feedthroughs

A
NW
.25
1.0
CF
.25
.875
Typ
Model
Number
Flange
Number
Feedthroughs
MCF-NW-16-1N
MCF-NW-25-1N
MCF-NW-40-1N
MCF-NW-40-2N
MCF-NW-40-3N
MCF-NW-40-4N
MCF-NW-50-1N
MCF-NW-50-2N
MCF-NW-50-3N
MCF-NW-50-4N
MCF-075-1N
MCF-150-1N
MCF-150-2N
MCF-150-3N
MCF-150-4N
NW-16
NW-25
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
1.33 CF
2.75 CF
2.75 CF
2.75 CF
2.75 CF
1
1
1
2
3
4
1
2
3
4
1
1
2
3
4
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.23
3.21
3.18
3.18
3.18
3.18
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.03
4.05
4.08
4.08
4.08
4.08
Price
The nickel rod conductors on these

electrical feedthroughs offer an alternative
to copper for use in environments and
processes that attack copper surfaces.
SPECIFICATIONS
Voltage rating 12 KV DC
Current 75 Amps
Nickel rod conductor
Use with vacuum connector
MCF-VC (Page 25).
CHAMBER-LIT 4/02
Copper Single High Current Feedthroughs
Model Number
Flange
HCF-NW-40-1
HCF-NW-50-1
HCF-150-1
NW-40
NW-50
2.75 CF
3.81
3.81
3.86
4.13
4.13
4.08
Price
B
NW
.75
1.0
These electrical power feedthroughs accommodate a

higher electrical current due to the size of the copper rod.
CF
SPECIFICATIONS
.75
Current rating 600 amps

Voltage 3 KV Peak
Conductor OFHC copper rod
1.0
Water Cooled Copper Single High Current Feedthroughs

Model Number
Flange
HCF-NW-40-1W
HCF-NW-50-1W
HCF-150-1W
NW-40
NW-50
2.75 CF
3.81
3.81
3.86
4.13
4.13
4.08
Price
NW
.75
1.0
B
These watercooled electrical feedthroughs

conduct the highest current loads when
properly cooled. Grounding of system is
necessary.
CF
SPECIFICATIONS
.75
Voltage 3 KV Peak
Conductor OFHC Copper Tube
1.0
BNC Coaxial Feedthroughs

Model
Number
Flange
Number
Feedthroughs
BNC-NW-16-1
BNC-NW-25-1
BNC-NW-40-1
BNC-NW-40-2
BNC-NW-40-3
BNC-NW-40-4
BNC-NW-50-1
BNC-NW-50-2
BNC-NW-50-3
BNC-NW-50-4
BNC-075-1
BNC-150-1
BNC-150-2
BNC-150-3
BNC-150-4
NW-16
NW-25
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
1.33 CF
2.75 CF
2.75 CF
2.75 CF
2.75 CF
1
1
1
2
3
4
1
2
3
4
1
1
2
3
4
1.43
1.43
1.33
1.33
1.33
1.43
1.33
1.33
1.33
1.33
1.41
1.38
1.38
1.38
1.38
.32
.32
.42
.42
.42
.32
.42
.42
.42
.42
.34
.37
.37
.37
.37
.75
.75
.90
.75
.75
.90
.95
.95
.95
Price
CF
.50
Ref.
NW
.50
Ref.
Atmosphere
Plug Included
The BNC (Bayonet Naval Connection)

electrical feedthrough consists of two concentric conductor paths which are separated
and insulated with high-purity alumina
ceramic. It is commonly used in 50 to 70
ohm low power instrumentation lines.
SPECIFICATIONS
Peak voltage 500V @10-4 Torr

Current 3 Amps
Electrical rating 500VDC
Atmosphere connector included
Use vacuum connector BNC-VC
(See page 25)
CHAMBER-LIT 4/02
MHV Coaxial Feedthroughs
CF
.50
Ref.
A
NW
.50
Ref.
Atmosphere
Plug Included
Model
Number
Flange
Number
Feedthroughs
MHV-NW-16-1
MHV-NW-25-1
MHV-NW-40-1
MHV-NW-40-2
MHV-NW-40-3
MHV-NW-40-4
MHV-NW-50-1
MHV-NW-50-2
MHV-NW-50-3
MHV-NW-50-4
MHV-075-1
MHV-150-1
MHV-150-2
MHV-150-3
MHV-150-4
NW-16
NW-25
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
1.33 CF
2.75 CF
2.75 CF
2.75 CF
2.75 CF
1
1
1
2
3
4
1
2
3
4
1
1
2
3
4
1.43
1.43
1.33
1.33
1.33
1.43
1.33
1.33
1.33
1.33
1.41
1.38
1.38
1.38
1.38
.25
.25
.35
.35
.35
.25
.35
.35
.35
.35
.27
.30
.30
.30
.30
.75
.75
.90
.75
.75
.90
.95
.95
.95
Price
The MHV (Miniature High Voltage or

High Voltage BNC) electrical feedthroughs
operate in medium to high power with
higher voltage requirements. MHV and
BNC feedthroughs look similar but are very
different in electrical rating. They should
never be cross-mated since their electrical
ratings are not compatible.
SPECIFICATIONS
Peak voltage 500V

Vacuum 10-4 Torr
Current 3 Amps
Atmosphere connector included
Use vacuum connector
MHV-VC (see page 25)
Electrical Feedthrough Connectors

Model
Number
Use
With
Material
Max. Current
(Amps)
MCF-VC
BNC-VC
IFT-VC
Medium Current
BNC and MHV
8-Pin Instrumentation
Beryllium Copper with SS Screws

Beryllium Copper with SS Screws
Beryllium Copper
100
15
10
Quantity
Price
10 per Pkg.
10 per Pkg.
10 per Pkg.
MCF-VC
BNC-VC
IFT-VC
Medium Current Connector
BNC & MHV Connector
8-Pin Instrumentation
Connector
.50
.260
1.00
.69
Socket accepts
.094 Diameter Pin
Accepts wire
up to .050
Diameter
.25
Diameter
.62
Socket accepts
.032 Diameter Pin
Accepts wire
up to .032
Diameter
.062
Diameter
CHAMBER-LIT 4/02
LIQUID FEEDTHROUGHS
Nor-Cals product line of liquid and liquid
nitrogen feedthroughs includes the most
commonly required for general, high and
ultrahigh vacuum applications. Tubing is
.25 and .375 inch OD, type 304 stainless
steel with CF or NW flanges. They are
available without fittings or terminated
with industry standard Swagelok or
Cajon VCR tube fittings. Maximum
bakeout with CF flanges is 4500C and
2040C with NWs. Vacuum ranges are
10-11 Torr and 10-8, respectively.
systems. These zero clearance fittings

make them the perfect installation solution
when space is a problem. Compression of
a removable copper gasket creates a
vacuum seal between air and
process sides.
feedthrough around the mounting flange

interface, protecting the seals integrity.
This is necessary because of the extreme
thermal gradients encountered with
liquid nitrogen.
Swagelok stainless steel tube compression fittings provide a leakproof, torquefree vacuum
seal by swaging
the stainless
steel tube to
which they are
mated. They
require no
gaskets.
Watercooled liquid feedthroughs are a

cost-effective and reliable way to introduce
water into a vacuum system. The .035
inch single wall tube construction is
designed for the transmission of water
as a cooling agent.
Cajon VCR
stainless steel
tube compression fittings
properly handle
rapid makeup in
tube, pipe and
welded vacuum
Liquid nitrogen feedthroughs are

constructed with dual and coaxial tube
geometries. This thermal barrier effectively reduces condensation and ice
buildup on the atmosphere side of the
Single Liquid Feedthroughs

Model Number
Flange
Tube Fittings
Tube OD
LFT-NW-16-1-025
LFT-NW-25-1-025
LFT-NW-25-1-025-2SW
LFT-NW-25-1-025-2MVCR
LFT-NW-40-1-025
LFT-NW-40-1-025-2SW
LFT-NW-40-1-038
LFT-NW-50-1-025
LFT-NW-50-1-025-2SW
LFT-NW-50-1-038
LFT-075-1-025
LFT-075-1-038
LFT-150-1-025
LFT-150-1-025-2SW
LFT-150-1-025-2MVCR
LFT-150-1-038
NW-16
NW-25
NW-25
NW-25
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
1.33 CF
2.75 CF
2.75 CF
2.75 CF
2.75 CF
2.75 CF
None
None
2 Swagelok
2 MVCR
None
2 Swagelok
2 MVCR
None
None
2 Swagelok
2 MVCR
None
None
None
None
2 Swagelok
2 MVCR
None
.250
.250
.250
.250
.250
.250
.250
.375
.250
.250
.250
.375
.250
.375
.250
.250
.250
.375
3.00
3.00
3.91
4.03
3.00
3.91
4.03
3.00
3.00
3.91
4.03
3.00
3.00
3.00
3.00
3.91
4.03
3.00
4.00
4.00
4.91
5.03
4.00
4.91
5.03
4.00
4.00
4.91
5.03
4.00
4.00
4.00
4.00
4.91
5.03
4.00
Price
CF
NW
CHAMBER-LIT 4/02
LIQUID FEEDTHROUGHS
Dual Liquid Feedthroughs
Model Number
Flange
Tube Fittings
Tube OD
Price
LFT-NW-40-2-025
LFT-NW-40-2-025-4SW
LFT-NW-50-2-025
LFT-NW-50-2-025-4SW
LFT-150-2-025
LFT-150-2-025-4SW
LFT-150-2-025-4MVCR
LFT-150-2-038
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
2.75 CF
2.75 CF
2.75 CF
2.75 CF
None
4 Swagelok
4 MVCR
None
4 Swagelok
4 MVCR
None
4 Swagelok
4 MVCR
None
.250
.250
.250
.250
.250
.250
.250
.250
.250
.375
3.00
3.91
4.03
3.00
3.91
4.03
3.00
3.91
4.03
3.00
4.00
4.91
5.03
4.00
4.91
5.03
4.00
4.91
5.03
4.00
CF
NW
Single Liquid Nitrogen Feedthroughs

Model Number
Flange
Tube Fittings
Tube OD
LNF-NW-16-1-025
LNF-NW-25-1-025
LNF-NW-25-1-025-2SW
LNF-NW-25-1-025-2MVCR
LNF-NW-40-1-025
LNF-NW-40-1-025-2SW
LNF-NW-40-1-038
LNF-NW-50-1-025
LNF-NW-50-1-025-2SW
LNF-NW-50-1-038
LNF-075-1-025
LNF-075-1-038
LNF-150-1-025
LNF-150-1-025-2SW
LNF-150-1-025-2MVCR
LNF-150-1-038
NW-16
NW-25
NW-25
NW-25
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
1.33 CF
1.33 CF
2.75 CF
2.75 CF
2.75 CF
2.75 CF
None
None
2 Swagelok
2 MVCR
None
2 Swagelok
2 MVCR
None
None
2 Swagelok
2 MVCR
None
None
None
None
2 Swagelok
2 MVCR
None
.250
.250
.250
.250
.250
.250
.250
.375
.250
.250
.250
.375
.250
.375
.250
.250
.250
.375
5.50
5.50
6.41
6.53
5.50
6.41
6.53
5.50
5.50
6.41
6.53
5.50
5.50
5.50
5.50
6.41
6.53
5.50
4.40
4.50
5.41
5.53
4.50
5.41
5.53
4.50
4.50
5.41
5.53
4.50
4.50
4.50
4.50
5.41
5.53
4.50
Price
CF
NW
CHAMBER-LIT 4/02
LIQUID FEEDTHROUGHS
Dual Liquid Nitrogen Feedthroughs
Model Number
Flange
Tube Fittings
Tube
Price
LNF-NW-40-2-025
LNF-NW-40-2-025-4SW
LNF-NW-50-2-025
LNF-NW-50-2-025-4SW
LNF-150-2-025
LNF-150-2-025-4SW
LNF-150-2-025-4MVCR
LNF-150-2-038
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
2.75 CF
2.75 CF
2.75 CF
2.75 CF
None
4 Swagelok
4 MVCR
None
4 Swagelok
4 MVCR
None
4 Swagelok
4 MVCR
None
.250
.250
.250
.250
.250
.250
.250
.250
.250
.375
6.50
7.41
7.53
6.50
7.41
7.53
6.50
7.41
7.53
6.50
3.50
4.41
4.53
3.50
4.41
4.53
3.50
4.41
4.53
3.50
5.50
6.41
6.53
5.50
6.41
6.53
5.50
6.41
6.53
5.50
4.50
5.41
5.53
4.50
5.41
5.53
4.50
5.41
5.53
4.50
NW
CF
CHAMBER-LIT 4/02
THIN FILM COATING INSTRUMENTATION
Cabling from
Oscillator to
Sensor must
not exceed 48"
(See page
32 for cable
selections)
Typical Thin Film

Coating System
Sensor
Holder
& Crystal
In-Vac Cable
Ground Wire
Monitor
Source Shutter
Feedthrough
Oscillator
6" Cable
10' Cable
MONITOR
SPECIFICATIONS
Deposition Monitors
Model
Number
Description
CM-2
CM-6
Two Channels
Six Channels
Price
Our deposition monitor measures film

thickness/rate or frequency using crystals
as the sensor device. Independent channels monitor different films or average
different sensors together to provide a
more uniform deposition measurement.
Remote Oscillator
RS232 port connects to PC

Windows based
software included
Easy to read alphanumeric
LED display
Programmable frequency
6.0 to 4.0 MHz
Rate averaging
1 to 20 readings
Measurement rate 0.15 to 2 seconds
Frequency resolution 0.1 Hz
Thickness resolution 1 A
Rate resolution selectable
0.1 or 0.01 A /s
Measurement rate 0.15 to 2 seconds
Input/Output, 4 relays and
4 input control
120/240 VAC 20 VA power
Mounting brackets included
Width/Height - 8.375 x 3.50
Depth - 7.75
9 layers recorded
0
Model
Number
Description
CO-A
Remote Oscillator for use with rate and thickness deposition monitor
Price
SPECIFICATIONS
3.82
2.25
Remote
Oscillator
Monitor
BNC Connection (Male)
.88
Feedthrough
Temperature Range 100 to 400C

Frequency Range 6.0 to 4.0 MHz
Aluminum die-cast material
BNC connectors
Nor-Cal offers an extensive selection of

commonly used quartz crystal feedthroughs,
sensors and multi-channel monitors, cables,
quartz crystals, accessories and replacement
parts for use in semiconductor, optical and
industrial thermal deposition processes.
Custom feedthroughs are available with a
variety of flanges in all sizes.
Our coating instrumentation products
support one of the more popular methods
of thin film measurement and rate control _
the crystal monitor, which utilizes the piezoelectric properties of a quartz crystal.
The electrical characteristics of the crystal,
which is held in place by the sensor, change
during deposition. Single sensors are
generally used for short deposition runs,
whereas, dual sensors allow for longer runs.
Dual sensors require an airline to operate a
pneumatic shutter which covers one crystal
at a time. The sensor is either welded to the
feedthrough or attached with connectors.
Most sensors are available with cooling lines.
The application determines the correct
choice of sensor. The sensor determines
compatible feedthroughs and cabling.
The chamber determines the appropriate
feedthrough and flange. For application
temps up to 1500C, electrical connection
between the sensor and feedthrough is
accomplished with a vacuum coaxial cable.
A bakeable, one piece sensor/feedthrough
replaces the standard in-vac cable with a
stainless steel high-temp coaxial line for
high temperature applications up to 3000C.
The feedthrough is the air-to-vacuum
connection between the sensor and the
oscillator. The feedthrough transfers the
quartz crystals piezo-electric vibrations to
the oscillator via a short coaxial cable.
The oscillator conditions the signals and
transfers them to the monitor via another
coaxial cable. The monitor then measures,
interprets and displays the thickness, rate
and frequency of deposition. Nor-Cals thin
film deposition monitors are available with
up to six independent channels to read six
single sensors or three dual sensors
simultaneously. Each sensor requires its
own cabling and oscillator. Contact our
sales staff for help with your system
configuration.
BNC Connection (Female)
CHAMBER-LIT 4/02

1 Bolt Crystal Feedthroughs
SPECIFICATIONS
Model
Number
Description
CF-100-1
CF-100-1-W
CF-100-1-WC
CFP-100-2-W
1 Microdot to BNC
1 Microdot to BNC, 2 cooling lines
1 Microdot to BNC, 2 cooling lines with compression fittings
2 Microdot to Microdot, 2 cooling lines, 1 air line
Price
Operating temperature up to 1500C

Vacuum Leak Rate <10-9 Atm
cc/sec Helium
304 stainless steel, TIG welded
1.00 inch max. baseplate thickness
1.25 inch bolt feedthroughs available
CF-100-1-WC
CF-100-1
BNC
Connector
1/8" Compression
Fittings
1.50 Hex
Microdot Connector
1.00
1.00
BNC
Connector
1.70
Microdot Connector
1.70
1.00
Microdot
Connectors
Microdot
Connector
12.00
1.50 Hex
CF Flange
Size
CF-133-1
CF-275-1-W
CF-275-1-WC
CFP-275-2-W
1.00
1.00
1.5 Hex
5.30
SPECIFICATIONS
Description
Price
1 Microdot to BNC
1 Microdot to BNC, 2 cooling lines
1 Microdot to BNC, 2 cooling lines with compression fittings
1 Microdot to BNC, 2 cooling lines, 1 air line
1.33
2.75
1.33
2.75
Microdot
Connectors
12.00"
CF Flanged Crystal Feedthroughs

Model
Number
1.70
SS Tubes: 3/16 OD
.128 ID
5.30
BNC Connector
1.50 Hex
3.70
CFP-100-2-W
CF-100-1-W
SS Tubes: 3/16 OD
.128 ID
1.70
5.01

cc/sec Helium
304 stainless steel, TIG welded
NW, ISO and ASA flanged
feedthroughs available
CF-275-1-W
CF-133-1
SS Tubes: 3/16 OD
.128 ID
Microdot
Connector
BNC Connector
CF-275-1-WC
9.00
CFP-275-2-W
1.10
BNC
Connector
2.00
2 Microdot
Connectors
SS Tubes: 3/16 OD
.128 ID
Microdot
Connector
2.75 CF Flange
4.00
2.00
2.75 CF Flange
1/8" Compression Fittings
2.75 CF Flange
BNC
Connector
2.50
1.33 CF
Mini Flange
Microdot
Connector
2 BNC
Connectors
2.75 CF Flange
2.75 CF Flange
4.00
2.50
9.00
Gold and aluminum alloy crystals, crystal holders, cables and reducing union connectors available on page 32.
CHAMBER-LIT 4/02

Crystal Sensors
SPECIFICATIONS
Model
Number
Description
CS-1
CS-1-W
CS-1-W-RA
CSP-2-W
CSP-2-W-RA
CSH-275-1-W
Compact single sensor with mounting bracket included

Single sensor, water cooled
Single sensor at 900 angle, water cooled
Dual sensor, pneumatic shutter, water cooled
Dual sensor at 900 angle, pneumatic shutter, water cooled
Single sensor with feedthrough, bakeable to 3000C, water cooled
Price
Fast, easy crystal replacement

6 MHz gold and aluminum alloy crystals
TIG welded, robust 304
stainless steel construction
cc/sec Helium
Custom lengths and bends available
CS-1
CS-1-W-RA
Crystal Sensor
Mounting Holes
1.10
Crystal Sensor
1.10
Cooling Lines (.125 OD SS Tube)

Microdot Connector
Microdot
Connector
.975
CSP-2-W
CS-1-W
Crystal Sensor
Crystal Sensor
1.00
Microdot Connector
30.00
Microdot
Connectors
1.03
1.00
Shutter
2.60
.57
30.00
Two Cooling Lines
(.125 OD SS Tube)
30.00
1.29
Two Cooling Lines
Air Line
(.125 OD SS Tube)
Deposition Shield
for Actuator Piston
Shutter
Actuator
(.125 OD SS Tube)
Back Cover Plate
CSP-2-W-RA
CSH-275-1-W
Specify length
and bend
1.35
2.75 CF Flange
.25 Rigid 304 SS Coaxial Tube
Microdot
Connectors
30.00
Crystal Sensor
BNC
Connector
Shutter Extended
3.75
4.25
3.50
Cooling Line (.125 OD SS Tube)

Air Line (.125 OD SS Tube)
Cooling Line (.125 OD SS Tube)
Pneumatic Actuator
Gold and aluminum alloy crystals,

crystal holders, cables and reducing union
connectors available on next page.
CHAMBER-LIT 4/02

Cables and Connectors
Model
Number
CCV-MM-30*
CCV-MM-30T*
CCA-BB-6
CCA-BM-6
CCA-BB-10
CRU-1
Description
Length
Price
30.75
Microdot to Microdot in-vacuum coaxial cable, metal sheath. Connects feedthrough to sensor.
Microdot to Microdot in-vacuum coaxial cable, Teflon coated metal sheath. Connects feedthrough to sensor. 30.75
BNC to BNC cable (Male to Female). Connects feedthrough to oscillator.
6.00
BNC to Microdot cable. Connects feedthrough to oscillator.
6.00
120.00
BNC to BNC cable (Male to Male). Connects oscillator to monitor.
Reducing union tube connector 3/16 to 1/8. Connects cooling and air lines between feedthough and sensor
Each
*Add $13.00 for special lengths
Quartz Crystals and Accessories

Model
Number
Description
Quantity
CQ-G
CQ-A
CH-1
6MHz gold, .550 diameter

6MHz aluminum alloy, .550 diameter
Replacement crystal holder
Pkg. of 10
Pkg. of 10
Each
Price
CHAMBER-LIT 4/02
NEW PRODUCTS
Manual Ball Valves

Ball valves are a low cost, manually operated, straight
through isolation device. Their simple, robust design
provides high reliability in dirty applications. They
are commonly used on MOCVD and CVD equipment
downstream from the chamber or vacuum pump to
isolate traps or abatement tools. A forged 316L
stainless steel body and Teflon seat make these
valves ideal for corrosive environments. Other
applications include vacuum and other facilities
requirements. A quarter-turn of the handle quickly
switches the valve from open to close. Nor-Cal Ball
Valves are available with NW-16 through 50 flanges
as standards. Call for other flange configurations.
IQ Series Intellisys Throttling Butterfly

Valve with On-Valve Controller
Nor-Cal Products IQ-Series IntellisysTM Throttling Butterfly Valve with onvalve control features the same patented closed loop motor control and
proven adaptive pressure control algorithm found in Nor-Cals standalone pressure controller. The high performance controller/valve will
rotate from fully open to closed in 1/8 second with over 100,000 steps of
addressable control resolution. Wafer through-put increases of 5 to 15%
with 2 to 10 fold reductions in wafer scrap are possible. The IQ valves
footprint is smaller by over 90% than typical buried box controllers and
by over 60% than competitive integral controller products. DeviceNETTM,
RS-232 serial or RS-485 MODBUS communication. For more information
refer to the separate Intellisys Adaptive Pressure Control brochure located
in the Valves section of this binder.
VALVE-LIT 4/03
GENERAL INFORMATION
Since we have been improving our designs and expanding our product line in order to offer the vacuum industry stainless steel valves for
almost every application. Our valves provide outstanding performance in the most demanding applications such as semiconductor and compound semiconductor processing.
Construction
Vacuum Range
Copper Seal Bonnets
Our poppet valves are fully opening for high

conductance and to prevent bellows and
poppet contamination in semiconductor
applications. Bodies are die-formed from
304 stainless steel to eliminate sharp inside
corners and improve conductance. The
valves are electropolished for faster pumpdown, lower outgassing and better corrosion
resistance. The welded bellows are made
from AM-350 stainless steel to provide
corrosion resistance and excellent flexibility.
They are designed with additional segments
to provide extended life. Nor-Cal valves can
be operated in any position and actuators can
be removed quickly for routine inspection
without disassembling the system.
Poppet seals and welds have helium leak

rates of 10-9 std. cc./sec. or less. Viton
sealed valves can be used in the 10-9 Torr
range, while copper seal valves are suited for
use in the 10-10 range. Bakeable All-Metal
valves are vacuum rated to below 10-10 Torr.
Copper seal bonnet valves with CF flanges

provide metal seals between the inside of the
valve and the atmosphere. They are available
in all standard sizes and port configurations.
Models
Nor-Cals poppet valves are available in
most port configurations from .38 to 4.0 inch
ODs with CF, NW, ISO or ASA flanges. Angle,
Angle-In-Line, In-Line, Tee and StraightThrough valves through 3 inch OD's are all
available with manual or pneumatic actuators
and Viton or copper seal bonnets. Sizes 4.0
inches and larger are available with pneumatic actuators only.
Bakeable all-metal valves with right angle
port configuration are manufactured with
.75 to 2.5 inch OD ports and CF flanges.
Gate valves are available with nominal IDs of
1.5 to 12 inches with CF, NW, ISO and ASA
flanges. Bonnets are either copper or Viton
sealed with manual or pneumatic actuators.
(See gate valve specifications on Page 27.)
Poppet Valve Conductance

The conductance values in the adjacent
table have been calculated for air at room
temperature using the formulas for tubes
and elbows presented in the third edition of
Roth's, Vacuum Technology:
Cv=12(D4/L') for viscous flow or
Cm=12(D3/L') for molecular flow
L'=Laxial +1.33(0/180)D for elbows
Port lengths without flanges and inner diameters for
the valve sizes and configurations were used. This
method is an approximation, use values accordingly.
Bakeability
Standard valves are bakeable to 204C for
intermittent periods. However, the Viton
O-rings begin to take a set at 150C. High
temperature Kalrez O-rings are available as
an option and allow these valves to be baked
to 316C for intermittent periods and 280C for
extended periods. Bakeable all-metal poppet
valves are offered for 400C bakeouts.
Heater jackets are available for all valves.
Valve Actuation
Manually operated valves, available with port
ODs up to 3 inches, utilize Acme threads and a
self-lubricating bronze nut for fewer turns and
smooth, trouble-free operation.
Pneumatic valves are normally air-to-open,
spring-to-close in port ODs through 2 inches
for immediate closure in case of electrical
or air failure. Larger valves are air-to-open,
air-to close as are all valves as an option.
Fail-Safe valves are air-to-open, spring-toclose and are available in 2.5, 3 and 4 inch
sizes. Most sizes are available with air-to
open, air-to-close with spring assist as an
option. Operating air pressure for all
pneumatic valves is 60 to 80 psig.
Poppet Valve
General Specifications
Electropolished 304 stainless
steel die-formed body
15 micron filter on air cylinder exhaust
Full opening
Viton poppet O-ring, standard
.38 to 4.0 inch port ODs
Helium leak rate 10-9 std. cc./sec. or less
Viton Seal Bonnet:
10-9 Torr vacuum rating,
Bakeable to 204C intermittent,
CF, NW, ISO and ASA flanges
Copper Seal Bonnet:
10-10 Torr vacuum rating, CF flanges,
bakeable to 204C intermittent
Pneumatically Operated: Normally closed,
60 to 80 psig operating air pressure
Maximum differential pressure
20 psi across valve seat
External differential presures greater
than 5 psi on the bellows may result
in premature bellows failure
Options
Micro-switch
Actuators
O-rings
Fittings
Air Solenoids
Heater Jackets
Liters per second

Angle or Tee
OD
0.50
0.75
1.00
1.12
1.50
2.00
2.50
3.00
4.00
Viscous
4
9
26
128
311
820
1580
3856
Molecular
3
5
12
37
65
136
217
396
Angle-In-Line
In-Line
Straight-Through
Viscous Molecular
Viscous Molecular
Viscous Molecular
8
19
88
230
499
835
-
4
9
25
48
83
115
-
3
7
18
84
207
506
948
2299
2
4
8
24
44
84
130
236
6
29
80
-
4
11
23
-
VALVE-LIT 9/02
OPTIONS
How to Specify Options
Actuator Options
Several options are available on poppet

valves. The options are described in
detail on these two pages. One or more
options can be added to a particular valve
by adding the option suffix to the basic
valve model number.
All pneumatically actuated valves with air-to-open, spring-to-close actuators (port ODs
through 2 inches) can be furnished with air-to-open, air-to-close actuators at no extra charge.
Air-to-open, air-to-close actuators with a spring assist can be furnished for an additional $25.00.
Please add option suffixes

in the following order:
1. Actuator: "-A"= air-to-open, air-to-close
"-AS"= air-to-open, air-to-close
with spring assist
"-SA"=spring-to-open,
air-to-close
2. Micro-switch: "-M"
3. O-ring: "-KT" = high temp Kalrez
"-KC" = chemical resistant
Kalrez
"-CR" = Chemraz
"-S" = Silicone
Micro-Switch Options
Micro-Switch Position Indicator
The Micro-Switch Option is available on all pneumatically actuated Nor-Cal valves. Add $100.00
to valve cost. A pair of 5-amp micro-switches
are opened or closed by the movement of the valve
stem. One switch closes when the valve is fully
open and the other when it is fully closed. These
can be connected to control panels with alarms or
lights for positive position indication. Normally,
electrical leads are approximately ten inches long,
but may be cut to any length upon request.
Port
OD
.38
.50
.75
1.00
1.50
2.00
3.00
4.00
2.06
2.06
2.06
2.06
3.29
3.54
3.54
5.01
O-ring Options
4. Angle Valve Fitting: (see table below)

5. Air Solenoid: (see table next page)
Examples of model
numbers with options:
ESVP-1502-CF-AS-M-S11 or
CAIVP-3002-ISO-S-S32 or
CSV-1002-NW-CR-F2
Standard Nor-Cal valves use chemical resistant Viton O-rings for closure. Viton O-rings
should not be heated to above 204C. Even prolonged exposures of 150C may degrade
the O-rings. The following special O-rings can be provided as options:
High temperature Kalrez O-rings allow the valve to be baked to 316C intermittently
or 280C for prolonged periods where the O-ring is allowed to expand.
Silicone O-rings provide adequate sealing performance in thermal cycling from -65C to 232C.
Chemical resistant Kalrez and Chemraz are also available.
Right Angle Valve Fitting Options

Right Profile
Left
Profile
Port
OD
.75
1.00
1.50
2.00
2.50
3.00
4.00
A
1.50
1.22
1.62
2.25
2.25
2.44
3.22
Dimensions
in inches
All Nor-Cal right angle valves (ESV, CSV, ESVP and CSVP models)
are available with the six fitting options described in the following
table. These options are designed to make it easy for our customers
to retrofit our valves with thermocouple gauges, leak valves, up-to-air
valves or gas introduction lines. Other fittings or configurations are
available upon request.
Option
Profile
F1
F2
F3
F4
F5
F6
Left
Left
Left
Right
Right
Right
Description
1 4 Female VCR
3 8 Female VCR
1 8 Female NPT
1 4 Female VCR
3 8 Female VCR
18 Female NPT
Ports
Both
Both
Bottom
Both
Both
Bottom
Note: Available on ESV, ESVP, CSV and CSVP models only.
Add to
Valve Price
VALVE-LIT 9/02
OPTIONS
Air Solenoid Options
All pneumatic poppet valves can be provided with air solenoids with several current ratings
for electropneumatic actuation. (Gate valves come standard with a 120V, 50/60Hz air
solenoid valve. See solenoid chart for gate valves on page 27) Valves with air-to-open,
spring-to-close actuation require three-way air solenoids, while air-to-open, air-to-close
actuators require four-way solenoids (see table above). Both three and four-way air
solenoids are available in four current ratings. A pneumatic valve ordered with this option
will arrive with an air solenoid installed. Fourteen inch long electrical leads are provided
for connection to the power supply. Air solenoids can be purchased separately in a kit
complete with instructions for installation by the customer. When placing your order
please specify the model number of the valve that the air solenoid will be installed on,
so that our sales staff can confirm whether a three-way or four-way solenoid is required.
Port OD
Option
Kit
Description
.38 through 2.0

and all Fail-Safe
valve sizes*
S11
S21
S31
S41
S11-K
S21-K
S31-K
S41-K
3-way 120V AC, 50/60 Hz

3-way 24V DC
3-way 240V AC, 50/60 Hz
3-way 24V AC, 50/60 Hz
2.5 thru 4.0*
S12
S22
S32
S42
S12-K
S22-K
S32-K
S42-K
4-way 120V AC, 50/60 Hz

4-way 24V DC
4-way 240V AC, 50/60 Hz
4-way 24V AC, 50/60 Hz
* Use 4-way solenoid option for 1.12 and 1.5 OD STVP and CSTVP models.
Price
Thermal Products
All Nor-Cal poppet valves and gate valves can be provided with
silicone foam or fiberglass insulated heater jackets to reduce
resident time of corrosives or particle buildup in semiconductor applications. These jackets are available with PID controllers or thermostats with high temperature shutoffs. Jacket
and control specifications can be tailored to meet your specific
needs. Call for price and model number. Refer to the Thermal
Products catalog located in this binder for more information.
VALVE-LIT 9/02
MANUALLY OPERATED ANGLE VALVES

Manually Operated Viton Seal Angle Valves
Model
Number
ESV-038
ESV-0382-CF
ESV-0382-NWB
ESV-050
ESV-0502-CF
ESV-0502-NWB
ESV-075
ESV-0752-CF
ESV-0752-NWB
ESV-100
ESV-1002-CF
ESV-1002-NWB
ESV-150
ESV-1502-CF
ESV-1502-NWB
ESV-200
ESV-2002-CF
ESV-2002-NWB
ESV-2002-ASA
ESV-250
ESV-2502-CF
ESV-2502-ISO
ESV-2502-ASA
ESV-300
ESV-3002-CF
ESV-3002-ISO
ESV-3002-ASA
Port
OD
.38
.50
.75
1.00
1.50
2.00
2.50
3.00
Description
No Flanges
Rotatable 1.33 CF on Both Ports
NW-10B on Both Ports
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
Rotatable ASA-5-200R on Both Ports
No Flanges
ISO-63-250-OF on Both Ports
No Flanges
1.50
1.60
1.65
1.50
1.60
1.65
2.00
2.50
2.15
1.88
2.05
2.03
2.25
2.46
2.40
3.25
3.48
3.40
3.50
3.00
3.38
3.25
3.25
3.25
3.53
3.50
3.50
4.06
4.16
4.21
4.06
4.16
4.21
4.56
5.06
4.71
4.32
4.49
4.47
5.63
5.84
5.78
7.85
8.08
8.00
8.10
8.27
8.65
8.52
8.52
8.68
8.96
8.93
8.93
4.44
4.54
4.59
4.56
4.66
4.71
5.31
5.81
5.46
5.32
5.49
5.47
7.13
7.34
7.28
9.85
10.08
10.00
10.10
10.77
11.15
11.02
11.02
11.68
11.96
11.93
11.93
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
3.00
3.00
3.00
3.50
3.50
3.50
3.50
4.00
4.00
4.00
4.00
4.50
4.50
4.50
4.50
Price
Specifications
ISO, CF or ASA Flanges
Electropolished 304
stainless steel body
.38 to 3 inch port ODs
Self-lubricating bronze nut
Acme threads for fewer turns
Bakeable to 204C intermittent
Viton Seal Bonnet:
Bored NW Flanges
C
B
A
A
Options
Fittings
O-rings
Heater Jackets
ESV O-Ring Kits

Port OD
Model Number
.38-1.0
1.5
2.0
2.5
3.0
ESV-075-95
ESV-150-95
ESV-200-95
ESV-250-95
ESV-300-95
Price
VALVE-LIT 9/02
MANUALLY OPERATED ANGLE VALVES

Manually Operated Copper Seal Bonnet Angle Valves
Model
Number
Port
OD
CSV-038
CSV-0382-CF
CSV-050
CSV-0502-CF
CSV-075
CSV-0752-CF
CSV-100
CSV-1002-CF
CSV-150
CSV-1502-CF
CSV-200
CSV-2002-CF
CSV-250
CSV-2502-CF
CSV-300
CSV-3002-CF
.38
.50
.75
1.00
1.50
2.00
2.50
3.00
Description
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
1.50
1.60
1.50
1.60
2.00
2.50
1.88
2.05
2.25
2.46
3.25
3.48
3.00
3.38
3.25
3.53
4.06
4.16
4.06
4.16
4.56
5.06
4.32
4.49
5.63
5.84
7.85
8.08
8.27
8.65
8.68
8.96
4.44
4.54
4.56
4.66
5.31
5.81
5.32
5.49
7.13
7.34
9.85
10.08
10.77
11.15
11.68
11.96
2.73
2.73
2.73
2.73
2.73
2.73
2.73
2.73
3.25
3.25
4.05
4.05
4.61
4.61
5.62
5.62
Price
Specifications
Electropolished 304 stainless steel body

Copper Seal Bonnet: 10-10 Torr
vacuum rating, CF flanges
Rotatable
CF Flanges
C
B
Options
Fittings
O-rings
Heater Jackets
CSV O-Ring and Gasket Kits

Port OD
Model Number
.38-1.0
1.5
2.0
2.5
3.0
CSV-075-95
CSV-150-95
CSV-200-95
CSV-250-95
CSV-300-95
Price
VALVE-LIT 9/02
PNEUMATICALLY ACTUATED ANGLE VALVES

Pneumatically Actuated Viton Seal Angle Valves
Model
Number
Port
OD
ESVP-038
ESVP-0382-CF
ESVP-0382-NWB
ESVP-050
ESVP-0502-CF
ESVP-0502-NWB
ESVP-075
ESVP-0752-CF
ESVP-0752-NWB
ESVP-100
ESVP-1002-CF
ESVP-1002-NWB
ESVP-150
ESVP-1502-CF
ESVP-1502-NWB
ESVP-200
ESVP-2002-CF
ESVP-2002-NWB
ESVP-2002-ASA
ESVP-250
ESVP-2502-CF
ESVP-2502-ISO
ESVP-2502-ASA
ESVP-300
ESVP-3002-CF
ESVP-3002-ISO
ESVP-3002-ASA
ESVP-400
ESVP-4002-CF
ESVP-4002-ISO
ESVP-4002-ASA
.38
.50
.75
1.00
1.50
2.00
2.50
3.00
4.00
Description
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
4.50 CF on Both Ports
No Flanges
No Flanges
Rotatable ASA-7.5-400R on Both Ports
1.50
1.60
1.65
1.50
1.60
1.65
2.00
2.50
2.15
1.88
2.05
2.03
2.25
2.46
2.40
3.25
3.48
3.40
3.50
3.00
3.38
3.25
3.25
3.25
3.53
3.50
3.50
4.22
4.66
4.47
4.47
3.62
3.72
3.77
3.62
3.72
3.77
4.12
4.62
4.27
3.88
4.05
4.03
4.98
5.19
5.13
6.74
6.97
6.89
6.99
7.18
7.56
7.43
7.43
7.62
7.90
7.87
7.87
9.55
9.99
9.80
9.80
5.77
5.87
5.92
5.77
5.87
5.92
6.26
6.76
6.41
6.02
6.19
6.17
7.56
7.77
7.71
11.23
11.46
11.38
11.48
10.10
10.48
10.35
10.35
11.00
11.28
11.25
11.25
14.99
15.43
15.24
15.24
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
3.00
3.00
3.00
3.50
3.50
3.50
3.50
4.00
4.00
4.00
4.00
4.50
4.50
4.50
4.50
6.50
6.50
6.50
6.50
Price
Specifications

15 micron air filter on air cylinder exhaust
.38 to 2 inch OD: air-to-open,
spring-to-close
Over 2 inch OD: air-to-open, air-to-close
Viton Seal Bonnet:
ESVP O-Ring Kits
Port OD
Model Number
.38-1.0
1.5
2.0
2.5
3.0
4.0
ESVP-075-95
ESVP-150-95
ESVP-200-95
ESVP-250-95
ESVP-300-95
ESVP-400-95
Price
B
Options
Fittings, O-rings and Air Solenoids
Micro-Switch and Actuators
Heater Jackets
VALVE-LIT 9/02
PNEUMATICALLY ACTUATED ANGLE VALVES

Pneumatically Actuated Copper Seal Bonnet Angle Valves
Model
Number
Port
OD
CSVP-038
CSVP-0382-CF
CSVP-050
CSVP-0502-CF
CSVP-075
CSVP-0752-CF
CSVP-100
CSVP-1002-CF
CSVP-150
CSVP-1502-CF
CSVP-200
CSVP-2002-CF
CSVP-250
CSVP-2502-CF
CSVP-300
CSVP-3002-CF
CSVP-400
CSVP-4002-CF
.38
.50
.75
1.00
1.50
2.00
2.50
3.00
4.00
Description
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
1.50
1.60
1.50
1.60
2.00
2.50
1.88
2.05
2.25
2.46
3.25
3.48
3.00
3.38
3.25
3.53
4.22
4.66
3.75
3.85
3.75
3.85
4.25
4.75
4.00
4.17
4.98
5.19
6.62
6.85
7.18
7.56
7.62
7.90
9.55
9.99
5.77
5.82
5.77
5.82
6.26
6.76
6.02
6.19
7.56
7.77
11.23
11.45
10.10
10.48
11.00
11.28
14.99
15.43
2.73
2.73
2.73
2.73
2.73
2.73
2.73
2.73
3.25
3.25
4.05
4.05
4.61
4.61
5.62
5.62
6.73
6.73
Price
Specifications

spring-to-close
Copper Seal Bonnet:
10-10 Torr vacuum rating, CF flanges
Options
Fittings, O-rings
Air Solenoids
Micro-Switch
Actuators
Heater Jackets
CSVP O-Ring & Gasket Kits

Port OD
Model Number
.38-1.0
1.5
2.0
2.5
3.0
4.0
CSVP-075-95
CSVP-150-95
CSVP-200-95
CSVP-250-95
CSVP-300-95
CSVP-400-95
Price
VALVE-LIT 9/02
MANUALLY OPERATED ANGLE-IN-LINE VALVES

Manually Operated Viton Seal Angle-In-Line Valves
Model
Number
Port
OD
AIV-075
AIV-0752-CF
AIV-0752-NWB
AIV-100
AIV-1002-CF
AIV-1002-NWB
AIV-150
AIV-1502-CF
AIV-1502-NWB
AIV-200
AIV-2002-CF
AIV-2002-NWB
AIV-250
AIV-2502-CF
AIV-2502-ISO
AIV-300
AIV-3002-CF
AIV-3002-ISO
.75
1.00
1.50
2.00
2.50
3.00
Description
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
3.70
4.70
4.00
3.90
4.23
4.20
4.82
5.24
5.12
6.70
7.15
7.00
7.75
8.50
8.25
10.05
10.61
10.55
3.47
3.47
3.47
3.42
3.42
3.42
4.55
4.55
4.55
6.19
6.19
6.19
6.99
6.99
6.99
7.71
7.71
7.71
4.01
4.01
4.01
4.14
4.14
4.14
5.61
5.61
5.61
9.15
9.15
9.15
10.31
10.31
10.31
11.38
11.38
11.38
Price
2.25
2.25
2.25
2.25
2.25
2.25
3.00
3.00
3.00
3.50
3.50
3.50
4.00
4.00
4.00
4.50
4.50
4.50
Bored NW Flanges
Specifications
ISO or CF Flanges
AIV O-Ring Kits

.75 to 3.0 inch port OD's
Viton Seal Bonnet:
CF, NW and ISO flanges
Port OD
Model Number
.38 - 1.0
1.5
2.0
2.5
3.0
ESV-075-95
ESV-150-95
ESV-200-95
ESV-250-95
ESV-300-95
Price
Options
O-rings
Heater Jackets
VALVE-LIT 9/02
MANUALLY OPERATED ANGLE-IN-LINE VALVES

Manually Operated Copper Seal Bonnet Angle-In-Line Valves
Model
Number
Port
OD
CAIV-075
CAIV-0752-CF
CAIV-100
CAIV-1002-CF
CAIV-150
CAIV-1502-CF
CAIV-200
CAIV-2002-CF
CAIV-250
CAIV-2502-CF
CAIV-300
CAIV-3002-CF
.75
Description
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
1.00
1.50
2.00
2.50
3.00
3.70
4.70
3.90
4.48
4.82
5.24
6.70
7.15
7.75
8.50
10.05
10.61
3.47
3.47
3.42
3.42
4.55
4.55
6.19
6.19
6.99
6.99
7.71
7.71
4.01
4.01
4.14
4.14
5.61
5.61
9.15
9.15
10.31
10.31
11.38
11.38
2.73
2.73
2.73
2.73
3.25
3.25
4.05
4.05
4.61
4.61
5.62
5.62
Price
Specifications
D
CF Flanges

.75 to 3.0 inch port OD's
Copper Seal Bonnet:
10-10 Torr vacuum rating, CF flanges
Options
O-rings
Heater Jackets
A
CAIV O-Ring and Gasket Kits

Port OD
Model Number
.38 - 1.0
1.5
2.0
2.5
3.0
CSV-075-95
CSV-150-95
CSV-200-95
CSV-250-95
CSV-300-95
Price
VALVE-LIT 9/02
PNEUMATICALLY ACTUATED ANGLE-IN-LINE VALVES

Pneumatically Actuated Viton Seal Angle-In-Line Valves
Model
Number
Port
OD
AIVP-075
AIVP-0752-CF
AIVP-0752-NWB
AIVP-100
AIVP-1002-CF
AIVP-1002-NWB
AIVP-150
AIVP-1502-CF
AIVP-1502-NWB
AIVP-200
AIVP-2002-CF
AIVP-2002-NWB
AIVP-250
AIVP-2502-CF
AIVP-2502-ISO
AIVP-300
AIVP-3002-CF
AIVP-3002-ISO
.75
1.00
1.50
2.00
2.50
3.00
Description
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
3.70
4.70
4.00
3.90
4.23
4.20
4.82
5.24
5.12
6.70
7.15
7.00
7.75
8.50
8.25
10.05
10.61
10.55
4.32
4.32
4.32
4.27
4.27
4.27
5.69
5.69
5.69
7.94
7.94
7.94
7.64
7.64
7.64
8.70
8.70
8.70
2.25
2.25
2.25
2.25
2.25
2.25
3.00
3.00
3.00
3.50
3.50
3.50
4.00
4.00
4.00
4.50
4.50
4.50
Price
ISO or CF
Flanges
Bored NW
Flanges
A
A
Specifications
.33 straight-through ID for high
conductance
.75 to 2 OD: air-to-open, spring-toclose. Over 2 OD: air-to-open, air-to-close
Bakeable to 204C
Viton Seal Bonnet: 10-9 Torr vacuum
rating, CF, NW and ISO flanges
AIVP O-Ring Kits

Port OD
Model Number
.38 - 1.0
1.5
2.0
2.5
3.0
ESVP-075-95
ESVP-150-95
ESVP-200-95
ESVP-250-95
ESVP-300-95
Price
Options
Actuator
O-ring
Air Solenoid Heater Jackets
Micro-Switch
VALVE-LIT 9/02
PNEUMATICALLY ACTUATED ANGLE-IN-LINE VALVES

Pneumatically Actuated Copper Seal Bonnet Angle-In-Line Valves
Model
Number
Port
OD
CAIVP-075
CAIVP-0752-CF
CAIVP-100
CAIVP-1002-CF
CAIVP-150
CAIVP-1502-CF
CAIVP-200
CAIVP-2002-CF
CAIVP-250
CAIVP-2502-CF
CAIVP-300
CAIVP-3002-CF
.75
Description
No Flanges
3.70
Rotatable 1.33 CF on Both Ports 4.70
No Flanges
3.90
No Flanges
4.82
No Flanges
6.70
No Flanges
7.75
No Flanges
10.05
1.00
1.50
2.00
2.50
3.00
4.32
4.32
4.27
4.27
5.69
5.69
7.94
7.94
7.64
7.64
8.70
8.70
2.73
2.73
2.73
2.73
3.25
3.25
4.05
4.05
4.61
4.61
5.62
5.62
Price
Specifications
D
CF Flanges

.33 straight-through ID for high
conductance
spring-to-close
Bakeable to 204C
Options
O-ring
Air Solenoid
Micro-Switch
Actuator
Heater Jackets
CAIVP O-Ring & Gasket Kits

Port OD
Model Number
.38 - 1.0
1.5
2.0
2.5
3.0
CSVP-075-95
CSVP-150-95
CSVP-200-95
CSVP-250-95
CSVP-300-95
Price
VALVE-LIT 9/02
MANUALLY OPERATED IN-LINE VALVES

Manually Operated Viton Seal In-Line Valves
Model
Number
Port
OD Description
ILV-038
ILV-0382-CF
ILV-0382-NWB
ILV-050
ILV-0502-CF
ILV-0502-NWB
ILV-075
ILV-0752-CF
ILV-0752-NWB
ILV-100
ILV-1002-CF
ILV-1002-NWB
ILV-150
ILV-1502-CF
ILV-1502-NWB
ILV-200
ILV-2002-CF
ILV-2002-NWB
ILV-2002-ASA
ILV-250
ILV-2502-CF
ILV-2502-ISO
ILV-2502-ASA
ILV-300
ILV-3002-CF
ILV-3002-ISO
ILV-3002-ASA
.38
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
.50
.75
1.00
1.50
2.00
2.50
3.00
1.50
1.60
1.65
1.50
1.60
1.65
2.00
2.50
2.15
1.88
2.05
2.03
2.25
2.46
2.40
3.25
3.48
3.40
3.50
3.00
3.38
3.25
3.25
3.25
3.53
3.50
3.50
.94
.94
.94
1.00
1.00
1.00
1.12
1.12
1.12
1.37
1.37
1.37
1.88
1.88
1.88
2.62
2.62
2.62
2.62
3.12
3.12
3.12
3.12
3.68
3.68
3.68
3.68
1.50
1.50
1.50
1.62
1.62
1.62
1.87
1.87
1.87
2.25
2.25
2.25
3.12
3.12
3.12
4.12
4.12
4.12
4.12
4.93
4.93
4.93
4.93
5.62
5.62
5.62
5.62
4.06
4.06
4.06
4.19
4.19
4.19
4.44
4.44
4.44
4.69
4.69
4.69
6.52
6.52
6.52
8.73
8.73
8.73
8.73
10.20
10.20
10.20
10.20
11.04
11.04
11.04
11.04
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
3.00
3.00
3.00
3.50
3.50
3.50
3.50
4.00
4.00
4.00
4.00
4.50
4.50
4.50
4.50
4.44
4.44
4.44
4.69
4.69
4.69
5.19
5.19
5.19
5.69
5.69
5.69
8.02
8.02
8.02
10.73
10.73
10.73
10.73
12.70
12.70
12.70
12.70
14.04
14.04
14.04
14.04
Specifications
Price

rating, CF, NW, ISO and ASA flanges
Options
ISO, ASA or CF Flanges
Bored
NW Flanges
F
D
B
C
O-rings
Heater Jackets
ILV O-Ring Kits

Port OD
.38-1.0
1.5
2.0
2.5
3.0
Model Number
Price
ESV-075-95
ESV-150-95
ESV-200-95
ESV-250-95
ESV-300-95
VALVE-LIT 9/02
MANUALLY OPERATED IN-LINE VALVES

Manually Operated Copper Seal Bonnet In-Line Valves
Model
Number
CILV-038
CILV-0382-CF
CILV-050
CILV-0502-CF
CILV-075
CILV-0752-CF
CILV-100
CILV-1002-CF
CILV-150
CILV-1502-CF
CILV-200
CILV-2002-CF
CILV-250
CILV-2502-CF
CILV-300
CILV-3002-CF
Port
OD
.38
.50
.75
1.00
1.50
2.00
2.50
3.00
Description
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
1.50
1.60
1.50
1.60
2.00
2.50
1.88
2.05
2.25
2.46
3.25
3.48
3.00
3.38
3.25
3.53
.94
.94
1.00
1.00
1.12
1.12
1.37
1.37
1.88
1.88
2.62
2.62
3.12
3.12
3.62
3.62
1.50
1.50
1.62
1.62
1.87
1.87
2.25
2.25
3.12
3.12
4.12
4.12
4.93
4.93
5.55
5.55
4.06
4.06
4.19
4.19
4.44
4.44
4.69
4.69
6.52
6.52
8.73
8.73
10.20
10.20
11.04
11.04
2.73
2.73
2.73
2.73
2.73
2.73
2.73
2.73
3.25
3.25
4.05
4.05
4.61
4.61
5.62
5.62
4.44
4.44
4.69
4.69
5.19
5.19
5.69
5.69
8.02
8.02
10.73
10.73
12.70
12.70
14.04
14.04
Price
Specifications
Electropolished 304 stainless
steel body
Bakeable to 204 C intermittent
Copper Seal Bonnet:
CF flanges
CILV O-Ring and Gasket Kits
Port OD
.38-1.0
1.5
2.0
2.5
3.0
Model Number
Price
CSV-075-95
CSV-150-95
CSV-200-95
CSV-250-95
CSV-300-95
B
C
Options
O-rings
Heater Jackets
VALVE-LIT 9/02
PNEUMATICALLY ACTUATED IN-LINE VALVES

Pneumatically Actuated Viton Seal In-Line Valves
Model
Number
Port
OD
ILVP-038
ILVP-0382-CF
ILVP-0382-NWB
ILVP-050
ILVP-0502-CF
ILVP-0502-NWB
ILVP-075
ILVP-0752-CF
ILVP-0752-NWB
ILVP-100
ILVP-1002-CF
ILVP-1002-NWB
ILVP-150
ILVP-1502-CF
ILVP-1502-NWB
ILVP-200
ILVP-2002-CF
ILVP-2002-NWB
ILVP-2002-ASA
ILVP-250
ILVP-2502-CF
ILVP-2502-ISO
ILVP-2502-ASA
ILVP-300
ILVP-3002-CF
ILVP-3002-ISO
ILVP-3002-ASA
ILVP-400
ILVP-4002-CF
ILVP-4002-ISO
ILVP-4002-ASA
.38
.50
.75
1.00
1.50
2.00
2.50
3.00
4.00
Description
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
Rotatable ASA-7.5-400R on Both Ports
1.50
1.60
1.65
1.50
1.60
1.65
2.00
2.50
2.15
1.88
2.05
2.03
2.25
2.46
2.40
3.25
3.48
3.40
3.50
3.00
3.38
3.25
3.25
3.25
3.53
3.50
3.50
4.22
4.66
4.47
4.47
B
.94
.94
.94
1.00
1.00
1.00
1.12
1.12
1.12
1.37
1.37
1.37
1.88
1.88
1.88
2.62
2.62
2.62
2.62
3.12
3.12
3.12
3.12
3.68
3.68
3.68
3.68
4.88
4.88
4.88
4.88
1.50
1.50
1.50
1.62
1.62
1.62
1.87
1.87
1.87
2.25
2.25
2.25
3.12
3.12
3.12
4.12
4.12
4.12
4.12
4.93
4.93
4.93
4.93
5.62
5.62
5.62
5.62
7.38
7.38
7.38
7.38
3.62
3.62
3.62
3.75
3.75
3.75
4.00
4.00
4.00
4.25
4.25
4.25
5.86
5.86
5.86
7.62
7.62
7.62
7.62
9.11
9.11
9.11
9.11
9.98
9.98
9.98
9.98
12.83
12.83
12.83
12.83
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
3.00
3.00
3.00
3.50
3.50
3.50
3.50
4.00
4.00
4.00
4.00
4.50
4.50
4.50
4.50
6.50
6.50
6.50
6.50
Specifications
E
F
D
B
C

.38 to 2.0 OD: air-to-open, spring-to-close
Over 2 OD: air-to-open, air-to-close
Price
5.76
5.76
5.76
5.89
5.89
5.89
6.14
6.14
6.14
6.39
6.39
6.39
8.45
8.45
8.45
12.11
12.11
12.11
12.11
12.03
12.03
12.03
12.03
13.38
13.38
13.38
13.38
18.27
18.27
18.27
18.27
ILVP O-Ring Kits

Port OD
.38-1.0
1.5
2.0
2.5
3.0
4.0
Model Number Price

ESVP-075-95
ESVP-150-95
ESVP-200-95
ESVP-250-95
ESVP-300-95
ESVP-400-95
Options
O-rings
Air Solenoids
Micro-Switch
Actuators
Heater Jackets
VALVE-LIT 9/02
PNEUMATICALLY ACTUATED IN-LINE VALVES

Pneumatically Actuated Copper Seal Bonnet In-Line Valves
Model
Number
Port
OD
CILVP-038
CILVP-0382-CF
CILVP-050
CILVP-0502-CF
CILVP-075
CILVP-0752-CF
CILVP-100
CILVP-1002-CF
CILVP-150
CILVP-1502-CF
CILVP-200
CILVP-2002-CF
CILVP-250
CILVP-2502-CF
CILVP-300
CILVP-3002-CF
CILVP-400
CILVP-4002-CF
.38
.50
.75
1.00
1.50
2.00
2.50
3.00
4.00
Description
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
1.50
1.60
1.50
1.60
2.00
2.50
1.88
2.05
2.25
2.46
3.25
3.48
3.00
3.38
3.25
3.53
4.22
4.66
B
.94
.94
1.00
1.00
1.12
1.12
1.37
1.37
1.88
1.88
2.62
2.62
3.12
3.12
3.62
3.62
4.88
4.88
1.50
1.50
1.62
1.62
1.87
1.87
2.25
2.25
3.12
3.12
4.12
4.12
4.93
4.93
5.55
5.55
7.38
7.38
3.74
3.74
3.88
3.88
4.12
4.12
4.38
4.38
5.86
5.86
7.50
7.50
9.11
9.11
9.98
9.98
12.83
12.83
2.73
2.73
2.73
2.73
2.73
2.73
2.73
2.73
3.25
3.25
4.05
4.05
4.61
4.61
5.62
5.62
6.73
6.73
Price
5.76
5.76
5.89
5.89
6.14
6.14
6.39
6.39
8.44
8.44
12.11
12.11
12.03
12.03
13.38
13.38
18.27
18.27
Specifications
CILVP O-Ring and Gasket Kits

.38 to 2.0 OD: air-to-open, spring-to-close
Over 2 OD: air-to-open, air-to-close
O-rings
Air Solenoids
Micro-Switch
Actuators
Heater Jackets
Model Number
.38-1.0
1.5
2.0
2.5
3.0
4.0
CSVP-075-95
CSVP-150-95
CSVP-200-95
CSVP-250-95
CSVP-300-95
CSVP-400-95
Price
B
C
Options
Port OD
VALVE-LIT 9/02
MANUALLY OPERATED TEE VALVES

Manually Operated Viton Seal Tee Valves
Model
Number
Port
OD
ESV-038T
ESV-0383T-CF
ESV-0383T-NWB
ESV-050T
ESV-0503T-CF
ESV-0503T-NWB
ESV-075T
ESV-0753T-CF
ESV-0753T-NWB
ESV-100T
ESV-1003T-CF
ESV-1003T-NWB
ESV-150T
ESV-1503T-CF
ESV-1503T-NWB
ESV-200T
ESV-2003T-CF
ESV-2003T-NWB
ESV-2003T-ASA
ESV-250T
ESV-2503T-CF
ESV-2503T-ISO
ESV-2503T-ASA
ESV-300T
ESV-3003T-CF
ESV-3003T-ISO
ESV-3003T-ASA
.38
.50
.75
1.00
1.50
2.00
2.50
3.00
Description
No Flanges
Rotatable 1.33 CF on All Ports
NW-10B on All Ports
No Flanges
NW-10B on All Ports
No Flanges
NW-16B on All Ports
No Flanges
NW-25B on All Ports
No Flanges
NW-40B on All Ports
No Flanges
NW-50B on All Ports
Rotatable ASA-5-200R on All Ports
No Flanges
ISO-63-250-OF on All Ports
No Flanges
1.50
1.60
1.65
1.50
1.60
1.65
2.00
2.50
2.15
1.88
2.05
2.03
2.25
2.46
2.40
3.25
3.48
3.40
3.25
3.00
3.38
3.25
3.25
3.25
3.53
3.50
3.50
4.06
4.16
4.21
4.06
4.16
4.21
4.56
5.06
4.71
4.32
4.49
4.47
5.63
5.84
5.78
7.85
8.08
8.00
8.10
8.27
8.65
8.52
8.52
8.68
8.96
8.93
8.93
4.44
4.54
4.59
4.56
4.66
4.71
5.31
5.81
5.46
5.32
5.49
5.47
7.13
7.34
7.28
9.85
10.08
10.00
10.10
10.77
11.15
11.02
11.02
11.68
11.96
11.93
11.93
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
3.00
3.00
3.00
3.50
3.50
3.50
3.50
4.00
4.00
4.00
4.00
4.50
4.50
4.50
4.50
Price
Specifications
ESV-T O-Ring Kits
Port OD

Vacuum port on bottom
Viton Seal Bonnet:
.38-1.0
1.5
2.0
2.5
3.0
Model Number
Price
ESV-075-95
ESV-150-95
ESV-200-95
ESV-250-95
ESV-300-95
Options
O-rings
Heater Jackets
VALVE-LIT 9/02
MANUALLY OPERATED TEE VALVES

Manually Operated Copper Seal Bonnet Tee Valves
Model
Number
Port
OD
CSV-038T
CSV-0383T-CF
CSV-050T
CSV-0503T-CF
CSV-075T
CSV-0753T-CF
CSV-100T
CSV-1003T-CF
CSV-150T
CSV-1503T-CF
CSV-200T
CSV-2003T-CF
CSV-250T
CSV-2503T-CF
CSV-300T
CSV-3003T-CF
Description
.38
1.33
.50
1.33
.75
1.33
1.00
2.12
1.50
2.75
2.00
3.38
2.50
4.50
3.00
4.62
No Flanges
Rotatable CF on All Ports
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
1.50
1.60
1.50
1.60
2.00
2.50
1.88
2.05
2.25
2.46
3.25
3.48
3.00
3.38
3.25
3.53
4.06
4.16
4.06
4.16
4.56
5.06
4.32
4.49
5.63
5.84
7.85
8.08
8.27
8.65
8.68
8.96
4.44
4.54
4.56
4.66
5.31
5.81
5.32
5.49
7.13
7.34
9.85
10.08
10.77
11.15
11.68
11.96
2.73
2.73
2.73
2.73
2.73
2.73
2.73
2.73
3.25
3.25
4.05
4.05
4.61
4.61
5.62
5.62
Price
Specifications
C
B

Copper Seal Bonnet:
CF flanges
CSV-T O-Ring & Gasket Kits

Port OD
Model Number
.38-1.0
1.5
2.0
2.5
3.0
CSV-075-95
CSV-150-95
CSV-200-95
CSV-250-95
CSV-300-95
Price
Options
A
O-rings
Heater Jackets
VALVE-LIT 9/02
PNEUMATICALLY ACTUATED TEE VALVES

Pneumatically Actuated Viton Seal Tee Valves
Model
Number
Port
OD
ESVP-038T
ESVP-0383T-CF
ESVP-0383T-NWB
ESVP-050T
ESVP-0503T-CF
ESVP-0503T-NWB
ESVP-075T
ESVP-0753T-CF
ESVP-0753T-NWB
ESVP-100T
ESVP-1003T-CF
ESVP-1003T-NWB
ESVP-150T
ESVP-1503T-CF
ESVP-1503T-NWB
ESVP-200T
ESVP-2003T-CF
ESVP-2003T-NWB
ESVP-2003T-ASA
ESVP-250T
ESVP-2503T-CF
ESVP-2503T-ISO
ESVP-2503T-ASA
ESVP-300T
ESVP-3003T-CF
ESVP-3003T-ISO
ESVP-3003T-ASA
ESVP-400T
ESVP-4003T-CF
ESVP-4003T-ISO
ESVP-4003T-ASA
.38
.50
.75
1.00
1.50
2.00
2.50
3.00
4.00
Description
No Flanges
NW-10B on All Ports
No Flanges
NW-10B on All Ports
No Flanges
NW-16B on All Ports
No Flanges
NW-25B on All Ports
No Flanges
NW-40B on All Ports
No Flanges
NW-50B on All Ports
No Flanges
No Flanges
No Flanges
Rotatable ASA-7.5-400R on All Ports
1.50
1.60
1.65
1.50
1.60
1.65
2.00
2.50
2.15
1.88
2.05
2.03
2.25
2.46
2.40
3.25
3.48
3.40
3.50
3.00
3.38
3.25
3.25
3.25
3.53
3.50
3.50
4.22
4.66
4.47
4.47
3.62
3.67
3.77
3.62
3.67
3.77
4.12
4.62
4.27
3.88
4.05
4.03
4.98
5.19
5.13
6.74
6.97
6.89
6.99
7.18
7.56
7.43
7.43
7.62
7.90
7.87
7.87
9.55
9.99
9.80
9.80
5.77
5.87
5.92
5.77
5.87
5.92
6.26
6.76
6.41
6.02
6.19
6.17
7.56
7.77
7.71
11.23
11.46
11.38
11.48
10.10
10.48
10.35
10.35
11.00
11.28
11.25
11.25
14.99
15.43
15.24
15.24
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
2.25
3.00
3.00
3.00
3.50
3.50
3.50
3.50
4.00
4.00
4.00
4.00
4.50
4.50
4.50
4.50
6.50
6.50
6.50
6.50
Price
Specifications
ESVP-T O-Ring Kits

.38 to 2 inch ODs: air-to-open,
spring-to-close
2 to 4 inch ODs: air-to-open, air-to-close
Options
O-rings
Air Solenoids
Micro-Switch
Actuators
Heater Jackets
Port OD
Model Number
.38-1.0
1.5
2.0
2.5
3.0
4.0
ESVP-075-95
ESVP-150-95
ESVP-200-95
ESVP-250-95
ESVP-300-95
ESVP-400-95
Price
VALVE-LIT 9/02
PNEUMATICALLY ACTUATED TEE VALVES

Pneumatically Actuated Copper Seal Bonnet Tee Valves
Model
Number
Port
OD
CSVP-038T
CSVP-0383T-CF
CSVP-050T
CSVP-0503T-CF
CSVP-075T
CSVP-0753T-CF
CSVP-100T
CSVP-1003T-CF
CSVP-150T
CSVP-1503T-CF
CSVP-200T
CSVP-2003T-CF
CSVP-250T
CSVP-2503T-CF
CSVP-300T
CSVP-3003T-CF
CSVP-400T
CSVP-4003T-CF
.38
.50
.75
1.00
1.50
2.00
2.50
3.00
4.00
Description
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
No Flanges
1.50
1.60
1.50
1.60
2.00
2.50
1.88
2.05
2.25
2.46
3.25
3.48
3.00
3.38
3.25
3.53
4.22
4.66
3.75
3.85
3.75
3.85
4.25
4.75
4.00
4.17
4.98
5.19
6.62
6.85
7.18
7.56
7.62
7.90
9.55
9.99
5.77
5.82
5.77
5.82
6.26
6.76
6.02
6.19
7.56
7.77
11.23
10.58
10.10
10.48
11.00
11.28
14.99
15.43
2.73
2.73
2.73
2.73
2.73
2.73
2.73
2.73
3.25
3.25
4.05
4.05
4.61
4.61
5.62
5.62
6.73
6.73
Price
Specifications
CSVP-T O-Ring & Gasket Kits

.38 to 2 inch ODs: air-to-open,
spring-to-close
2 to 4 inch ODs: air-to-open, air-to-close
Options
Port OD
Model Number
.38-1.0
1.5
2.0
2.5
3.0
4.0
CSVP-075-95
CSVP-150-95
CSVP-200-95
CSVP-250-95
CSVP-300-95
CSVP-400-95
Price
O-rings
Air Solenoids
Micro-Switch
Actuators
Heater Jackets
VALVE-LIT 9/02
MANUALLY OPERATED STRAIGHT-THROUGH VALVES

Manually Operated Viton Seal Straight-Through Valves
Model
Number
Port
ID*
Port
OD
Description
STV-075
STV-0752-CF
STV-0752-NWB
.65
.65
.65
.75
.75
.75
No Flanges
STV-112
STV-1122-CF
STV-1122-NWB
1.00
1.00
1.00
1.12
1.12
1.12
STV-150
STV-1502-CF
STV-1502-NWB
1.38
1.38
1.38
1.50
1.50
1.50
5.00
6.00
5.30
3.30
3.30
3.30
4.50
4.50
4.50
2.25
2.25
2.25
No Flanges
5.50
5.83
5.80
3.86
3.86
3.86
5.15
5.15
5.15
3.00
3.00
3.00
No Flanges
7.00
7.42
7.30
5.47
5.47
5.47
7.69
7.69
7.69
3.50
3.50
3.50
Price
* Full opening straight-through diameter
Manually Operated Copper Seal Bonnet Straight-Through Valves

Model
Number
Port
ID*
Port
OD
Description
CSTV-075
CSTV-0752-CF
.65
.65
.75
.75
No Flanges
CSTV-150
CSTV-1502-CF
1.38
1.38
1.50
1.50
No Flanges
5.00
6.00
3.51
3.51
4.71
4.71
2.73
2.73
7.00
7.42
5.47
5.47
7.69
7.69
4.05
4.05
Price
Specifications
Full-opening, straight-through ID
.75, 1.13 and 1.5 inch port ODs
rating, CF and NW flanges
Copper Seal Bonnet: 10-10 Torr vacuum
rating, CF flanges
C B
A
Options
O-rings
CF Flanges
D
Bored NW
Flanges
Heater Jackets
STV O-Ring Kits

Port OD
Model Number
.75
1.12
1.50
ESV-075-95
STV-112-95
STV-150-95
Price
CSTV O-Ring & Gasket Kits

Port OD
Model Number
.75
1.50
CSV-075-95
CSTV-150-95
Price
VALVE-LIT 9/02
PNEUMATICALLY ACTUATED STRAIGHT-THROUGH VALVES

Pneumatically Actuated Viton Seal Straight-Through Valves
Model
Number
Port
ID*
Port
OD
Description
STVP-075
STVP-0752-CF
STVP-0752-NWB
.65
.65
.65
.75
.75
.75
No Flanges
5.00
6.00
5.30
3.92
3.92
3.92
2.25
2.25
2.25
STVP-112
STVP-1122-CF
STVP-1122-NWB
1.00
1.00
1.00
1.12
1.12
1.12
No Flanges
5.50
5.83
5.80
5.10
5.10
5.10
3.00
3.00
3.00
STVP-150
STVP-1502-CF
STVP-1502-NWB
1.38
1.38
1.38
1.50
1.50
1.50
No Flanges
7.00
7.42
7.30
6.11
6.11
6.11
3.50
3.50
3.50
Price
Pneumatically Actuated Copper Seal Bonnet Straight-Through Valves

Model
Number
Port
ID*
Port
OD
Description
CSTVP-075
CSTVP-0752-CF
.65
.65
.75
.75
No Flanges
5.00
6.00
3.92
3.92
2.73
2.73
CSTVP-150
CSTVP-1502-CF
1.38
1.38
1.50
1.50
No Flanges
7.00
7.42
6.11
6.11
4.05
4.05
Price
Bored
NW Flanges
CF Flanges
B
A
A
Specifications
CSTVP O-Ring & Gasket Kits

Full-opening, straight-through ID
.75, 1.13 and 1.5 inch ODs
.75 inch OD: air-to-open, spring-to-close
1.13 and 1.5 inch OD: air-to-open/close
rating, CF and NW flanges
Options
O-rings
Micro-switch
Heater Jackets
Port OD
Model Number
.75
1.50
CSVP-075-95
CSTVP-150-95
Price
STVP O-Ring Kits

Port OD
.75
1.12
1.50
Model Number
Price
ESVP-075-95
STVP-112-95
STVP-150-95
Air Solenoids
Actuators
VALVE-LIT 9/02
BAKEABLE ALL-METAL VALVES

Manually Operated All-Metal Angle Valves
Nor-Cals new series of metal seal
angle valves are intended for use in
UHV or cryogenic applications where
temperature extremes preclude the use
of our elastomer seal valves. Approved
for use in beamline facilities, these
valves have a temperature operating
range from 400C to -250C.
Maximum temperature bakeouts may
require poppet seal replacement after 50
cycles, while hundreds of cycles are
possible with moderate bakeouts. A dial
indicator at the top of the valve indicates
the proper torque for closure and also
when the seal should be replaced.
The poppet seal is easily replaced with a
slotted screw driver. After seal replacement
the valve must be torqued to a higher value
than during normal operation to make it
seat. (See torque specifications table on
this page) After closing the valve to its
normal torque value loosen the set screw
below the closure nut, rotate the indicator
to the furthest counter-clockwise line on
top of the valve and retighten the set screw.
The valve may be closed to this mark
indefinitely. Periodic checks with a torque
wrench will indicate seat wear and the
proper mark to use for alignment. When
the indicator has reached the last mark we
recommend seal replacement. Do not
exceed the maximum torque specifications.
Model
Number
Port
OD
Description
AMV-0752-CF
AMV-1502-CF
.75
1.50

1.50
2.45
5.40
6.87
1.50
1.50
Port lengths that match other manufacturers' products are available upon request.
Price
$ 495.00
$ 520.00
SEALING MECHANISM
Stainless Steel
Bellows
OFHC Copper
Poppet Seal
B
Stainless Steel
Knife Edge Seat
Torque Specifications (Inch Pounds)

Model Number
AMV-075-CF
AMV-150-CF
Port OD
(Open)
B
Seating Normal Maximum

60
120
50
100
120
200
Replacement Poppet Seals
Specifications
Bakeable to 400C open, 300C closed

Operable at cryogenic temperatures
Vacuum rated to below 10-10 Torr
Beamline approved
All stainless steel construction
Electropolished surfaces
Extended life stainless steel bellows
Easily replaceable copper poppet seal
Pulled port body for higher
conductance
Clean room assembled
Leak rate 10-10 std. cc./sec. or less
DiaI indicator for closure
Heater Jackets available
.75
1.50
Model Number
AMV-075-95
AMV-150-95
VALVE-LIT 4/03
GATE VALVES
Specifications
General Information
Bakeability
Nor-Cal stainless steel gate valves share

with our poppet valves the innovative
design, highest grade materials and
superior workmanship that has made us a
major supplier of valves to the vacuum
industry. The estimated service interval on
these valves is 100,000 cycles, depending
on the application.
Nor-Cal gate valves with Viton seal

bonnet and gate and standard Reed-switch
position indicators are bakeable to 150C,
as long as the actuator is not baked above
60C. A gate valve with copper seal
bonnet, Viton gate and micro-switch
option can be baked to 200C, except for
the actuator. With the air solenoid and
position indicators removed, a copper seal
bonnet valve with high temperature Kalrez
gate O-ring can be baked to 250C with the
gate in the open position. Silicone heater
jackets for bakeouts up to 200C can be
provided. Please ask your Nor-Cal
representative for pricing.
304 SS vacuum furnace brazed body

Electropolished inside and out
Welded AM-350 bellows
Viton gate O-ring, standard
1.5 to 12 inch nominal IDs
Helium leak rate 2x10-9 std. cc./sec.
Maximum Pressure Differential:
At Opening:
4 inch ID or smaller:
760 Torr on gate side,
20 torr on carriage side
Greater than 4 inch ID:
20 Torr either direction
Closed: 760 Torr in either direction
Viton Seal Bonnet: 10-9 Torr
vacuum rating, Bakeable to 150C
Copper Seal Bonnet: 10-10 Torr vacuum
rating, Bakeable to 200C with CF flanges
and gate in open position
Pneumatically Actuated: Normally closed
120V, 50/60Hz air solenoid, standard,
Maximum 80 psig operating air
pressure, standard. (Higher operating
pressures available upon request)
Reed-switch position indicator, standard
Manually operated:
Options
Micro-switch
O-rings
Air Solenoids
Heater Jackets
Our gate valves have an ultra-slim profile

which makes them perfect for applications
where space is limited, and their smaller
volume results in lower outgassing and
faster pumpdown. Larger sizes have a
unique feature in the actuator which
dampens the vibration which can arise
when the gate is opened. This makes these
valves ideal for semiconductor and other
vibration sensitive processes. The carriage
assembly and actuator can be removed
without disassembling the body from the
system for easy maintenance. The 304
stainless steel bodies are vacuum furnace
brazed to 1100C at 10-6 Torr before being
electropolished inside and out. The welded
AM-350 bellows have a short stroke for a
longer cycle life.
Nor-Cal gate valves are available with
NW(ISO-KF), ISO(clamp and bolt type),
CF and ASA flanges in port sizes from
1.5 to 12 inches. Larger sizes are available
upon request. Choose from manual or
pneumatic actuation and Viton or
copper seal bonnet.
How to Specify Options

One or more options can be ordered by
adding the option suffix to the basic valve
model number. Please add the option
suffixes in the following order:
1. Micro-switch: "-M" (Add $300 to price)
2. O-ring: "-KT" = high temp Kalrez
"-KC"= chemical resistant Kalrez
"-CR"= Chemraz
" -S "= Silicone
3. Air Solenoid: (See table below)
Examples of model numbers with options:
GVP-4002-ISO-M-S32
GVMP-4002-CF-KT-S22
Air Solenoid Options

All pneumatic gate valves come standard with a 4-Way, 120V, 50/60Hz air solenoid. Solenoids
are mounted on all Viton seal bonnet gate valves with four inch ID and larger. Solenoids for
Viton seal bonnet gate valves with under four inch ID and all sizes of copper seal gate valves are
shipped unmounted with the valve. Solenoids for these valves can be provided mounted with
an optional mounting bracket for an additional $55.00. Specify when ordering. Specify other
Air solenoid options by adding the correct suffix to model number. See chart below. Example:
GVMP-1502-CF-S22. Air Solenoids can be ordered separately. Call for price and part number.
Option
(standard)
S22
S32
S42
Description
Price
4-way, 120V AC, 60 Hz

4-way, 24V DC
4-way, 240V AC, 50/60 Hz
4-way, 24V AC, 50/60 Hz
VALVE-LIT 9/02
MANUALLY OPERATED GATE VALVES

Manually Operated Viton Seal Gate Valves
Nom
ID
Model
Number
Flange Conductance
Type (molecular-l/sec.) A
1.5
GV-1502-NW
GV-1502-CF
NW-40
2.75 CF
130
130
2.0
GV-2002-NW
GV-2002-CF
NW-50
3.38 CF
2.5
GV-2502-CF
GV-2502-ASA
GV-2502-ISO
GV-2502-ISO-OF
3.0
4.69
4.69
3.40
3.40
1.99
2.03
2.00
2.00
3.61
3.61
3.31
3.31
2.45
2.45
220
300
5.60
5.60
4.12
4.12
1.99
2.28
2.00
2.00
3.61
3.61
3.81
3.81
2.96
2.96
4.50 CF
ASA-6*
ISO-63
ISO-63-OF
520
610
610
320
6.50
6.50
6.50
6.50
4.81
4.81
4.81
4.81
2.40
2.03
2.03
3.46
2.00
2.00
2.00
2.00
3.61
3.61
3.61
3.61
4.37
4.37
4.37
4.37
3.52
3.52
3.52
3.52
GV-3002-CF
GV-3002-ASA
GV-3002-ISO
GV-3002-ISO-OF
4.62 CF
ASA-7.5*
ISO-80
ISO-80-OF
840
1070
1070
550
7.70
7.70
7.70
7.70
5.77
5.77
5.77
5.77
2.53
2.03
1.97
3.84
2.00
2.00
2.00
2.00
3.61
3.61
3.61
3.61
4.94
4.94
4.94
4.94
4.28
4.28
4.28
4.28
4.0
GV-4002-CF
GV-4002-ASA
GV-4002-ISO
GV-4002-ISO-OF
6.00 CF
ASA-9*
ISO-100
ISO-100-OF
1700
2100
2100
1900
10.76
10.76
10.76
10.76
8.13
8.13
8.13
8.13
2.97
2.41
2.41
4.25
3.11
3.11
3.11
3.11
7.90
7.90
7.90
7.90
7.00
7.00
7.00
7.00
5.65
5.65
5.65
5.65
6.0
GV-6002-CF
GV-6002-ASA
GV-6002-ISO
GV-6002-ISO-OF
8.00 CF
ASA-11*
ISO-160
ISO-160-OF
5400
7100
7100
4000
14.07
14.07
14.07
14.07
10.64
10.64
10.64
10.64
3.17
2.41
2.36
4.25
3.11
3.11
3.11
3.11
7.90
7.90
7.90
7.90
8.75
8.75
8.75
8.75
7.55
7.55
7.55
7.55
8.0
GV-8002-CF
GV-8002-ASA
GV-8002-ISO
GV-8002-ISO-OF
10.00 CF
ASA-11*
ISO-200
ISO-200-OF
12200
14500
15200
9500
18.42
18.42
18.42
18.42
13.93
13.93
13.93
13.93
3.35
2.76
2.66
4.25
3.11
3.11
3.11
3.11
7.90
7.90
7.90
7.90
11.25
11.25
11.25
11.25
10.02
10.02
10.02
10.02
10.0
GV-10002-CF
GV-10002-ASA
GV-10002-ISO
GV-10002-ISO-OF
12.00 CF
ASA-16*
ISO-250
ISO-250-OF
24900
24800
26900
15400
24.04
24.04
24.04
24.04
18.30
18.30
18.30
18.30
3.65
3.15
3.15
5.51
8.98
8.98
8.98
8.98
12.00
12.00
12.00
12.00
13.44
13.44
13.44
13.44
11.99
11.99
11.99
11.99
12.0
GV-12002-CF
GV-12002-ASA
GV-12002-ISO
GV-12002-ISO-OF
14.00 CF
ASA-16*
ISO-320
ISO-320-OF
34600
42800
42800
24500
28.89
28.89
28.89
28.89
22.03
22.03
22.03
22.03
3.89
3.15
3.15
4.67
8.98
8.98
8.98
8.98
12.00
12.00
12.00
12.00
15.90
15.90
15.90
15.90
14.28
14.28
14.28
14.28
*Without O-ring grooves. Grooves can be provided on request.
Price
Dimensions in inches.
Non-rotatable CF or ASA Flanges
Specifications
NW or ISO Flanges
1.5 to 12 inch nom. IDs

Acme threads for
fewer turns
Viton Seal Bonnet:
10-9 Torr vacuum
rating, Bakeable to 150C,
Handles
extend on
all 10" and 12"
manual gate valves
B A
B A
Options
O-rings
Heater Jackets
G
VALVE-LIT 9/02
MANUALLY OPERATED GATE VALVES

Manually Operated Copper Seal Bonnet Gate Valves
Nom
ID
Model
Number
1.5
2.0
2.5
3.0
4.0
6.0
8.0
10.0
12.0
GVM-1502-CF
GVM-2002-CF
GVM-2502-CF
GVM-3002-CF
GVM-4002-CF
GVM-6002-CF
GVM-8002-CF
GVM-10002-CF
GVM-12002-CF
Flange
Conductance
Type (molecular-l/sec.) A
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
10.00 CF
12.00 CF
14.00 CF
130
300
520
840
1700
5400
12200
24900
34600
4.69
5.60
6.50
7.70
10.76
14.07
18.42
24.04
28.89
3.40
4.12
4.81
5.77
8.13
10.64
13.93
18.30
22.03
2.03
2.28
2.40
2.53
2.97
3.17
3.35
3.65
3.89
2.00
2.00
2.00
2.00
3.11
3.11
3.11
8.98
8.98
3.57
3.61
3.61
3.61
7.90
7.90
7.90
12.12
12.12
3.31
3.81
4.37
5.24
7.00
8.75
11.25
13.44
15.90
2.45
2.96
3.52
4.28
5.65
7.55
10.02
11.99
14.28
Larger sizes are available upon request
Price
Specifications
GV O-Ring Kits
Non-Rotatable CF Flanges

Copper Seal Bonnet:
10-10 Torr Vacuum rating,
Bakeable to 200C with CF flanges
Nom. ID
D
Options
Handles
flip out
on all 10"
and 12"
manual
gate
valves
O-rings
Heater Jackets
B A
1.5
2.0
2.5
3.0
4.0
6.0
8.0
10.0
12.0
Model Number
Price
GV-150-95
GV-200-95
GV-250-95
GV-300-95
GV-400-95
GV-600-95
GV-800-95
GV-1000-95
GV-1200-95
GVM O-Ring and Gasket Kits

Nom. ID
Model Number
1.5
2.0
2.5
3.0
4.0
6.0
8.0
10.0
12.0
GVM-150-95
GVM-200-95
GVM-250-95
GVM-300-95
GVM-400-95
GVM-600-95
GVM-800-95
GVM-1000-95
GVM-1200-95
Price
VALVE-LIT 9/02
PNEUMATICALLY ACTUATED GATE VALVES

Pneumatically Actuated Viton Seal Gate Valves
Nom
ID
Model
Number
Flange Conductance
Type (molecular-l/sec.)
1.5
GVP-1502-NW
GVP-1502-CF
NW-40
2.75 CF
2.0
GVP-2002-NW
GVP-2002-CF
2.5
130
130
4.69
4.69
3.40
3.40
1.99
2.03
2.00
2.00
5.29
5.29
3.31
3.31
2.45
2.45
NW-50
3.38 CF
220
300
5.60
5.60
4.12
4.12
1.99
2.28
2.00
2.00
5.29
5.29
3.81
3.81
2.96
2.96
GVP-2502-CF
GVP-2502-ASA
GVP-2502-ISO
GVP-2502-ISO-OF
4.50 CF
ASA-6*
ISO-63
ISO-63-OF
520
610
610
320
6.50
6.50
6.50
6.50
4.81
4.81
4.81
4.81
2.40
2.03
2.03
3.46
2.00
2.00
2.00
2.00
5.29
5.29
5.29
5.29
4.37
4.37
4.37
4.37
3.52
3.52
3.52
3.52
3.0
GVP-3002-CF
GVP-3002-ASA
GVP-3002-ISO
GVP-3002-ISO-OF
4.62 CF
ASA-7.5*
ISO-80
ISO-80-OF
840
1070
1070
550
7.70
7.70
7.70
7.70
5.77
5.77
5.77
5.77
2.53
2.03
1.97
3.84
2.00
2.00
2.00
2.00
5.29
5.29
5.29
5.29
4.94
4.94
4.94
4.94
4.28
4.28
4.28
4.28
4.0
GVP-4002-CF
GVP-4002-ASA
GVP-4002-ISO
GVP-4002-ISO-OF
6.00 CF
ASA-9*
ISO-100
ISO-100-OF
1700
2100
2100
1900
10.76
10.76
10.76
10.76
8.13
8.13
8.13
8.13
2.97
2.41
2.41
4.25
2.97
2.97
2.97
2.97
6.95
6.95
6.95
6.95
7.00
7.00
7.00
7.00
5.65
5.65
5.65
5.65
6.0
GVP-6002-CF
GVP-6002-ASA
GVP-6002-ISO
GVP-6002-ISO-OF
8.00 CF
ASA-11*
ISO-160
ISO-160-OF
5400
7100
7100
4000
14.07
14.07
14.07
14.07
10.64
10.64
10.64
10.64
3.17
2.41
2.36
4.25
2.97
2.97
2.97
2.97
6.95
6.95
6.95
6.95
8.75
8.75
8.75
8.75
7.55
7.55
7.55
7.55
8.0
GVP-8002-CF
GVP-8002-ASA
GVP-8002-ISO
GVP-8002-ISO-OF
10.00 CF
ASA-11*
ISO-200
ISO-200-OF
12200
14500
15200
9500
18.42
18.42
18.42
18.42
13.93
13.93
13.93
13.93
3.35
2.76
2.66
4.25
2.97
2.97
2.97
2.97
6.95
6.95
6.95
6.95
11.25
11.25
11.25
11.25
10.02
10.02
10.02
10.02
10.0
GVP-10002-CF
GVP-10002-ASA
GVP-10002-ISO
GVP-10002-ISO-OF
12.00 CF
ASA-16*
ISO-250
ISO-250-OF
24900
24800
26900
15400
24.04
24.04
24.04
24.04
18.30
18.30
18.30
18.30
3.65
3.15
3.15
5.51
4.75
4.75
4.75
4.75
9.47
9.47
9.47
9.47
13.44
13.44
13.44
13.44
11.99
11.99
11.99
11.99
12.0
GVP-12002-CF
GVP-12002-ASA
GVP-12002-ISO
GVP-12002-ISO-OF
14.00 CF
ASA-16*
ISO-320
ISO-320-OF
34600
42800
42800
24500
28.89
28.89
28.89
28.89
22.03
22.03
22.03
22.03
3.89
3.15
3.15
4.67
4.75
4.75
4.75
4.75
9.47
9.47
9.47
9.47
15.90
15.90
15.90
15.90
14.28
14.28
14.28
14.28
*Without O-ring grooves. Grooves can be provided on request.
Specifications
D
Dimensions in inches.
NW or ISO Flanges
Non-Rotatable CF or ASA Flanges
Price
B A
B A

Normally closed
4 way, 120V, 60Hz air solenoid, standard
rating, Bakeable to 150C, CF, NW,
ISO and ASA flanges
Options
G
NOTE: Solenoids for Viton seal bonnet gate valves with under four inch ID and all sizes of copper
seal gate valves are shipped unmounted with the valve. Solenoids for these valves can be provided
mounted with an optional mounting bracket for an additional $55.00. Specify when ordering.
O-rings
Micro-Switch
Air Solenoids
Heater Jackets
VALVE-LIT 9/02
PNEUMATICALLY ACTUATED GATE VALVES

Pneumatically Actuated Copper Seal Bonnet Gate Valves
Nom. Model
ID
Number
Flange Conductance
Type (molecular-l/sec.)
1.5
2.0
2.5
3.0
4.0
6.0
8.0
10.0
12.0
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
10.00 CF
12.00 CF
14.00 CF
GVMP-1502-CF
GVMP-2002-CF
GVMP-2502-CF
GVMP-3002-CF
GVMP-4002-CF
GVMP-6002-CF
GVMP-8002-CF
GVMP-10002-CF
GVMP-12002-CF
130
300
520
840
1700
5400
12200
24900
34600
4.69
5.60
6.50
7.70
10.76
14.07
18.42
24.04
28.89
3.40
4.12
4.81
5.77
8.13
10.64
13.93
18.30
22.03
2.03
2.28
2.40
2.53
2.97
3.17
3.35
3.65
3.89
2.00
2.00
2.00
2.00
2.97
2.97
2.97
4.75
4.75
5.29
5.29
5.29
5.29
6.95
6.95
6.95
9.47
9.47
3.31
3.81
4.37
5.24
7.00
8.75
11.25
13.44
15.90
2.45
2.96
3.52
4.28
5.65
7.55
10.02
11.99
14.28
Larger sizes are available upon request.
Specifications
O-rings
Micro-Switch
Air Solenoids
Heater Jackets
GVP O-Ring Kits
Non-Rotatable CF Flanges

Normally closed
4-way, 120V, 60Hz air solenoid, standard
Solenoid is bagged and shipped
unmounted with valve
Copper Seal Bonnet:
10-10 Torr Vacuum rating,
Bakeable to 200C with CF flanges
Options
Price
B A
Nom. ID
Model Number
1.5
2.0
2.5
3.0
4.0
6.0
8.0
10.0
12.0
GVP-150-95
GVP-200-95
GVP-250-95
GVP-300-95
GVP-400-95
GVP-600-95
GVP-800-95
GVP-1000-95
GVP-1200-95
Price
G
NOTE: Solenoids for Viton seal

bonnet gate valves with under four
inch ID and all sizes of copper seal
gate valves are shipped unmounted
with the valve. Solenoids for these
valves can be provided mounted
with an optional mounting bracket
for an additional $55.00.
Specify when ordering.
GVMP O-Ring & Gasket Kits

Nom. ID
Model Number
1.5
2.0
2.5
3.0
4.0
6.0
8.0
10.0
12.0
GVMP-150-95
GVMP-200-95
GVMP-250-95
GVMP-300-95
GVMP-400-95
GVMP-600-95
GVMP-800-95
GVMP-1000-95
GVMP-1200-95
Price
VALVE-LIT 9/02
MANUAL BALL VALVES
Manual Ball Valves

Ball valves are a low cost, manually operated, straight through
isolation device. Their simple, robust design provides high reliability in dirty applications. They are commonly used on MOCVD and
CVD equipment downstream from the chamber or vacuum pump to
isolate traps or abatement tools. A forged 316L stainless steel body
and Teflon seat make these valves ideal for corrosive environments.
Other applications include vacuum and other facilities requirements.
A quarter-turn of the handle quickly switches the valve from open to
close. They are available with NW-16 through 50 flanges as
standards. Call for other flange configurations.
Port
ID
Model
Number
.75
1.00
1.50
2.00
BV-0752-NWB
BV-1002-NWB
BV-1502-NWB
BV-2002-NWB
Valve
ID
Flange
E
Type
.75
1.00
1.50
1.50
3.82
4.80
5.87
5.69
3.12
3.85
5.20
5.03
.98
1.20
1.67
1.53
2.88
3.75
4.42
4.42
4.75
5.41
7.00
7.00
NW-16
NW-25
NW-40
NW-50
Price
E
Specifications
A
B
Viton stem seal

Teflon ball seal
316L forged stainless steel body
Leak tested to 1x10-9 std.
cc/sec. (helium)
Typical pressure range: 45 psi
to 1x10-9 Torr
Bakeable to 150C
Heater jackets are available on request
VALVE-LIT 9/02
FLANGE DIMENSIONS
Flange Dimensions
This table provides general specifications
on standard flanges for specific valve sizes.
For specific information on a particular
flange refer to the appropriate catalog.
Again, these are standard flanges only.
Other sizes or types of flanges for
Nor-Cal valves are available upon
request. Call your Nor-Cal Products
representative for more information.
Nom
ID
Flange
Type
No. Holes/
Clamps
1.5
NW-40
Thread
Size
-
Bolt
Circle
OD
2.16
2.75 CF
1/
28
2.312
2.75
2.0
NW-50
3.38 CF
5 - 24
16
2.850
2.95
3.37
2.5
4.50 CF
ASA-6*
ISO-63
ISO-63-OF
8
4
4
3-4
3.628
4.750
4.330
-
4.47
6.00
5.12
3.74
4.62 CF
ASA-7.5*
ISO-80
ISO-80-OF
10
4
8
4-8
4.030
6.000
4.920
-
4.62
6.00
5.71
4.33
6.00 CF
ASA-9*
ISO-100
ISO-100-OF
16
8
8
4-8
5.128
7.500
5.710
-
6.00
9.00
6.50
5.12
8.00 CF
ASA-11*
ISO-160
ISO-160-OF
20
8
8
4-8
7.128
9.500
7.870
-
8.00
11.00
9.00
7.09
10.00 CF
ASA-11*
ISO-200
ISO-200-OF
24
8
12
6-12
9.128
9.500
10.240
-
10.00
11.00
11.25
9.45
12.00 CF
ASA-16*
ISO-250
ISO-250-OF
32
12
12
6-12
M10 - 1.50
-
11.181
14.250
12.200
-
12.00
16.00
14.00
11.42
14.00 CF
ASA-16*
ISO-320
ISO-320-OF
30
12
12
8-12
24
- 10
M12 - 1.75
-
12.810
14.250
15.550
-
14.00
16.00
16.73
14.57
3.0
4.0
6.0
8.0
10.0
12.0
4-
16 - 24
3 - 16
8
M8 - 1.25
5
16 - 24
3 - 16
8
M8 - 1.25
5
16 - 24
3 - 16
8
M8 - 1.25
5
16 - 24
3 - 10
4
M10 - 1.50
5
16 - 24
3 - 10
4
M10 - 1.50
5
16 - 24
3 - 10
4
8-
*Without O-ring groove. Grooves can be provided on request.
Kalrez is a registered trademark of DuPont Dow Elastomers.

Viton is a registered trademarks of DuPont Dow Elastomers.
Chemraz is a registered trademark of Green Tweed Co.
Genesis is a registered trademark of Nor-Cal Products, Inc.
Intellisys is a registered trademark of Nor-Cal Products, Inc.
DeviceNet is a registered trademark of Open DeviceNet Vendor
Association
VALVE-LIT 9/02
ADAPTIVE PRESSURE CONTROL TECHNOLOGY

TM
The Fastest, Most Precise Pressure Control System

Nor-Cal Products offers unequalled performance with the Intellisys
downstream pressure control system, providing measurable process
benefits through higher resolution, speed and reliability.
Adaptive Pressure Controller
NEW! IQ-Series Butterfly Valves

Substantial cost and space savings can be realized with the IQ-Series butterfly valves. All the control electronics are incorporated on to the valve motor
drive, resulting in a compact size that is easy to integrate on any system.
Capacitance Diaphragm Gauges
The Intellisys Adaptive Pressure Controller (APC) merges

closed loop motor control with adaptive pressure control
to provide advanced control system performance.
An advanced adaptive algorithm eliminates pressure
overshoot or gradual ramps during pressure transition. A Digital Signal Processor (DSP) enables
DeviceNet communications protocol and
programming flexibility for customer or
process specific requirements.
Nor-Cal Capacitance Diaphragm Gauges (CDG) feature a

ceramic diaphragm designed to help stabilize output noise
due to thermally induced variations found in other metal
diaphragm designs. Heated, non-heated and DeviceNet
compatible gauges are available with several tube fittings
and in standard pressure ranges from 0.1 to 1000 Torr.
Universal Valve Drive

Our Universal Valve Drive (UVD) easily replaces older
drive technology found on other manufacturers pressure
control valves. When used
with our APC, the universal
valve drive can upgrade
a competitive valve to
approach Intellisys
performance levels.
Throttling Butterfly Valves

Intellisys motor control technology
eliminates belts, gears and position
switches, improving reliability,
while increasing speed by at least a
factor of twenty. High-torque
geared drives are also available as
an option. Standard sizes range
from one to twelve inches.
Visit www.n-c.com
for more detailed
information
Intellisys System
Increases Throughput
Using a typical semiconductor process recipe,
the performance of an Intellisys pressure controller
and throttling butterfly valve is compared to two
competitive brands. During the tests, pressure
and valve plate angle are recorded simultaneously
for each of the three brands.
Nor-Cals valve closes completely in 0.125 seconds,
as compared to 1.7 and 1.8 seconds, achieving
pressure set point three seconds sooner. The other
valves slower speeds necessitate gradual ramps
and partial openings to avoid set point undershoot
or overshoot. With our advanced algorithm the
Intellisys system can essentially achieve
pressure step transitions.
The Nor-Cal Intellisys system shaved off over ten
seconds from the closest competitors time, with
an average of about two to three seconds saved
per pressure transition. This example represents
a 15% increase in throughput.
100%
90%
80%
70%
60%
50%
40%
30%
20%
10%
0%
mTorr
800
700
600
500
400
300
200
100
0
STEPS
TIME
Seconds
VALVE ANGLE (% Open)

Pressure Set Point
Competitor A
Competitor B
Nor-Cal Intellisys
PRESSURE (mTorr)
1 2
0
3
10
4
20
30
5
40
50
6
60
70
80
Intellisys and PMI are registered trademarks of Nor-Cal Products, Inc.

DeviceNet is a trademark of the Open DeviceNet Vendor Association (ODVA)
Viton is a registered trademark of DuPont Dow Elastomers.

Due to Nor-Cals continued improvement program, pricing

and specifications are subject to change without notice.
INTELLISYS-LIT 6/02
THROTTLING BUTTERFLY VALVES

Intellisys Throttling Butterfly Valves (TBV)
CONTROL RESOLUTION
Comparison of 4" TBV against
Competitors' Models
CONTROL ACCURACY
Double O-rings on the top and bottom

shaft seals ensure vacuum integrity,
even during cycling.
Intellisys Throttling Butterfly Valves are
now available in a full range of standard
sizes from one to twelve inch IDs.
Low cost, direct-drive valves are offered with
NW-25, 40 and 50 flanges as well as ISO-63,
80, 100 and 160 flanges.
High-torque geared drives
are available as an option.
Other options include aluminum valve bodies, heaters
for up to 200C internal
temperatures and special
O-ring materials, such as
Kalrez or Chemraz.
(% Deviation from Setpoint)
The Intellisys throttling butterfly valves

micro-stepped, direct-drive motor eliminates
belts, gears and limit switches, extending
MTBF while reducing the complexity and size
of the drive assembly. High-torque, gear drives
are also available in all sizes as an option.
All wetted parts are made from 316 stainless
steel for corrosion resistance.
Combined with a Nor-Cal APC, the high speed
valve drive enables systems to reach process
pressures sooner, reducing cycle time and
increasing yield. The TBV can cycle from
open to closed in 125 milliseconds,
providing faster time to set point.
Competing valves cycle in 1.6 to
7.5 seconds. The optimally
designed throttle plate
provides improved control
linearity, higher open
conductance leading to
control accuracy within
0.25% of set point.
(See chart to right)
4.00
3.50
Competitor A
Competitor B
Nor-Cal Products
3.00
2.50
2.00
1.50
1.00
0.50
0.00
Maximum Deviation .04%
-0.50
0
10
20
30
40
50
60
VALVE ANGLE (Degrees Open)
Features and Benefits

Higher system throughput
Optimally designed throttle
plate for improved control linearity
Smallest footprint available
Direct-drive motor eliminates
belts, gears and micro-switches
Fully serviceable valve motor subassembly
Easy installation and replacement
316 stainless steel and Viton
O-rings on all wetted parts
High open conductance
Low closed conductance
Specifications
Visual Throttle
Plate Indicator
Hard Stop
Direct-drive Motor
Motor Drive to
Valve Body Interface
High Efficiency
Thermal Insulator
Oldham Coupling
Precision Shaft Bearings
Dual O-rings
Dual O-rings
Optimally Designed
Throttle Plate
Precision Shaft Bearings

Optional Heater Jacket
Compatible Controllers: All Nor-Cal

APC Controllers
Materials: Wetted materials
316 stainless steel, Viton
Seals: Viton (standard); other materials
available upon request
Leak Rate: 1 x 109 atm.scc/sec He
Time Open-to-Close: 125 -250 millisecond,
depending on size
Control Resolution: 3.2 arc second
Valve Position: Visual Indicator
Differential Pressure: 15 psi maximum
across valve plate
Cycle Life: 1 million open-close cycles
Heat Capabilities: Up to 200C with
optional heater kits
Ambient Operating Temp. Range: 050C
CE Certified: Machinery and EMC Directives
Special Flush
NW Clamps
INTELLISYS-LIT 6/02
THROTTLING BUTTERFLY VALVES & UNIVERSAL VALVE DRIVE

TBV Order Information
Model
Number
TBV-100-NW-25
TBV-150-NW-40
TBV-200-NW-50
TBV-250-ISO-63
TBV-300-ISO-80
TBV-400-ISO-100
TBV-600-ISO-160
TBV-800-ISO-200
TBV-1000-ISO-250
TBV-1200-ISO-320
2.25
2.25
2.00
1.00
1.00
1.00
1.62
1.62
1.62
1.62
Flange
Type
4.15
4.15
4.15
4.15
4.15
4.15
4.15
4.15
4.15
4.15
.87
1.39
1.98
2.44
2.94
3.85
5.87
7.88
9.88
12.42
NW-25
NW-40
NW-50
ISO-63
ISO-80
ISO-100
ISO-160
ISO-200
ISO-250
ISO-320
2.75
2.75
3.36
5.12
5.71
6.50
8.90
11.22
13.19
16.73
6.26
6.26
6.57
7.02
7.34
7.77
9.04
10.20
11.14
12.98
Price
Includes Viton O-rings. All valves are available in aluminum construction

and/or with JIS or ASA flanges as well as with high-torque gear drives. Call for part numbers and pricing.
TBV-CRD-10
10 feet
OPEN
.23
Intellisys
THROTTLING BUTTERFLY VALVE
APC to Valve Cable

Length
CLOSED
3.21
Viton O-rings are standard. As an option, other O-rings

can be provided. Add the desired option suffix to the main
part number. EXAMPLE: TBV-200-NW-50-KT
Model Number
2.38
.23
3.21
FLOW
TM
Intellisys
FLOW
TM
1.28
1.91
OPEN
High Temperature Kalrez

Chemical Resistant Kalrez
Chemraz
KT
KC
CR
2.53
2.38
CLOSED
Price
2.53
VALVE CONTROLLER
Option Description
VALVE CONTROLLER
TBV O-ring Options
1.28
1.91
Price
Other cable lengths are available upon request.
Double Claw Clamp Kits

Model
Number
Kit Fits
Valve Sizes
Price
TBV-ISO-100-DCP 2.5, 3.0 and 4.0

TBV-ISO-160-DCP 6.0, 8.0 and 10.0
VALVE CONTROLLER
OPEN
OPEN
CLOSED
CLOSED
2.38
Universal Valve Drive (UVD)
2.38
2.53
2.53
Our Universal Valve Drive can easily replace the older drive technology
.23
.23
Intellisys
TM
G BUTTERFLY
THROTTLIN
5.89
Intellisys
5.89
VALVE CONTROLLER
Kits contain a set of four clamps.
B
E
Intellisys
TM
TM
VALVE
found
ys on other manufacturers pressure control valves. When combined
Intelliswith
our Intellisys adaptive pressure controller, the valve drive can
TM
THROTTLING
BUTTERFLY
VALVE
upgrade a competitive valve to nearly the same performance levels

provided by Intellisys. Drive-to-valve adapters for most
manufacturers valves are available from stock. Custom
interfaces can quickly be designed for your specific
application. The UVD can be customized to fit any
manufacturers throttle valve. Call for more details.
3.21
3.21
INTELLISYS-LIT 6/02
IQ SERIES THROTTLING BUTTERFLY VALVES

IQ Series Throttling Butterfly Valves
Specifications
Nor-Cal Products new IQ-Series Throttling

Butterfly Valve with on-valve control is the
ideal choice for leading edge 200mm and
300mm tools with DeviceNetTM communications networks. In addition, IQ-TBVs can help
the system designer meet continually scrutinized tool footprint allotments. With its
compact, low cost design, the IQ valve is
specifically produced with the system designer
in mind. One of the unique features of the IQ
valve is that the pressure control electronics
are integrated on the valve. As a result, controller space requirements are reduced by
over 80% compared to typical buried box
controllers and by almost 50% compared to
competitive integral controller products.
Furthermore, all interface and communications
connections are made directly to the valve
greatly simplifying interconnecting cable
installations.
Construction:
Wetted Materials: 316 stainless steel, Viton
Seals: Viton standard, other materials
are available upon request
Operation:
Power Input: 24 VDC, 100 W max., 60 W
nominal (with one heated gauge connected)
Differential pressure: 15 psi maximum
across the valve plate
Heating capabilities: Up to 150C with
optional heater jackets
Ambient Operating Conditions: 0 to 45C @
0 to 95% humidity, non condensing
Leak Rate: 1 x 10-9 atmscc/sec He
Peripheral I/O:
DeviceNet Communications:
Micro-style 5-pin male connector
Serial Communication: RS-232 or RS-485
on DB-15 female Auxiliary connector
Capacitance Diaphragm Gauge:
One or two gauge operation.
Second gauge requires external power
Analog / TTL: Two each, analog and
open collector outputs
Inherent Performance:
Maximum speed: 125 msec open to closed
Control Plate Resolution: 3.2 arc seconds
Maximum torque: 280 in-oz
Pressure Control Performance:
Accuracy: The greater of 5 mV or 0.25% of
reading
Repeatability: Within 2.5 mV or
0.12% of reading
Control Range: 0.5% to 100% of
the vacuum gauge range
Reliability:
O-ring Cycle life: 1 million open-close cycles
MTBF: > 10,000 hours continuous operation
a series of predetermined angles. A slow

mode is also available, which is ideally suited
for applications in which the rate of pressure
change has to be controlled precisely.
Operation in any of these three modes can be
accessed and enabled on the fly or through
activation of one of five pre-programmable
set points stored in the IQ valves non-volatile
memory. Last, the popular PMI function
can also be used with the IQ-series valves.
This function allows the user to monitor the
torque produced by the motor as it actuates
the valve. Over time, as process by-products
condense on the inner surfaces of the valve
bore and plate, the torque profile will increase
and register as a percentage of maximum
torque. Needed valve maintenance can then
be performed on a scheduled basis rather
than running the valve until failure.
The same patented closed loop motor control

technology and proven adaptive pressure control
algorithm found in Nor-Cals stand-alone pressure
controller is included in the IQ valve. As a result,
the valve moves from the fully open to closed position in 1/8 second while offering over 100,000
steps of addressable control resolution throughout
the stroke. In comparison, other standard integral controller products require nearly 8 seconds
to actuate while only providing 10,000 control
steps. Due to the IQ valves fast speed and ultrafine resolution, throughput increases of 5 to 15%
with 2 to 10 fold reductions in wafer scrap are possible.
As with the traditional Intellisys downstream
pressure control products, the IQ valve can be
operated in a number of modes. The closed
loop pressure control mode is enabled whenever the valve is allowed to modulate the valve
plate position automatically so as to cause the
chamber pressure to match the system pressure set point. Alternatively, the IQ valve can
be operated in valve position control mode in
which the tool software commands the valve to
2.85
2.70
GAUGE
AUXILIARY
TM
4.40
.62
Model
Number
TBV-IQ-100-NW-25
TBV-IQ-150-NW-40
TBV-IQ-200-NW-50
TBV-IQ-250-ISO-63
TBV-IQ-300-ISO-80
TBV-IQ-400-ISO-100
TBV-IQ-600-ISO-160
TBV-IQ-800-ISO-200
Flange
Type
2.25
2.25
2.00
1.00
1.00
1.00
1.62
1.62
2.75
2.75
3.36
5.12
5.71
6.50
8.90
11.20
8.02
8.02
8.33
8.78
9.10
9.53
10.08
13.85
.87
1.39
1.98
2.44
2.94
3.85
5.87
7.87
NW-25
NW-40
NW-50
ISO-63
ISO-80
ISO-100
ISO-160
ISO-200
Other sizes, flanges and materials of construction are available. Call for pricing
TM
5.91
TM
IQ SERIES
1.90
B
A
INTELLISYS-LIT 6/02
ADAPTIVE PRESSURE CONTROLLER

Specifications
Adaptive Pressure Controller (APC)

The Intellisys Adaptive Pressure Controller
(APC) provides advanced control system
performance by combining closed loop
motor control with adaptive pressure control.
The Intellisys APC system provides more than
100,000 control steps in the typical throttling
butterfly valve operating range - a 60 times
improvement over existing technology.
The adaptive algorithm eliminates pressure
overshoot, undershoot and gradual ramps
during pressure transitions. Moreover, Digital
Signal Processing (DSP) enables DeviceNet
communications protocol and programming
flexibility for customer or process specific
requirements. When used with an Intellisys
valve, the APC provides at least a twenty
times increase in throttle valve speed
over competitive products. An industry
first preventative maintenance
indicator (PMI), reduces
unscheduled maintenance
and downtime by alerting
the user when the throttle
plate and bore should be
cleaned. This is made
possible by the APCs ability
to sense changes in motor
torque from condensable
by-product buildup in the valve. As a safety

feature, the PMI will automatically stop the
motor when maximum torque is reached,
preventing damage to the valve.
The user can program up to five pressure
control or valve position set points stored
in non-volatile memory, while monitoring
system pressure and valve position. Adjustable soft start routines can be programmed
to reduce particle disturbance within the
load lock or chamber.
The versatile auto-sensing power supply for
the APC accepts 100-240 VAC input providing
power to the valve, as well as filtered 15 VDC
for up to two heated CDGs. Flexible RS-232 and
TTL/analog interface allows compatibility with
most host controllers.
APC Order Information

Model Number
Description
Price
APC-001-B.1
APC-001-B.2
For Gear Drive Throttling Valve. Buried Box.

For Direct Drive Throttling Valve. Buried Box.
(when operated with an Intellisys APC)
Includes 6 foot power cord. Other power cord lengths available upon request.
FAULT
CONTROL
OPEN
PREVENTATIVE
MAINTENANCE
INDICATOR
ON
POWER
VALVE
OFF
CLOSE
Intellisys
TM
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Power Input:
3-pin 100-240 VAC Input Connector
System Interface:
Serial Connector: DB-9 receptacle for RS232 DCE or RS-485/ Modbus serial interface.
TTL Connector: DB-37 receptacle contains
all TTL and analog I/O
Analog Set Point: 0-10 and 0-5 VDC linearly
proportional to pressure or valve position
Pressure Output: 0-10 VDC analog output
signals proportional to pressure, one for
each vacuum gauge attached
Valve Angle Output: 0-10 and 0-5 VDC
proportional to valve position, 0 V is
closed, 10 V(5V) is open
Signal Interface: 9 digital (TTL) control
input signals to operate the APC. 4 open
collector status outputs, 2 process limit
relays, Form C contacts
Device Interface:
Gauge Connector: Two DB-9 receptacles
provide 15 VDC @ 800mA for one or two
vacuum gauges with differential signal input
for increased noise immunity
Pressure Input: 0-10 VDC linearly
proportional to pressure
Valve Connector: DB-15 receptacle
provides power to operate the high
performance valve
Approvals:
CE (EMC and Low Voltage Directives)
Operating Range:
0 to 400C @ 0-95% humidity noncondensing
Weight: 3 lbs. 8 oz. (1.7 Kg)
Valve Performance:
Control Range: From 0.5% to
100% of the vacuum gauge range
Accuracy: The greater of 5 mV
or 0.25% of reading
Repeatability: Within 2.5 mV
or 0.25% of reading
Maximum Speed: 0.125 to 0.250
seconds open-to-closed
Control Resolution: 100 thousand
to 1.5 million steps
APC Cables
POWER
TTL I/0
2.75
100-240V~
50-60Hz
CDG1
SW1
RS-232
CDG2
6.50
VALVE
Model Number
Description
TBV-CRD-10
CDG-CRD-10
CDG-CRD-DB9-10
CDG-CRD-DB15-10
APC to Valve Cable

APC to Gauge Cable
APC to Gauge Cable
APC to Gauge Cable
Length
Connectors
10 feet
10 feet
10 feet
10 feet
Bare Leads
DB-9 gauge
DB-15 gauge
Price
Other lengths available on request.
INTELLISYS-LIT 6/02
CAPACITANCE DIAPHRAGM GAUGES
Capacitance Diaphragm Gauges
Drift (mV)
Nor-Cal Capacitance Diaphragm Gauges (CDGs) complement Intellisys adaptive pressure controllers and throttle valves with vacuum pressure measurements of superior accuracy and repeatability.
The CDGs ceramic diaphragm helps minimize zero drift and stabilizes output noise due to thermally
induced variations. 45C heated and non-heated (temperature compensated) devices are available
with several tube fittings and in standard pressure ranges from 0.1 to 1000 Torr. The unheated CDG
achieves an accuracy of 0.2%, while the 45C heated CDG achieves 0.15% accuracy.
Improved thermal and mechanical diaphragm
properties reduce problems associated with metal
diaphragms, such as hysteresis, non-linear motion
Ceramic Diaphragm
range, temperature induced changes, material imZero Drift vs. Hours of Operation
perfections and corrosiveness.
The gauges aluminum oxide ceramic diaphragm
is created with no internal stress, surface tension ripples, grain or imperfections. The diaphragm
1
returns quickly and accurately to the same position for a given pressure, so measurements remain
0
repeatable over time. And, because the diaphragm isnt damaged by exposure to atmospheric
pressure or repeated cycling, there is no need for isolation valves. The corrosion resistant ceramic
-1
100
200 300 400
500 600
diaphragm improves process consistency and prolongs sensor life. All CDG parts that come into
Time (Hours)
contact with process gasses are made from inert materials to ensure consistent performance and
long life in corrosive environments.
The Intellisys CDG is 100% electrically and mechanically compatible with competitive gauges for
easy replacement installations. DeviceNet compatible gauges can also be ordered as an option.
Heated CDG
Unheated
Please call for more information.
CDG
3.09
2.05
CDG ---- - --- - --
3.15
Intellisys
CAPACITANCE DIAPHRAGM GAUGE
PRODUCT FAMILY
090 Non-heated
091 Heated (45C)
091D Heated with
DeviceNet
RANGE
31
1000 Torr
21
100 Torr
11
10 Torr
01
1 Torr
M11 0.1 Torr*
CDG Pricing
Price
Intellisys
CAPACITANCE DIAPHRAGM GAUGE
2.48
TM
.50
5.45
6.08
1.93
1.85
*Not available in 090 Family
CDG Specifications
Part Number
1.33 CF
NW-16
1/2 FVCR
CR090 MODELS (Unheated)

CR091MODELS (45C Heated)
1, 10, 100, 1000 Torr
0.1, 1, 10, 100, 1000 Torr
1.33, 13.3, 133, 1330 mbar
0.133, 1.33, 13.3, 133, 1330 mbar
133, 1330, 13,300, 133,000 Pascal
13.3, 133, 1330, 13,300, 133,000 Pascal
Full scale (FS)
Full scale (FS)
Accuracy:
0.2% of reading temperature effects 0.15% of reading
Materials Exposed to Gases:
Ceramic (AlO2), 316 Stainless Steel
Max. Overrange Pressure:
1000 Torr for 0.1, 1, 10 & 100 Torr sensors
1500 Torr for 1000 Torr sensor
Resolution:
0.0025% of Full Scale for 0.1/1 Torr sensors
0.0015% of Full Scale for 10/100/1000 Torr sensors
Sensor Temp. Effects:
0.1-Torr
1/10/100/1000 Torr
Zero Coefficient
0.005% of Full ScaleS/C
0.005% of FS/C 0.0025% of FS/C
Span Coefficient
0.01% of reading/C
Time Constant:
<30 ms
Operating Temps.:
5C to 50C
15C to 40C
Power:
23 mA
300 mA
Weight:
0.57 lbs.
1.07 lbs.
Internal Volume:
6 cc
7 cc
Pressure Range:
CDG090
CDG091 (except M11 Range)
CDG091D (except M11 Range
CDG091-M11
CDG091D-M11
Use part-tree to select family, range and fitting. Bare tube
fitting is standard. For VCR, CF or NW fitting option add
$60 to cost. Example Part number: CDG091-M11-VCR
APC to CDG Cables

Model Number
TUBE FITTING OPTION

(Blank) Bare Tube
VCR Female 1/2" VCR
CF
CF-16
NW
KF-16
TM
Connectors Price
CDG-CRD-10
Bare Leads
CDG-CRD-DB9-10 DB-9 gauge
CDG-CRD-DB15-10 DB-15 gauge
10 foot standard length. Other lengths available.
INTELLISYS-LIT 6/02
HEATER JACKETS & CONTROLLERS

TBV Heaters and Controllers
Thermal Profile of Throttling Butterfly Valves

(Thermocouple test sites and temperatures)
TEMPERATURE (Centigrade)
1800
Many semiconductor processes are carried

out in vacuum chambers with internal temperatures in the 700C range. Process
by-products exit the chamber in vapor phase,
but sublimate in the foreline and vacuum pump
exhaust when gas temperatures drop sufficiently for them to form solids. The resultant
buildup can increase wafer defects from
particle backstreaming, reduce throughput
of vacuum lines, impede the function of
throttle valves and isolation valves, damage
some dry pumps and reduce the efficiency
of the scrubber. This buildup can be reduced
or eliminated by heating vacuum lines and
associated components from the chamber
to the scrubber, or by using a combination
of heaters and foreline traps, which collect
the by-products, preventing them from
continuing downstream.
A CE certified, thermostat controlled heater
jacket is available for Intellisys TBVs for 150C
internal temperatures. For temperatures up to
200C a CE certified heater and PID controller
provide precise temperature control. Heaters
for all TBV valves cover the valve body as well
as the mating flanges. Heaters for TBV valves
with NW flanges are provided with special
aluminum clamps. Standard sizes are
available up to six inches. Larger sizes
are available on request.
160
1400
1200
Inside Bore
Valve Body
Plate Center
Heater Jacket Skin
1000
800
600
400
200
00
0
30
60
90
120
150
180
210
240
TIME (Minutes)
Typical Heated Line Configurations

1. Heated foreline to pump and heated exhaust line
to scrubber. No foreline trap.
2. Heated foreline to foreline trap before pump.
3. Heated foreline to pump and heated exhaust to foreline
TBV Heater Jackets with Thermostats
PID Heater Controller
Model
Number
Use with TBV

Part Number
Voltage
The HC-935A-1-1 features single temperature sensor input from a

thermocouple or RTD sensor, and dual control outputs. The outputs
may operate in a variety of modes including: heat, cool, alarm and
timer. The timer function operates in a choice of delay-ON, delay-OFF,
signal-ON or signal-OFF modes. Front panel lock capability and a
LED display round out the feature set. Other HC-935 controllers
are available for one, two and four zones. Call for pricing.
HT-TBV-100-150-1*
HT-TBV-150-150-1*
HT-TBV-200-150-1*
HT-TBV-250-150-1
HT-TBV-300-150-1
HT-TBV-400-150-1
HT-TBV-600-150-1
TBV-100-NW-25
TBV-150-NW-40
TBV-200-NW-50
TBV-250-ISO-63
TBV-300-ISO-80
TBV-400-ISO-100
TBV-600-ISO-160
120 VAC
120 VAC
120 VAC
120 VAC
120 VAC
120 VAC
120 VAC
Model
Number
Max. Output
Watts
Zones
HC-935A-1-1
960 @ 120V
Price
Features
1/32 DIN package

NEMA 4X
Countdown timer
Programmable alarms
Universal power supply
Small panel footprint
0.25% accuracy
Worldwide flexibility
Low cost multi-zone
temperature control
Price
Set point 150C. 2000C manually resetable over-temp. Includes a 12 power cord
with AMP connector. 240 VAC Option: Change -1 at end of part number to -2.
Example: HT-TBV-100-150-2. Call for larger sizes and for temps. below 150C.
For temps. up to 200C a PID controlled heater jacket is recommended.
* Includes two special NW clamps.
TBV Heater Jackets for PID Control

Model
Number
Use with TBV

Part Number
Voltage
HC-TBV-100-200-1*
HC-TBV-150-200-1*
HC-TBV-200-200-1*
HC-TBV-250-200-1
HC-TBV-300-200-1
HC-TBV-400-200-1
HC-TBV-600-200-1
TBV-100-NW-25
TBV-150-NW-40
TBV-200-NW-50
TBV-250-ISO-63
TBV-300-ISO-80
TBV-400-ISO-100
TBV-600-ISO-160
120 VAC
120 VAC
120 VAC
120 VAC
120 VAC
120 VAC
120 VAC
Price
Maximum temperature 200C. Includes 12 power cord with AMP connector and two
built-in type K thermocouples with 6 lead and mini-connector.
240 VAC Option: Change -1 at end of part no. to -2. Example: HC-TBV-100-200-2.
* Includes two special NW clamps.
INTELLISYS-LIT 6/02
TECHNICAL INFORMATION
Pin Assignments for the Intellisys TBV and TBV-IQ Valves, CDG and APC Controller
Active Low Input Signals
Active Low Output Signals
Active High Output Signals
View or download technical bulletins, frequently asked questions,

PDF catalogs and operators manuals for Intellisys adaptive
pressure control products at www.n-c.com.
Call 1-800-824-4166 for Intellisys Technical Support.
INTELLISYS-LIT 6/02
ADAPTIVE PRESSURE CONTROL
TM
Throttling Pendulum
Valves and Adaptive
Pressure Controllers
Intellisys throttling pendulum valves provide equipment manufacturers with unmatched pressure control performance and low
particle generation. Other pendulum valves use one actuation
method to move the gate and another method to seal, creating an
out of control area near the closed position. To compensate for
this, system designers often add secondary bypass lines with
costly throttling butterfly valves for high pressure, high flow
regimes, such as NF3 cleans. Intellisys pendulum valves utilize
exclusive closed-loop motor control and a patented Penduroll
actuator mechanism to move the sealing gate rapidly across the
valve bore and transition to the axial direction. The result is precise pressure control over the entire valve stroke, most notably
near the closed position. The Intellisys control system is the only
choice for demanding 300mm Etch and CVD applications which
require fast, accurate pressure control across the entire range
of critical process flows and chamber pressures.
Nor-Cal Products closed-loop motor control monitors and
controls the exact position of the valves gate mechanism.
The adaptive pressure controller provides over eight million steps
of addressable resolution to position the gate exactly where it
needs to be to control pressure or to seal. In addition, the Nor-Cal
control systems speed of actuation is unequaled in providing optimal transient response, pressure set-point stability, and overall
process improvement. The APCs adaptive algorithm outperforms
learn modes by optimizing phase and gain settings in real time
during varying chamber pressure and flow conditions.
Isolation Pendulum Valves

Nor-Cal Products pneumatically actuated isolation pendulum
valves contain the same patented Penduroll mechanism that is
found in the Intellisys throttling pendulum valves. These valves
offer the user a compact and low cost alternative to competitive
designs. In addition, the smooth actuation results in low particle
generation and rapid open-to-close speeds.
In-situ serviceability of the valve is made possible through
the incorporation of a removable bonnet cover. The entire gate
assembly and sealing O-ring can be accessed without removing
the valve from the system, making regular inspections,
cleanings and O-ring replacements quick and easy.
General Features and Benefits

Space saving, low cost design
Low particle generation
High reliability
Easy maintenance, split body allows O-ring
replacement without removing valve from system
Body can be heated to 150C with optional heater jackets
Available in ISO and JIS flange styles
Construction
Wetted Materials:
Body: Cast aluminum AC4CH
Valve plate: Aluminum A5052
Other parts: A 6061, A7075, SS304 and SS316, Viton
Seals: Viton standard, other materials available upon request
Body and plate surface treatment:
Bare aluminum standard, hard anodizing optional
Valve Design
Operating Pressure: 3.8 x 10-8 to 760 Torr (5 x 10-8 to 1000 mbar)
Maximum Differential Pressure
(while opening valve):
200mm - 20 Torr (26 mbar)
Heating or Bakeout Capabilities:
Body: 150C max with optional heater jackets
Actuator: 60C maximum
Ambient Operating Conditions: 0 to 60C
Leak Rate: 1 x 10-9 atmscc/sec He across seat
and to atmosphere (bare aluminum body)
Service Life : 200,000 cycles - Open to Fully Closed (All valves)
1 million cycles - Open to Partially Closed (3-position valves)
1 million cycles - Open to Control Closed Position (TPV)
Intellisys is a trademark of Nor-Cal Products, Inc.

Penduroll is a registered trademark of V-Tex Corporation
PENDULUM VALVES
Intellisys Throttling Pendulum Valves
Nom. ID
8.00
10.00
12.00
14.00
Part Number
TPV-800-ISO-200
TPV-1000-ISO-250
TPV-1200-ISO-320
TPV-1400-JIS-350
A
3.46
3.94
4.72
4.92
B
3.78
3.78
4.06
4.06
C
19.90
23.80
30.20
32.30
D
14.40
16.60
22.00
22.00
E
6.50
8.46
10.60
12.20
F
9.29
9.49
12.80
12.80
Weight
49 lbs. (22 Kg)
62 lbs. (28 Kg)
123 lbs. (56 Kg)
143 lbs. (65 Kg)
Other sizes and flange configurations available. Call for details.
Specifications
Power Input:
36 VDC to valve supplied from APC. Customer supplied

4.5 to 16 VDC to optional position sensor
Performance: (when operated with an Intellisys APC Controller)
Maintenance Space
E
Control Range:
From .5% to 100% of the vacuum gauge range
Accuracy:
The greater of 5 mV or 0.25% of reading
Repeatability:
Within 2.5 mV or 0.12% of reading
Maximum Speed: 1 to 3 seconds open-to-closed
F
Control resolution: 8 million to 20 million steps
Options:
High Temperature: Heated and insulated valve body
with PID or thermostat controls
Position Indicators: Open/closed optical valve position indicator with LEDs
Safety Lock:
Closed position safety lock pin. Operated by a spring-toclose electric solenoid. (Requires customer supplied
24-76 VDC relay and power, relay logic signal from APC)
Rough Pump Port: NW-25 roughing port on main casting allows
pump-down of chamber prior to opening pendulum valve
Isolation Pendulum Valves

Nom. ID
6.00
8.00
10.00
12.00
14.00
16.00
Model Number
IPV-600-ISO-160
IPV-800-ISO-200
IPV-1000-ISO-250
IPV-1200-ISO-320
IPV-1400-JIS-350
IPV-1600-ISO-400
A
3.15
3.46
3.94
4.72
4.92
5.91
B
3.78
3.78
3.78
4.06
4.06
5.00
C
15.90
19.90
23.80
30.20
32.30
36.00
D
12.20
14.40
16.60
22.00
22.00
24.70
E
5.32
6.50
8.46
10.60
12.20
12.80
F
G
5.87 8.50
5.28 9.29
5.47 9.49
7.24 12.80
7.64 12.80
7.83 15.00
Weight
40 lbs. (18 Kg)
49 lbs. (22 Kg)
62 lbs. (28 Kg)
123 lbs. (56 Kg)
143 lbs. (65 Kg)
231 lbs. (115 Kg)
Other sizes and flange configurations available. Call for details.
Specifications
Compressed air source: CDA or equivalent at 65 to 85 psig

Maximum speed:
3 seconds open to closed
Maintenance Space
(250 mm size and below)
E
D
F
Call for Pricing. - International product pricing will vary.
ADAPTIVE PRESSURE CONTROLLERS

Intellisys Pendulum Valve Controllers
The Intellisys Adaptive Pressure Controller (APC) merges closed loop motor control with adaptive pressure control to provide
advanced control system performance. An advanced adaptive algorithm eliminates pressure overshoot or gradual ramps during
pressure transition. A Digital Signal Processor (DSP) enables DeviceNet communications protocol and programming flexibility
for customer or process specific requirements.

Unique Preventative Maintenance Indicator (PMI)
reduces unscheduled maintenance and downtime
Patented motor control technology senses increased
torque in throttle gate for improved diagnostics
Autosensing 90-240 VAC power supply
Flexible analog and digital system interfacing
Buried box model saves valuable rack space
Specifications
Power Input:
System Interface:
Serial Connector:
Model Number
Description
APC-001-PM.2
Full functionality including RS-485/

Modbus serial interface. Allows up to 16
controllers on one communications line.
APC-001-P.2
Full functionality including

RS-232 DCE serial interface.
FAULT
CONTROL
OPEN
PREVENTATIVE
MAINTENANCE
INDICATOR
ON
POWER
VALVE
OFF
CLOSE
Intellisys
TM
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7.00
POWER
TTL I/0
2.75
100-240V~
50-60Hz
CDG1
SW1
RS-232
CDG2
VALVE
3-Pin 100-240VAC Input Connector
DB-9 receptacle for RS-232 DCE or

RS-485/ Modbus serial interface
TTL Connector:
DB-37 receptacle contains all
TTL and analog I/O
Analog Setpoint: 0-10 and 0-5 VDC linearly proportional
to pressure or valve position
Pressure Output: 0-10 VDC analog output signals
proportional to pressure, one for
each vacuum gauge attached
Valve Angle Output: 0-10 and 0-5 VDC proportional to valve
position, 0V is closed, 10V(5V) is open
Signal Interface: 9 digital (TTL) control input signals
to operate the APC. 4 open collector
status outputs, 2 process limit relays,
Form C contacts
Device Interface:
Gauge Connector: Two DB-9 receptacles provide
15VDC @ 800mA for 1 or 2 vacuum
gauges with differential signal input
for increased noise immunity
Pressure Input:
0-10 Volts DC linearly proportional
to pressure
Valve Connector: DB-15 receptacle provides power to
operate the high performance valve
stepper motor
Approvals:
CE (EMC and Low Voltage Directives)
Operating Range: 0 to 400C @ 0-95% humidity
noncondensing
Weight:
3 lbs. 8 oz. (1.7 Kg)
6.50
Call for Pricing. - International product pricing will vary.
Chamber
Percent Valve Angle
VALVE
ANGLE
2.5
2.0
1.5
Scale In Torr
Most dry etch processes and many

advanced CVD applications require the
use of a wide range of operating pressures, including some low pressure
conditions that are well into the molecular flow regime. That is, in part,
driving OEMs to use large diameter
pump stacks with high capacity turbo
pumps. This means that the days of
inserting a simple butterfly valve
between the chamber and the pump are
gone due to the limited control range
and non-sealing nature of large diameter butterfly valves, as well as to the
space they consume in the pump stack.
To address these problems, OEM system
designers turned their attention to the use
of throttling gate or pendulum valves,
thereby addressing the pressure control
and isolation valve issue with a single
solution. Until now, controlling the large,
heavy gate proved slow and cumbersome.
Metal-to-metal contact of structural parts
often resulted in particle generation and
mechanism failure causing havoc with
process yields. Finally, existing valve
designs are unable to provide the full range
of pressure and mass flow requirements
due to their inability to control pressure
in the near closed position.
Specifically, designers have had
to counteract the low controllable
conductance limitation by inserting an
additional throttle valve in the by-pass
line around the throttling gate valve.
(See illustration below.) In other
cases, forcing the system through time
consuming control learn algorithms
for every new process condition has
become necessary. In either case, a
compromise involving valuable space,
cost or process performance has often
been the only solution until now.
100
90
80
70
60
50
40
30
20
10
0
High
Vacuum
Pump
Flow rate is
increased to 2 slm
which causes a
sudden jump
in base pressure.
C
Scale In Torr
Scale in MilliTorr
50
40
C
Competitor never
reaches set-point
due to high "closed"
position conductance.
Note that competitor
remains at 0% valve
angle.
30
20
10
0
STEP 1
0
STEP 2
10
STEP 3
20
30
Time in Seconds
The high speed, ultra-high resolution

and exclusive actuation method of
Intellisys throttling pendulum valves
eliminate the previous products
shortcomings. Using a simulated semiconductor process, the Intellisys pendulum valve system was compared with a
similar system from, historically, the
sole manufacturer of such valves. (See
chart above) In both cases, the test
used the following abbreviated process
recipe with a 40 liter chamber connected
to an 1800 lps, ISO-250 turbo pump.
Step 1 Pump system to base pressure
Step 2 Flow 80 sccm N2 & command
system to a process set-point
of 50 mTorr
Step 3 Evacuate system to
base pressure
Step 4 Flow 2 slm N2 and command
system to a cleaning step
pressure of 2.5 Torr
Step 5 Evacuate system to
base pressure
The graph clearly illustrates significant
performance differences between the
two valves. During the initial ramp from
base pressure to 50 mTorr, the Intellisys
system drives the pendulum gate to a
point where the sealing O-ring is just
Isolation
Valve
Nor-Cal's
Intellisys
Throttling
Pendulum
Valve
TM
To Rough Pump
SYSTEM PRESSURE
0.5
Chamber
Isolation
Valve
High
Vacuum
Pump
Throttling
Butterfly Valve
and Controller
eliminated with
Intellisys TPV
system.
Throttling
Butterfly Valve
with Controller
Competitor's
Throttling
Pendulum
Valve
Competitor's time
to reach set-point
lags due to inability
to close gate
completely.
Nor-Cal
Competitor
Set-Point
1.0
Scale in MilliTorr
Simplified System
Design with Single
Valve Approach
To Rough Pump
Savings of
approximately
$5000.00
STEP 4
40
STEP 5
50
60
in contact with the sealing surface,

whereas the competitive valve cannot
and exhibits a significant leak-by in the
closed position. (See Step 2.) As a result, the rate of pressure change was
compromised and the time taken to
reach set-point more than doubled.
Furthermore, using the competitive
valve led to pressure oscillations that
measured 8% of set-point lasting
3 to 4 seconds.
Another noteworthy observation
occurred in the cleaning step.
(See Step 4.) The Intellisys valve
efficiently reached the target pressure
of 2.5 Torr in approximately 3 seconds.
However, even though the competitive
valve traveled completely closed and
remained closed for the duration of the
process step, the maximum achievable
pressure leveled out at just over 2 Torr.
This phenomenon is, again, attributable
to the high leak rate of the competitive
valve when in the closed position.
Inherent valve design and pressure
control performance limitations,
such as these, have a direct effect on
vacuum system design complexity. In
the past, processes that required operation over a wide range of flow rates and
pressures essentially dictated that the
tool vacuum foreline be complex. Even
though it was only for use during certain
operations the added control valve bypass took up space and could add up
to $5,000 in system cost for every
chamber. In contrast, the Intellisys
pendulum valve system enables full
command of all control applications
with just one valve and associated pressure controller, thereby saving extra
space, cost and integration efforts.
GENERAL INFORMATION
Genesis
TM
The Genesis modular vacuum valve system provides semiconductor equipment

designers with unlimited possibilities for downstream vacuum subassemblies.
Nippleless valve bodies and block fittings can be assembled by two attachment
methods using universal ISO-KF centering ring/O-ring hardware, providing maximum flexibility and the smallest footprint possible.
Genesis Valves
Simple and robust, Genesis valves are rated
at one million cycles before service. During
testing, these valves were cycled millions
of times while maintaining vacuum integrity.
The welded bellows is AM-350 for corrosion
resistance, longevity and flexibility. The bellows fully retracts from the side port when the
valve is open, eliminating buildup of process
by-products on the bellows and subsequent
particle generation during operation. Valve
center plates have been eliminated in order to
provide precise alignment between the poppet
and valve seat. A composite stem bushing
resists wear even at high temperatures.
Valve return springs are shot peened in order
to provide millions of cycles without loss of

force. Teflon coated air cylinders feature a
15 micron air filter to prevent particle
migration either into or out of the air cylinder.
Genesis valves and fittings have a patented
nippleless body, which provides the highest
conductance and smallest footprint available.
Air solenoids, open/closed position indicators,
and soft start actuators can be added with no
addition to size. All valves are designed for
easy O-ring or bellows replacement. Design
symmetry allows the air actuator to be oriented
at 90 increments for easy access to the air
solenoid and visibility of position indicators.
Genesis valve bodies and fittings are electroless nickel coated aluminum for excellent
thermal characteristics and corrosion resistance. Components are machined from solid
6061-T6 aluminum to eliminate welds, leak
paths and entrapments. All tapped holes are
supplied with stainless steel threaded inserts
for long term serviceability.
Million cycle reliability

Low cost soft start option
Low cost heated option
Smallest footprint available
Modular design
Corrosion resistant
Valve Options
Soft Start Valve Actuator
Teflon Coated
Air Cylinder
For reduced particle contamination in load

locks and process chambers, Genesis valves
can be provided with a patented low cost soft
start actuator with no increase in valve size. A
double-acting air piston, opens a soft start circuit inside the valve when air is supplied to the
top of the air cylinder. The soft start by-pass
opening can be provided fully open or with a
specified orifice, depending on the desired
pump down. (See charts page 4 and below)
The Genesis valve can be provided with

CE certified proximity open/closed position
indicators. These proximity indicators detect
the position of the piston in the air cylinder.
Main Valve Stem
Soft Start Stem The technician has a visual indication of
power to the circuit and the position of
High Temp.
the valve, as does the operator watching
Composite
the panel. With the soft start option only
Stem Bushing
one position indicator can be provided
Welded
for the fully open position.
Double Acting
Air Piston
AM-350
Bellows
Chamber Pressure (Torr)
Typical 30 Liter Chamber

Pump-Down with Soft-Start
Interchangeable
Orifice
800
700
Open soft-start with 0.070" orifice
Nickel Coated
Aluminum
Body
600
Open 1.5" valve

at desired
cross-over pressure
500
400
300
Air Solenoid
Main Valve
Only
200
100
0
0
10
15
20
25
30
35
40
45
TIME (Seconds)
After the chamber has been pumped from

atmosphere to the desired cross over
pressure, the main valve circuit is opened by
supplying air to the bottom of the air cylinder.
Each circuit can be operated independantly
and is air-to-open, spring-to-close.
Open/Closed Position Indicator
As an option, low 1.8 wattage, CE certified

air solenoids in several current ratings can
be provided on the valve, ready to attach to
the house air supply. One three-way air solenoid is required for a standard Genesis valve
and two three-way air solenoids are required
for a soft start version. Air solenoids can
also be supplied as a kit with assembly
hardware and instructions.
O-rings
Standard Genesis valves are furnished with
Viton O-rings. They are resistant to most
chemicals, but should not be heated to temperatures in excess 204C. Even prolonged
exposures of 150C may begin to degrade the
O-rings. The following O-rings can be provided as options. High temperature Kalrez
O-rings allow the valve to be heated to 316C
intermittently or 280C for prolonged periods
where the O-ring is allowed to expand.
Chemical resistant Kalrez and Chemraz
are also available.
Due to Nor-Cals continuing improvement program, pricing and specifications are subject to change without notice.
GENESIS-LIT 11/02
GENERAL INFORMATION
Modular Valve System
Bulkhead Attachment
to Chamber with
Double Stud
Fasteners
Block Subassemblies
with Double Stud Fasteners
Special subassemblies, such as diverter valves
or roughing/high vacuum circuits can be assembled quickly using double stud fasteners
with valves and block fittings. These subassemblies can be provided as a unit from
Nor-Cal or you may choose to assemble them
from individual components. They are ideal for
limited space installations, such as on cluster
tool frames, and provide highest conductance,
while eliminating unnecessary hardware.
Double stud fasteners can be used to make a
bulkhead attachment from a valve directly to
a chamber. Stud fasteners can be installed
using a jewelers screwdriver and an ignition
wrench. An installation tool for stud fasteners
is provided with each stud fastener kit or
assembly, or one can be purchased separately.
Genesis
Tee Fitting
VCR Test Port

attached with
Finger Clamps
Finger Clamp
Component Assembly
Elbows, reducers, chamber ports, roughing
lines, or other vacuum components can be
attached directly to valve bodies or fittings with
finger clamps. Unnecessary valve ports have
been eliminated, shortening the gas path and
increasing system conductance.
For ultimate versatility standard nipples and
elbows can be attached with finger clamps in
order to make a drop-in replacement valve,
such as an angle-in-line or tee valve. Once the
finger clamp bolt is loosened it can be pivoted
out of the way in order to remove or install the
flange and centering ring. The finger clamp
does not need to be removed from the valve or
fitting. The clamp is self-aligning when tightened, for ease of flange installation.
Optional
Modular Heater
Finger Clamp
Attachment
Genesis Valve with

Soft Start Actuator
Foreline to
Vacuum Pump
Heaters and Insulators

A unique, UL listed modular heater provides 120C or
150C internal temperatures in valves or fittings at a
fraction of the cost of a silicone heater. Genesis heaters
use thick film technology to provide uniform heat
throughout the component. Each heater contains
a control set point and a resetable high temperature shut off. The 1.5 and 2.0 inch sizes also
have a low temperature alert that can be connected to a remote alarm. Each thermostat
can be replaced without destroying the heater.
The same heater can be attached to a valve
body or fitting with two screws. A trim-to-fit,
molded insulator covers the heated component
and mating flanges. These clean room compatible insulators are constructed of .50 inch thick
molded silicone. When in use, the exterior
surface remains touch-safe. Insulators meet
UL 94 V-O requirements. Insulators for other
Modular Thick
components are available upon request.
Film Heater
Molded Insulator
Replaceable
Set Point
Thermostat
Resetable
High Temp.
Thermostat
Genesis is a registered trademarks of Nor-Cal Products, Inc.

Teflon is a registered trademark of DuPont de Nemours & Co., Inc.
Viton is a registered trademark of DuPont Dow Elastomers.
GENESIS-LIT 11/02
GENESIS VALVES & VALVE OPTIONS

Genesis Modular Valves
Valve Model
Size Number
0.75
1.00
1.50
2.00
Flange
Thread
Bolt
Circle
NW-16
NW-25
NW-40
NW-50
1.15
1.06
1.25
1.63
2.31
2.13
2.50
3.25
3.04
3.14
3.71
4.44
1.46
1.46
1.88
2.25
12-24
12-24
12-24
1/4-20
2.031
2.031
2.616
3.406
GNV-072
GNV-102
GNV-152
GNV-202
3 and 4 Genesis valves available upon request. Call for pricing and information.
D
A
B
Valve Options
Price
SPECIFICATIONS
Million cycle service interval
Electroless nickel coated aluminum bodies
TeflonTM coated aluminum air cylinder
Welded AM-350 bellows
Viton O-rings standard
High temperature composite stem bushing
Air-to-open, spring-to-close actuation
60-80 psi required air pressure
Helium leak rate 1x10-9 Torr standard
cc./sec. maximum
Differential pressure, 25 psi maximum
5/32 inch One-Touch air fittings standard.
Other sizes are available in US and
Metric tubing diameters
Larger valve sizes available. Call for details.
Follow the part tree to add one or more options to a particular Genesis valve. Add option suffixes to the basic valve part number in the order show by
part tree. EXAMPLES: GNV-152-S2-P1-KT-B21, GNV-102-P2-A11 & GNV-202-S0-P1
O-ring Option
Option Description
GNV-152 - -- - --- - -- - --Soft Start
Air Solenoid
O-ring
Position Indicator
KT
KC
CR
S
Price
4079 High Temperature Kalrez

2051 Chemical Resistant Kalrez
513 Chemraz
Silicone
Position Indicator Option

Actuator
Option
Soft Start/Standard
Standard
Standard
P1O
P1C
P2
Description
Add to Price
One position indicator - main valve open only

One position indicator - main valve closed only
Two position indicators - main valve open and closed
Refer to diagram at left for dimensions.
SPECIFICATIONS
12 to 24 VDC
Normally open
CE certified
Shielded
M5 threads x 30mm long
A
Air Solenoid and

Position Indicator Diagram
SIZE
.75
1.0
1.5
2.0
2.55
2.55
2.73
3.11
4.82
4.82
5.31
6.05
3.76
3.76
4.06
4.42
1.66
1.66
1.82
2.03
Viton Replacement O-rings,

Bellows Assemblies and Valve
Rebuild Kits are available on Page 5
-25C to 70C temperature range

Not available on heated valves
Air Solenoid Option

Actuator
Option
Kit
Quantity
Standard
A11
A21
A31
A41
B11
B21
B31
B41
A11-K
A21-K
A31-K
A41-K
B11-K
B21-K
B31-K
B41-K
1
1
1
1
2
2
2
2
Soft Start
Description
120 VAC, 50/60 Hz
24 VDC
240 VAC, 50/60 Hz
24 VAC, 50/60 Hz
120 VAC, 50/60 Hz
24 VDC
240 VAC, 50/60 Hz
24 VAC, 50/60 Hz
Refer to diagram at left for dimensions.
SPECIFICATIONS
24 inch long electrical leads with quick disconnect
1.8 watt power consumption
Price
5/32 inch One-Touch air fittings supplied

Remote mount on heated valves
GENESIS-LIT 11/02
SOFT START OPTIONS & ASSEMBLY HARDWARE

Soft Start Actuator Option
Description
S0
S1
S2
S3
Pump-Down with
Various Soft-Start Orifices
Add to Price
Soft start actuator - no orifice. For 1, 1.5 and 2 valves.

Soft start actuator with 0.147 orifice installed. For 1, 1.5 and 2 valves.
Refer to the Pump Down Curves graph to right.

Soft start actuators for larger valves available. Call for information.
Soft Start Orifice Kits

Model Number
Contents
GNV-075-SO-K
GNV-075-SO-1
GNV-075-SO-2
GNV-075-SO-3
GNV-075-SO-T
3 orifice sizes and a 1/8 inch allen wrench for installation

0.070 orifice
0.109 orifice
0.147 orifice
1/8 inch allen wrench for orifice installation
(1.5" Valve on 30 Liter Chamber)
800
Price
Chamber Pressure (Torr)
Option
700
No Orifice
0.147" Orifice
0.109" Orifice
0.070" Orifice
600
500
400
300
200
100
0
0
30
60
90
120
150
180
210
TIME (Seconds)
Assembly Hardware
Two fastening systems are available for
Genesis valves and fittings providing maximum
flexibility and the smallest footprint possible.
Nippleless valve bodies and block fittings can
be assembled with finger clamps or double
stud fasteners using universal ISO-KF centering ring/O-ring hardware, providing maximum
flexibility and the smallest footprint possible.
Finger Clamp
Assembly
Double Stud
Fastener Assembly
Finger Clamps
Valve
Size
Model
Number
Material
Bolt
Torque
.751.5
2.0
GNCP-150-S
GNCP-200-S
Stainless
Stainless
12-24 x 7/8
1/4-20 x 7/8
60 in. lbs.
100 in. lbs.
Price
Finger Clamps allow a standard ISO-KF flange to be attached directly to a Genesis valve or fitting
using a standard ISO-KF centering ring and O-ring. Each kit contains four finger clamps, hex
head bolts and washers for one connection.
Double Stud Fasteners

Valve
Size
Model
Number
Thread
.751.5
GNSF-150
GNSF-150-K
GNSF-200
GNSF-200-K
12-24
12-24
1/4-20
1/4-20
.625
.625
.730
.730
2.0
0.15
A
To order Stud Fastener Tool separately - order Model Number GNSF-T. Price $5.00.
DIMENSIONS
for Modular Valve Joining
with Double Studs Fasteners
NOM. ID
1.0
1.5
2.0
2.28
2.65
3.40
4.40
5.15
6.65
Double stud fasteners allow two Genesis

components to be connected using a standard
ISO-KF centering ring and O-ring. Each kit
contains four double stud fasteners for one
connection and an installation tool.
Price
A
0.375
GENESIS-LIT 11/02
GENESIS HEATERS INSULATORS & ACCESSORIES

Genesis heaters use thick film technology to provide uniform heat throughout the component. Each heater contains a control set point and a
resetable high temperature shut off. The 1.5 and 2.0 inch sizes also have a low temperature alert that can be connected to a remote alarm.
Each thermostat can be replaced without destroying the heater. The same heater can be attached to a valve body or fitting with two screws.
Valve Heaters
.75 & 1.0
1.5
2.0
Model
Number
Set
Point
Watts
HT-GN-100-120-1
HT-GN-100-150-1
HT-GN-150-120-1
HT-GN-150-150-1
HT-GN-200-120-1
HT-GN-200-150-1
120C
150C
120C
150C
120C
150C
120
120
120
120
160
160
2.13
2.13
2.50
2.50
3.25
3.25
Heater and Insulator

Dimensions Diagram
Price
C
E
SPECIFICATIONS
Compact, modular design

120 VAC, 240 VAC available upon request
120C or 150C set points, standard
Manually resetable 200C
over temperature shutoff, standard
Low temperature alert, standard

on 1.5 and 2.0 inch
12 inch power cord with AMP 3-pin connector
Two 12 inch low temperature alert cords
with AMP MR connectors, standard on
1.5 and 2.0 inch
UL listed. CE certification pending
Optional Heater
Valve
Size
0.75
Valve Heater Insulators

Valve
Size
Model
Number
Price
0.75
A
.75 & 1.0

1.5
2.0
HI-GNV-100
HI-GNV-150
HI-GNV-200
6.00
6.63
8.00
4.50
5.00
5.88
3.13
3.63
4.38
2.50
2.88
3.31
3.64
4.25
5.00
SPECIFICATIONS
Touch safe exterior
.50 inch thick molded silicone construction
Trimable
Clean room compatible

Meets UL 94 V-O
Insulators for other components available
Heater Power Cords

Model Number
Length
HT-GN-PCD-6
HT-GN-PCD-12
6 ft.
12 ft.
Price
Fused 120 VAC power cords. Other length power cords

are available on request. Call for price.
Genesis Valve Repair Kits

First maintenance is recommended at one million cycles, depending on the cleanliness of the process. Typical service will require O-ring replacement.
Viton O-rings
Bellows Assembly
Valve Rebuild
Includes bellows O-ring and poppet O-ring.

Other O-ring materials available. Call for pricing.
Bellows, top flange and poppet weldment

assembly. Requires O-ring kit to seal.
Includes all valve parts except

the body and position indicator.*
Valve
Model
Size Actuator Number
.75 & 1.0 Standard
Soft Start
1.5
Standard
Soft Start
2.0
Standard
Soft Start
Price
GNV-100-95
GNV-100-95-S0
GNV-150-95
GNV-150-95-S0
GNV-200-95
GNV-200-95-S0
Valve
Model
.75 & 1.0 Standard
Soft Start
1.5
Standard
Soft Start
2.0
Standard
Soft Start
Price
GNV-100-16
GNV-100-16-S0
GNV-150-16
GNV-150-16-S0
GNV-200-16
GNV-200-16-S0
Valve
Model
.75 & 1.0 Standard
Soft Start
1.5
Standard
Soft Start
2.0
Standard
Soft Start
Price
GNV-100-99
GNV-100-99-S0
GNV-150-99
GNV-150-99-S0
GNV-200-99
GNV-200-99-S0
* Position indicator type must be specified

when ordering. See page 3.
Example: GNV-150-99-S0-P10
GENESIS-LIT 11/02
GENESIS MODULAR FITTINGS
OPTIONAL HEATER
Genesis fittings provide the most compact, highest conductance, corrosion resistant
vacuum connection available when used with Genesis valves, fittings and double stud fasteners.
These fittings can also attach with finger clamps to standard ISO-KF components with universal
O-rings, which are also available from Nor-Cal Products.
SPECIFICATIONS
Electroless nickel coated 6061 T-6 aluminum

Stainless steel threaded inserts
Attach to standard components with finger clamps
Optional modular heater available
Attach to Genesis valves and fittings with double stud fasteners
B
TYP
Valve
Size
Model
Number
Thread
Bolt
Circle
1.0
1.5
2.0
GNF-102
GNF-152
GNF-202
2.125
2.500
3.250
1.063
1.250
1.625
12-24
12-24
1/4-20
2.031
2.616
3.406
Fittings for .75 inch valves are available on request. Call for pricing and information.
Price
OPTIONAL HEATER
90 Elbow
0.750
A
TYP
B
TYP
Tee
Valve
Size
Model
Number
Thread
Bolt
Circle
1.0
1.5
2.0
GNF-103
GNF-153
GNF-203
2.125
2.500
3.250
1.063
1.250
1.625
12-24
12-24
1/4-20
2.031
2.616
3.406
Price
A
TYP
B
TYP
4-Way Cross
Valve
Size
Model
Number
Thread
Bolt
Circle
1.0
1.5
2.0
GNF-104
GNF-154
GNF-204
2.125
2.500
3.250
1.063
1.250
1.625
12-24
12-24
1/4-20
2.031
2.616
3.406
Price
A
TYP
B
TYP
5-Way Cross
Valve
Size
Model
Number
Thread
Bolt
Circle
1.0
1.5
2.0
GNF-105
GNF-155
GNF-205
2.125
2.500
3.250
1.063
1.250
1.625
12-24
12-24
1/4-20
2.031
2.616
3.406
Price
A
TYP
B
TYP
6-Way Cross
Valve
Size
Model
Number
Thread
Bolt
Circle
1.0
1.5
2.0
GNF-106
GNF-156
GNF-206
2.125
2.500
3.250
1.063
1.250
1.625
12-24
12-24
1/4-20
2.031
2.616
3.406
Price
A
TYP
GENESIS-LIT 11/02
GENERAL INFORMATION & OPTIONS

General Information
Since 1962, Nor-Cal Products has been designing and building standard and custom foreline traps for the vacuum industry. These traps range in complexity from
the sealed coaxial traps, which prevent oil backstreaming, to the triple-pass water
cooled traps, which remove condensable gasses that contaminate mechanical
pump oil or other parts of the system. Typically, our customers realize a 200%
improvement in preventative maintenance intervals after installing
one of these traps.
All traps dissemble easily with a Viton O-ring and V-clamp, with the exception
of our sealed coaxial metal sieve traps which have a one piece body. The two piece
body allows for easy removal for cleaning or replacement. Standard finish for all
traps is beadblast. Electropolish finish is available on request.
Options
Copper Sieve Option -CS
The standard metal sieve filter is stainless
steel. Copper metal sieve filters are available at no additional cost for all sealed and
two-piece metal sieve traps.
240 Volt Heater Option -240V

The standard molecular sieve trap regeneration heater is 120V. 240V heaters are
available as an option at no additional cost.
Other voltages are also available.
OPTIONS PART NUMBER CONFIGURATION MATRIX

When ordering a trap with options, please follow the option order sequence below
when buiding the part number. For example, when ordering a particulate trap with an
ISO flange body and fiberglass, high capacity filter, the part number would read:
FTPA-6-2002-NWB-BF-L7
FORELINE
TRAP TYPE
PARENT
PART NUMBER
OPTION 1
OPTION 2
METAL SIEVE
F C T -X -X X X
C T -X -X X X
F T A -X -X X X
B F*
B F*
B F*
CS
CS
CS
WATER COOLED
F T W S -X -X X X
F T W A -X -X X X
BF #
BF #
QD
QD
PARTICULATE
F T P A -X -X X X
F T P S -X -X X X
BF
BF
LIQUID
NITROGEN
F T N -X -X X X
F T N A -X -X X X
N T D -X -X X X
N T D A -X -X X X
BF
BF
BF
BF
MOLECULAR
SIEVE
F T M -X -X X X
F T M A -X -X X X
F T M S -X -X X X
BF
BF
BF
240V
240V
240V
ISO Body Flange Option -BF

All 4, 6 and 8 inch OD trap bodies can be
supplied with ISO clamp style flanges as
an alternative to V-clamps.
4 Body .................. Add
6 Body .................. Add
8 Body .................. Add
Quick Disconnect Option -QD

Immediately shut off water flow from
both directions for single-handed, no-spill
removal of a water cooled trap from the
system for preventative maintenance or
O-ring replacement.
Add
* Available only on four, six and eight inch diameter bodies

** "L7" 0ption available only with six inch bodies
# Not available with 4.5 bodies
OUTLET
Fiberglass Particulate
Filter Option -F
This filter is recommended for
temperatures up to 370C.
Add
F or L7**
F or L7**
High
Capacity
Particulate
Trap
High Capacity Particulate

Filter Option -L7
This fiberglass filter provides a reservoir for
applications with heavy particle loads that
might block the inlet. Available on 6 bodies
only. See diagram at right.
Add
INLET
TRAPA-LIT 7/02
2
Nor-Cal
Products, P. O. Box 518, Yreka, CA 96097 800-824-4166 or 530-842-4457 FAX 530-842-9130 Email [email protected]
NEW PRODUCTS & CUSTOM FORELINE TRAPS

New Products
Single and Multistage LPCVD-TEOS Traps
Three Stage
LPCVD/TEOS
Foreline Trap
Increase your systems throughput and extend preventative maintenance intervals

by two times or more with Nor-Cal Products multistage LPCVD-TEOS foreline traps.
All three traps have a stainless steel gauze filter to collect crystalline TEOS before it
reaches downstream components. The two and three stage traps also have a fiberglass filter to remove silicon dioxide. The three stage traps final stage is a reservoir
to collect liquid TEOS without restricting foreline conductance. Coaxial or right
angle bodies are available with 3 or 4 inch port sizes. See page 11.
Oil Mist Eliminators

During rotary vane pump operation, oil mist escapes from the exhaust
port; mainly when pumping between atmospheric pressure and 1 mbar.
Oil mist eliminators retain oil mist contained in the exhausted gases
with a high level of separation; an internal over pressure valve prevents
exceeding the maximum permissible exhaust pressure. See page 16.
Custom Foreline Traps

Standard trap designs are readily altered or custom models are designed and fabricated to improve performance for your specific
application. Some examples are described below. Call for more information or to discuss your application requirements.
Liquid Recovery Traps
Liquid Nitrogen Traps
Multistage Traps
Nor-Cal has provided many types of

condensation traps for liquid collection
before they enter the pump. Often they
have valves or drains to allow the liquid to
be collected and reused. Some of the
liquids collected include photo resist,
oil and tantalum.
High capacity liquid nitrogen traps can

be furnished for customers who require
larger LN2 capacity to extend the time
between refills or larger trapping capacity
for condensable by-product.
Multi-stage traps can be furnished for

processes that require a combination of
trap media, such as water-cooling and
particle filtration. The trap shown here
was developed for a GaAs MOCVD
process. The first stage particle filter
removes heavy metals, while the water
cooled second stage collects sulfur.
High Capacity Particulate Traps

Nor-Cal can provide high-capacity particle
traps with several liter capacities for applications with large particle loads, such as silicon
wafer processing.
Custom
High Capacity
Particulate
Trap
High Capacity Water Cooled
Semiconductor CVD equipment manufacturers require high wafer counts between

preventative maintenance. Unlike other
manufacturers who offer one solution to
fit a number of applications, Nor-Cal will
design high-capacity water-cooled traps
to achieve specific customer-stated goals.
Port geometry, capacity, conductance
and efficiency are adjusted in order to Partical
Filter
produce the optimal design for the
for Metals
application. Examples of processes we
have provided solutions for include TiN
barrier layer deposition, LPCVD Nitride
and III-Vs MOCVD.
Electropolish or
Nickelplate Finish
Multistage
GaAs Trap
Water
Coils for
Sulphur
INLET
Electropolish finish inside and out is

available upon request for all standard
and custom traps. Electropolished
traps are easier to clean because the
surface is more highly polished than the
standard beadblast finish. Nickleplating
is available upon request foradditional
corrosion resistance. Call for pricing.
OUTLET
TRAPA-LIT 7/02
APPLICATIONS & COMPREHENSIVE DOWNSTREAM SOLUTIONS

Foreline Trap Selection Table
TRAP
APPLICATION
Oil Backstream
Molecular
Metal Sieve
Stainless
Steel
Copper
Zeolite
LN 2
++
++
++
+++
+++
++
++
Water Vapor
Organics
Particles
Acid Vapors
Condensibles
Cold
Particulate
H 20
+
+
Low
Vapor
Pressure
++
++
+++ +++
High
Vapor
Pressure
+++
< 370C
Fiberglass
+++
+++
+++
+
+
< 149C
Polyester
Temperature Guide for Specific Semiconductor Processes

Our experience coupled with a broad
product offering allows us to integrate
components, providing comprehensive
solutions to semiconductor fabs and
equipment manufacturers. To improve
overall system performance and achieve
customer defined goals, a thorough
evaluation of the system is conducted.
A detailed worksheet is posted on our
website for you to download. Filling out
this worksheet will greatly assist us in
calculating your cost of ownership model.
A cost of ownership model can show payback as a result of increased tool utilization
and decreased maintenance costs.
Foreline traps, thermal products, Intellisys
pressure control valves, Genesis soft start
valves and weldments can be provided as
turnkey modules. Thermal and vacuum
characterization can be performed at Nor-Cal
before the assembly is supplied, leak checked, blanked off and clean room packaged.
Solid Phase
Vapor Phase
TM
TM
Download a
Comprehensive Downstream
Solutions Worksheet
from our website at
www.n-c.com/nctraps.htm
Complete worksheet and
fax to 530-842-9130.
TRAPA-LIT 7/02
SEALED METAL SIEVE TRAPS

Sealed traps contain a fibrous stainless steel sieve which eliminates hydrocarbons backstreaming toward the chamber when the mechanical pump oil is at its vapor pressure. Copper sieve can also be provided as an option at no additional cost. The unibody construction
requires removal of the trap from the system for cleaning. The two inch OD body size is available from stock with port ODs from .50 to one
inch, while the four inch is available with port ODs from .75 to two inches. Larger body sizes, CF and ASA flanges are available on request.
Standard finish is beadblast. Electropolish is also available. Call for pricing.
Sealed Coaxial Metal Sieve Traps

Body
OD
Model
Number
Flanges
Port
OD
2.00*
CT-2-050
CT-2-0502-NWB
CT-2-075
CT-2-0752-NWB
CT-2-100
CT-2-1002-NWB
CT-4-075
CT-4-0752-NWB
CT-4-100
CT-4-1002-NWB
CT-4-150
CT-4-1502-NWB
CT-4-200
CT-4-2002-NWB
NW-10B
NW-16B
NW-25B
NW-16B
NW-25B
NW-40B
NW-50B
8.07
8.37
8.07
8.37
8.07
8.37
10.00
10.30
10.00
10.30
10.00
10.30
10.00
10.30
.50
.50
.75
.75
1.00
1.00
.75
.75
1.00
1.00
1.50
1.50
2.00
2.00
Price
INLET
4.00
* ISO body flange option not available for 2 trap bodies
OUTLET
Options (See page 2)

Copper Sieve Filters
TRAPA-LIT 7/02
METAL SIEVE TRAPS

Nor-Cal metal sieve traps are provided with a fibrous stainless steel sieve for removal of hydrocarbons which backstream toward
the chamber when the mechanical pump oil is at its vapor pressure. Copper sieve is also available as an option at no additional cost.
The metal sieve traps two-piece clamped body design makes disassembly, cleaning and sieve replacement a simple task. For proper
sealing, apply a light coating of Krytox lube when cleaning or replacing the O-ring. Standard finish is beadblast. Electropolish finish
is also available. Larger body sizes, CF and ASA flanges are also available. Call for pricing.
Coaxial Metal Sieve Traps

B
Body Model
OD Number
INLET
2.00*
A
4.00
OUTLET
FCT-2
B
6.00
INLET
8.00
OUTLET
Air space
for higher
conductance
FCT-4, FCT-6, FCT-8
FCT-2-050
FCT-2-0502-NWB
FCT-2-075
FCT-2-0752-NWB
FCT-2-100
FCT-2-1002-NWB
FCT-4-075
FCT-4-0752-NWB
FCT-4-100
FCT-4-1002-NWB
FCT-4-150
FCT-4-1502-NWB
FCT-4-200
FCT-4-2002-NWB
FCT-6-150
FCT-6-1502-NWB
FCT-6-200
FCT-6-2002-NWB
FCT-6-250
FCT-6-2502-ISO
FCT-6-300
FCT-6-3002-ISO
FCT-6-400
FCT-6-4002-ISO
FCT-8-200
FCT-8-2002-NWB
FCT-8-250
FCT-8-2502-ISO
FCT-8-300
FCT-8-3002-ISO
FCT-8-400
FCT-8-4002-ISO
Flanges
Port
OD
NW-10B
NW-16B
NW-25B
NW-16B
NW-25B
NW-40B
NW-50B
NW-40B
NW-50B
ISO-63-250-OF
ISO-80-300-OF
ISO-100-400-OF
NW-50B
ISO-63-250-OF
ISO-80-300-OF
ISO-100-400-OF
.50
.50
.75
.75
1.00
1.00
.75
.75
1.00
1.00
1.50
1.50
2.00
2.00
1.50
1.50
2.00
2.00
2.50
2.50
3.00
3.00
4.00
4.00
2.00
2.00
2.50
2.50
3.00
3.00
4.00
4.00
A
8.23
8.53
8.23
8.53
8.23
8.53
10.00
10.30
10.00
10.30
10.00
10.30
10.00
10.30
10.00
10.30
10.00
10.30
10.00
10.50
10.00
10.50
10.00
10.50
13.00
13.30
13.00
13.50
13.00
13.50
13.00
13.50
Price
3.56
3.56
3.56
3.56
3.56
3.56
4.80
4.80
4.80
4.80
4.80
4.80
4.80
4.80
6.90
6.90
6.90
6.90
6.90
6.90
6.90
6.90
6.90
6.90
9.00
9.00
9.00
9.00
9.00
9.00
9.00
9.00

ISO Body Flanges
TRAPA-LIT 7/02
METAL SIEVE TRAPS

Angle Metal Sieve Traps
Body Model
OD Number
2.00*
4.00
6.00
8.00
FTA-2-050
FTA-2-0502-NWB
FTA-2-075
FTA-2-0752-NWB
FTA-2-100
FTA-2-1002-NWB
FTA-4-075
FTA-4-0752-NWB
FTA-4-100
FTA-4-1002-NWB
FTA-4-150
FTA-4-1502-NWB
FTA-4-200
FTA-4-2002-NWB
FTA-6-150
FTA-6-1502-NWB
FTA-6-200
FTA-6-2002-NWB
FTA-6-300
FTA-6-3002-ISO
FTA-6-400
FTA-6-4002-ISO
FTA-8-200
FTA-8-2002-NWB
FTA-8-300
FTA-8-3002-ISO
FTA-8-400
FTA-8-4002-ISO
Flanges
Port
OD
NW-10B
NW-16B
NW-25B
NW-16B
NW-25B
NW-40B
NW-50B
NW-40B
NW-50B
ISO-80-300-OF
ISO-100-400-OF
NW-50B
ISO-80-300-OF
ISO-100-400-OF
.50
.50
.75
.75
1.00
1.00
.75
.75
1.00
1.00
1.50
1.50
2.00
2.00
1.50
1.50
2.00
2.00
3.00
3.00
4.00
4.00
2.00
2.00
3.00
3.00
4.00
4.00
6.79
6.94
6.79
6.94
6.79
6.94
8.42
8.57
8.42
8.57
8.42
8.57
8.42
8.57
8.50
8.65
8.50
8.65
8.50
8.75
8.50
8.75
11.50
11.65
11.50
11.75
11.50
11.75
3.56
3.56
3.56
3.56
3.56
3.56
4.80
4.80
4.80
4.80
4.80
4.80
4.80
4.80
6.90
6.90
6.90
6.90
6.90
6.90
6.90
6.90
9.00
9.00
9.00
9.00
9.00
9.00
5.23
5.38
5.10
5.25
4.98
5.13
6.52
6.67
6.40
6.55
6.14
6.29
5.89
6.04
5.00
5.15
4.75
4.90
4.62
5.00
4.12
4.50
7.63
7.78
7.13
7.50
6.63
7.00
2.50
2.65
2.50
2.65
2.50
2.65
3.50
3.65
3.50
3.65
3.50
3.65
3.50
3.65
4.50
4.65
4.50
4.65
4.50
4.75
4.50
4.75
5.50
5.65
5.50
5.75
5.50
5.75
Price
INLET
A
C
OUTLET
FTA-2
Air space
for higher
conductance
INLET
OUTLET
FTA-4, FTA-6 & FTA-8

ISO Body Flanges
Replacement Metal Sieves

Body Model
OD Number
2.00
4.00
6.00
8.00
FT-2-SS
FT-2-CS
FT-4-SS
FT-4-CS
FT-6-SS
FT-6-CS
FT-8-SS
FT-8-CS
Description
Price
Stainless Steel
Copper
Stainless Steel
Copper
Stainless Steel
Copper
Stainless Steel
Copper
Other replacement hardware located on page 17
TRAPA-LIT 7/02
WATER COOLED TRAPS

Water cooled traps protect mechanical
pumps and other downstream components from condensable process gasses
and their by-products. They can extend
or eliminate preventative maintenance
intervals and pump overhauls. Nor-Cals
unique water cooled traps have up to
Solid Phase
three coils of corrosion resistant 316
stainless steel tubing to provide a large
surface area. Internal baffles combined
with the coils create a perilous path for
the gas flow, maximizing resident time
Vapor Phase
and increasing contact between the gas
and the coils. Depending on the application, house water or refrigerated water
can be used to achieve the required
temperature to cause by-products
to pass from gas to solid phase.
A thirty to fifty psi water supply is
required. Anticipate a 2 gpm flow rate.
The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned. For proper sealing,
apply a light coating of Krytox lube when cleaning or replacing the O-ring. Standard finish is beadblast. Electropolish finish,
right angle configurations, larger body sizes and CF or ASA flanges are also available. Call for pricing.
Quick Disconnect Fittings immediately shut off water flow from both directions for single handed, no-spill removal
of the trap from the system for preventative maintenance or O-ring replacement. Available as an option.
Temperature Guide For

Specific Semiconductor Processes
Coaxial Water Cooled Traps

B
Body
OD
INLET
4.50*
6.00
1" Min.
OUTLET
3/8" OD Tube Typ.
FTWS-4.5
B
8.00
3/8" OD Tube Typ.

INLET
1" Min.
Model
Number
Port
OD
1.50
1.50
2.00
2.00
1.50
1.50
2.00
2.00
2.50
2.50
3.00
3.00
2.00
2.00
2.50
2.50
3.00
3.00
4.00
4.00
9.45
9.75
9.45
9.75
10.00
10.30
10.00
10.30
10.00
10.50
10.00
10.50
13.00
13.30
13.00
13.50
13.00
13.50
13.00
13.50
5.28
5.28
5.28
5.28
6.90
6.90
6.90
6.90
6.90
6.90
6.90
6.90
9.00
9.00
9.00
9.00
9.00
9.00
9.00
9.00
Flanges
FTWS-4.5-150
FTWS-4.5-1502-NWB
NW-40B
FTWS-4.5-200
FTWS-4.5-2002-NWB
NW-50B
FTWS-6-150
FTWS-6-1502-NWB
NW-40B
FTWS-6-200
FTWS-6-2002-NWB
NW-50B
FTWS-6-250
FTWS-6-2502-ISO ISO-63-250-OF
FTWS-6-300
FTWS-8-200
FTWS-8-2002-NWB
NW-50B
FTWS-8-250
FTWS-8-300
FTWS-8-400
* ISO flange body option not available for 4.5 trap bodies
OUTLET
FTWS-6 & FTWS-8
Price

ISO Body Flanges
Quick Disconnect Fittings
TRAPA-LIT 7/02
WATER COOLED TRAPS

Angle Water Cooled Traps
Body
OD
Model
Number
4.50*
FTWA-4.5-150
FTWA-4.5-1502-NWB
FTWA-4.5-200
FTWA-4.5-2002-NWB
FTWA-6-150
FTWA-6-1502-NWB
FTWA-6-200
FTWA-6-2002-NWB
FTWA-6-250
FTWA-6-2502-ISO
FTWA-6-300
FTWA-6-3002-ISO
FTWA-8-200
FTWA-8-2002-NWB
FTWA-8-250
FTWA-8-2502-ISO
FTWA-8-300
FTWA-8-3002-ISO
FTWA-8-400
FTWA-8-4002-ISO
6.00
8.00
Flanges
NW-40B
NW-50B
NW-40B
NW-50B
ISO-63-250-OF
ISO-80-300-OF
NW-50B
ISO-63-250-OF
ISO-80-300-OF
ISO-100-400-OF
Port
OD
1.50
1.50
2.00
2.00
1.50
1.50
2.00
2.00
2.50
2.50
3.00
3.00
2.00
2.00
2.50
2.50
3.00
3.00
4.00
4.00
7.40
7.55
7.40
7.55
8.50
8.65
8.50
8.65
8.50
8.75
8.50
8.75
11.50
11.65
11.50
11.75
11.50
11.75
11.50
11.75
5.28
5.28
5.28
5.28
6.90
6.90
6.90
6.90
6.90
6.90
6.90
6.90
9.00
9.00
9.00
9.00
9.00
9.00
9.00
9.00
3.75
3.90
3.75
3.90
4.50
4.65
4.50
4.65
4.50
4.75
4.50
4.75
5.50
5.65
5.50
5.75
5.50
5.75
5.50
5.75
Price
5.90
6.05
5.90
6.05
5.25
5.40
5.25
5.40
5.25
5.50
5.25
5.50
6.62
6.77
6.62
7.87
6.62
6.87
6.62
6.87
* ISO flange body option not available for 4.5 trap bodies

B
ISO Body Flanges

Quick Disconnect Fittings
OUTLET
D
A
INLET
3/8" OD
Tube Typ.
1" Min.
FTWA-4.5
B
1" Min.
3/8" OD
Tube Typ.
INLET
Quick Disconnect Fittings Kit
Model
Number
Fits
Tube OD
FTW-QD
.375
Description
Cost
Two double-end shut off fittings (DESO)
OUTLET
FTWA-6 & FTWA-8
TRAPA-LIT 7/02
PARTICULATE TRAPS
These traps remove particles that might enter the mechanical pump and
contaminate the oil. A polyester felt filter traps particles over 10 microns
in size at 98% efficiency. Filters can be cleaned with a vacuum cleaner.
Suitable for process temperatures from ambient to 149C.
Woven 10 micron fiberglass filters are available as an option. These filters
provide a much longer service life than the polyester. This filter is required for
temperatures greater than 149C. Maximum fiberglass filter temperature is
370C. Filters with other micron ratings are available upon request.
The high capacity fiberglass filter option, shown in the diagram to right,
provides a reservoir for applications with heavy particle loads that might
block the inlet. The high capacity filter option is not available for 8 bodies.
The two-piece trap body and 304 stainless steel construction allow these
traps to be easily cleaned. For proper sealing, apply a light coating of
Krytox lube when cleaning or replacing the O-ring. Standard finish is
beadblast. Electropolish finish, larger body sizes and custom flange
configurations available. Call for pricing.
High Capacity Filter

Option "-L7"
Standard
Length Filter
OUTLET
OUTLET
INLET
INLET
See Page 2 for Option Ordering Instructions
Angle Particulate Traps

Body Model
OD Number
Coaxial
B
6.00
INLET
8.00*
FTPA-6-150
FTPA-6-1502-NWB
FTPA-6-200
FTPA-6-2002-NWB
FTPA-8-150
FTPA-8-1502-NWB
FTPA-8-200
FTPA-8-2002-NWB
Flanges
Port
OD
NW-40B
NW-50B
NW-40B
NW-50B
1.50
1.50
2.00
2.00
1.50
1.50
2.00
2.00
13.75
13.90
13.75
13.90
13.75
13.90
13.75
13.90
6.90
6.90
6.90
6.90
9.00
9.00
9.00
9.00
10.25
10.40
10.00
10.15
10.25
10.40
10.00
10.15
Price
4.50
4.65
4.50
4.65
5.50
5.65
5.50
5.65
*High Capacity Filter not available for 8 body
Coaxial Particulate Traps
OUTLET
Body Model
OD Number
Angle
6.00
INLET
8.00*
A
C
FTPS-6-150
FTPS-6-1502-NWB
FTPS-6-200
FTPS-6-2002-NWB
FTPS-8-150
FTPS-8-1502-NWB
FTPS-8-200
FTPS-8-2002-NWB
Flanges
Port
OD
NW-40B
NW-50B
NW-40B
NW-50B
1.50
1.50
2.00
2.00
1.50
1.50
2.00
2.00
16.00
16.30
16.00
16.30
16.00
16.30
16.00
16.30
6.90
6.90
6.90
6.90
9.00
9.00
9.00
9.00
*High Capacity Filter not available for 8 body
Price
Replacement Filters
OUTLET

ISO Body Flanges
Woven Fiberglass Filter
High Capacity Fiberglass Filter
Body
OD
6.00 or 8.00
6.00 or 8.00
6.00 only
Model
Number
Description
FT-6-PP
FT-6-PF
FT-6-PF-L7
11.5 Length Polyester Felt Particulate Trap Filter

11.5 Length Woven Fiberglass Particulate Trap Filter
7.5 Length High Capacity Woven Fiberglass Filter
Other hardware located on page 17
Price
TRAPA-LIT 7/02
LPCVD-TEOS SINGLE AND MULTI-STAGE TRAPS
Increase your systems throughput and extend preventative maintenance

intervals by two times or more with Nor-Cal Products LPCVD/TEOS multistage foreline traps. The first stage is a stainless steel gauze filter which
collects crystalline TEOS before it reaches downstream piping and isolation
valves. The second stage is a 10 micron fiberglass filter which removes
silicon dioxide which causes frequent PMs in throttling butterfly valves.
The third and final stage is a reservoir which collects liquid TEOS without
restricting foreline conductance.
traps to be easily cleaned. Standard finish is beadblasted. Electropolish is
also available on request. Call for pricing.
One Stage LPCVD-TEOS Traps

Body
OD
Model
Number
Port
Config. Flanges
Port
ID
8.00
8.00
FTT1S-8-3002-ISO
FTT1A-8-3002-ISO
Coaxial
Angle
ISO-80
ISO-80
3.00
3.00
16.84
15.09
9.00
5.75
12.06
8.00
8.00
FTT1S-8-4002-ISO
FTT1A-8-4002-ISO
Coaxial ISO-100
Angle ISO-100
4.00
4.00
16.84
15.09
9.00
5.75
12.06
Includes one stainless steel gauze filter
Price
INLET
Two Stage LPCVD-TEOS Traps

Body
OD
Model
Number
Port
Config. Flanges
Port
ID
8.00
8.00
FTT2S-8-3002-ISO
FTT2A-8-3002-ISO
Coaxial
Angle
ISO-80
ISO-80
3.00
3.00
19.12
21.00
9.45
5.75
18.00
8.00
8.00
FTT2S-8-4002-ISO
FTT2A-8-4002-ISO
Coaxial ISO-100
Angle ISO-100
4.00
4.00
19.12
21.00
9.45
5.75
18.00
Includes one stainless steel gauze filter and one 10 micron fiberglass filter
Price
OUTLET
Coaxial
INLET
Three Stage LPCVD-TEOS Traps

Body
OD
Model
Number
Port
Config. Flanges
Port
ID
8.00
8.00
FTT3S-8-3002-ISO
FTT3A-8-3002-ISO
Coaxial
Angle
ISO-80
ISO-80
3.00
3.00
19.12
21.00
9.45
5.75
18.00
8.00
8.00
FTT3S-8-4002-ISO
FTT3A-8-4002-ISO
Coaxial ISO-100
Angle ISO-100
4.00
4.00
19.12
21.00
9.45
5.75
18.00
Includes one stainless steel gauze filter and one 10 micron fiberglass filter
Price
OUTLET
Angle
Replacement Filters
Body Model
OD Number
8.00
Filter
Material
FT-8-SS Stainless Steel Gauze

FT-8-SS-5 Stainless Steel Gauze
FT-8-PF-5 Woven Fiberglass
Fits
Traps
Price
One stage, FTT1

Two and three stage, FTT2 and FTT3
Two and three stage, FTT2 and FTT3
Other replacement hardware is located on page 17

TRAPA-LIT 7/02
LIQUID NITROGEN TRAPS

Nor-Cals liquid nitrogen traps are used to remove condensible gasses before
they enter the mechanical pump and contaminate the oil. They also prevent oil
vapors from the mechanical pump from contaminating the chamber. These traps
actually act as a pump producing lower base pressures and faster pump down.
The dual-tube trap can be attached to an automatic fill tube, eliminating the need
for refilling the reservoir with liquid nitrogen.
The maximum duration of time between refills
on the single tube models is as follows:
4 inch diameter ........................ 8 hours
traps to be easily cleaned without disassembling the system. For proper
sealing, apply a light coating of Krytox lube when cleaning or replacing the
O-ring. Coaxial port configurations, ISO, CF or ASA flanges and electropolish
finish available. Call for pricing.
In-Line Liquid Nitrogen Traps

Body Model
OD Number
1.00 OD
x .87 ID
Fill and
Vent Tube
4.00
A
INLET
OUTLET
6.00
C
8.00
In-Line
FTN-4-075
FTN-4-0752-NWB
FTN-4-100
FTN-4-1002-NWB
FTN-4-150
FTN-4-1502-NWB
FTN-6-150
FTN-6-1502-NWB
FTN-6-200
FTN-6-2002-NWB
FTN-8-150
FTN-8-1502-NWB
FTN-8-200
FTN-8-2002-NWB
Flanges
Port
OD
NW-16B
NW-25B
NW-40B
NW-40B
NW-50B
NW-40B
NW-50B
.75
.75
1.00
1.00
1.50
1.50
1.50
1.50
2.00
2.00
1.50
1.50
2.00
2.00
11.50
11.50
11.50
11.50
11.50
11.50
14.20
14.20
14.20
14.20
15.25
15.25
15.25
15.25
LN2
Reservoir
3.70
3.70
3.70
3.70
3.70
3.70
4.50
4.50
4.50
4.50
5.00
5.00
5.00
5.00
.75 Liter
.75 Liter
.75 Liter
.75 Liter
.75 Liter
.75 Liter
1.60 Liter
1.60 Liter
1.60 Liter
1.60 Liter
4.00 Liter
4.00 Liter
4.00 Liter
4.00 Liter
B
7.00
7.30
7.00
7.30
7.00
7.30
9.00
9.30
9.00
9.30
11.00
11.30
11.00
11.30
1.00 OD
x .87 ID
Fill and
Vent Tube
Angle Liquid Nitrogen Traps

Body Model
OD Number
INLET
OUTLET
Angle

ISO Body Flanges
Price
4.00 FTNA-4-075
FTNA-4-0752-NWB
FTNA-4-100
FTNA-4-1002-NWB
FTNA-4-150
FTNA-4-1502-NWB
6.00 FTNA-6-150
FTNA-6-1502-NWB
FTNA-6-200
FTNA-6-2002-NWB
8.00 FTNA-8-150
FTNA-8-1502-NWB
FTNA-8-200
FTNA-8-2002-NWB
Flanges
Port
OD
NW-16B
NW-25B
NW-40B
NW-40B
NW-50B
NW-40B
NW-50B
.75
.75
1.00
1.00
1.50
1.50
1.50
1.50
2.00
2.00
1.50
1.50
2.00
2.00
13.00
13.30
13.00
13.30
13.00
13.30
15.70
16.00
15.70
16.00
16.75
16.90
16.75
16.90
4.80
4.80
4.80
4.80
4.80
4.80
6.90
6.90
6.90
6.90
9.00
9.00
9.00
9.00
7.03
7.18
6.91
7.06
6.65
7.80
8.25
8.40
8.00
8.15
9.00
9.15
8.75
8.90
LN2
D Reservoir
3.50
3.65
3.50
3.65
3.50
3.65
4.50
4.65
4.50
4.65
5.50
5.65
5.50
5.65
Price
.75 Liter
.75 Liter
.75 Liter
.75 Liter
.75 Liter
.75 Liter
1.6 Liter
1.6 Liter
1.6 Liter
1.6 Liter
4 Liter
4 Liter
4 Liter
4 Liter
TRAPA-LIT 7/02
DUAL TUBE LIQUID NITROGEN TRAPS
The dual-tube design allows the liquid nitrogen reservoir to be attached to an automatic fill tube, reducing the amount of service required by the system. These traps
are available in in-line and right angle port configurations with 4.0, 6.0, and 8.0
inch OD bodies, .75 to 4.0 inch OD ports. The two-piece trap body and 304 stainless steel construction allow these traps to be easily cleaned. For proper sealing,
apply a light coating of Krytox lube when cleaning or replacing the O-ring. ISO, CF
or ASA flanges and electropolish finish available on request. Call for pricing.
In-Line Dual-Tube Liquid Nitrogen Traps

Body Model
OD Number
4.00
6.00
8.00
NTD-4-075
NTD-4-0752-NWB
NTD-4-100
NTD-4-1002-NWB
NTD-4-150
NTD-4-1502-NWB
NTD-6-150
NTD-6-1502-NWB
NTD-6-200
NTD-6-2002-NWB
NTD-8-150
NTD-8-1502-NWB
NTD-8-200
NTD-8-2002-NWB
Flanges
Port
OD
NW-16B
NW-25B
NW-40B
NW-40B
NW-50B
NW-40B
NW-50B
.75
.75
1.00
1.00
1.50
1.50
1.50
1.50
2.00
2.00
1.50
1.50
2.00
2.00
LN2
Reservoir Price
11.50
11.50
11.50
11.50
11.50
11.50
14.20
14.20
14.20
14.20
15.25
15.25
15.25
15.25
3.70
3.70
3.70
3.70
3.70
3.70
4.50
4.50
4.50
4.50
5.00
5.00
5.00
5.00
7.00
7.30
7.00
7.30
7.00
7.30
9.00
9.30
9.00
9.30
11.00
11.30
11.00
11.30
Fill
Tube
.75 Liter
.75 Liter
.75 Liter
.75 Liter
.75 Liter
.75 Liter
1.6 Liter
1.6 Liter
1.6 Liter
1.6 Liter
4 Liter
4 Liter
4 Liter
4 Liter
Vent
Tube
A
INLET
OUTLET
In-Line
Fill
Tube
Vent
Tube
Angle Dual-Tube Liquid Nitrogen Traps

Body Model
OD Number
4.00 NTDA-4-075
NTDA-4-0752-NWB
NTDA-4-100
NTDA-4-1002-NWB
NTDA-4-150
NTDA-4-1502-NWB
6.00 NTDA-6-150
NTDA-6-1502-NWB
NTDA-6-200
NTDA-6-2002-NWB
8.00 NTDA-8-150
NTDA-8-1502-NWB
NTDA-8-200
NTDA-8-2002-NWB
Flanges
Port
OD
NW-16B
NW-25B
NW-40B
NW-40B
NW-50B
NW-40B
NW-50B
.75
.75
1.00
1.00
1.50
1.50
1.50
1.50
2.00
2.00
1.50
1.50
2.00
2.00
13.00
13.15
13.00
13.15
13.00
13.15
15.70
15.85
15.70
15.85
16.75
16.90
16.75
16.90
4.80
4.80
4.80
4.80
4.80
4.80
6.90
6.90
6.90
6.90
9.00
9.00
9.00
9.00
7.03
7.18
6.91
7.06
6.65
6.80
8.25
8.40
8.00
8.15
9.00
9.15
8.75
8.90
LN2
D Reservoir
3.50
3.65
3.50
3.65
3.50
3.65
4.50
4.65
4.50
4.65
5.50
5.65
5.50
5.65
Price
.75 Liter
.75 Liter
.75 Liter
.75 Liter
.75 Liter
.75 Liter
1.6 Liter
1.6 Liter
1.6 Liter
1.6 Liter
4 Liter
4 Liter
4 Liter
4 Liter
INLET
OUTLET
Angle

ISO Body Flanges
TRAPA-LIT 7/02
MOLECULAR SIEVE TRAPS

These traps perform a dual function. A zeolite desiccant removes hydrocarbons which backstream toward the chamber when the mechanical pump oil
Heater
is at its vapor pressure. Also, the zeolite traps water vapor and other gasses
before they reach the mechanical pump and contaminate the pump oil.
Depending on the process this can reduce the frequency of oil changes
by a significant amount.
Gas
Nor-Cals molecular sieve foreline trap utilizes the flex trap design for ease of
Annular
Path
Baffle
In
maintenance and zeolite replacement. For maximum conductance the sieve
material is contained in a suspended basket fabricated from perforated 304
stainless steel. The suspended basket provides the conductance to the sieve
at the top of the basket as well as around the periphery. A mid-basket baffle
Gas
Path
causes the gas to enter one-half of the basket and to exit the other half.
Out
When initializing a new trap, replacing the sieve or when base pressure
cannot be achieved, the sieve should be regenerated by turning on the heater
Sieve
Removable
for a few hours and running the mechanical pump with its ballast valve open.
End
The frequency and duration of sieve regeneration is dependent upon the kind
and amount of gasses produced by the particular application. To replace the
sieve, remove the trap end that contains the heater and remove the nut at the end
of the basket. Dump the expired sieve material, replace with new, reattach the basket/end
plate then perform the regeneration process outlined in the previous paragraph.
All molecular sieve traps are supplied with a molecular sieve charge and a regeneration heater. The heater is held in place with a clip
allowing these traps to be mounted in any position. A 4.0 inch diameter trap heater is rated at 120V, 125W; 6.0 inch at 120V, 230W;
and 8.0 inch at 120V, 350W. A 240 volt regeneration heater is available as an option. Other voltages and wattages are available
upon request. Standard trap finish is beadblasted. Electropolish finish, custom flange configurations, and larger body sizes are
also available. Call for pricing.
In-Line Molecular Sieve Traps

Body Model
OD Number
4.00
INLET
A
6.00
OUTLET
B
8.00
FTM-4-075
FTM-4-0752-NWB
FTM-4-100
FTM-4-1002-NWB
FTM-4-150
FTM-4-1502-NWB
FTM-6-150
FTM-6-1502-NWB
FTM-6-200
FTM-6-2002-NWB
FTM-8-200
FTM-8-2002-NWB
FTM-8-250
FTM-8-2502-ISO
FTM-8-300
FTM-8-3002-ISO
FTM-8-400
FTM-8-4002-ISO
Flanges
Port
OD
NW-16B
NW-25B
NW-40B
NW-40B
NW-50B
NW-50B
ISO-63-250-OF
ISO-80-300-OF
ISO-100-400-OF
.75
.75
1.00
1.00
1.50
1.50
1.50
1.50
2.00
2.00
2.00
2.00
2.50
2.50
3.00
3.00
4.00
4.00
6.20
6.20
6.20
6.20
6.20
6.20
8.10
8.10
8.10
8.10
13.00
13.00
13.00
13.00
13.00
13.00
13.00
13.00
7.00
7.30
7.00
7.30
7.00
7.30
9.00
9.30
9.00
9.30
11.00
11.30
11.00
11.50
11.00
11.50
11.00
11.50
3.50
3.50
3.50
3.50
3.50
3.50
4.00
4.00
4.00
4.00
6.75
6.75
6.75
6.75
6.75
6.75
6.75
6.75
Price
Replacement Sieves
Body OD
4.00
6.00
8.00
Model Number
Description
FT-4-MS
FT-6-MS
FT-8-MS
1 lb. Molecular Sieve Charge, 4 trap requires .75 lb.

2 lb. Molecular Sieve Charge, 6 trap requires 1.5 lb.
5 lb. Molecular Sieve Charge, 8 trap requires 4.75 lb.
Other replacement hardware located on page 17

Price
TRAPA-LIT 7/02
MOLECULAR SIEVE TRAPS

Angle Molecular Sieve Traps
Body Model
OD Number
4.00
6.00
8.00
Flanges
FTMA-4-075
FTMA-4-0752-NWB
NW-16B
FTMA-4-100
FTMA-4-1002-NWB
NW-25B
FTMA-4-150
FTMA-4-1502-NWB
NW-40B
FTMA-6-150
FTMA-6-1502-NWB
NW-40B
FTMA-6-200
FTMA-6-2002-NWB
NW-50B
FTMA-8-200
FTMA-8-2002-NWB
NW-50B
FTMA-8-250
FTMA-8-2502-ISO ISO-63-250-OF
FTMA-8-300
FTMA-8-400
Port
OD
.75
.75
1.00
1.00
1.50
1.50
1.50
1.50
2.00
2.00
2.00
2.00
2.50
2.50
3.00
3.00
4.00
4.00
7.70
7.70
7.70
7.70
7.70
7.70
9.60
9.60
9.60
9.60
14.50
14.65
14.50
14.75
14.50
14.75
14.50
14.75
6.40
6.55
6.40
6.55
6.40
6.55
7.60
7.75
7.60
7.75
11.38
11.53
11.38
11.63
11.38
11.63
11.38
11.63
3.50
3.65
3.50
3.65
3.50
3.65
4.50
4.65
4.50
4.65
5.50
5.65
5.50
5.75
5.50
5.75
5.50
5.75
Price
INLET
OUTLET
Straight-In-Line Molecular Sieve Traps

Body Model
OD Number
4.00
6.00
8.00
Flanges
FTMS-4-075
FTMS-4-0752-NWB
NW-16B
FTMS-4-100
FTMS-4-1002-NWB
NW-25B
FTMS-4-150
FTMS-4-1502-NWB
NW-40B
FTMS-6-150
FTMS-6-1502-NWB
NW-40B
FTMS-6-200
FTMS-6-2002-NWB
NW-50B
FTMS-8-200
FTMS-8-2002-NWB
NW-50B
FTMS-8-250
FTMS-8-2502-ISO ISO-63-250-OF
FTMS-8-300
FTMS-8-400
Port
OD
.75
.75
1.00
1.00
1.50
1.50
1.50
1.50
2.00
2.00
2.00
2.00
2.50
2.50
3.00
3.00
4.00
4.00
7.00
7.00
7.00
7.00
7.00
7.00
7.00
7.00
7.00
7.00
10.00
10.00
10.00
10.00
10.00
10.00
10.00
10.00
7.00
7.30
7.00
7.30
7.00
7.30
9.00
9.30
9.00
9.30
11.00
11.30
11.00
11.50
11.00
11.50
11.00
11.50
3.50
3.50
3.50
3.50
3.50
3.50
3.50
3.50
3.50
3.50
5.00
5.00
5.00
5.00
5.00
5.00
5.00
5.00
Price
A
OUTLET
Replacement Heaters
Trap OD
4.00
4.00
6.00
6.00
8.00
8.00
Model Number
Description
FT-4-HR
FT-4-HR-240V
FT-6-HR
FT-6-HR-240V
FT-8-HR
FT-8-HR-240V
Molecular Sieve Cartridge Heater, rated at 120V, 125W

Other replacement hardware located on Page 17
INLET
240V Regeneration Heaters

ISO Body Flanges
Price
Larger port sizes and custom

flange configurations
available on request.
TRAPA-LIT 7/02
OIL MIST ELIMINATORS

FTOME-25-S
1.97
1.97
4.64
5.83
4.64
FTOME-25-HP
FTOME-25-S
To Exhaust Pump
2.44
Square
FTOME-25-HP
4.09 Square
2.24
Sight
Glass
7.87
1/8 G
Drain
During rotary vane pump operation, oil mist escapes from the exhaust port; mainly
when pumping between atmospheric pressure and 1 mbar. Safe operation of a rotary
vane pump requires an Oil Mist Eliminator (OME) to be mounted above the pumps
exhaust port. The oil mist is present in exhaust gases with a high level of separation.
These mists present a potential environmental and health hazard as well as creating
an oily build-up on everything in the pumps proximity. Misting increases as exhaust
pressure increases.
The OMEs filtration system contains the mist* and returns it to the pump body.
The OMEs internal over-pressure valve prevents vapor explosions due to exceeding
the maximum permissible exhaust pressure.
*Oil mist eliminators do not trap gas. Vent all processes properly.
Oil Mist Eliminators
To Exhaust Pump
Model Number Process Usage

FTOME-25-S
FTOME-25-HP
FTOME-40-S
FTOME-40-S
FTOME-40-C2
Body
General, non-corrosive
Polyamide
General, non-corrosive. For frequent
Aluminum
cycling or high pressure operation
General, non-corrosive
Aluminum
Fluorinated, corrosive
Stainless Steel
Flanges
Price
NW-25
NW-25
NW-40
NW-40
13.30
Replacement Filters
5.51
To Exhaust Pump
FTOME-40-C2
3.35
6.69
3.26
4.72
Model Number
Use with
Filter Material
FTOME-25-S-F
FTOME-25-HP-F
FTOME-40-S-F
FTOME-40-C2-F
FTOME-25-S
FTOME-25-HP
FTOME-40-S
FTOME-40-C2
Epoxy/glass microfiber
Polypropylene
Quantity
Price
1
1
1
1
4.92
To
Exhaust
Pump
Oil
Level
For NW clamps, O-rings and aluminum or stainless steel centering rings

please refer to the Nor-Cal Products NW-ISO catalog.
13.82
3.94
3/8 G Drain
TRAPA-LIT 7/02
REPLACEMENT HARDWARE
Foreline Trap Replacement Hardware
Body
OD
Model
Number
For Use With Trap Type
Description
All
FT-CP-B
FTW-QD
All Types (except 2.00 bodies)

All Water Cooled
Replacement T-Bolt and Nuts for Trap Mounting Bracket

Quick Disconnect Fittings Kit for Water Cooled Traps (DESO)
2.00
FT-2-SS
FT-2-CS
NW-50-OR-V
NW-50-CP
Metal Sieve
Metal Sieve
All Types
All Types
Stainless Steel Sieve Cartridge

Copper Sieve Cartridge
Viton Body O-Ring
Body Clamp
4.00
FT-4-SS
FT-4-CS
FT-4-MS
FT-4-HR
FT-4-HR-240V
FT-4-OR
FT-4-CP
FT-4-MB
Metal Sieve
Metal Sieve
Molecular Sieve
Molecular Sieve
Molecular Sieve
All Types
All Types
All Types

1 lb. Molecular Sieve Charge, requires .75 lb. Molecular Sieve
Viton Body O-Ring
Body Clamp
Trap Mounting Bracket
4.50
FT-4.5-OR
FT-4.5-CP
FT-4.5-MB
FTW-4.5-OR
All Types
All Types
All Types
Water Cooled
Viton Body O-Ring

Body Clamp
Internal Viton O-Ring
6.00
FT-6-SS
FT-6-CS
FT-6-MS
FT-6-HR
FT-6-HR-240V
FT-6-OR
FT-6-CP
FT-6-MB
FT-6-PP
FT-6-PF
FT-6-PF-L7
Metal Sieve
Metal Sieve
Molecular Sieve
Molecular Sieve
Molecular Sieve
All Types
All Types
All Types
Particulate
Particulate
Particulate

2 lb. Molecular Sieve Charge
Viton Body O-Ring
Body Clamp
11.5 Standard Length Polyester Felt Filter
11.5 Standard Length Woven Fiberglass Filter
7.5 Length High Capacity Woven Fiberglass Filter
8.00
FT-6-PP
FT-6-PF
FT-8-SS
FT-8-SS-5
FT-8-PF-5
FT-8-CS
FT-8-MS
FT-8-HR
FT-8-HR-240V
FT-8-OR
FT-8-CP
FT-8-MB
Particulate
Particulate
Metal Sieve and One Stage LPCVD/TEOS
Two and Three Stage LPCVD/TEOS
Two and Three Stage LPCVD/TEOS
Metal Sieve
Molecular Sieve
Molecular Sieve
Molecular Sieve
All Types
All Types
All Types
8 Standard Length Polyester Particulate Filter

8 Standard Length Woven Fiberglass Particulate Filter
8 Standard Length Stainless Steel Sieve Cartridge
5 Length Stainless Steel Sieve Cartridge
5 Length Woven Fiberglass Particulate Trap Filter
5 lb. Molecular Sieve Charge
Viton Body O-Ring
Body Clamp
Price
TRAP MOUNTING BRACKET
TRAPA-LIT 7/02
CF FLANGE SYSTEM
Receiver
Plate Nut
Gasket
Insert
Non-Rotatable CF Flange
Rotatable CF Flange
General Information
Rotatable Flange Option
Nor-Cal CF Flanges are compatible

with other Conflat style flanges and are
available in sizes from 11/3 to 161/2 inches
OD for 1/4 to 14 inch tube.
Flanges 41/2 inches OD and smaller
are made from 304 electroslag remelt
(ESR) bar stock. ESR is a refining
process that produces stainless steel
with higher purity, fewer inclusions
and more uniform grain structure to
eliminate microscopic leak paths.
Larger CF flanges are made from Argon
Oxygen Decarburization (AOD) 304
stainless steel. This material is certified
to meet ASTM-240 and has less than
.01% sulfur to prevent sulfur stringers.
Grain size is 3 to 6 per ASTM E-112.
Maximum inclusion size is 2.5 per
ASTM E-45. Normally our standard
CF material is in the low carbon range
for 304 stainless steel. As specials 304L
and 316L material can be supplied
in AOD or roll-forged rings.
Machining is consistent with good UHV
practice. Machine coolant is sulfur free to
reduce outgassing. State-of-the-art CNC
machine centers are used to produce
flanges with consistent high quality.
Flanges are machine washed in approved
aqueous detergent after machining.
Chem-cleaning and clean room
packaging are available on request.
CF flanges utilize an OFHC copper

gasket to produce a vacuum tight seal
up to 10-13 Torr, even when baked
repeatedly to 5000C.
OFHC Copper Gasket
When the copper
gasket is compressed between
the knife edges
of CF flanges,
its material flows
laterally to fill surface
imperfections.
R
Alternate
Fastening Hardware
CF flanges are available with UNC
or UNF tapped and untapped holes.
Metric tapped or helicoiled holes can
be ordered as specials. Tapped flanges
have through holes, so bolts may protrude slightly from the back of the flange
when fastened to an untapped flange.
Untapped CF flanges can be fastened
to each other with stainless steel bolts
and hex nuts or plate nuts. Plate nuts
center themselves over two adjacent
holes and can be held in place with one
finger while the bolts are tightened.
They are available for most flange sizes
from 11/3 to 10 inch ODs. As an alternative to hex head bolts, 12-point bolts
are available for CF flanges from 23/4 to
10 inch ODs. Silver plated bolts are
available upon request to eliminate the
need for anti-seize compound in clean
room environments.
Nor-Cal offers CF flanges in rotatable

as well as non-rotatable versions. When
components of several systems are used
interchangeably, use of rotatable flanges
is recommended. Assembly is facilitated by
rotating the receiver portion of the flange to
align its bolt holes with those of the mating
flange. The insert is welded to the tube or
component and contains the knife edge
portion of the CF flange.
Non-rotatable CF flanges, unlike rotatable,
contain both sealing surface and bolt holes
in one unit. This makes the non-rotatable
flange less expensive, and therefore the
preferred choice when mating component
orientation is not a concern. All fittings
are priced with a rotatable flange opposing
a non-rotatable. For fittings with all
non-rotatable flanges subtract the
difference in price between a rotatable
and non-rotatable flange of the desired
size multiplied by the number of
additional non-rotatable flanges.
CF/WS-LIT 11/02
CF MINI-FLANGES & HARDWARE

CF Mini Flanges
CF mini flanges are manufactured
to the same high standard as our other
CF flanges for 14, 38, 12, and 34 inch
OD tube sizes. Nor-Cal offers special
purpose, double-sided and zero-length
reducer mini flanges along with fittings,
viewports and feedthroughs in this size,
so we can supply all the components
necessary to build a complete table-top,
small laboratory or gas handling
system from stock.
Non-Rotatable
Bored Weld Neck
Blank
1.330
1.062
Bored
1.330
1.062
1.330
1.062
C
.300
.300
.500
.060
A
B
A
.672
.750
Non-Rotatable 11 3 Inch Nominal OD CF Mini Flanges

Description
Model
Number
A
ID
B
OD
Bolt Holes
Number Dia. or Thread
Non-Rotatable
133-000N
133-000NK
133-025N
133-038N
133-050N
133-075N
133-075NK
133-075NBK
Blank
Blank
.255
.380
.505
.625
.625
.625
.755
-
.175
-
6
6
6
6
6
6
6
6
.172
.172
.172
.172
.172
.172
.172
.172
Non-Rotatable
Tapped
133-000NT
133-000NKT
133-025NT
133-038NT
133-050NT
133-075NT
133-075NKT
133-075NBKT
Blank
Blank
.255
.380
.505
.625
.625
.625
.755
-
.175
-
6
6
6
6
6
6
6
6
8-32
8-32
8-32
8-32
8-32
8-32
8-32
8-32
R - Rotatable
N - Non Rotatable
T - Tapped
K - Weld Neck
BK - Same as K without .060 Weld Prep.
Price
CF/WS-LIT 11/02
CF MINI-FLANGES & HARDWARE

Rotatable
Blank
Bored Weld Neck
1.330
1.062
Bored
1.330
1.062
1.330
1.062
.300
.300
.500
.060
A
.672
.750
Rotatable 11 3 Inch Nominal OD CF Mini Flanges

Description
Model
Number
A
ID
B
OD
Bolt Holes
Number Dia. or Thread
Rotatable
133-000R
133-000RK
133-025R
133-038R
133-050R
133-075R
133-075RK
133-075RBK
Blank
Blank
.255
.380
.505
.625
.625
.625
6
6
6
6
6
6
6
6
.172
.172
.172
.172
.172
.172
.172
.172
Rotatable
Tapped
133-000RT
133-000RKT
133-025RT
133-038RT
133-050RT
133-075RT
133-075RKT
133-075RBKT
Blank
Blank
.255
.380
.505
.625
.625
.625
6
6
6
6
6
6
6
6
8-32
8-32
8-32
8-32
8-32
8-32
8-32
8-32
R - Rotatable
N - Non Rotatable
T - Tapped
K - Weld Neck
BK - Same as K without .060 Weld Prep.
Price
Mini Flange Hardware

Model Number Description
Price
G-133
G-133V
(10) OFHC Copper Gaskets

(5) Viton Gaskets
B-133
B-133T
(25) Stainless Steel 8-32 x .75" Bolts, Nuts and Washers

(25) Stainless Steel 8-32 x .56" Bolts and Washers
NP-075
KNP-075
(24) 8-32 Plate Nuts. See page 21.

(12) Plate Nuts and (24) 8-32 x .75" Bolts
CF/WS-LIT 11/02
CF FLANGES
2 1 8 Inch Nominal OD CF Flanges
Model
Number
A
OD
B
ID
Non-Rotatable
212-000N
212-025N
212-050N
212-075N
212-100N
2.12
2.12
2.12
2.12
2.12
Blank
.255
.505
.688
.938
.760
1.010
.469
.469
.469
.469
.469
.167
.167
1.625
1.625
1.625
1.625
1.625
4
4
4
4
4
.265
.265
.265
.265
.265
Non-Rotatable
Tapped
212-000NT
212-025NT
212-050NT
212-075NT
212-100NT
2.12
2.12
2.12
2.12
2.12
Blank
.255
.505
.688
.938
.760
1.010
.469
.469
.469
.469
.469
.167
.167
1.625
1.625
1.625
1.625
1.625
4
4
4
4
4
14-28
Rotatable
212-000R
212-025R
212-050R
212-075R
212-100R
2.12
2.12
2.12
2.12
2.12
Blank
.255
.505
.688
.938
.760
1.010
.469
.469
.469
.469
.469
.167
.167
1.625
1.625
1.625
1.625
1.625
4
4
4
4
4
.265
.265
.265
.265
.265
Rotatable
Tapped
212-000RT
212-025RT
212-050RT
212-075RT
212-100RT
2.12
2.12
2.12
2.12
2.12
Blank
.255
.505
.688
.938
.760
1.010
.469
.469
.469
.469
.469
.167
.167
1.625
1.625
1.625
1.625
1.625
4
4
4
4
4
14-28
Description
Bolt Holes
Number Dia. or Thrd. Price
14-28
14-28
14-28
14-28
14-28
14-28
14-28
14-28
Non-Rotatable
Rotatable
Blank
Blank
A
F
A
F
Bored
Bored
A
F
E
A
F
D
B
C
B
C
CF/WS-LIT 11/02
CF FLANGES
2 34 Inch Nominal OD CF Flanges
Model
Number
A
OD
B
ID
Non-Rotatable
275-000N
275-025N
275-050N
275-075N
275-100N
275-125N
275-150N
2.73
2.73
2.73
2.73
2.73
2.73
2.73
Blank
.255
.505
.688
.938
1.188
1.438
.760
1.010
1.260
1.510
.500
.500
.500
.500
.500
.500
.500
.209
.209
.209
.209
2.312
2.312
2.312
2.312
2.312
2.312
2.312
6
6
6
6
6
6
6
.265
.265
.265
.265
.265
.265
.265
Non-Rotatable
Tapped
275-000NT
275-025NT
275-050NT
275-075NT
275-100NT
275-125NT
275-150NT
2.73
2.73
2.73
2.73
2.73
2.73
2.73
Blank
.255
.505
.688
.938
1.188
1.438
.760
1.010
1.260
1.510
.500
.500
.500
.500
.500
.500
.500
.209
.209
.209
.209
2.312
2.312
2.312
2.312
2.312
2.312
2.312
6
6
6
6
6
6
6
14-28
Rotatable
275-000R
275-025R
275-050R
275-075R
275-100R
275-125R
275-150R
2.73
2.73
2.73
2.73
2.73
2.73
2.73
Blank
.255
.505
.688
.938
1.188
1.438
.760
1.010
1.260
1.510
.500
.500
.500
.500
.500
.500
.500
.209
.209
.209
.209
2.312
2.312
2.312
2.312
2.312
2.312
2.312
6
6
6
6
6
6
6
.265
.265
.265
.265
.265
.265
.265
Rotatable
Tapped
275-000RT
275-025RT
275-050RT
275-075RT
275-100RT
275-125RT
275-150RT
2.73
2.73
2.73
2.73
2.73
2.73
2.73
Blank
.255
.505
.688
.938
1.188
1.438
.760
1.010
1.260
1.510
.500
.500
.500
.500
.500
.500
.500
.209
.209
.209
.209
2.312
2.312
2.312
2.312
2.312
2.312
2.312
6
6
6
6
6
6
6
14-28
Description
Bolt Holes
14-28
14-28
14-28
14-28
14-28
14-28
14-28
14-28
14-28
14-28
14-28
14-28
Non-Rotatable
Rotatable
Blank
Blank
A
F
A
F
Bored
Bored
A
F
E
A
F
D
B
C
B
C
CF/WS-LIT 11/02
CF FLANGES & HARDWARE

Model
Number
A
OD
B
ID
Non-Rotatable
338-000N
338-150N
338-200N
3.36
3.36
3.36
Blank
1.438
1.938
1.510
2.010
.687
.687
.687
.225
.225
2.850
2.850
2.850
8
8
8
.332
.332
.332
Non-Rotatable
Tapped
338-000NT
338-150NT
338-200NT
3.36
3.36
3.36
Blank
1.438
1.938
1.510
2.010
.687
.687
.687
.225
.225
2.850
2.850
2.850
8
8
8
516-24
Rotatable
338-000R
338-150R
338-200R
3.36
3.36
3.36
Blank
1.438
1.938
1.510
2.010
.687
.687
.687
.225
.225
2.850
2.850
2.850
8
8
8
.332
.332
.332
Rotatable
Tapped
338-000RT
338-150RT
338-200RT
3.36
3.36
3.36
Blank
1.438
1.938
1.510
2.010
.687
.687
.687
.225
.225
2.850
2.850
2.850
8
8
8
516-24
Description
Bolt Holes
516-24
516-24
516-24
516-24

Model
Number
A
OD
B
ID
Non-Rotatable
450-000N
450-150N
450-200N
450-250N
4.47
4.47
4.47
4.47
Blank
1.438
1.938
2.438
1.510
2.010
2.510
.687
.687
.687
.687
.375
.375
.375
3.628
3.628
3.628
3.628
8
8
8
8
.332
.332
.332
.332
Non-Rotatable
Tapped
450-000NT
450-150NT
450-200NT
450-250NT
4.47
4.47
4.47
4.47
Blank
1.438
1.938
2.438
1.510
2.010
2.510
.687
.687
.687
.687
.375
.375
.375
3.628
3.628
3.628
3.628
8
8
8
8
516-24
Rotatable
450-000R
450-150R
450-200R
450-250R
4.47
4.47
4.47
4.47
Blank
1.438
1.938
2.438
1.510
2.010
2.510
.750
.750
.750
.750
.375
.375
.375
3.628
3.628
3.628
3.628
8
8
8
8
.332
.332
.332
.332
Rotatable
Tapped
450-000RT
450-150RT
450-200RT
450-250RT
4.47
4.47
4.47
4.47
Blank
1.438
1.938
2.438
1.510
2.010
2.510
.750
.750
.750
.750
.375
.375
.375
3.628
3.628
3.628
3.628
8
8
8
8
516-24
Description
Bolt Holes
516-24
516-24
516-24
516-24
516-24
516-24
Non-Rotatable
Blank
Rotatable
Blank
A
F
A
F
Bored
Bored
A
F
A
F
D
B
C
B
C
CF/WS-LIT 11/02

Model
Number
A
OD
B
ID
Non-Rotatable
462-000N
462-300N
4.61
4.61
Blank
2.938
3.010
.812
.812
.281
4.030
4.030
10
10
.332
.332
Non-Rotatable
Tapped
462-000NT
462-300NT
4.61
4.61
Blank
2.938
3.010
.812
.812
.281
4.030
4.030
10
10
516-24
Rotatable
462-000R
462-300R
4.61
4.61
Blank
2.938
3.010
.812
.812
.281
4.030
4.030
10
10
.332
.332
Rotatable
Tapped
462-000RT
462-300RT
4.61
4.61
Blank
2.938
3.010
.812
.812
.281
4.030
4.030
10
10
516-24
Description
Bolt Holes
516-24
516-24
Non-Rotatable
Blank
Rotatable
Blank
A
F
A
F
Bored
Bored
A
F
A
F
D
B
C
B
C
CF/WS-LIT 11/02
CF FLANGES
6 Inch Nominal OD CF Flanges
Model
Number
A
OD
B
ID
Non-Rotatable
600-000N
600-400N
5.97
5.97
Blank
3.910
4.010
.781
.781
.438
5.128
5.128
16
16
.332
.332
Non-Rotatable
Tapped
600-000NT
600-400NT
5.97
5.97
Blank
3.910
4.010
.781
.781
.438
5.128
5.128
16
16
516-24
Rotatable
600-000R
600-400R
5.97
5.97
Blank
3.910
4.010
.844
.844
.438
5.128
5.128
16
16
.332
.332
Rotatable
Tapped
600-000RT
600-400RT
5.97
5.97
Blank
3.910
4.010
.844
.844
.438
5.128
5.128
16
16
516-24
Description
Bolt Holes
516-24
516-24
6 34 Inch Nominal OD CF Flange

Model
Number
A
OD
B
ID
Non-Rotatable
675-000N
675-500N
6.73
6.73
Blank
4.875
5.010
.844
.844
.460
5.969
5.969
18
18
.332
.332
Non-Rotatable
Tapped
675-000NT
675-500NT
6.73
6.73
Blank
4.875
5.010
.844
.844
.460
5.969
5.969
18
18
516-24
Rotatable
675-000R
675-500R
6.73
6.73
Blank
4.875
5.010
.844
.844
.460
5.969
5.969
18
18
.332
.332
Rotatable
Tapped
675-000RT
675-500RT
6.73
6.73
Blank
4.875
5.010
.844
.844
.460
5.969
5.969
18
18
516-24
Description
Bolt Holes
516-24
516-24
Non-Rotatable
Rotatable
Blank
Blank
A
F
A
F
Bored
Bored
A
F
E
A
F
D
B
C
D
B
C
CF/WS-LIT 11/02
CF FLANGES
8 Inch Nominal OD CF Flange
Model
Number
A
OD
B
ID
Non-Rotatable
800-000N
800-600N
7.97
7.97
Blank
5.875
6.020
.875
.875
.500
7.128
7.128
20
20
.332
.332
Non-Rotatable
Tapped
800-000NT
800-600NT
7.97
7.97
Blank
5.875
6.020
.875
.875
.500
7.128
7.128
20
20
516-24
Rotatable
800-000R
800-600R
7.97
7.97
Blank
5.875
6.020
.937
.937
.500
7.128
7.128
20
20
.332
.332
Rotatable
Tapped
800-000RT
800-600RT
7.97
7.97
Blank
5.875
6.020
.937
.937
.500
7.128
7.128
20
20
516-24
Description
Bolt Holes
516-24
516-24
Non-Rotatable
Rotatable
Blank
Blank
A
F
A
F
Bored
Bored
A
F
E
A
F
D
B
C
D
B
C
CF/WS-LIT 11/02

Model
Number
A
OD
B
ID
Non-Rotatable
1000-000N
1000-800N
9.97
9.97
Blank
7.875
8.020
.968
.968
.500
9.128
9.128
24
24
.332
.332
Non-Rotatable
Tapped
1000-000NT
1000-800NT
9.97
9.97
Blank
7.875
8.020
.968
.968
.500
9.128
9.128
24
24
516-24
Rotatable
1000-000R
1000-800R
9.97
9.97
Blank
7.875
8.020
.968
.968
.500
9.128
9.128
24
24
.332
.332
Rotatable
Tapped
1000-000RT
1000-800RT
9.97
9.97
Blank
7.875
8.020
.968
.968
.500
9.128
9.128
24
24
516-24
Description
Bolt Holes
516-24
516-24

Description
Model
Number
A
OD
B
ID
Bolt Holes
Non-Rotatable
1200-000N
1200-1000N
12.00
12.00
Blank
9.875
10.020
1.125
1.125
.500
11.181
11.181
32
32
.332
.332
Non-Rotatable
Tapped
1200-000NT
1200-1000NT
12.00
12.00
Blank
9.875
10.020
1.125
1.125
.500
11.181
11.181
32
32
516-24
Rotatable
1200-000R
1200-1000R
12.00
12.00
Blank
9.875
10.020
1.125
1.125
.500
11.181
11.181
32
32
.332
.332
Rotatable
Tapped
1200-000RT
1200-1000RT
12.00
12.00
Blank
9.875
10.020
1.125
1.125
.500
11.181
11.181
32
32
516-24
516-24
516-24
Non-Rotatable
Rotatable
Blank
Blank
A
F
A
F
Bored
Bored
A
F
E
A
F
D
B
C
D
B
C
CF/WS-LIT 11/02
CF FLANGES
Description
Model
Number
A
OD
B
ID
Bolt Holes
Non-Rotatable
1325-000N
1325-1000N
13.25
13.25
Blank
9.875
10.020
1.125
1.125
.500
12.055
12.055
30
30
.390
.390
Non-Rotatable
Tapped
1325-000NT
1325-1000NT
13.25
13.25
Blank
9.875
10.020
1.125
1.125
.500
12.055
12.055
30
30
38-24
Rotatable
1325-000R
1325-1000R
13.25
13.25
Blank
9.875
10.020
1.125
1.125
.500
12.055
12.055
30
30
.390
.390
Rotatable
Tapped
1325-000RT
1325-1000RT
13.25
13.25
Blank
9.875
10.020
1.125
1.125
.500
12.055
12.055
30
30
38-24
38-24
38-24
Non-Rotatable
Rotatable
Blank
Blank
A
F
A
F
Bored
Bored
A
F
E
A
F
D
B
C
B
C
CF/WS-LIT 11/02
CF FLANGES
Description
Model
Number
A
OD
B
ID
Bolt Holes
Non-Rotatable
1400-000N
1400-1200N
14.00
14.00
Blank
11.875
12.030
1.125
1.125
.500
12.810
12.810
30
30
.390
.390
Non-Rotatable
Tapped
1400-000NT
1400-1200NT
14.00
14.00
Blank
11.875
12.030
1.125
1.125
.500
12.810
12.810
30
30
38-24
Rotatable
1400-000R
1400-1200R
14.00
14.00
Blank
11.875
12.030
1.125
1.125
.500
12.810
12.810
30
30
.390
.390
Rotatable
Tapped
1400-000RT
1400-1200RT
14.00
14.00
Blank
11.875
12.030
1.125
1.125
.500
12.810
12.810
30
30
38-24
38-24
38-24
14 1 2 Inch Nominal OD CF Flange

Description
Model
Number
A
OD
B
ID
Bolt Holes
Non-Rotatable
1450-000N
1450-1200N
14.50
14.50
Blank
11.875
12.020
1.125
1.125
.500
13.310
13.310
32
32
.390
.390
Non-Rotatable
Tapped
1450-000NT
1450-1200NT
14.50
14.50
Blank
11.875
12.020
1.125
1.125
.500
13.310
13.310
32
32
38-24
Rotatable
1450-000R
1450-1200R
14.50
14.50
Blank
11.875
12.020
1.125
1.125
.500
13.310
13.310
32
32
.390
.390
Rotatable
Tapped
1450-000RT
1450-1200RT
14.50
14.50
Blank
11.875
12.020
1.125
1.125
.500
13.310
13.310
32
32
38-24
38-24
38-24
Non-Rotatable
Rotatable
Blank
Blank
A
F
A
F
D
D
Bored
Bored
A
F
A
F
D
B
C
B
C
CF/WS-LIT 11/02
CF FLANGES
Description
Model
Number
A
OD
B
ID
Bolt Holes
Non-Rotatable
1650-000N
1650-1400N
16.50
16.50
Blank
13.750
14.020
1.125
1.125
.500
15.310
15.310
36
36
.390
.390
Non-Rotatable
Tapped
1650-000NT
1650-1400NT
16.50
16.50
Blank
13.750
14.020
1.125
1.125
.500
15.310
15.310
36
36
38-24
Rotatable
1650-000R
1650-1400R
16.50
16.50
Blank
13.750
14.020
1.125
1.125
.500
15.310
15.310
36
36
.390
.390
Rotatable
Tapped
1650-000RT
1650-1400RT
16.50
16.50
Blank
13.750
14.020
1.125
1.125
.500
15.310
15.310
36
36
38-24
38-24
38-24
Non-Rotatable
Rotatable
Blank
Blank
A
F
A
F
D
D
Bored
Bored
A
F
A
F
B
C
D
B
C
CF/WS-LIT 11/02
CF FLANGE HARDWARE
2 1 8 Inch Nominal OD CF Flange Hardware
Model Number
Description
Price
G-212
G-212V

(5) Viton Gaskets
B-212
B-212T
(25) Stainless Steel 14-28 x 1.25" Bolts, Nuts and Washers

(25) Stainless Steel 14-28 x .875" Bolts and Washers
B-212-12
B-212T-12
(25) Stainless Steel 12-Point 14-28 x 1.25" Bolts, Nuts and Washers
(25) Stainless Steel 12-Point 14-28 x .875" Bolts and Washers
2 34 Inch Nominal OD CF Flange Hardware

Model Number
Description
Price
G-275
G-275V

(5) Viton Gaskets
B-275
B-275T

(25) Stainless Steel 14-28 x 1.00" Bolts and Washers
B-275-12
B-275T-12
(25) Stainless Steel 12-Point 14-28 x 1.00" Bolts and Washers
NP-150
KNP-150
KNP-150-12
(24) 14-28 Plate Nuts. See Page 21.

(12) Plate Nuts, (24) 14-28 x 1.25" Bolts and Washers
(12) Plate Nuts, (24) 12-Point 14-28 x 1.25" Bolts and Washers

Model Number
Description
Price
G-338
G-338V

(1) Viton Gasket
B-338
B-338T

B-338-12
B-338T-12
NP-200
KNP-200
KNP-200-12


Model Number
Description
Price
G-450
G-450V

(1) Viton Gasket
B-450
B-450T

B-450-12
B-450T-12
NP-250
KNP-250
KNP-250-12

CF/WS-LIT 11/02
CF FLANGE HARDWARE
Model Number
Description
Price
G-462
G-462V

(1) Viton Gasket
B-462
B-462T
(25) Stainless Steel 516-24 x 2.25" Bolt and Nut Kit

B-462-12
B-462T-12
NP-300
KNP-300
KNP-300-12

(20) Plate Nuts, (40) 516-24 x 2.25" 12-Point Bolts and Washers
6 Inch Nominal OD CF Flange Hardware

Model Number
Description
Price
G-600
G-600V

(1) Viton Gasket
B-600
B-600T

(25) Stainless Steel 516-24 x 1.25"Bolts and Washers
B-600-12
B-600T-12
NP-400
KNP-400
KNP-400-12

(16) Plate Nuts (32) 516-24 x 2.25" Bolts and Washers
(16) Plate Nuts (32) 516-24 x 2.25" 12-Point Bolts and Washers
6 34 Inch Nominal OD CF Flange Hardware

Model Number
Description
Price
G-675
G-675V

(1) Viton Gasket
B-675
B-675T

B-675-12
B-675T-12

Model Number
Description
Price
G-800
G-800V

(1) Viton Gasket
B-800
B-800T

B-800-12
B-800T-12
NP-600
KNP-600
KNP-600-12

CF/WS-LIT 11/02
CF FLANGE HARDWARE
Model Number
Description
Price
G-1000
G-1000V

(1) Viton Gasket
B-1000
B-1000T

B-1000-12
B-1000T-12
(25) Stainless Steel 12-Point 516-24x 2.50" Bolts, Nuts and Washers
NP-800
KNP-800
KNP-800-12


Model Number
Description
Price
G-1200
(1) OFHC Copper Gasket
B-1200
B-1200T

13 1 4 Inch
Nominal OD CF Flange Hardware
Model Number
Description
Price
G-1325
G-1325V

(1) Viton Gasket
B-1325
B-1325T


Model Number
Description
Price
G-1400
G-1400V

(1) Viton Gasket
B-1400
B-1400T

14 1 2
Inch Nominal OD Flange Hardware
Model Number
Description
Price
G-1450
B-1450
B-1450T

16 1 2
Inch Nominal OD Flange Hardware
Model Number
Description
G-1650
G-1650V

(1) Viton Gasket
Price
B-1650
B-1650T

CF/WS-LIT 11/02
CF SPECIAL PURPOSE FLANGES

Nor-Cals special purpose CF flanges
are used as roughing accessories,
accommodating thermocouple
gauge tubes and/or up-to-air valves.
Double-sided flanges are
provided with one or more
radially tapped holes.
CF Straight-Through Special Purpose Flanges

Model Number
Description
133-ST
275-ST
1.33" OD Flg. with one 18" NPT Hole

2.75" OD Flg. with features listed above
133-STT
275-STT
1.33" OD Flg. with Thermocouple Gauge Tube

133-STV
275-STV
133-STV-14 MVCR
1.33" OD Flg. with Up-To-Air Valve

1.33" OD Flg. with Up-To-Air Valve and
14" Cajon Male VCR Fitting on Valve
1.33" OD Flg. with Up-to-Air Valve and
14" Cajon Female VCR Fitting on Valve
1.33" OD Flg. with Up-To-Air Valve and
14" Swagelok Fitting on Valve
275-STV-14 MVCR
133-STV-14 FVCR
275-STV-14 FVCR
133-STV-14 SWAG
275-STV-14 SWAG
Price
1/8
NPT
1/8
NPT
WELD
133-ST
275-ST
133-STT
275-STT
133-STV
275-STV
CF/WS-LIT 11/02
CF SPECIAL PURPOSE FLANGES

CF Double-Sided Special Purpose Flanges
Model Number
Description
133-D1
275-D1
133-D2
275-D2
Double-Sided 1.33" OD Flg. with (1) 116" NPT Hole

Double-Sided 1.33" OD Flg. with (2) 116" NPT Holes
Double-Sided 2.75" OD Flg. with (2) 18" NPT Holes
133-DT
275-DT
Double-Sided 1.33" OD Flg. with Thermocouple Gauge Tube

Double-Sided 2.75" OD Flg. with features listed above
133-DV
275-DV
133-DV-14 MVCR
Double-Sided 1.33" OD Flg. with Up-To-Air Valve

and 14" Cajon Male VCR Fitting on Valve
and 14" Cajon Female VCR Fitting on Valve
and 14" Swagelok Fitting on Valve
275-DV-14 MVCR
133-DV-14 FVCR
275-DV-14 FVCR
133-DV-14 SWAG
275-DV-14 SWAG
Price
For
2.75" OD
.75
.38
One or two 116"

NPT for 1.33" OD or
1
8" NPT for 2.75" OD
1200
.25
.50
For
1.33" OD
133-D1 or D2
275-D1 or D2

and Up-To-Air Valve
and Up-To-Air Valve
133-D1V
275-D1V
133-DTV
275-DTV-14SWAG
Double-Sided 1.33" OD Flg. with Thermocouple Gauge

Tube and Up-To-Air Valve
Double-Sided 1.33" OD Flg. with Thermocouple Gauge Tube
and Up-To-Air Valve with 14" Cajon Male VCR Fitting on Valve
Double-Sided 1.33" OD Flg. with Thermocouple Gauge Tube and
Up-To-Air Valve with 14" Cajon Female VCR Fitting on Valve
Double-Sided 1.33" OD Flg. with Thermocouple Gauge Tube and
Up-To-Air Valve with 14" Swagelok Fitting on Valve
275-DS-MINI
Double-Sided 2.75" OD Flg. with 1.33" OD Side Port
275-DTV
133-DTV-14 MVCR
275-DTV-14 MVCR
133-DTV-14 FVCR
275-DTV-14 FVCR
133-DTV-14 SWAG
133-DT
275-DT
WELD
133-DV
275-DV
275-DS-MINI
WELD
WELD
WELD
133-DTV
275-DTV
133-D1V
275-D1V
CF/WS-LIT 11/02
CF DOUBLE-SIDED FLANGES & HARDWARE

Nor-Cals double-sided flanges are
identical to standard CF flanges except the
same gasket-sealing detail is machined into
both faces of the flange. These flanges can
be inserted between like-sized flanges as
spacers, orifice plates, or when radially
drilled, as custom penetrations into
vacuum systems.
CF Double-Sided Flanges
Nominal
OD
Model
Number
Made
From
113
133-000D
133-025D
133-038D
133-050D
133-075D
133-000DS
133-075DS
218
133-000N
133-000N
133-000N
133-000N
133-000N
133-000NS*
133-000NS*
Blank
.255
.380
.505
.630
Blank
.630
.300
.300
.300
.300
.300
.500
.500
212-000D
212-100D
212-000N
212-000N
Blank
1.010
.470
.470
234
275-000D
275-025D
275-050D
275-075D
275-100D
275-125D
275-150D
275-000DS
275-150DS
275-000N
275-000N
275-000N
275-000N
275-000N
275-000N
275-000N
275-000NS*
275-000NS*
Blank
.255
.505
.760
1.010
1.260
1.510
Blank
1.510
.500
.500
.500
.500
.500
.500
.500
.750
.750
338
338-000D
338-150D
338-200D
338-000N
338-000N
338-000N
Blank
1.510
2.010
.687
.687
.687
412
450-000D
450-150D
450-200D
450-250D
450-000N
450-000N
450-000N
450-000N
Blank
1.510
2.010
2.510
.687
.687
.687
.687
458
462-000D
462-300D
462-000N
462-000N
Blank
3.010
.812
.812
600-000D
600-400D
600-000N
600-000N
Blank
4.010
.781
.781
634
675-000D
675-500D
675-000N
675-000N
Blank
5.010
.844
.844
800-000D
800-600D
800-000N
800-000N
Blank
6.020
.875
.875
10
1000-000D
1000-800D
1000-000N
1000-000N
Blank
8.020
.968
.968
1314
1325-000D
1325-1000D
1325-000N
1325-000N
Blank
10.020
1.125
1.125
14
1400-000D
1400-1200D
1400-000N
1400-000N
Blank
12.020
1.125
1.125
*Denotes Special Flanges that are thicker than standard.
Price
Dimensions in Inches
CF/WS-LIT 11/02
CF DOUBLE-SIDED FLANGES & HARDWARE

CF Double-Sided Flange Hardware
Nom
OD
Model
Number
Description
113
G-133
G-133V
B-133D

(5) Viton Gaskets
218
G-212
G-212V
B-212D

(5) Viton Gaskets
234
G-275
G-275V
B-275DS
B-275D
KNP-150D

(5) Viton Gaskets
(6) Plate Nuts, 14-28 x 2.00" (12) Bolts and Washers
338
G-338
G-338V
B-338D

(1) Viton Gaskets
412
G-450
G-450V
B-450D

(1) Viton Gaskets
458
G-462
G-462V
B-462D

(1) Viton Gaskets
G-600
G-600V
B-600D

(1) Viton Gaskets
634
G-675
G-675V
B-675D

(1) Viton Gaskets
G-800
G-800V
B-800D

(1) Viton Gaskets
10
G-1000
G-1000V
B-1000D

(1) Viton Gaskets
1314
G-1325
G-1325V

(1) Viton Gaskets
Price
CF/WS-LIT 11/02
PLATE NUTS
Plate Nuts
Flange
OD
Model
Number
Thread
Size
1.33
2.75
3.38
4.50
4.62
6.00
8.00
10.00
NP-075
NP-150
NP-200
NP-250
NP-300
NP-400
NP-600
NP-800
8-32
1
4-28
5
16-24
5
16-24
5
16-24
5
16-24
5
16-24
5
16-24
.80
1.59
1.75
2.03
1.75
1.75
1.75
1.75
.3
.5
.5
.5
.5
.5
.5
.5
.53
1.15
1.09
1.39
1.25
1.00
1.12
1.19
.15
.18
.22
.22
.22
.22
.22
.22
All Plate Nuts - 24 per package
Price
Plate Nut Assembly Kits with Hex Head Bolts

Flange
OD
Model
Number
Description
1.33
2.75
3.38
4.50
4.62
6.00
8.00
10.00
KNP-075
KNP-150
KNP-200
KNP-250
KNP-300
KNP-400
KNP-600
KNP-800
(12) Plate Nuts (24) 8-32 x .75" Bolts and Washers

Price
Plate Nut Assembly Kits with 12-Point Bolts

Flange
OD
2.75
3.38
4.50
4.62
6.00
8.00
10.00
Model
Number
Description
KNP-150-12
KNP-200-12
KNP-250-12
KNP-300-12
KNP-400-12
KNP-600-12
KNP-800-12

Nor-Cal manufactures plate nuts for

most sizes of CF flanges from 11/3 to 10
inches OD. These handy backing nuts
center themselves over two adjacent bolt
holes on the back side of a flange and can
be held in place with one finger while bolts
are tightened with a single wrench.
Plate nuts are perfect for those hard to
reach (and see) spaces that are
encountered during system
assembly and service.
Price
Plate Nut for

1.33 and 2.75" Flanges
Plate Nut for

Flanges larger than 2.75
C
D
CF/WS-LIT 11/02
CF ZERO LENGTH REDUCER FLANGES

CF Zero Length Reducer Flanges
Nor-Cals zero length reducer flanges

are a convenient and inexpensive way
to reduce a large flange for smaller
vacuum plumbing and/or component
connection. To list all possible reducer
combinations would require excessive
space, therefore only the most
commonly used reducers are listed.
If your requirement is not listed,
please inquire.
Model
Number
Small Flange
Detail
D
B
Large Flange
Detail
Small Flange
Detail
212-133-075Z*
133-000NT
275-133-075Z
133-000NT
275-212-100Z*
212-000NT
338-133-075Z
133-000NT
338-212-100Z*
212-000NT
338-275-150Z*
275-000NT
450-133-075Z
133-000NT
450-212-100Z
212-000NT
450-275-150Z
275-000NT
450-338-200Z*
338-000NT
462-133-075Z
133-000NT
462-212-100Z
212-000NT
462-275-150Z
275-000NT
462-338-200Z
338-000NT
600-133-075Z
133-000NT
600-212-100Z
212-000NT
600-275-150Z
275-000NT
600-338-200Z
338-000NT
600-450-250Z
450-000NT
600-462-300Z*
462-000NT
675-133-075Z
133-000NT
675-212-100Z
212-000NT
675-275-150Z
275-000NT
675-338-200Z
338-000NT
675-450-250Z
450-000NT
675-462-300Z
462-000NT
675-600-400Z*
600-000NT
800-133-075Z
133-000NT
800-212-100Z
212-000NT
800-275-150Z
275-000NT
800-338-200Z
338-000NT
800-450-250Z
450-000NT
800-462-300Z
462-000NT
800-600-400Z
600-000NT
800-675-500Z*
675-000NT
1000-133-075Z
133-000NT
1000-212-100Z
212-000NT
1000-275-150Z
275-000NT
1000-338-200Z
338-000NT
1000-450-250Z
450-000NT
1000-462-300Z
462-000NT
1000-600-400Z
600-000NT
1000-675-500Z
675-000NT
1000-800-600Z
800-000NT
1325-133-075Z
133-000NT
1325-212-100Z
212-000NT
1325-275-150Z
275-100NT
1325-338-200Z
338-000NT
1325-450-250Z
450-000NT
1325-462-300Z
462-000NT
1325-600-400Z
600-000NT
1325-675-500Z
675-000NT
1325-800-600Z
800-000NT
1325-1000-800Z 1000-000NT
Large Flange
Detail
212-000NT
275-000N
275-000NT
338-000N
338-000NT
338-000NT
450-000N
450-000N
450-000N
450-000NT
462-000N
462-000N
462-000N
462-000N
600-000N
600-000N
600-000N
600-000N
600-000N
600-000NT
675-000N
675-000N
675-000N
675-000N
675-000N
675-000N
675-000NT
800-000N
800-000N
800-000N
800-000N
800-000N
800-000N
800-000N
800-000NT
1000-000N
1000-000N
1000-000N
1000-000N
1000-000N
1000-000N
1000-000N
1000-000N
1000-000N
1325-000N
1325-000N
1325-000N
1325-000N
1325-000N
1325-000N
1325-000N
1325-000N
1325-000N
1325-000N
.625
.625
1.000
.625
1.000
1.500
.625
1.000
1.500
2.000
.625
1.000
1.500
2.000
.625
1.000
1.500
2.000
2.500
3.000
.625
1.000
1.500
2.000
2.500
3.000
4.000
.625
1.000
1.500
2.000
2.500
3.000
4.000
5.000
.625
1.000
1.500
2.000
2.500
3.000
4.000
5.000
6.000
.625
1.000
1.500
2.000
2.500
3.000
4.000
5.000
6.000
8.000
.470
.500
.500
.687
.687
.687
.687
.687
.687
.687
.812
.812
.812
.812
.781
.781
.781
.781
.781
.781
.844
.844
.844
.844
.844
.844
.844
.875
.875
.875
.875
.875
.875
.875
.875
.968
.968
.968
.968
.968
.968
.968
.968
.968
1.125
1.125
1.125
1.125
1.125
1.125
1.125
1.125
1.125
1.125
*Denotes that both sets of bolts holes are tapped

Price
CF/WS-LIT 11/02
23
Nor-Cal
Products, P. O. Box 518, Yreka, CA 96097 800-824-4166 or 530-842-4457 FAX 530-842-9130 Email [email protected]
CF FITTINGS
Nor-Cal manufactures a complete line of
vacuum fittings with CF flanges. The tube
portions are fabricated from 304 stainless
steel. On request 316 stainless steel can be
supplied. Nor-Cal makes its own elbows,
and all tees and crosses are made with the
pulled port technique. This allows smooth,
crevice-free butt welds to provide the
maximum in cleanliness for UHV applications. Bake out range is up to 500C.
Nor-Cal fittings are also available with NW
(ISO-KF compatible), ISO and ASA flanges.
Standard finish is bead blasted.
As an option, a tumbled finish can be
provided at no extra charge. Indicate this
by adding -T suffix to the part number.
Electropolish can also be provided as an
option. Call for pricing.
CF Half Nipples
B
Non-Rotatable
Model
Number
Flange
OD
Tube
OD
1N-075
1N-100
1N-150
1N-200
1N-250
1N-250V
1N-300
1N-400
1N-400V
1N-600
1N-600V
1N-800
1N-1000
1N-1200
1.33
2.12
2.75
3.38
4.50
4.50
4.62
6.00
6.00
8.00
8.00
10.00
13.25
14.00
.75
1.00
1.50
2.00
2.50
2.50
3.00
4.00
4.00
6.00
6.00
8.00
10.00
12.00
1.50
2.05
2.46
3.22
3.38
4.12
3.53
4.32
5.31
5.50
6.56
7.50
10.00
10.00
Price
CF Full Nipples
B
Non-Rotatable
Rotatable
Model
Number
Flange
OD
Tube
OD
2N-075
2N-100
2N-150
2N-200
2N-250
2N-250V
2N-300
2N-400
2N-400V
2N-600
2N-600V
2N-800
2N-1000
2N-1200
1.33
2.12
2.75
3.38
4.50
4.50
4.62
6.00
6.00
8.00
8.00
10.00
13.25
14.00
.75
1.00
1.50
2.00
2.50
2.50
3.00
4.00
4.00
6.00
6.00
8.00
10.00
12.00
3.00
4.10
4.92
6.44
6.76
8.24
7.06
8.64
10.62
11.00
13.12
15.00
20.00
20.00
Price
CF/WS-LIT 11/02
CF FITTINGS
CF Reducer Nipples
Model
Number
Flange 1
OD
Flange 2
OD
Tube
OD
6.00
8.00
8.00
8.00
10.00
10.00
10.00
10.00
13.25
14.00
2.75
2.75
4.50
6.00
2.75
4.50
6.00
8.00
10.00
12.00
1.50
1.50
2.50
4.00
1.50
2.50
4.00
6.00
8.00
10.00
2NR-600-275
2NR-800-275
2NR-800-450
2NR-800-600
2NR-1000-275
2NR-1000-450
2NR-1000-600
2NR-1000-800
2NR-1325-1000
2NR-1400-1200
Price
5.00
Non-Rotatable
Note: Reducer Nipples with other CF Flanges

and different lengths are available upon request.
Rotatable
CF Conical Reducer Nipples

Model
Number
OD
2NRC-212-133
2NRC-275-133
2NRC-275-212
2NRC-338-212
2NRC-338-275
2NRC-450-275
2NRC-450-338
2NRC-462-275
2NRC-462-338
2NRC-462-450
2NRC-600-338
2NRC-600-450
2NRC-600-462
2.12
2.75
2.75
3.38
3.38
4.50
4.50
4.62
4.62
4.62
6.00
6.00
6.00
Flange 1
Tube OD
1.00
1.50
1.50
2.00
2.00
2.50
2.50
3.00
3.00
3.00
4.00
4.00
4.00
Flange 2
OD
Tube OD
1.33
1.33
2.12
2.12
2.75
2.75
3.38
2.75
3.38
4.50
3.38
4.50
4.62
.75
.75
1.00
1.00
1.50
1.50
2.00
1.50
2.00
2.50
2.00
2.50
3.00
Price
B
2.04
3.08
2.75
2.77
2.81
2.96
2.98
4.12
4.13
4.28
4.29
4.44
4.34
Non-Rotatable
Rotatable
CF 45 Radius Elbows with Tangents

Model
Number
Flange
OD
Tube
OD
2KL-075
2KL-100
2KL-150
2KL-200
2KL-250
2KL-300
2KL-400
1.33
2.12
2.75
3.38
4.50
4.62
6.00
.75
1.00
1.50
2.00
2.50
3.00
4.00
.94
1.14
1.74
2.07
3.37
3.96
5.22
Price
Both Flanges Rotatable
CF/WS-LIT 11/02
CF FITTINGS
CF 90 Radius Elbows
B
R
B
Model
Number
Flange
OD
2E-075
2E-100
2E-150
2E-200
2E-250
2E-300
2E-400
2E-600
2E-800
2E-1000
1.33
2.12
2.75
3.38
4.50
4.62
6.00
8.00
10.00
13.25
Tube
OD
.75
1.00
1.50
2.00
2.50
3.00
4.00
6.00
8.00
10.00
Price
1.50
1.67
2.46
3.22
4.12
4.78
6.44
9.50
12.50
15.50
1.00
1.50
2.25
3.00
3.75
4.50
6.00
9.00
12.00
15.00
CF 90 Mitered Elbows
B
Model
Number
Flange
OD
Tube
OD
2E-075M
2E-100M
2E-150M
2E-200M
2E-250M
2E-250MV
2E-300M
2E-400M
2E-400MV
2E-500M
2E-600M
2E-600MV
2E-800M
2E-1000M
1.33
2.12
2.75
3.38
4.50
4.50
4.62
6.00
6.00
6.75
8.00
8.00
10.00
13.25
.75
1.00
1.50
2.00
2.50
2.50
3.00
4.00
4.00
5.00
6.00
6.00
8.00
10.00
1.50
2.05
2.46
3.22
3.38
4.12
3.53
4.32
5.31
4.71
5.50
6.56
7.50
10.00
Price
CF/WS-LIT 11/02
CF FITTINGS
CF Tees
Model
Number
Flange
OD
Tube
OD
3T-075
3T-100
3T-150
3T-200
3T-250
3T-250V
3T-300
3T-400
3T-400V
3T-500
3T-600
3T-600V
3T-800
3T-1000
1.33
2.12
2.75
3.38
4.50
4.50
4.62
6.00
6.00
6.75
8.00
8.00
10.00
13.25
.75
1.00
1.50
2.00
2.50
2.50
3.00
4.00
4.00
5.00
6.00
6.00
8.00
10.00
1.50
2.05
2.46
3.22
3.38
4.12
3.53
4.32
5.31
4.71
5.50
6.56
7.50
10.00
Price
Non-Rotatable
B
Typ
Rotatable
CF Reducer Tees
Model
Number
3TR-150-075
3TR-150-100
3TR-200-075
3TR-200-150
3TR-250-150
3TR-250-200
3TR-300-200
3TR-300-250
3TR-400-150
3TR-400-200
3TR-400-250
3TR-400-300
3TR-500-400
3TR-600-150
3TR-600-200
3TR-600-250
3TR-600-400
3TR-800-600
Flange 1 & 2
Flange 3
Flange OD Tube OD Flange OD Tube OD
2.75
2.75
3.38
3.38
4.50
4.50
4.62
4.62
6.00
6.00
6.00
6.00
6.75
8.00
8.00
8.00
8.00
10.00
1.50
1.50
2.00
2.00
2.50
2.50
3.00
3.00
4.00
4.00
4.00
4.00
5.00
6.00
6.00
6.00
6.00
8.00
1.33
2.12
1.33
2.75
2.75
3.38
3.38
4.50
2.75
3.38
4.50
4.62
6.00
2.75
3.38
4.50
6.00
8.00
.75
1.00
.75
1.50
1.50
2.00
2.00
2.50
1.50
2.00
2.50
3.00
4.00
1.50
2.00
2.50
4.00
6.00
Note: Reducer tees of other tube sizes are available upon request.
B
2.46
2.46
3.22
3.22
3.38
3.38
3.53
3.53
4.32
4.32
4.32
4.32
4.71
5.50
5.50
5.50
5.50
7.50
Price
1.87
2.29
2.13
2.71
2.96
3.48
3.73
3.63
3.71
4.23
4.13
4.03
4.82
4.71
5.23
5.13
5.32
6.50
Non-Rotatable
2
M
3
Rotatable
B
Typ
CF/WS-LIT 11/02
CF FITTINGS
CF 4-Way Crosses
Non-Rotatable
B
Typ
B
Typ
Rotatable
Model
Number
Flange
OD
4C-075
4C-100
4C-150
4C-200
4C-250
4C-250V
4C-300
4C-400
4C-400V
4C-500
4C-600
4C-600V
4C-800
4C-1000
1.33
2.12
2.75
3.38
4.50
4.50
4.62
6.00
6.00
6.75
8.00
8.00
10.00
13.25
Tube
OD
.75
1.00
1.50
2.00
2.50
2.50
3.00
4.00
4.00
5.00
6.00
6.00
8.00
10.00
Price
1.50
2.05
2.46
3.22
3.38
4.12
3.53
4.32
5.31
4.71
5.50
6.56
7.50
10.00
CF Reducer Crosses
Non-Rotatable
M
Typ
4
Rotatable
B
Typ
Model
Number
4CR-150-075
4CR-150-100
4CR-200-075
4CR-200-150
4CR-250-150
4CR-250-200
4CR-300-200
4CR-300-250
4CR-400-150
4CR-400-200
4CR-400-250
4CR-400-300
4CR-500-400
4CR-600-150
4CR-600-200
4CR-600-250
4CR-600-400
4CR-800-600
Flange 1 & 2
Flange 3 & 4
Flange OD Tube OD Flange OD Tube OD
2.75
2.75
3.38
3.38
4.50
4.50
4.62
4.62
6.00
6.00
6.00
6.00
6.75
8.00
8.00
8.00
8.00
10.00
1.50
1.50
2.00
2.00
2.50
2.50
3.00
3.00
4.00
4.00
4.00
4.00
5.00
6.00
6.00
6.00
6.00
8.00
1.33
2.12
1.33
2.75
2.75
3.38
3.38
4.50
2.75
3.38
4.50
4.62
6.00
2.75
3.38
4.50
6.00
8.00
.75
1.00
.75
1.50
1.50
2.00
2.00
2.50
1.50
2.00
2.50
3.00
4.00
1.50
2.00
2.50
4.00
6.00
Other reducer combinations can be supplied upon request.
B
2.46
2.46
3.22
3.22
3.38
3.38
3.53
3.53
4.32
4.32
4.32
4.32
4.71
5.50
5.50
5.50
5.50
7.50
Price
1.87
2.29
2.13
2.71
2.96
3.48
3.73
3.63
3.71
4.23
4.13
4.03
4.82
4.71
5.23
5.13
5.32
6.50
CF/WS-LIT 11/02
CF FITTINGS
CF 5-Way Crosses
Model
Number
Flange
OD
Tube
OD
5C-075
5C-100
5C-150
5C-200
5C-250
5C-250V
5C-300
5C-400
5C-400V
5C-500
5C-600
5C-600V
5C-800
5C-1000
1.33
2.12
2.75
3.38
4.50
4.50
4.62
6.00
6.00
6.75
8.00
8.00
10.00
13.25
.75
1.00
1.50
2.00
2.50
2.50
3.00
4.00
4.00
5.00
6.00
6.00
8.00
10.00
1.50
2.05
2.46
3.22
3.38
4.12
3.53
4.32
5.31
4.71
5.50
6.56
7.50
10.00
Non-Rotatable
Price
B
Typ
Rotatable
B
Typ
CF 6-Way Crosses
Model
Number
6C-075
6C-100
6C-150
6C-200
6C-250
6C-250V
6C-300
6C-400
6C-400V
6C-500
6C-600
6C-600V
6C-800
6C-1000
Flange
OD
Tube
OD
1.33
2.12
2.75
3.38
4.50
4.50
4.62
6.00
6.00
6.75
8.00
8.00
10.00
13.25
.75
1.00
1.50
2.00
2.50
2.50
3.00
4.00
4.00
5.00
6.00
6.00
8.00
10.00
Price
Non-Rotatable
(incl. flange not shown)
1.50
2.05
2.46
3.22
3.38
4.12
3.53
4.32
5.31
4.71
5.50
6.56
7.50
10.00
B
Typ
Rotatable
B
Typ
CF 6-Way Cube Crosses

Model
Number
6C-075-CU
6C-150-CU
6C-250-CU
6C-400-CU
6C-600-CU
Nominal
Flg. Size
1.33
2.75
4.50
6.00
8.00
.67
1.37
2.24
2.98
3.98
Note: CF 6-Way Cube Crosses are available in other sizes upon request.
Price
B
Typ
CF/WS-LIT 11/02
CF FITTINGS
CF Flex Couplings
Free Length
Rotatable
Non-Rotatable
Model
Number
Flange Bellows Wall

Free Spring Rate Compresssed
OD
ID Thickness Length
lbs./in.
Length Price
2FC-075-1
2FC-075-2
2FC-075-3
2FC-100-1
2FC-100-2
2FC-100-3
2FC-150-1
2FC-150-2
2FC-150-3
2FC-150-6
2FC-200-3
2FC-250-4
2FC-300-4
2FC-400-4
2FC-500-4
2FC-600-4
2FC-800-4
1.33
1.33
1.33
2.12
2.12
2.12
2.75
2.75
2.75
2.75
3.38
4.50
4.62
6.00
6.75
8.00
10.00
.50
.50
.50
.75
.75
.75
1.50
1.50
1.50
1.50
2.00
2.50
3.00
4.00
5.00
6.00
8.00
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.010
.010
.010
.010
.010
.010
3.20
4.20
5.20
3.20
4.20
5.20
3.20
4.20
5.20
8.20
6.00
7.00
7.00
7.00
7.00
7.00
7.00
45
36
28
40
32
25
85
69
53
28
56
80
78
75
73
130
83
2.95
3.70
4.45
2.95
3.70
4.45
2.95
3.70
4.45
6.70
5.25
6.00
6.00
6.00
6.00
6.00
6.00
CF Zero Length 7056 Glass Viewports

V
Bakeable to 4000C
90% transmission 0.4
to 2.0 micron wavelength
Model
Number
Flange
OD
V
View Diameter
ZV-075
ZV-100
ZV-150
ZV-200
ZV-250
ZV-300
ZV-400
ZV-500
ZV-600
ZV-800
1.33
2.12
2.75
3.38
4.50
4.62
6.00
6.75
8.00
10.00
.63
.63
1.49
1.49
2.66
2.66
3.97
3.97
5.60
5.60
Price
CF Zero Length Fused Silica Viewports

V
Bakeable to 2000C
Special coatings and
materials available
90% transmission 0.3
to 2.5 micron wavelength
Model
Number
Flange
OD
V
View Diameter
ZVQ-150
ZVQ-200
ZVQ-250
ZVQ-300
ZVQ-400
ZVQ-500
ZVQ-600
ZVQ-800
2.75
3.38
4.50
4.62
6.00
6.75
8.00
10.00
1.40
1.40
2.69
2.69
3.88
3.88
5.37
7.78
Price
CF/WS-LIT 11/02
CF ADAPTERS
Nor-Cal offers a full line of adapter flanges, adapter nipples and conical adapter nipples.
Other flange sizes and combinations are available upon request. They are made from
select grade 304 stainless steel to provide the maximum cleanliness for UHV applications. Also see the ASA and NW/ISO flange catalogs for other adapter combinations.
CF Quick Disconnect Adapters

Model
Number
Flange
OD
Tube
OD
1.33
1.33
1.33
2.75
2.75
2.75
2.75
2.75
133- 4 QD
133-38 QD
133-12 QD
275-14 QD
275-38 QD
275-12 QD
275-34 QD
275-1 QD
Minimum
ID
4
3
8
1
2
1
4
3
8
1
2
3
4
1
16
9
32
13
32
3
16
9
32
13
32
5
8
7
8
Price
Tube
OD
Min
ID
1.39
1.53
1.70
1.39
1.53
1.70
1.99
2.01
CF Swagelok Adapters
Model
Number
1
133- 4 SWAG
133-38 SWAG
275-14 SWAG
275-38 SWAG
Flange
OD
1.33
1.33
2.75
2.75
Tube
OD
1
4
8
1
4
3
8
3
Price
1.37
1.58
1.37
1.54
Swagelok
CF
CF Male VCR Adapters

Model
Number
1
133- 4 MVCR
133-38 MVCR
275-14 MVCR
275-38 MVCR
Flange
OD
Tube
OD
1.33
1.33
2.75
2.75
4
8
1
4
3
8
3
Price
1.36
1.55
1.36
1.55
MVCR
CF
CF/WS-LIT 11/02
CF ADAPTERS
CF Female VCR Adapters
Model
Number
1
133- 4 FVCR
133-38 FVCR
275-14 FVCR
275-38 FVCR
FVCR
Flange
OD
Tube
OD
1.33
1.33
2.75
2.75
4
8
1
4
3
8
Price
1.88
2.13
1.88
2.13
CF
Glass Adapters - 7052 Glass / Kovar

B
C
Model
Number
Flange
OD
1GA-075K
1GA-100K
1GA-150K
1GA-200K
1GA-250K
1GA-300K
1GA-400K
1GA-500K
1GA-600K
1.33
2.12
2.75
3.38
4.50
4.62
6.00
6.75
8.00
5.43
5.42
5.46
5.98
7.76
7.66
10.44
10.96
11.00
.75
1.00
1.50
2.00
2.50
3.00
4.00
5.00
6.00
Price
Glass Adapters - 7740 Pyrex / S.S.

B
C
Model
Number
Flange
OD
1GA-075P
1GA-100P
1GA-150P
1GA-200P
1GA-250P
1GA-300P
1GA-400P
1GA-500P
1GA-600P
1.33
2.12
2.75
3.38
4.50
4.62
6.00
6.75
8.00
4.93
4.92
4.96
5.48
5.63
6.53
6.69
8.71
8.75
.75
1.00
1.50
2.00
2.50
3.00
4.00
5.00
6.00
Price
CF/WS-LIT 11/02
CF ADAPTERS
CF to ASA Adapter Flanges
Model
Number
Small Flange
Detail
Large Flange
Detail
ASA-5-133-075Z
ASA-5-212-100Z
ASA-5-275-150Z
133-000NT
212-000NT
275-000NT
ASA-5-000N
ASA-5-000N
ASA-5-000N
.63
1.00
1.50
.50
.50
.50
ASA-6-133-075Z
ASA-6-212-100Z
ASA-6-275-150Z
ASA-6-338-200Z
133-000NT
212-000NT
275-000NT
338-000NT
ASA-6-000N
ASA-6-000N
ASA-6-000N
ASA-6-000N
.63
1.00
1.50
2.00
.50
.50
.50
.75
ASA-7.5-133-075Z
ASA-7.5-212-100Z
ASA-7.5-275-150Z
ASA-7.5-338-200Z
ASA-7.5-450-250Z
133-000NT
212-000NT
275-000NT
338-000NT
450-000NT
ASA-7.5-000N
ASA-7.5-000N
ASA-7.5-000N
ASA-7.5-000N
ASA-7.5-000N
.63
1.00
1.50
2.00
2.50
.50
.50
.50
.75
.75
ASA-9-133-075Z
ASA-9-212-100Z
ASA-9-275-150Z
ASA-9-338-200Z
ASA-9-450-250Z
ASA-9-462-300Z
ASA-9-600-400Z
133-000NT
212-000NT
275-000NT
338-000NT
450-000NT
462-000NT
600-000NT
ASA-9-000N
ASA-9-000N
ASA-9-000N
ASA-9-000N
ASA-9-000N
ASA-9-000N
ASA-9-000N
.63
1.00
1.50
2.00
2.50
3.00
4.00
.75
.75
.75
.75
.75
.75
.75
ASA-11-133-075Z
ASA-11-212-100Z
ASA-11-275-150Z
ASA-11-338-200Z
ASA-11-450-250Z
ASA-11-462-300Z
ASA-11-600-400Z
ASA-11-800-600Z
133-000NT
212-000NT
275-000NT
338-000NT
450-000NT
462-000NT
600-000NT
800-000NT
ASA-11-000N
ASA-11-000N
ASA-11-000N
ASA-11-000N
ASA-11-000N
ASA-11-000N
ASA-11-000N
ASA-11-000N
.63
1.00
1.50
2.00
2.50
3.00
4.00
6.00
.75
.75
.75
.75
.75
.75
.75
.75
Price
Note: Add suffix -G to Model Number if O-ring is required on ASA mating side.
See ASA Flange Catalog for Groove prices.
Large Flange
Detail
D
Small Flange
Detail
CF/WS-LIT 11/02
CF ADAPTERS
CF to ISO Adapter Nipples
Model
Number
Flange Types
Flange 1
Flange 2
AN-450-ISO-63-OF
AN-462-ISO-80-OF
AN-600-ISO-100-OF
AN-800-ISO-160-OF
AN-1000-ISO-200-OF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
10.00 CF
ISO-63-OF
ISO-80-OF
ISO-100-OF
ISO-160-OF
ISO-200-OF
Tube OD
Price
2.50
3.00
4.00
6.00
8.00
5.00
CF to ISO Conical Adapter Nipples

1
2
Model
Number
Flange 1
Type
Tube OD
Type
ANC-275-ISO-63-OF
ANC-275-ISO-80-OF
ANC-338-ISO-63-OF
ANC-338-ISO-80-OF
ANC-338-ISO-100-OF
ANC-450-ISO-80-OF
ANC-450-ISO-100-OF
ANC-462-ISO-63-OF
ANC-462-ISO-100-OF
ANC-600-ISO-63-OF
ANC-600-ISO-80-OF
2.75 CF
2.75 CF
3.38 CF
3.38 CF
3.38 CF
4.50 CF
4.50 CF
4.62 CF
4.62 CF
6.00 CF
6.00 CF
ISO-63-OF
ISO-80-OF
ISO-63-OF
ISO-80-OF
ISO-100-OF
ISO-80-OF
ISO-100-OF
ISO-63-OF
ISO-100-OF
ISO-63-OF
ISO-80-OF
1.50
1.50
2.00
2.00
2.00
2.50
2.50
3.00
3.00
4.00
4.00
Flange 2
Tube OD
2.50
3.00
2.50
3.00
4.00
3.00
4.00
2.50
4.00
2.50
3.00
Price
2.83
4.08
2.85
4.10
4.10
4.25
4.25
4.16
4.16
4.31
4.31
CF to NW Adapter Nipples
Model
Number
1
2
AN-NW-10-133
AN-NW-16-133
AN-NW-25-212
AN-NW-40-275
AN-NW-50-133
AN-NW-50-338
Flange Types
Flange 1
Flange 2
NW-10
NW-16
NW-25
NW-40
NW-50
NW-50
1.33 CF
1.33 CF
2.12 CF
2.75 CF
1.33 CF
3.38 CF
Note: Other sizes available on request.
Tube OD
Price
.50
.75
1.00
1.50
.75
2.00
2.00
CF/WS-LIT 11/02
CF ADAPTERS
CF to NW Conical Adapter Nipples
Model
Number
Flange 1
Type
Tube OD
Type
ANC-NW-16-212
ANC-NW-16-275
ANC-NW-25-133
ANC-NW-25-275
ANC-NW-25-338
ANC-NW-40-133
ANC-NW-40-212
ANC-NW-40-338
ANC-NW-40-450
ANC-NW-40-462
ANC-NW-50-212
ANC-NW-50-275
ANC-NW-50-450
ANC-NW-50-462
ANC-NW-50-600
NW-16
NW-16
NW-25
NW-25
NW-25
NW-40
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
NW-50
2.12 CF
2.75 CF
1.33 CF
2.75 CF
3.38 CF
1.33 CF
2.12 CF
3.38 CF
4.50 CF
4.62 CF
2.12 CF
2.75 CF
4.50 CF
4.62 CF
6.00 CF
.75
.75
1.00
1.00
1.00
1.50
1.50
1.50
1.50
1.50
2.00
2.00
2.00
2.00
2.00
Flange 2
Tube OD
1.00
1.50
.75
1.50
2.00
.75
1.00
2.00
2.50
3.00
1.00
1.50
2.50
3.00
4.00
Price
1.69
2.73
2.03
2.73
2.75
3.03
2.69
2.75
2.90
4.06
2.69
2.73
2.90
4.06
4.21
CF to ASA Conical Adapter Nipples

Model
Number
Flange 1
Type
Tube OD
Type
ANC-212-ASA-5
ANC-275-ASA-5
ANC-275-ASA-6
ANC-338-ASA-5
ANC-338-ASA-6
ANC-338-ASA-7.5
ANC-450-ASA-5
ANC-450-ASA-6
ANC-450-ASA-7.5
ANC-462-ASA-5
ANC-462-ASA-7.5
ANC-600-ASA-5
ANC-600-ASA-6
2.12 CF
2.75 CF
2.75 CF
3.38 CF
3.38 CF
3.38 CF
4.50 CF
4.50 CF
4.50 CF
4.62 CF
4.62 CF
6.00 CF
6.00 CF
ASA-5
ASA-5
ASA-6
ASA-5
ASA-6
ASA-7.5
ASA-5
ASA-6
ASA-7.5
ASA-5
ASA-7.5
ASA-5
ASA-6
1.00
1.50
1.50
2.00
2.00
2.00
2.50
2.50
2.50
3.00
3.00
4.00
4.00
Flange 2
Tube OD
2.00
2.00
3.00
2.50
3.00
4.00
2.00
3.00
4.00
2.00
4.00
2.00
3.00
B
2.79
2.83
4.08
2.85
4.10
4.10
3.00
4.25
4.25
4.16
4.16
4.31
4.31
Price
2
1
Note: Add suffix -G to Model Number if O-ring groove is required on ASA Flange.
See ASA Flange Catalog for Groove prices.
CF/WS-LIT 11/02
CF ADAPTERS
CF to ASA Adapter Nipples
Model
Number
Non-Rotatable
Rotatable
5.00
Flange Types
Flange 1
Flange 2
Tube OD
AN-133-ASA-5
AN-133-ASA-6
AN-212-ASA-6
AN-462-ASA-6
1.33 CF
1.33 CF
2.12 CF
4.62 CF
ASA-5
ASA-6
ASA-6
ASA-6
.75
.75
1.00
3.00
AN-133-ASA-7.5
AN-212-ASA-7.5
AN-275-ASA-7.5
1.33 CF
2.12 CF
2.75 CF
ASA-7.5
ASA-7.5
ASA-7.5
.75
1.00
1.50
AN-133-ASA-9
AN-212-ASA-9
AN-275-ASA-9
AN-338-ASA-9
AN-450-ASA-9
AN-462-ASA-9
AN-600-ASA-9
1.33 CF
2.12 CF
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
ASA-9
ASA-9
ASA-9
ASA-9
ASA-9
ASA-9
ASA-9
.75
1.00
1.50
2.00
2.50
3.00
4.00
AN-133-ASA-11
AN-212-ASA-11
AN-275-ASA-11
AN-338-ASA-11
AN-450-ASA-11
AN-462-ASA-11
AN-600-ASA-11
AN-800-ASA-11
1.33 CF
2.12 CF
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
ASA-11
ASA-11
ASA-11
ASA-11
ASA-11
ASA-11
ASA-11
ASA-11
.75
1.00
1.50
2.00
2.50
3.00
4.00
6.00
.75
1.00
1.50
2.00
2.50
3.00
4.00
6.00
8.00
AN-133-ASA-13.5
AN-212-ASA-13.5
AN-275-ASA-13.5
AN-338-ASA-13.5
AN-450-ASA-13.5
AN-462-ASA-13.5
AN-600-ASA-13.5
AN-800-ASA-13.5
AN-1000-ASA-13.5
1.33 CF
2.12 CF
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
10.00 CF
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
AN-133-ASA-16
AN-212-ASA-16
AN-275-ASA-16
AN-338-ASA-16
AN-450-ASA-16
AN-462-ASA-16
AN-600-ASA-16
AN-800-ASA-16
AN-1000-ASA-16
AN-1325-ASA-16
1.33 CF
2.12 CF
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
10.00 CF
13.25 CF
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
Price
.75
1.00
1.50
2.00
2.50
3.00
4.00
6.00
8.00
10.00
Note: Add suffix -G to Model Number if O-ring Groove is required on ASA Flange.
See ASA Flanges Catalog for Groove prices.
CF/WS-LIT 11/02
CF FLEXIBLE STAINLESS STEEL HOSES

CF Flexible Stainless Steel Hose
Nom
ID
Model
Number
Overall
Length
Flange
OD
Wall
Thickness
Static Bend
Radius
FH-075-12-2CF
FH-075-18-2CF
FH-075-24-2CF
FH-075-36-2CF
12
18
24
36
1.33
1.33
1.33
1.33
.008
.008
.008
.008
1.26
1.26
1.26
1.26
FH-100-12-2CF
FH-100-18-2CF
FH-100-24-2CF
FH-100-36-2CF
12
18
24
36
2.12
2.12
2.12
2.12
.008
.008
.008
.008
1.46
1.46
1.46
1.46
1 2
FH-150-12-2CF
FH-150-18-2CF
FH-150-24-2CF
FH-150-36-2CF
12
18
24
36
2.75
2.75
2.75
2.75
.010
.010
.010
.010
2.16
2.16
2.16
2.16
FH-200-12-2CF
FH-200-18-2CF
FH-200-24-2CF
FH-200-36-2CF
12
18
24
36
3.38
3.38
3.38
3.38
.012
.012
.012
.012
2.56
2.56
2.56
2.56
212
FH-250-12-2CF
FH-250-18-2CF
FH-250-24-2CF
FH-250-36-2CF
12
18
24
36
4.50
4.50
4.50
4.50
.012
.012
.012
.012
3.15
3.15
3.15
3.15
FH-300-12-2CF
FH-300-18-2CF
FH-300-24-2CF
FH-300-36-2CF
12
18
24
36
4.62
4.62
4.62
4.62
.016
.016
.016
.016
3.82
3.82
3.82
3.82
FH-400-12-2CF
FH-400-18-2CF
FH-400-24-2CF
FH-400-36-2CF
12
18
24
36
6.00
6.00
6.00
6.00
.016
.016
.016
.016
4.45
4.45
4.45
4.45
See Braided Hose selection next page.
Price
Length
Stainless steel vacuum hose is available

in 34 to 4 inch diameters with CF flanges,
in standard lengths of 12, 18, 24 and 36
inches with one rotatable and non-rotatable
flange. Larger sizes and non standard
lengths are available upon request.
Flex hoses can be found with other
flange types or with butt weld fittings
in their appropriate catalog.
The flexibility and reliability of these
hoses, provided by 321 stainless steel
bellows, make them ideally suited for
vibration isolation and roughing and
alignment manifolds.
CF/WS-LIT 11/02
CF FLEXIBLE STAINLESS STEEL HOSES

CF Flexible Stainless Steel Braided Hose
Nom
OD
Model
Number
Overall
Length
Flange
OD
Wall
Static Bend
Thickness
Radius
FHB-075-12-2CF
FHB-075-18-2CF
FHB-075-24-2CF
FHB-075-36-2CF
12
18
24
36
1.33
1.33
1.33
1.33
.008
.008
.008
.008
2.09
2.09
2.09
2.09
FHB-100-12-2CF
FHB-100-18-2CF
FHB-100-24-2CF
FHB-100-36-2CF
12
18
24
36
2.12
2.12
2.12
2.12
.008
.008
.008
.008
2.52
2.52
2.52
2.52
112
FHB-150-12-2CF
FHB-150-18-2CF
FHB-150-24-2CF
FHB-150-36-2CF
12
18
24
36
2.75
2.75
2.75
2.75
.010
.010
.010
.010
3.86
3.86
3.86
3.86
FHB-200-12-2CF
FHB-200-18-2CF
FHB-200-24-2CF
FHB-200-36-2CF
12
18
24
36
3.38
3.38
3.38
3.38
.012
.012
.012
.012
4.72
4.72
4.72
4.72
Length
Price
Stainless steel vacuum hose with

protective stainless steel braid is
available for 3/4 to 2 inch OD hose
in 12, 18, 24 and 36 inch lengths.
Larger sizes and nonstandard
lengths are available on request.
CF/WS-LIT 11/02
ALUMINUM TO STAINLESS STEEL TRANSITIONS

Aluminum to
Stainless Steel Transitions
Aluminum to Stainless Steel Transitions provide a reliable
UHV seal for aluminum vacuum systems. An explosion
bonded composite of aluminum, stainless steel and two
other UHV materials make these transitions leak tight
at UHV pressures. Transitions are welded to a
stainless steel CF flange as a complete unit ready
to weld to your aluminum chamber or beamline,
or the transition can be purchased separately for
welding to your own CF flange.
The explosion bonds have been tested for tensile, shear
and thermal stress. Testing included thermal quenching
from 773K to 77K. This process has shown vacuum integrity
to better than 5 x 10-10 standard cc/per second with wall thickness
as thin as 0.025. Each unit is thermally cycled to 300C.
Helium leak testing is done before and after thermal cycling.
D
B
.25"
Applications
Specifications
Accelerators
Synchrotrons
Semiconductor
Processing
6061 Aluminum
304 Stainless Steel
UHV materials for
transition bond
Flange Diameter
D
B
A
SS
45
E
Chamfer .020" x 45
1.70"
Al
.25"
Model Number
Description
O.D.
ALST-075-CF
ALST-075
Nonrotatable CF
Transition Only
1.33
--
0.50
0.50
0.750
0.750
2.20
--
1.00
1.00
-0.750
ALST-150-CF
ALST-150
Nonrotatable CF
Transition Only
2.75
--
1.25
1.25
1.500
1.500
1.91
--
1.75
1.75
-1.505
ALST-250-CF
ALST-250
Nonrotatable CF
Transition Only
4.50
--
2.25
2.25
2.500
2.500
2.08
--
2.75
2.75
-2.505
ALST-400-CF
ALST-400
Nonrotatable CF
Transition Only
6.00
--
3.75
3.75
4.000
4.000
2.14
--
4.25
4.25
-4.005
ALST-600-CF
ALST-600
Nonrotatable CF
Transition Only
8.00
--
5.75
5.75
6.000
6.000
2.20
--
6.25
6.25
-6.005
ALST-800-CF
ALST-600
Nonrotatable CF
Transition Only
10.00
--
7.75
7.75
8.000
8.000
2.20
--
8.25
8.25
-8.005
Price
Dimensons in inches
CF-LIT 4/03
WIRE SEAL FLANGE SYSTEM

General Information
Typical Wire Seal Flange Assembly
Nor-Cals wire seal flanges are

designed for use on bell jars, custom
vacuum chambers and related systems.
Standard sizes range from 12 to 27
inch nominal OD for tube sizes from
10 to 24 inch OD. A male and female
flange compress a .080 inch diameter
OFHC copper wire to effect a seal.
Gasket flow is confined by the geometry
of the flange surfaces to the area of the
seal. Minor nicks and scratches within
this contact area are filled with crushed
copper wire providing a seal that
is leak tight at 10-13 Torr after
repeated bake out to 500C.
Male
Bored
Female
Blank
Wire Seal
Assembly Instructions
for Nor-Cal Conflat and
Wire Seal Type Flanges
1. Apply a small amount of high
temperature anti-seize compound
to the bolt threads.
2. Check that both flange surfaces
are clean and sealing edges are
free from nicks and scratches.
3. Using clean, lint free gloves,
unpack gasket.
4. Place gasket in the knife edge
counterbore of non-rotatable flange.
5. Align the mating hole pattern
and leak test grooves.
6. Install the proper bolts and
tighten hand tight. Check to see
that the flange faces are parallel.
7. Tighten the bolts 1/4 to 1/2 turns
using a circular clockwise pattern
until the flange faces are metal to
metal. Torque the fasteners to
the listed value using the
same pattern.
Torque Specifications for Conflat Flange Assembly

Nominal OD
Bolt Size
Torque in Inch Pounds
11/3
8-32
- 28
1/4 - 28
5/16 - 24
5/16 - 24
5/16 - 24
5/16 - 24
5/16 - 24
5/16 - 24
5/16 - 24
5/16 - 24
3/8 - 24
3/8 - 24
3/8 - 24
3/8 - 24
28
110
110
190
190
190
190
190
190
190
190
345
345
345
345
21/8
23/4
33/8
41/2
45/8
6
63/4
8
10
12
131/4
14
141/2
161/2
1 /4
These torque specs are for Nor-Cal supplied fasteners only.
Torque Specifications for Wire Seal Flange Assembly

Nominal OD
12
14
17
19
22
27
Bolt Size
Torque in Inch Pounds
3/8
- 24
- 24
1/2 - 20
1/2 - 20
5/8 - 18
5/8 - 18
3/8
These torque specs are for Nor-Cal supplied fasteners only.
345
345
850
850
1,450
1,450
WS-LIT 11/01
WIRE SEAL FLANGES & HARDWARE

Nor-Cals wire seal flanges are designed for use on bell jars, custom vacuum
chambers and related systems. Standard sizes range from 12 to 27 inch nominal
OD for tube sizes from 10 to 24 inch OD. A male and female flange compress a
.080 inch diameter OFHC copper wire to effect a seal. Gasket flow is confined by
the geometry of the flange surfaces to the area of the seal. Minor nicks and scratches
within this contact area are filled with crushed copper wire providing a seal that is
leak tight at 10-13 Torr after repeated bake out to 500C. Solid blanks are standard.
Dished head blanks are offered as a lower cost alternative.
Female Wire Seal

Blank
A
D
F
Bored
Wire Seal Flanges
Model
Number
OD
A
Bolt
Holes
WS-12-000M
WS-12-1000M
WS-12-000F
WS-12-1000F
12.375
12.375
12.375
12.375
Blank
9.750
Blank
9.750
10.020
10.020
1.13
1.13
1.13
1.13
.630
.630
11.343
11.343
11.343
11.343
24
24
24
24
WS-14-000M
WS-14-1200M
WS-14-000F
WS-14-1200F
14.625
14.625
14.625
14.625
Blank
11.750
Blank
11.750
12.020
12.020
1.13
1.13
1.13
1.13
.630
.630
13.593
13.593
13.593
13.593
32
32
32
32
WS-17-000M
WS-17-1400M
WS-17-000F
WS-17-1400F
17.250
17.250
17.250
17.250
Blank
13.750
Blank
13.750
14.020
14.020
1.13
1.13
1.13
1.13
.630
.630
15.718
15.718
15.718
15.718
36
36
36
36
WS-19-000M
WS-19-1600M
WS-19-000F
WS-19-1600F
19.562
19.562
19.562
19.562
Blank
15.750
Blank
15.750
16.020
16.020
1.31
1.31
1.31
1.31
.630
.630
17.875
17.875
17.875
17.875
36
36
36
36
WS-22-000M
WS-22-1800M
WS-22-000F
WS-22-1800F
22.125
22.125
22.125
22.125
Blank
17.750
Blank
17.750
18.020
18.020
1.50
1.50
1.50
1.50
1.000
1.000
20.187
20.187
20.187
20.187
36
36
36
36
WS-27-000M
WS-27-2400M
WS-27-000F
WS-27-2400F
27.125
27.125
27.125
27.125
Blank
23.625
Blank
23.625
24.020
24.020
1.75
1.75
1.75
1.75
1.125
1.125
25.843
25.843
25.843
25.843
40
40
40
40
Price
E
C
F
Male Wire Seal

Blank
A
D
F
Bored
A
B
Wire Seal Flange Gaskets and Bolt Sets

Model
Number
Flange
OD
Description
WG-12
WB-12
WG-14
WB-14
12.375
12.375
14.625
14.625
Copper Gasket
Stainless Steel Bolts and Nuts
Copper Gasket
1
24
1
32
WG-17
WB-17
17.250
17.250
Copper Gasket
1
36
WG-19
WB-19
19.562
19.562
Copper Gasket
1
36
WG-22
WB-22
22.125
22.125
Copper Gasket
1
36
WG-27
WB-27
27.125
27.125
Copper Gasket
1
40
Quantity
Size
Price
8-24 x 212
8-24 x 212
2-20 x 234
1
2-20 x 3
8-18 x 312
5
8-18 x 4
WS-LIT 11/01
NEW PRODUCTS
NW and ISO 316L Flanges
New Improved NW/ISO-KF Clamps
In response to requests from our

customers for corrosion resistant flanges
and fittings for downstream semiconductor
applications, Nor-Cal now stocks several
items made from 316L stainless steel material. NW and ISO flanges and centering
rings are available in 25 to 100mm sizes.
Conical reducers with NW flanges are also
available for immediate shipment. Tubing
and elbows in 316L stainless steel can be
found in the Weld Fittings catalog.
Nor-Cals improved NW wing-nut and SureSeal clamps help prevent O-ring leaks,
permeation and failure in your vacuum system due to unique centering ribs and a
larger clamping surface for uniform O-ring compression. Limited hinge rotation
facilitates one-handed installation. The SureSeal clamp features instant closure to
optimal compression, saving at least 10 seconds per flange assembly/disassembly,
and an ergonomic lever, which eliminates injury causing repetitive motions.
Thin Wall Flexible

Stainless Steel Hose
NW and ISO Centering

Rings with Screens
For applications requiring increased

flexibility, Nor-Cal now offers the same
high quality stainless steel NW flex
hoses in a .006 inch wall thickness.
Thin wall hose is offered in
standard lengths from
ten to forty inches
in 3/4 to 2 inch
diameters.
Nor-Cal Products now stocks

centering rings with stainless steel
screen for NW and ISO flanges. These
are commonly used at the inlet of the
pump to protect it from small items
that might damage it.
EVAC Chain Clamps, Metal

Seals and Tapered Flanges
Nor-Cal Products stocks a complete line
of EVAC chain clamps and aluminum metal
seals for converting elastomer seal NW (KF)
and ISO flanges to UHV metal seals. They
provide a number of benefits over elastomer
seals: reduced outgassing, no permeation,
no hydrocarbons, resistance
to radiation and short half-life.
NW/ISO-LIT 7/01
NW FLANGE SYSTEM
NW Flange System
Flange
O-ring
Centering
Ring
Nor-Cal NW flanges are designed to

ISO 2681 specifications for standard USA
tube sizes from .375 to 2.00 inches. They
are compatible with other manufacturers
ISO-KF style flanges. NW flanges utilize
an aluminum clamp with a single wingnut
fastener allowing frequent disassembly
without tools. The vacuum seal is effected
by uniform application of pressure by
the clamp on the 15 surface of the 304
stainless steel flanges. The mating flange
surfaces compress a Viton O-Ring held
in place by a centering ring. The resultant
seal can be used in vacuum applications
of up to 10-8 Torr and baked to 204C,
however sustained baking above 150C
may result in deterioration of O-rings.
Additionally, Nor-Cals NW flanges have
the advantage of being rotatable and are
available on virtually all of our components
and fittings. Nor-Cal manufactures a full
line of NW adapters so you can add to
or build an entire system with NW
components.
NW flanges can also be used with EVAC
chain clamps and aluminum seals to obtain
a UHV seal bakeable to 150C. EVAC chain
clamps and seals are described in detail on
pages three through six of this catalog.
Clamp
Flange
Centering Ring
O-ring
Flange
NW/ISO-LIT 7/01
NW FLANGES & HARDWARE

NW Bored Blank Flanges (NWB)
*Bored Blank (NWB)
Model
Number
A
.150
NW-10B-038, NW-10B-050, NW-25B-100,

NW-40B-150 and NW-50B-200
A
.150
NW-16B-075
.150
Tube
OD
NW-10B-038
NW-10B-050
NW-16B-038*
NW-16B-050*
NW-16B-075
NW-25B-038*
NW-25B-050*
NW-25B-075*
NW-25B-100
NW-40B-038*
NW-40B-050*
NW-40B-075*
NW-40B-100*
NW-40B-150
NW-50B-038*
NW-50B-050*
NW-50B-075*
NW-50B-100*
NW-50B-150*
NW-50B-200
.375
.500
.375
.500
.750
.375
.500
.750
1.000
.375
.500
.750
1.000
1.500
.375
.500
.750
1.000
1.500
2.000
.380
.510
.380
.510
.760
.380
.510
.760
1.010
.380
.510
.760
1.010
1.510
.380
.510
.760
1.010
1.510
2.010
.326
.451
.326
.451
.680
.326
.451
.715
.938
.326
.451
.715
.938
1.438
.326
.451
.715
.938
1.438
1.938
*Refer to Bored Blank (NWB) drawing to left
Price
NW 316L Stainless Steel Bored Blank Flanges (NWB)

Model
Number
.150
Tube
OD
NW-25B-100-316L
NW-40B-150-316L
NW-50B-200-316L
1.000
1.500
2.000
Price
1.010
1.510
2.010
.938
1.438
1.938
NW Blank Off Caps

Model Number
NW-10B
NW-16B
NW-25B
NW-40B
NW-50B
NW Blank Off Caps- 316L

Price
Model Number
.200
.200
.200
.200
.200
NW-16B-316L
NW-25B-316L
NW-40B-316L
NW-50B-316L
Price
.200
.200
.200
.200
A
B
.150
.500
NW Socket Weld Flanges

Model
Number
Tube
OD
NW-10-SW
NW-16-SW
NW-25-SW
NW-40-SW
NW-50-SW
.500
.750
1.000
1.500
2.000
1.180
1.180
1.575
2.160
2.950
.480
.680
.938
1.438
1.938
.510
.760
1.010
1.510
2.010
.640
.798
1.140
1.640
2.140
Price
NW/ISO-LIT 7/01

NW Long Butt Weld Flanges
Long Butt Weld
Model
Number
NW-10FL
NW-16FL
NW-25FL
NW-40FL
NW-50FL
1.180
1.180
1.575
2.160
2.950
.480
.680
1.031
1.620
2.060
.380
.625
.870
1.370
1.870
.500
.750
1.000
1.500
2.000
Price
A
B
.100
.120
15
1.575
NW 316L Stainless Steel Long Butt Weld Flanges

Model
Number
NW-25FL-316L
NW-40FL-316L
NW-50FL-316L
1.575
2.160
2.950
1.031
1.620
2.060
.870
1.370
1.870
1.000
1.500
2.000
Price
C
D
NW Short Butt Weld Flanges

Model
Number
Tube
OD
NW-10F
NW-16F
NW-16FB
NW-25F
NW-40F
NW-50F
.50
.75
.75
1.00
1.50
2.00
1.180
.480
.380
(Noted on drawing)
.680
.625
1.031
.870
1.620
1.370
2.060
1.870
1.180
1.575
2.160
2.950
.500
.500
Price
.750
1.000
1.500
2.000
.500
.500
.750
.750
NW-16F
NW- 16FB, NW-10F, NW-25, NW-40F, NW-50F
1.180
.680
A
B
.100
.100
.120
.120
15o
E
15o
.560
C
D
.625
.672
.750
NW/ISO-LIT 7/01

NW Clamps
Model
Number
NW-10-CP
NW-16-CP
NW-25-CP
NW-40-CP
NW-50-CP
1.690
1.690
2.140
2.750
3.500
2.392
2.392
2.796
3.437
4.245
.625
.625
.625
.625
.710
Price
B
NW SureSeal Clamps
Model
Number
NW-10-SSC
NW-16-SSC
NW-25-SSC
NW-40-SSC
NW-50-SSC
1.750
1.750
2.284
2.947
3.784
2.392
2.392
2.796
3.437
4.245
.741
.741
.741
.741
.836
Price
B
See pages 4 through 6 for EVAC chain clamps, metal seals and flanges.
NW Bulkhead Clamps
B
Model
Number
NW-16-BCP
NW-25-BCP
NW-40-BCP
NW-50-BCP
C
A
Aluminum
Number of
Screws
Through Hole
A
2.00
2.37
2.94
3.75
1.50
1.89
2.44
3.25
.361
.387
.366
.404
6
6
6
8
.90
1.26
1.84
2.35
Price
10-32 x 5/8" Screws
Bulkhead Clamps
NW Flange
Bulkhead or Baseplate
Bulkhead clamps provide a simple

means of fastening an NW flange to a
baseplate. Each aluminum clamp is sold
with stainless steel socket head cap screws
and washers for attachment. Leave .075
inch minimum between the bottom of
the tapped hole and the inside of the
chamber wall.
NW Centering Ring
NW/ISO-LIT 7/01
Nor-Cal offers aluminum and stainless steel centering rings for NW and ISO flanges.
Buna, silicone and Viton O-rings are available for NW, while Buna and Viton are stocked
for ISO centering rings. Aluminum ISO centering rings are provided with an aluminum
spacer ring. Stainless steel ISO centering rings are also provided with aluminum spacer
rings as an option.
NW Aluminum Centering Rings with O-ring

Model
Number
NW-10-CR-AV
NW-10-CR-AB
NW-16-CR-AV
NW-16-CR-AB
NW-25-CR-AV
NW-25-CR-AB
NW-40-CR-AV
NW-40-CR-AB
NW-50-CR-AV
NW-50-CR-AB
O-ring
Material
Viton
Buna
Viton
Buna
Viton
Buna
Viton
Buna
Viton
Buna
.478
.478
.669
.669
1.024
1.024
1.614
1.614
2.047
2.047
.456
.456
.625
.625
.984
.984
1.570
1.570
1.967
1.967
See next page for replacement O-rings.
Price
A
B
.210
.310
.154
NW Stainless Steel Centering Rings with O-ring

Model
Number
NW-10-CR-SV
NW-10-CR-SS
NW-10-CR-SB
NW-16-CR-SV
NW-16-CR-SS
NW-16-CR-SB
NW-25-CR-SV
NW-25-CR-SS
NW-25-CR-SB
NW-40-CR-SV
NW-40-CR-SS
NW-40-CR-SB
NW-50-CR-SV
NW-50-CR-SS
NW-50-CR-SB
O-ring
Material
Viton
Silicone
Buna
Viton
Silicone
Buna
Viton
Silicone
Buna
Viton
Silicone
Buna
Viton
Silicone
Buna
.478
.478
.478
.669
.669
.669
1.024
1.024
1.024
1.614
1.614
1.614
2.047
2.047
2.047
.456
.456
.456
.625
.625
.625
.984
.984
.984
1.570
1.570
1.570
1.967
1.967
1.967
Price
A
B
.310
.154
NW 316L Stainless Steel Centering Rings with O-ring

Model
Number
NW-25-CR-SV-316L
NW-40-CR-SV-316L
NW-50-CR-SV-316L
.210
O-ring
Material
Viton
Viton
Viton
1.024
1.614
2.047
.984
1.570
1.967
A
B
Price
.210
.310

.154
NW/ISO-LIT 7/01

NW Screened Stainless Steel Centering Rings with O-ring
A
B
Model
Number
.210
.310
.154
NW-25-CR-SV-74
NW-40-CR-SV-74
NW-50-CR-SV-74
O-ring
Material
Viton
Viton
Viton
Mesh
1.024
1.614
2.047
.984
1.570
1.967
74
74
74
See below for replacement O-rings.
Price
NW Reducer Stainless Steel Centering Rings with O-ring

.154
A
.310
Model
Number
NW-10/16-CR
NW-20/25-CR
NW-32/40-CR
B
.210
O-ring
Material
Viton
Viton
Viton
.48
.87
1.34
.67
1.02
1.61
Price
NW Stainless Steel Overpressure Rings

A
C
Model
Number
NW-10-PR
NW-16-PR
NW-25-PR
NW-40-PR
NW-50-PR
1.25
1.25
1.66
2.25
2.75
1.186
1.186
1.583
2.169
2.620
Maximum
PSIG
.346
.346
.346
.346
.145
100
100
100
75
50
Price
NW Stainless Steel Centering

Rings with Viton O-ring and Over Pressure Ring
For dimensions refer to
Centering Ring/ O-ring assembly drawing
on previous page and Overpressure Ring
Diagram this page.
Model
Number
Description
NW-10-CR-SV-PR
NW-16-CR-SV-PR
NW-25-CR-SV-PR
NW-40-CR-SV-PR
NW-50-CR-SV-PR
Contains Part Numbers NW-10-PR and NW-10-CR-SV

Price
Buna and Silicone O-rings available. Call for pricing.
Viton Replacement O-Rings

Model
Number
Flange
Type
NW-10-OR-V
NW-16-OR-V
NW-25-OR-V
NW-40-OR-V
NW-50-OR-V
NW-10
NW-16
NW-25
NW-40
NW-50
Price
Silicone Replacement O-Rings Buna Replacement O-Rings

Model
Number
Flange
Type
NW-10-OR-S
NW-16-OR-S
NW-25-OR-S
NW-40-OR-S
NW-50-OR-S
NW-10
NW-16
NW-25
NW-40
NW-50
Price
Model
Number
Flange
Type
NW-10-OR-B
NW-16-OR-B
NW-25-OR-B
NW-40-OR-B
NW-50-OR-B
NW-10
NW-16
NW-25
NW-40
NW-50
Price
NW/ISO-LIT 7/01
NW FITTINGS
Nor-Cal manufactures a complete
line of NW vacuum fittings. The tube
portions are fabricated from 304 stainless
steel. 316L stainless steel can be supplied
on request. Nor-Cal makes its own elbows,
and all tees and crosses are made with
the pulled-port technique. This allows
smooth, crevice-free butt welds to provide
the maximum in cleanliness for UHV
applications. Bakeout range is up to
200C. Nor-Cal fittings are also available
with CF, ISO and ASA flanges.
Standard finish is bead blasted.
As an option, a tumbled finish can be
provided at no extra charge. Indicate
this by adding -T to the part number.
Electropolished finish can also be
provided as an option. Call for pricing.
NW Flex Couplings
Model
Number
2FC-NW-10-1
2FC-NW-10-2
2FC-NW-10-3
2FC-NW-16-1
2FC-NW-16-2
2FC-NW-16-3
2FC-NW-25-1
2FC-NW-25-2
2FC-NW-25-3
2FC-NW-40-1
2FC-NW-40-2
2FC-NW-40-3
2FC-NW-40-6
2FC-NW-50-1
2FC-NW-50-2
2FC-NW-50-3
Bellows
ID
Free
Length
Compressed
Length
.38
.38
.38
.50
.50
.50
.75
.75
.75
1.50
1.50
1.50
1.50
1.75
1.75
1.75
3.20
4.20
5.20
3.20
4.20
5.20
3.20
4.20
5.20
3.20
4.20
5.20
8.20
3.20
4.20
5.20
2.95
3.70
4.45
2.95
3.70
4.45
2.95
3.70
4.45
2.95
3.70
4.45
6.70
2.95
3.70
4.45
Price
321 Stainless Steel Flex Coupling
Free Length
NW/ISO-LIT 7/01
NW FITTINGS
NW Half Nipples
Model
Number
Tube
OD
1N-NW-10
1N-NW-16B
1N-NW-25B
1N-NW-40B
1N-NW-50B
.50
.75
1.00
1.50
2.00
1.25
1.15
2.03
2.40
3.15
Price
NW Full Nipples
Model
Number
Tube
OD
2N-NW-l0
2N-NW-16B
2N-NW-25B
2N-NW-40B
2N-NW-50B
.50
.75
1.00
1.50
2.00
2.50
2.30
4.06
4.80
6.30
Price
NW Reducer Nipples
Model
Number
Flange
1
Flange
2
Tube
OD
2NR-NW-16-10
2NR-NW-25-10
2NR-NW-25-16
2NR-NW-40-10
2NR-NW-40-16
2NR-NW-40-25
2NR-NW-50-10
2NR-NW-50-16
2NR-NW-50-25
2NR-NW-50-40
NW-16
NW-25
NW-25
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
NW-10
NW-10
NW-16
NW-10
NW-16
NW-25
NW-10
NW-16
NW-25
NW-40
.50
.50
.75
.50
.75
1.00
.50
.75
1.00
1.50
1.40
1.40
1.30
1.40
1.30
2.18
1.40
1.30
2.18
2.55
Price
NW Conical Reducer Nipples

1
2
Model
Number
Flange
1
Flange
2
2NRC-NW-25-16
2NRC-NW-40-16
2NRC-NW-50-16
2NRC-NW-40-25
2NRC-NW-50-25
2NRC-NW-50-40
NW-25
NW-40
NW-50
NW-40
NW-50
NW-50
NW-16
NW-16
NW-16
NW-25
NW-25
NW-40
A
.620
.620
.620
.870
.870
1.380
Price
1.57
1.57
1.57
1.57
1.57
1.57
NW 316L Conical Reducer Nipples

B
Model
Number
2NRC-NW-40-25-316L
2NRC-NW-50-40-316L
Flange
1
Flange
2
NW-40
NW-50
NW-25
NW-40
A
.870
1.380
Price
1.57
1.57
NW/ISO-LIT 7/01
NW FITTINGS
NW 45 Radius Elbows
B
Model
Number
Tube
OD
2K-NW-25
2K-NW-40
2K-NW-50
1.00
1.50
2.00
.77
1.08
1.39
Price
NW 45 Radius Elbows with Tangents
Model
Number
Tube
OD
2KL-NW-16
2KL-NW-25
2KL-NW-40
2KL-NW-50
.75
1.00
1.50
2.00
.91
1.12
1.68
1.99
Price
NW 90 Mitered Elbows
Model
Number
Tube
OD
2E-NW-16MB
2E-NW-25MB
2E-NW-40MB
2E-NW-40MH
2E-NW-50MB
2E-NW-50MH
.75
1.00
1.50
1.50
2.00
2.00
1.15
2.03
2.40
2.56
3.15
2.76
Price
B Typ
NW 90 Radius Elbows
Model
Number
Tube
OD
2E-NW-10
2E-NW-16B
2E-NW-25B
2E-NW-40B
2E-NW-40H
2E-NW-40HL
2E-NW-50B
2E-NW-50HL
.50
.75
1.00
1.50
1.50
1.50
2.00
2.00
1.25
1.15
1.65
2.40
2.56
5.12
3.15
5.51
.75
1.00
1.50
2.25
2.25
2.25
3.00
3.00
Price
B
R
NW Tees
Model
Number
Tube
OD
3T-NW-10
3T-NW-16B
3T-NW-25B
3T-NW-40B
3T-NW-40H
3T-NW-50B
3T-NW-50H
.50
.75
1.00
1.50
1.50
2.00
2.00
1.25
1.15
2.03
2.40
2.56
3.15
2.76
Price
B Typ
NW/ISO-LIT 7/01
NW FITTINGS
NW Reducer Tees
1
2
K
3
B Typ
Model
Number
3TR-NW-25-16B
3TR-NW-40-16B
3TR-NW-40-25B
3TR-NW-50-16B
3TR-NW-50-40B
Tube 1 & 2
Arm OD
Tube 3
Leg OD
1.00
1.50
1.50
2.00
2.00
.75
.75
1.00
.75
1.50
2.03
2.40
2.40
3.15
3.15
1.27
1.53
2.28
1.78
2.65
Price
NW 4-Way Crosses
B
Typ
B Typ
Model
Number
Tube
OD
4C-NW-10
4C-NW-16B
4C-NW-25B
4C-NW-40B
4C-NW-40H
4C-NW-50B
4C-NW-50H
.50
.75
1.00
1.50
1.50
2.00
2.00
1.25
1.15
2.03
2.40
2.56
3.15
2.76
Price
3
NW Reducer Crosses
2
K Typ
4
B Typ
Model
Number
4CR-NW-25-16B
4CR-NW-40-16B
4CR-NW-40-25B
4CR-NW-50-16B
4CR-NW-50-40B
Tube 1 & 2
OD
Tube 3 & 4
OD
1.00
1.50
1.50
2.00
2.00
.75
.75
1.00
.75
1.50
2.03
2.40
2.40
3.15
3.15
1.27
1.53
2.28
1.78
2.65
Price
NW 5-Way Crosses
5th Leg Opposite
B
Typ
Model
Number
Tube
OD
5C-NW-16
5C-NW-25B
5C-NW-40B
5C-NW-50B
.75
1.00
1.50
2.00
1.50
2.03
2.40
3.15
Price
B Typ
6th Leg
Opposite
B
Typ
NW 6-Way Crosses
Model
Number
Tube
OD
6C-NW-16
6C-NW-25B
6C-NW-40B
6C-NW-50B
.75
1.00
1.50
2.00
1.50
2.03
2.40
3.15
Price
B Typ
NW/ISO-LIT 7/01
NW FITTINGS
Nor-Cal Products offers a complete
line of NW flanged viewports. Special
materials and coatings, such as sapphire
and anti-reflective (AR) coating, are available on request. Glass provides a large
distortion free viewing area at low cost.
Quartz provides superior ultraviolet
radiation transmission and resistance
to thermal shock. NW and ISO flanged
viewports withstand 2000C bakeouts
and pressures to 10-9 Torr.
100
Viewport
Optical
Transmission
Curves
% Transmission
90
Fused Quartz
80
70
60
50
40
30
20
7056 Glass
10
0
.10
.20
.30
.40 .50 .60
.80
1.0
2.0
3.0
4.0 5.0 6.0
8.0 10.0
NW Zero Length Viewports - Fused Quartz

Model
Number
Flange
Type
View
Diameter
ZV-NW-40A
ZV-NW-50A
ZV-NW-40
ZV-NW-50
NW-40
NW-50
NW-40
NW-50
1.26
1.63
1.26
1.63
Price
Outer Flange
NW ZERO LENGTH VIEWPORT ASSEMBLY

NW Clamp
NW Viewport
Bearing Washer
Quartz Glass
Inner O-ring
NW Butt Weld Flange
Outer O-ring
Retainer Ring
ZV-NW-40A and ZV-NW-50A
ZV-NW-40 and ZV-NW-50
Nor-Cals zero length view ports have

an innovative design which places the
viewing glass inside the centering ring.
The clear, polished quartz can be removed
for cleaning or replacement. Zero length
viewports are available for NW-40, NW-50
or other ISO-KF compatible flanges of the
same size. Also available are 7056 glass
viewports in a one-piece assembly.
This viewport replaces a blank off cap
and uses a standard NW centering ring
assembly and clamp for sealing.
NW Viewports - 7056 Glass

Model
Number
Flange
Type
VP-NW-16
VP-NW-25
VP-NW-40
VP-NW-50
NW-16
NW-25
NW-40
NW-50
.385
.385
.554
.554
View Diameter
V
Price
.62
.62
1.51
1.51
NW-50 and 40-VP
NW-25 and 16 VP
NW/ISO-LIT 7/01
NW ADAPTERS
Nor-Cal offers a full line of adapter nipples and conical adapter nipples with NW and ISO
flanges. Other flange sizes and combinations are available upon request. They are made
from select grade 304 stainless steel to provide the maximum in cleanliness for UHV
applications. Also see CF/Wire Seal and ASA catalogs for other adapter combinations.
NW Female Pipe Adapters

Model
Number
NPT
1
NW-10B- 8 FPT
NW-16B-18 FPT
NW-25B-18 FPT
NW-40B-18 FPT
NW-50B-18 FPT
NW-10B-14 FPT
NW-16B-14 FPT
NW-25B-14 FPT
NW-40B-14 FPT
NW-50B-14 FPT
NW-25B-12 FPT
NW-40B-12 FPT
NW-50B-12 FPT
NW-25B-34 FPT
NW-40B-34 FPT
NW-50B-34 FPT
NW-25B-1 FPT
NW-40B-1 FPT
NW-50B-1 FPT
NPT
NW
Flange
A
/8
/8
1
/8
1
/8
1
/8
1
/4
1
/4
1
/4
1
/4
1
/4
1
/2
1
/2
1
/2
3
/4
3
/4
3
/4
1
1
1
1
A
.92
.92
.92
.92
.92
1.07
1.07
1.07
1.07
1.07
1.39
1.39
1.39
1.45
1.45
1.45
1.57
1.57
1.57
NW Male Pipe Adapters

A
Model
Number
NPT
1
NPT
NW-10B- 8 MPT
NW-16B-18 MPT
NW-25B-18 MPT
NW-40B-18 MPT
NW-50B-18 MPT
NW-10B-14 MPT
NW-16B-14 MPT
NW-25B-14 MPT
NW-40B-14 MPT
NW-50B-14 MPT
NW-16B-12 MPT
NW-25B-12 MPT
NW-40B-12 MPT
NW-50B-12 MPT
NW-25B-34 MPT
NW-40B-34 MPT
NW-50B-34 MPT
NW-25B-1 MPT
NW-40B-1 MPT
NW-50B-1 MPT
/8
/8
1
/8
1
/8
1
/8
1
/4
1
/4
1
/4
1
/4
1
/4
1
/2
1
/2
1
/2
1
/2
3
/4
3
/4
3
/4
1
1
1
1
Price
Price
.89
.89
.89
.89
.89
1.10
1.10
1.10
1.10
1.10
1.35
1.35
1.35
1.35
1.35
1.35
1.35
1.64
1.64
1.64
NW/ISO-LIT 7/01
NW ADAPTERS
NW Swagelok Adapters
Model
Number
Flange
Size
NW-10- 4 SWAG
NW-16-14 SWAG
NW-25-14 SWAG
NW-40-14 SWAG
NW-50-14 SWAG
NW-10-38 SWAG
NW-16-38 SWAG
NW-25-38 SWAG
NW-40-38 SWAG
NW-50-38 SWAG
Tube
OD
1
NW-10
NW-16
NW-25
NW-40
NW-50
NW-10
NW-16
NW-25
NW-40
NW-50
4
1
4
1
4
1
4
1
4
3
8
3
8
3
8
3
8
3
8
Price
Swagelok
1.47
1.47
1.47
1.47
1.47
1.63
1.63
1.63
1.63
1.63
NW
Flange
B
NW Male VCR Adapters
Model
Number
Flange
Size
NW-10-14 MVCR
NW-16-14 MVCR
NW-25-14 MVCR
NW-40-14 MVCR
NW-50-14 MVCR
NW-16-38 MVCR
NW-25-38 MVCR
NW-40-38 MVCR
NW-50-38 MVCR
NW-10
NW-16
NW-25
NW-40
NW-50
NW-16
NW-25
NW-40
NW-50
Tube
OD
1
4
1
4
1
4
1
4
1
4
3
8
3
8
3
8
3
8
Price
NW
Flange
Male
VCR
1.46
1.46
1.46
1.46
1.46
1.65
1.65
1.65
1.65
NW Female VCR Adapters
Model
Number
1
NW-10- 4 FVCR
NW-16-14 FVCR
NW-25-14 FVCR
NW-40-14 FVCR
NW-50-14 FVCR
NW-16-38 FVCR
NW-25-38 FVCR
NW-40-38 FVCR
NW-50-38 FVCR
Flange
Size
NW-10
NW-16
NW-25
NW-40
NW-50
NW-16
NW-25
NW-40
NW-50
Tube
OD
1
4
1
4
1
4
1
4
1
4
3
8
3
8
3
8
3
8
Price
1.96
1.96
1.96
1.96
1.96
2.77
2.77
2.77
2.77
NW
Flange
Female
VCR
B
NW/ISO-LIT 7/01
NW ADAPTERS
NW Ball Socket Adapters
B
Model
Number
BS-50/30-NW
BS-50/30G-NW
BS-75/50-NW
BS-75/50G-NW
Ball
Socket
Flange
Size
Tube OD
A
O-Ring
Size
50/30
50/30
75/50
75/50
NW-40
NW-40
NW-50
NW-50
1.50
1.50
2.00
2.00
1.90
1.90
2.65
2.65
2-224
2-232
Note: G suffix in model number indicates O-ring and O-ring groove.
Ball
Socket
A
Price
NW
Flange
NW Welch Pump Adapters

Model
Number
AN-NW-16-1400
AN-NW-16-1405
AN-NW-25-1405
AN-NW-25-1402
AN-NW-40-1402
2.90
AN-NW-40-1376
AN-NW-40-1397
AN-NW-50-1397
Use With Welch Pump

Model Number
1399, 1400, 1410
1405
1405
1380, 1402, 1403,
8806, 8811, 8816, 8821
1380, 1402, 1403, 8806,
8811, 8816, 8821
1373, 1376, 8831
1374, 1397
1374, 1397
Thread
Tube ID
B
/8-18 NPSM x 1.00

/4-20 NPSM x 1.00
3
/4-20 NPSM x 1.00
1-20 NPSM x 1.00
.450
.562
.562
.750
1-20 NPSM x 1.00
.750
11/2-12 NPSM x 1.00

13/4-20 NPSM x 1.00
13/4-20 NPSM x 1.00
1.125
1.375
1.375
3
3
Note: Includes aluminum gasket
Price
NW Quick Disconnects
Model
Number
1
NW-10- 4 QD
NW-16-14 QD
NW-25-14 QD
NW-40-14 QD
NW-10-38 QD
NW-16-38 QD
NW-25-38 QD
NW-40-38 QD
NW-16-12 QD
NW-25-12 QD
NW-40-12 QD
NW-50-12 QD
NW-25-34 QD
NW-40-34 QD
NW-50-34 QD
NW-40-1 QD
NW-50-1 QD
Flange
Size
NW-10
NW-16
NW-25
NW-40
NW-10
NW-16
NW-25
NW-40
NW-16
NW-25
NW-40
NW-50
NW-25
NW-40
NW-50
NW-40
NW-50
Tube OD
A
Minimum
ID
.187
.187
.187
.187
.281
.281
.281
.281
.406
.406
.406
.406
.625
.625
.625
.875
.875
1.48
1.48
1.48
1.48
1.62
1.62
1.62
1.62
1.79
1.79
1.79
1.79
1.93
1.93
1.93
1.95
1.95
/4
/4
1
/4
1
/4
3
8
3
8
3
8
3
8
1
2
1
2
1
2
1
2
3
/4
3
/4
3
/4
1
1
1
On request, NW Quick Disconnects can be provided

bored through for the tube OD. Add -BT suffix to the part number
and add $10.00 to the list price. Example NW-10-1/4 QD-BT for $55.00
Price
NW/ISO-LIT 7/01
NW ADAPTERS
This fitting provides a compact means of adapting from an ISO flange to a smaller
NW with minimal loss in conductance. They are also available with other flange
combinations and are listed in the appropriate catalogs. The same fitting is used to
reduce a larger ISO flange to a smaller size with the same benefit in conductance.
(See ISO Conical Reducer Nipples.)
NW to CF Conical Adapter Nipples

Model
Number
Flange 1
Type
Tube OD
Flange 2
Type
Tube OD
ANC-NW-16-212
ANC-NW-16-275
ANC-NW-25-133
ANC-NW-25-275
ANC-NW-25-338
ANC-NW-40-133
ANC-NW-40-212
ANC-NW-40-338
ANC-NW-40-450
ANC-NW-40-462
ANC-NW-50-212
ANC-NW-50-275
ANC-NW-50-450
ANC-NW-50-462
ANC-NW-50-600
NW-16
NW-16
NW-25
NW-25
NW-25
NW-40
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
NW-50
2.12 CF
2.75 CF
1.33 CF
2.75 CF
3.38 CF
1.33 CF
2.12 CF
3.38 CF
4.50 CF
4.62 CF
2.12 CF
2.75 CF
4.50 CF
4.62 CF
6.00 CF
.75
.75
1.00
1.00
1.00
1.50
1.50
1.50
1.50
1.50
2.00
2.00
2.00
2.00
2.00
1.00
1.50
.75
1.50
2.00
.75
1.00
2.00
2.50
3.00
1.00
1.50
2.50
3.00
4.00
Price
1.69
2.73
2.03
2.73
2.75
3.03
2.69
2.75
2.90
4.06
2.69
2.73
2.90
4.06
4.21
NW to ISO Conical Adapter Nipples

Model
Number
Flange 1
Type
Tube OD
Flange 2
Type
Tube OD
ANC-NW-40-ISO-63
ANC-NW-40-ISO-80
ANC-NW-50-ISO-63
ANC-NW-50-ISO-80
ANC-NW-50-ISO-100
NW-40
NW-40
NW-50
NW-50
NW-50
ISO-63
ISO-80
ISO-63
ISO-80
ISO-100
1.50
1.50
2.00
2.00
2.00
2.50
3.00
2.50
3.00
4.00
Price
2.78
4.03
2.78
4.03
4.03
B
NW to ASA Conical Adapter Nipples

Model
Number
Flange 1
Type
Tube OD
Flange 2
Type
Tube OD
ANC-NW-25-ASA-5
ANC-NW-40-ASA-5
ANC-NW-40-ASA-6
ANC-NW-50-ASA-5
ANC-NW-50-ASA-6
ANC-NW-50-ASA-7.5
NW-25
NW-40
NW-40
NW-50
NW-50
NW-50
ASA-5
ASA-5
ASA-6
ASA-5
ASA-6
ASA-7.5
1.00
1.50
1.50
2.00
2.00
2.00
Note: Add suffix -G to model number

if O-ring groove is required on ASA flange.
See ASA flange catalog for groove prices.
2.00
2.50
3.00
2.50
3.00
4.00
Price
2.78
2.78
4.03
2.78
4.03
4.03
B
NW/ISO-LIT 7/01
NW ADAPTERS
NW to ASA Adapter Nipples
Model
Number
2
2.00
1
AN-NW-16-ASA-5
AN-NW-16-ASA-6
AN-NW-16-ASA-7.5
AN-NW-16-ASA-9
AN-NW-16-ASA-11
AN-NW-25-ASA-6
AN-NW-25-ASA-7.5
AN-NW-25-ASA-9
AN-NW-25-ASA-11
AN-NW-40-ASA-7.5
AN-NW-40-ASA-9
AN-NW-40-ASA-11
AN-NW-50-ASA-9
AN-NW-50-ASA-11
Flange Types
Flange 1
Flange 2
NW-16
NW-16
NW-16
NW-16
NW-16
NW-25
NW-25
NW-25
NW-25
NW-40
NW-40
NW-40
NW-50
NW-50
ASA-5
ASA-6
ASA-7.5
ASA-9
ASA-11
ASA-6
ASA-7.5
ASA-9
ASA-11
ASA-7.5
ASA-9
ASA-11
ASA-9
ASA-11
Tube OD
Price
.75
.75
.75
.75
.75
1.00
1.00
1.00
1.00
1.50
1.50
1.50
2.00
2.00
Note: Add suffix -G to model number if

O-Ring Groove is required on ASA Flange.
NW to ISO Adapter Nipples

2
Model
Number
1.75
1
AN-NW-16-ISO-63-OF
AN-NW-25-ISO-63-OF
AN-NW-25-ISO-80-OF
AN-NW-25-ISO-100-OF
AN-NW-40-ISO-100-OF
AN-NW-50-ISO-160-OF
Flange Types
Flange 1
Flange 2
NW-16
NW-25
NW-25
NW-25
NW-40
NW-50
ISO-63
ISO-63
ISO-80
ISO-100
ISO-100
ISO-160
Tube OD
Price
.75
1.00
1.00
1.00
1.50
2.00
NW to CF Adapter Nipples
2
Model
Number
2.00
1
AN-NW-10-133
AN-NW-16-133
AN-NW-25-212
AN-NW-40-275
AN-NW-50-133
AN-NW-50-338
Flange Types
Flange 1
Flange 2
NW-10
NW-16
NW-25
NW-40
NW-50
NW-50
1.33 CF
1.33 CF
2.12 CF
2.75 CF
1.33 CF
3.38 CF
Tube OD
.50
.75
1.00
1.50
.75
2.00
Note: Other sizes available on request.
NW Glass Adapters-7740 Pyrex

Model
Number
B
C
1GA-NW-038P
1GA-NW-075P
1GA-NW-100P
1GA-NW-150P
1GA-NW-200P
Price
Flange
Type
NW-10
NW-16
NW-25
NW-40
NW-50
4.90
4.90
4.90
4.90
5.40
.38
.75
1.00
1.50
2.00
Price
NW/ISO-LIT 7/01
NW ADAPTERS
NW to ISO tee and cross adapters are commonly ordered as a

special roughing line component. These fittings are offered by
Nor-Cal as standard items. They are available from stock with
several NW to ISO flange combinations.
NW to ISO Adapter Tees

Model
Number
Flange 1 & 2
Type
Arm OD
Flange 3
Type Leg OD
3TA-NW-40-ISO-63-OF
3TA-NW-40-ISO-80-OF
3TA-NW-40-ISO-100-OF
3TA-NW-50-ISO-63-OF
3TA-NW-50-ISO-80-OF
ISO-63
ISO-80
ISO-100
ISO-160
ISO-63
ISO-80
ISO-100
ISO-160
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
2.50
3.00
4.00
6.00
2.50
3.00
4.00
6.00
1.50
1.50
1.50
1.50
2.00
2.00
2.00
2.00
3.25
3.50
4.13
5.38
3.25
3.50
4.13
5.38
2.90
3.15
3.65
4.65
3.40
3.65
4.15
5.15
Other adapter combinations can be supplied upon request.
Price
2
K
3
B Typ
NW to ISO Adapter Crosses

Model
Number
Flange 1 & 2
Type Arm OD
Flange 3 & 4
Type Leg OD
4CA-NW-40-ISO-63-OF
4CA-NW-40-ISO-80-OF
4CA-NW-40-ISO-100-OF
4CA-NW-50-ISO-63-OF
4CA-NW-50-ISO-80-OF
ISO-63
ISO-80
ISO-100
ISO-160
ISO-63
ISO-80
ISO-100
ISO-160
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
2.50
3.00
4.00
6.00
2.50
3.00
4.00
6.00
Other adapter combinations can be supplied upon request.
1.50
1.50
1.50
1.50
2.00
2.00
2.00
2.00
3
B
3.25
3.50
4.13
5.38
3.25
3.50
4.13
5.38
2.90
3.15
3.65
4.65
3.40
3.65
4.15
5.15
Price
K
Typ
4
B Typ
NW/ISO-LIT 7/01
NW HOSE
We now offer PVC hoses with and without NW flanges. This inexpensive alternative
to stainless steel flex hose is made of non-toxic PVC reinforced with a spring wire.
It is excellent for exhaust lines and may be ordered by the foot. Each length includes
two hose clamps for installation.
PVC Hose with NW Flanges

ID
.50
.75
Length
1.00
1.50
2.00
Model
Number
Length
PVC-050-12-2NW
PVC-050-24-2NW
PVC-050-36-2NW
PVC-050-72-2NW
PVC-075-12-2NW
PVC-075-24-2NW
PVC-075-36-2NW
PVC-075-72-2NW
PVC-100-12-2NW
PVC-100-24-2NW
PVC-100-36-2NW
PVC-100-72-2NW
PVC-150-12-2NW
PVC-150-24-2NW
PVC-150-36-2NW
PVC-150-72-2NW
PVC-200-12-2NW
PVC-200-24-2NW
PVC-200-36-2NW
PVC-200-72-2NW
NW Flange
12.00
24.00
36.00
72.00
12.00
24.00
36.00
72.00
12.00
24.00
36.00
72.00
12.00
24.00
36.00
72.00
12.00
24.00
36.00
72.00
Minimum Bend
Radius at 20C
NW-10
NW-10
NW-10
NW-10
NW-16
NW-16
NW-16
NW-16
NW-25
NW-25
NW-25
NW-25
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
Price
2.00
2.00
2.00
2.00
3.00
3.00
3.00
3.00
4.00
4.00
4.00
4.00
6.00
6.00
6.00
6.00
8.00
8.00
8.00
8.00
PVC Hose
ID
OD
Length
Model
Number
ID
OD
Minimum Bend
Radius at 20C
PVC-050
PVC-075
PVC-100
PVC-150
PVC-200
.50
.75
1.00
1.50
2.00
.813
1.125
1.375
2.000
2.500
2.00
3.00
4.00
6.00
8.00
To order specify length required in

feet as follows: PVC-100-5.0 and PVC-200-10.0
Price/ft
PVC Hose Nipples

B
NW
Flange
.500
Model
Number
Flange
Type
Hose ID
A
1HN-NW-10-050
1HN-NW-16-075
1HN-NW-25-100
1HN-NW-40-150
1HN-NW-50-200
NW-10
NW-16
NW-25
NW-40
NW-50
.50
.75
1.00
1.50
2.00
1.26
1.26
1.50
1.97
2.17
Price
NW/ISO-LIT 7/01
NW HOSE
NW Flexible Stainless Steel Hose - Thin Wall
Nom
iD
.75
1.00
1.50
2.00
Model
Number
Length
Flanges
LH-075-10-2NW
LH-075-12-2NW
LH-075-18-2NW
LH-075-24-2NW
LH-075-36-2NW
LH-100-10-2NW
LH-100-12-2NW
LH-100-18-2NW
LH-100-24-2NW
LH-100-36-2NW
LH-150-10-2NW
LH-150-12-2NW
LH-150-18-2NW
LH-150-24-2NW
LH-150-36-2NW
LH-200-10-2NW
LH-200-12-2NW
LH-200-18-2NW
LH-200-24-2NW
LH-200-36-2NW
10.00
12.00
18.00
24.00
36.00
10.00
12.00
18.00
24.00
36.00
10.00
12.00
18.00
24.00
36.00
10.00
12.00
18.00
24.00
36.00
NW-16
NW-16
NW-16
NW-16
NW-16
NW-25
NW-25
NW-25
NW-25
NW-25
NW-40
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
NW-50
Wall Static Bend

Thickness Radius
Price
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
.006
1.00
1.00
1.00
1.00
1.00
1.40
1.40
1.40
1.40
1.40
2.36
2.36
2.36
2.36
2.36
2.50
2.50
2.50
2.50
2.50
The flexibility and reliability of stainless

steel vacuum hoses make them ideally
suited for use in vibration isolation and
roughing and alignment manifolds.
These 321 stainless steel hoses are
available in .75 to 2 inch diameters with
NW and NW to CF flange configurations.
For applications requiring increased flexibility, Nor-Cal now offers the same high
quality stainless steel NW flex hoses in a
.006 inch wall thickness. You can now
choose between our standard wall FH-
hose, the heavy wall TH- hose, and
lightweight, thin wall LH- hose. Thin
wall hose is offered in standard lengths
from 10 to 40 inches in .75 to 2 inch
diameters. Flex hoses can be found with
other flange types or with butt weld fittings
in their appropriate catalog. Custom
lengths can be supplied on request.
NW Flexible Stainless Steel Hose - Medium Wall

Nom
iD
.75
1.00
1.50
2.00
Model
Number
Length
Flanges
FH-075-10-2NW
FH-075-12-2NW
FH-075-18-2NW
FH-075-20-2NW
FH-075-24-2NW
FH-075-36-2NW
FH-075-40-2NW
FH-100-10-2NW
FH-100-12-2NW
FH-100-18-2NW
FH-100-20-2NW
FH-100-24-2NW
FH-100-36-2NW
FH-100-40-2NW
FH-150-10-2NW
FH-150-12-2NW
FH-150-18-2NW
FH-150-20-2NW
FH-150-24-2NW
FH-150-36-2NW
FH-150-40-2NW
FH-200-10-2NW
FH-200-12-2NW
FH-200-18-2NW
FH-200-20-2NW
FH-200-24-2NW
FH-200-36-2NW
FH-200-40-2NW
10.00
12.00
18.00
20.00
24.00
36.00
40.00
10.00
12.00
18.00
20.00
24.00
36.00
40.00
10.00
12.00
18.00
20.00
24.00
36.00
40.00
10.00
12.00
18.00
20.00
24.00
36.00
40.00
NW-16
NW-16
NW-16
NW-16
NW-16
NW-16
NW-16
NW-25
NW-25
NW-25
NW-25
NW-25
NW-25
NW-25
NW-40
NW-40
NW-40
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
NW-50
NW-50
NW-50
Length
Wall Static Bend

Thickness Radius
Price
.008
.008
.008
.008
.008
.008
.008
.008
.008
.008
.008
.008
.008
.008
.010
.010
.010
.010
.010
.010
.010
.012
.012
.012
.012
.012
.012
.012
1.26
1.26
1.26
1.26
1.26
1.26
1.26
1.46
1.46
1.46
1.46
1.46
1.46
1.46
2.16
2.16
2.16
2.16
2.16
2.16
2.16
2.56
2.56
2.56
2.56
2.56
2.56
2.56
NW/ISO-LIT 7/01
NW HOSE
NW Flexible Stainless Steel Hose - Medium Wall with Braid
Stainless steel vacuum hose with
protective stainless steel braid is available
for .75 to 2 inch OD hose in 12, 18, 20, 24,
36 and 40 inch lengths. Larger sizes and
custom lengths are available on request.
Length
Nom
ID
.75
1.00
1.50
2.00
Model
Number
Length
Flanges
FHB-075-12-2NW
FHB-075-18-2NW
FHB-075-20-2NW
FHB-075-24-2NW
FHB-075-36-2NW
FHB-075-40-2NW
FHB-100-12-2NW
FHB-100-18-2NW
FHB-100-20-2NW
FHB-100-24-2NW
FHB-100-36-2NW
FHB-100-40-2NW
FHB-150-12-2NW
FHB-150-18-2NW
FHB-150-20-2NW
FHB-150-24-2NW
FHB-150-36-2NW
FHB-150-40-2NW
FHB-200-12-2NW
FHB-200-18-2NW
FHB-200-20-2NW
FHB-200-24-2NW
FHB-200-36-2NW
FHB-200-40-2NW
12.00
18.00
20.00
24.00
36.00
40.00
12.00
18.00
20.00
24.00
36.00
40.00
12.00
18.00
20.00
24.00
36.00
40.00
12.00
18.00
20.00
24.00
36.00
40.00
NW-16
NW-16
NW-16
NW-16
NW-16
NW-16
NW-25
NW-25
NW-25
NW-25
NW-25
NW-25
NW-40
NW-40
NW-40
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
NW-50
NW-50
NW-50
Wall Static Bend

Thickness Radius
Price
.008
.008
.008
.008
.008
.008
.008
.008
.008
.008
.008
.008
.010
.010
.010
.010
.010
.010
.012
.012
.012
.012
.012
.012
2.09
2.09
2.09
2.09
2.09
2.09
2.52
2.52
2.52
2.52
2.52
2.52
3.86
3.86
3.86
3.86
3.86
3.86
4.72
4.72
4.72
4.72
4.72
4.72
Flexible stainless steel NW/CF adapter

hoses connect components with NW
flanges to components with CF flanges.
They are available in .75 to 1.5 inch OD
hose in 12, 18, 24 and 36 inch lengths.
Larger sizes, custom lengths and protective stainless steel braid are also available.
NW/CF Flexible Stainless Steel Adapter Hose - Medium Wall

Nom
ID
.75
1.50
Length
Model
Number
Length
Flanges
Wall Static Bend

Thickness Radius
Price
FH-075-12-NW-CF
FH-075-18-NW-CF
FH-075-24-NW-CF
FH-075-36-NW-CF
FH-150-12-NW-CF
FH-150-18-NW-CF
FH-150-24-NW-CF
FH-150-36-NW-CF
12.00
18.00
24.00
36.00
12.00
18.00
24.00
36.00
NW-16/CF-1.33
NW-16/CF-1.33
NW-16/CF-1.33
NW-16/CF-1.33
NW-40/CF-2.75
NW-40/CF-2.75
NW-40/CF-2.75
NW-40/CF-2.75
.008
.008
.008
.008
.010
.010
.010
.010
1.26
1.26
1.26
1.26
2.16
2.16
2.16
2.16
NW Flexible Stainless Steel Hose - Thick Wall

Thick wall stainless steel vacuum hose
is available for .75 to 2 inch OD hose in 10,
20 and 40 inch lengths. Larger sizes and
custom lengths are available on request.
Nom
ID
.75
1.00
Length
1.50
2.00
Model
Number
Length
Flanges
TH-075-10-2NW
TH-075-20-2NW
TH-075-40-2NW
TH-100-10-2NW
TH-100-20-2NW
TH-100-40-2NW
TH-150-10-2NW
TH-150-20-2NW
TH-150-40-2NW
TH-200-10-2NW
TH-200-20-2NW
TH-200-40-2NW
10.00
20.00
40.00
10.00
20.00
40.00
10.00
20.00
40.00
10.00
20.00
40.00
NW-16
NW-16
NW-16
NW-25
NW-25
NW-25
NW-40
NW-40
NW-40
NW-50
NW-50
NW-50
Wall
Static Bend
Thickness Radius
Price
.017
.017
.017
.017
.017
.017
.020
.020
.020
.020
.020
.020
2.13
2.13
2.13
2.88
2.88
2.88
3.50
3.50
3.50
5.25
5.25
5.25
NW/ISO-LIT 7/01
NEW PRODUCTS

Thin Wall Flexible


Rings with Screens

ten to forty inches
in 3/4 to 2 inch
diameters.


ISO-LIT 11/02
ISO FLANGE SYSTEM

A. Optional Fastener/
Optional Fastener
with Double Claw Clamp
C. Optional Fastener/
Non-Rotatable with
Rotatable Bolt Ring & Bolts
B. Optional Fastener/Tapped
Non-Rotatable with
Single Claw Clamp
D. Non-Rotatable/
Non-Rotatable
with Bolts
Nor-Cal ISO flanges and hardware are

manufactured to the International Standards Organization specification so they
can be mated to other manufacturers ISO
flanges. ISO flanges are made from Argon
Oxygen Decarburization (AOD) 304 stainless steel. This material is certified to meet
ASTM-240 and has less than .01% sulfur
in order to prevent sulfur stringers. Grain
size is 3 to 6 per ASTM E-112. Maximum
inclusion size is 2.5 per ASTM E-45.
Normally our standard material is in the
low carbon range for 304 stainless steel.
For increased corrosion resistance, some
sizes are available from stock in 316L
stainless steel.
Optional fastener and non-rotatable ISO
flanges are available from stock for 2.5 to
20 inch tube sizes. Both use a Viton O-ring,
held in place by a centering ring, to effect a
seal with a vacuum range of 10-8 Torr.
ISO components can be baked to 204C.
ISO flanges can also be used with standard
clamps and aluminum seals to obtain a
UHV seal bakeable to 150C. EVAC seals
are described in detail on pages 4 through
6 of this catalog.
Optional fastener (OF) flanges are joined
around the periphery with clamps. Double
claw clamps are used when a pair of OF
flanges are joined (Illustration A), or single
claw clamps are used to join an OF flange
to a tapped non-rotatable on a pump or
gate valve (B). This fastening method
allows the OF flange to be rotated for ease
of component alignment. Additionally, a
rotatable bolt ring can be used to fasten an
OF flange to a non-rotatable flange using
bolts (C). A retainer ring prevents the OF
flange from slipping through the bolt ring.
Non-rotatable ISO flanges are assembled
with bolts (D). They do not allow rotation
of bolt holes on mating flanges to align
components.
ISO-LIT 11/02
ISO FLANGES & HARDWARE

ISO Optional Fastener Flanges
Nom
ID
Optional Fastener
Blank
2.5
3.0
B
4.0
6.0
Seal Side
8.0
10.0
12.0
Optional Fastener
Bored
16.0
20.0
A
D
Model
Number
ISO-63-000-OF
ISO-63-250-OF
ISO-80-000-OF
ISO-80-300-OF
ISO-100-000-OF
ISO-100-400-OF
ISO-160-000-OF
ISO-160-600-OF
ISO-200-000-OF
ISO-200-800-OF
ISO-250-000-OF
ISO-250-1000-OF
ISO-320-000-OF
ISO-320-1200-OF
ISO-320-1275-OF
ISO-400-000-OF
ISO-400-1600-OF
ISO-500-000-OF
ISO-500-2000-OF
3.740
3.740
4.331
4.331
5.118
5.118
7.087
7.087
9.449
9.449
11.417
11.417
14.567
14.567
14.567
17.716
17.716
21.653
21.653
.47
.47
.47
.47
.47
.47
.47
.47
.47
.47
.47
.47
.67
.67
.67
.67
.67
.67
.67
Blank
2.438
Blank
2.938
Blank
3.910
Blank
5.875
Blank
7.875
Blank
9.875
Blank
11.875
12.420
Blank
15.624
Blank
19.624
2.510
3.010
4.010
6.020
8.020
10.020
12.020
12.770
16.020
20.020
.250
.250
.250
.375
.375
.375
.375
.375
.375
.375
Price
B
ISO 316L Optional Fastener Flanges

Nom
ID
C
Seal Side
2.5
3.0
4.0
Model
Number
ISO-63-250-OF-316L
ISO-80-300-OF-316L
ISO-100-400-OF-316L
3.740
4.331
5.118
.47
.47
.47
2.438
2.938
3.910
2.510
3.010
4.010
.250
.250
.250
Price
ISO Rotatable Bolt Ring and Retainer Ring
Aluminum
B
F
A
Model Number
Flange Size
ISO-63-BR
ISO-80-BR
ISO-100-BR
ISO-160-BR
ISO-200-BR
ISO-250-BR
ISO-320-BR
ISO-400-BR
ISO-500-BR
ISO-63
IS0-80
ISO-100
ISO-160
ISO-200
ISO-250
ISO-320
ISO-400
ISO-500
5.118
5.709
6.496
8.858
11.220
13.189
16.732
20.079
24.016
.472
.472
.472
.630
.630
.630
.787
.787
.787
4.331
4.921
5.709
7.874
10.236
12.205
15.551
18.898
22.835
Price
Replacement Retainer Ring

Stainless Steel
Model Number
Price
ISO-63-RR
ISO-80-RR
ISO-100-RR
ISO-160-RR
ISO-200-RR
ISO-250-RR
ISO-320-RR
ISO-400-RR
ISO-500-RR
ISO-LIT 11/02

ISO Non-Rotatable Flanges
Nom
ID
Model
Number
Bolt Holes
Number
Diameter
2.5
ISO-63-000N
ISO-63-250N
5.118
5.118
.472
.472
Blank
2.438
2.510
.250
4.331
4.331
4
4
.359
.359
3.0
ISO-80-000N
ISO-80-300N
5.709
5.709
.472
.472
Blank
2.938
3.010
.250
4.921
4.921
8
8
.359
.359
4.0
ISO-100-000N
ISO-100-400N
6.496
6.496
.472
.472
Blank
3.910
4.010
.250
5.709
5.709
8
8
.359
.359
6.0
ISO-160-000N
ISO-160-600N
8.858
8.858
.630
.630
Blank
5.875
6.020
.375
7.874
7.874
8
8
.438
.438
8.0
ISO-200-000N
ISO-200-800N
11.220
11.220
.630
.630
Blank
7.875
8.020
.375
10.236
10.236
12
12
.438
.438
10.0
ISO-250-000N
ISO-250-1000N
13.189
13.189
.630
.630
Blank
9.875
10.020
.375
12.205
12.205
12
12
.438
.438
12.0
ISO-320-000N
ISO-320-1200N
ISO-320-1275N
16.732
16.732
16.732
.787
.787
.787
Blank
11.760
12.420
12.020
12.770
.375
.375
15.551
15.551
15.551
12
12
12
.551
.551
.551
16.0
ISO-400-000N
ISO-400-1600N
20.079
20.079
.787
.787
Blank
15.642
16.020
.375
18.898
18.898
16
16
.551
.551
20.0
ISO-500-000N
ISO-500-2000N
24.016
24.016
.787
.787
Blank
19.642
20.020
.375
22.835
22.835
16
16
.551
.551
Price
Non-Rotatable
A
D
C
F
F
Seal Side
ISO Bolt Kits

Model
Number
Description
B-ISO-63
B-ISO-80
B-ISO-100
B-ISO-160
B-ISO-200
B-ISO-250
B-ISO-320
B-ISO-400
B-ISO-500
(4) S.S. Bolts, Nuts & Washers, M8 x 40

Price
ISO-LIT 11/02

ISO Double Claw Aluminum Clamps
Model
Number
Thread Size
ISO-63-DCP
ISO-80-DCP
ISO-100-DCP
ISO-160-DCP
ISO-200-DCP
ISO-250-DCP
ISO-320-DCP
ISO-400-DCP
ISO-500-DCP
Flange
Size
ISO-63
ISO-80
ISO-100
ISO-160
ISO-200
ISO-250
ISO-320
ISO-400
ISO-500
Thread
Size
.94
.94
.94
1.10
1.10
1.10
1.34
1.34
1.34
Clamps
Required
16-18
16-18
5
16-18
5
16-18
5
16-18
5
16-18
7
/16-14
7
16-14
7
16-14
1.96
1.96
1.96
1.96
1.96
1.96
2.20
2.20
2.20
Price
3-4
4-8
4-8
4-8
6-12
6-12
8-12
8-16
12-16
ISO Single Claw Aluminum Clamps

A
B
Thread Size
Model
Number
Flange
Size
ISO-63-SCP
ISO-80-SCP
ISO-100-SCP
ISO-160-SCP
ISO-200-SCP
ISO-250-SCP
ISO-320-SCP
ISO-400-SCP
ISO-500-SCP
ISO-63
ISO-80
ISO-100
ISO-160
ISO-200
ISO-250
ISO-320
ISO-400
ISO-500
.94
.94
.94
1.10
1.10
1.10
1.34
1.34
1.34
1.18
1.18
1.18
1.18
1.18
1.18
1.46
1.46
1.46
.52
.52
.52
.52
.52
.52
.88
.88
.88
Thread Clamps
Size Required Price
5
16-18
16-18
5
16-18
5
16-18
5
16-18
5
16-18
7
16-14
7
16-14
7
16-14
4
8
8
8
12
12
12
16
16
ISO Single Claw Aluminum Clamps - Metric

A
B
Thread Size
Model
Number
Flange
Size
ISO-63-SCP-M
ISO-80-SCP-M
ISO-100-SCP-M
ISO-160-SCP-M
ISO-200-SCP-M
ISO-250-SCP-M
ISO-320-SCP-M
ISO-400-SCP-M
ISO-500-SCP-M
ISO-63
ISO-80
ISO-100
ISO-160
ISO-200
ISO-250
ISO-320
ISO-400
ISO-500
.94
.94
.94
1.10
1.10
1.10
1.34
1.34
1.34
Metric
Thread Size
1.20
1.20
1.20
1.20
1.20
1.20
1.48
1.48
1.48
.40
.40
.40
.40
.40
.40
.79
.79
.79
M8
M8
M8
M10
M10
M10
M12
M12
M12
Clamps
Required Price
4
8
8
8
12
12
12
16
16
ISO-LIT 11/02

ISO Aluminum Centering Rings
with O-ring and Aluminum Spacer Ring
Model
Number
ISO-63-CR-AV
ISO-63-CR-AB
ISO-80-CR-AV*
ISO-80-CR-AB*
ISO-100-CR-AV*
ISO-100-CR-AB*
ISO-160-CR-AV*
ISO-160-CR-AB*
ISO-200-CR-AV*
ISO-200-CR-AB*
ISO-250-CR-AV*
ISO-250-CR-AB*
ISO-320-CR-AV*
ISO-320-CR-AB*
ISO-400-CR-AV*
ISO-400-CR-AB*
ISO-500-CR-AV*
ISO-500-CR-AB*
O-ring
Material
Viton
Buna
Viton
Buna
Viton
Buna
Viton
Buna
Viton
Buna
Viton
Buna
Viton
Buna
Viton
Buna
Viton
Buna
2.63
2.63
3.14
3.14
3.89
3.89
5.90
5.90
8.26
8.26
10.14
10.14
12.32
12.32
15.55
15.55
19.53
19.53
2.74
2.74
3.25
3.25
4.00
4.00
6.01
6.01
8.37
8.37
10.25
10.25
12.51
12.51
15.75
15.75
19.72
19.72
* Rolled Centering Ring. See page 32 for replacement O-rings.
Price
ISO-63 through ISO-250

B
A
.312
.154

B
A
ISO-63-CR-SV
ISO-80-CR-SV
ISO-100-CR-SV
ISO-160-CR-SV
ISO-200-CR-SV
ISO-250-CR-SV
ISO-320-CR-SV
ISO-400-CR-SV
.220
O-ring
Material
Viton
Viton
Viton
Viton
Viton
Viton
Viton
Viton
2.63
3.14
3.89
5.90
8.26
10.14
12.36
15.55
2.74
3.25
4.00
6.01
8.37
10.25
12.52
15.75
See page 32 for replacement O-rings.
.275
.550
ISO Stainless Steel Centering Rings

with O-Ring and Aluminum Spacer Ring
Model
Number
.210
B
A
Price
.210
.312
.154
ISO-320 and ISO-400

B
A
.275
.550
.220
ISO 316L Stainless Steel Centering Rings

with O-Ring and Aluminum Spacer Ring
Model
Number
ISO-63-CR-SV-316L
ISO-80-CR-SV-316L
ISO-100-CR-SV-316L
O-ring
Material
Viton
Viton
Viton
2.63
3.14
3.89
2.74
3.25
4.00
B
A
Price
.210
.312
.154
See page 32 for replacement O-rings.
ISO-LIT 11/02

ISO Stainless Steel Centering Rings with O-ring
B
.154
ISO-63-CR
ISO-80-CR
ISO-100-CR
ISO-160-CR
ISO-200-CR
ISO-250-CR
ISO-320-CR
ISO-400-CR
.312
.210
ISO-320 and ISO-400

B
.220
Model
Number
O-ring
Material
Viton
Viton
Viton
Viton
Viton
Viton
Viton
Viton
2.63
3.14
3.89
5.90
8.26
10.14
12.32
15.55
Price
2.74
3.25
4.00
6.01
8.37
10.25
12.52
15.74
.550
.275
ISO Screened Stainless Steel Centering Rings

with O-ring and Aluminum Spacer Ring
B
A
.210
.312
C
.154
Model
Number
O-ring
Material
Mesh
Viton
Viton
Viton
Viton
2.63
3.14
3.89
5.90
2.74
3.25
4.00
6.01
2.38
2.87
3.50
5.50
16
16
16
16
ISO-63-CR-SV-16
ISO-80-CR-SV-16
ISO-100-CR-SV-16
ISO-160-CR-SV-16
Includes O-ring. See below for replacement O-rings.
Viton Replacement O-Rings
Price
Buna Replacement O-Rings
Model
Number
Flange
Type
Price
Model
Number
Flange
Type
ISO-63-0R-V
ISO-80-OR-V
ISO-100-OR-V
ISO-160-OR-V
ISO-200-OR-V
ISO-250-OR-V
ISO-320-OR-V
ISO-400-OR-V
ISO-500-OR-V
ISO-63
ISO-80
ISO-100
ISO-160
ISO-200
ISO-250
ISO-320
ISO-400
ISO-500
$ 8.00
$ 11.00
$ 19.00
$ 24.00
$ 27.00
$ 32.00
$ 40.00
$ 42.00
$ 55.00
ISO-63-0R-B
ISO-80-OR-B
ISO-100-OR-B
ISO-160-OR-B
ISO-200-OR-B
ISO-250-OR-B
ISO-320-OR-B
ISO-400-OR-B
ISO-500-OR-B
ISO-63
ISO-80
ISO-100
ISO-160
ISO-200
ISO-250
ISO-320
ISO-400
ISO-500
Price
ISO-LIT 11/02
ISO FITTINGS
Nor-Cal manufactures a complete line
of ISO vacuum fittings. The tube portions
are fabricated from 304 stainless steel.
For increased resistance to corrosion in
downstream semiconductor processes,
Nor-Cal now stocks some ISO flanges and
fittings in 316L material. Nor-Cal makes
its own elbows, and all tees and crosses
are made with the pulled-port technique.
This allows smooth, crevice-free butt
welds to provide the maximum in cleanliness for UHV applications. Bakeout range
is up to 204C. Nor-Cal fittings are also
available with CF (Conflat style), NW
(ISO-KF compatible) and ASA flanges.
ISO flanged fittings are available with
optional fastener (OF) or non-rotatable
(N) flanges, although they are shown
here with OF flanges only. To order a
fitting with non-rotatable flanges
substitute an N for OF in the
model number.
ISO Half Nipples

Model
Number
Tube
OD
1N-ISO-63-OF
1N-ISO-63-OF-V
1N-ISO-63-OF-H
1N-ISO-80-OF
1N-ISO-80-OF-H
1N-ISO-100-OF
1N-ISO-100-OF-V
1N-ISO-100-OF-H
1N-ISO-160-OF
1N-ISO-160-OF-V
1N-ISO-160-OF-H
1N-ISO-200-OF
1N-ISO-250-OF
1N-ISO-320-OF
1N-ISO-400-OF
1N-ISO-500-OF
2.50
2.50
2.50
3.00
3.00
4.00
4.00
4.00
6.00
6.00
6.00
8.00
10.00
12.00
16.00
20.00
3.25
4.00
3.94
3.50
3.94
4.13
5.12
3.94
5.38
6.44
3.94
7.38
9.88
9.88
9.88
9.88
Price
Standard finish is bead blasted. As an

option, a tumbled finish can be provided
at no extra charge. Indicate this by adding
-T to the part number. Electropolished
finish can also be provided as an option.
Call for pricing.
ISO 316L Half Nipples

Model
Number
1N-ISO-63-OF-316L
1N-ISO-80-OF-316L
1N-ISO-100-OF-316L
Tube
OD
2.50
3.00
4.00
3.25
3.50
4.13
Price
ISO-LIT 11/02
ISO FITTINGS
ISO Full Nipples
Model
Number
Tube
OD
2N-ISO-63-OF
2N-ISO-80-OF
2N-ISO-100-OF
2N-ISO-160-OF
2N-ISO-200-OF
2N-ISO-250-OF
2N-ISO-320-OF
2N-ISO-400-OF
2N-ISO-500-OF
2.50
3.00
4.00
6.00
8.00
10.00
12.00
16.00
20.00
6.50
7.00
8.26
10.76
14.76
19.76
19.76
19.76
19.76
ISO Reducer Nipples

1
2
Model
Number
2NR-ISO-80-63-OF
2NR-ISO-100-63-OF
2NR-ISO-100-80-OF
2NR-ISO-160-63-OF
2NR-ISO-160-80-OF
2NR-ISO-160-100-OF
2NR-ISO-200-63-OF
2NR-ISO-200-80-OF
2NR-ISO-200-100-OF
2NR-ISO-200-160-OF
2NR-ISO-250-63-OF
2NR-ISO-250-80-OF
2NR-ISO-250-100-OF
2NR-ISO-250-160-OF
2NR-ISO-250-200-OF
3.00
Price
Flange
1
Flange
2
Tube
OD
ISO-80
ISO-100
ISO-100
ISO-160
ISO-160
ISO-160
ISO-200
ISO-200
ISO-200
ISO-200
ISO-250
ISO-250
ISO-250
ISO-250
ISO-250
ISO-63
ISO-63
ISO-80
ISO-63
ISO-80
ISO-100
ISO-63
ISO-80
ISO-100
ISO-160
ISO-63
ISO-80
ISO-100
ISO-160
ISO-200
2.50
2.50
3.00
2.50
3.00
4.00
2.50
3.00
4.00
6.00
2.50
3.00
4.00
6.00
8.00
Price
ISO Conical Reducer Nipples

1
Model
Number
Flange 1
Type Tube OD
Flange 2
Type Tube OD
2NRC-ISO-80-63-OF
2NRC-ISO-100-63-OF
2NRC-ISO-100-80-OF
ISO-80
ISO-100
ISO-100
ISO-63
ISO-63
ISO-80
3.00
4.00
4.00
2.50
2.50
3.00
Price
4.12
4.12
4.12
ISO 45 Elbows with Tangents

B
Model
Number
2KL-ISO-63-OF
2KL-ISO-80-OF
2KL-ISO-100-OF
Tube
OD
2.50
3.00
4.00
3.25
3.93
5.03
Price
Dimsensions in inches
ISO-LIT 11/02
ISO FITTINGS
ISO 90 Mitered Elbows
Model
Number
Tube
OD
2E-ISO-63-OF-M
2E-ISO-80-OF-M
2E-ISO-100-OF-M
2E-ISO-160-OF-M
2E-ISO-200-OF-M
2E-ISO-250-OF-M
2.50
3.00
4.00
6.00
8.00
10.00
Price
3.25
3.50
4.13
5.38
7.38
9.88
ISO 90 Radius Elbows

Model
Number
2E-ISO-63-OF
2E-ISO-80-OF
2E-ISO-100-OF
2E-ISO-160-OF
2E-ISO-200-OF
2E-ISO-250-OF
Tube
OD
2.50
3.00
4.00
6.00
8.00
10.00
4.00
4.75
6.25
9.38
12.38
15.38
Price
3.75
4.50
6.00
9.00
12.00
15.00
B
R
ISO Tees
Model
Number
3T-ISO-63-OF
3T-ISO-80-OF
3T-ISO-100-OF
3T-ISO-160-OF
3T-ISO-200-OF
3T-ISO-250-OF
Tube
OD
2.50
3.00
4.00
6.00
8.00
10.00
Price
3.25
3.50
4.13
5.38
7.38
9.88
B Typ
ISO Reducer Tees

Model
Number
Flange 1 & 2
Type
Arm OD
Flange 3
Type
Leg OD
3TR-ISO-80-63-OF
3TR-ISO-100-63-OF
3TR-ISO-100-80-OF
3TR-ISO-160-63-OF
3TR-ISO-160-80-OF
3TR-ISO-160-100-OF
3TR-ISO-200-63-OF
3TR-ISO-200-80-OF
3TR-ISO-200-100-OF
3TR-ISO-200-160-OF
ISO-80
ISO-100
ISO-100
ISO-160
ISO-160
ISO-160
ISO-200
ISO-200
ISO-200
ISO-200
ISO-63
ISO-63
ISO-80
ISO-63
ISO-80
ISO-100
ISO-63
ISO-80
ISO-100
ISO-160
3.00
4.00
4.00
6.00
6.00
6.00
8.00
8.00
8.00
8.00
2.50
2.50
3.00
2.50
3.00
4.00
2.50
3.00
4.00
6.00
3.50
4.13
4.13
5.38
5.38
5.38
7.38
7.38
7.38
7.38
3.50
4.00
4.00
5.00
5.00
5.13
6.00
6.00
6.13
6.38
Price
2
K
3
B Typ
ISO-LIT 11/02
ISO FITTINGS
ISO 4-Way Crosses
Model
Number
B
Typ
Tube
OD
4C-ISO-63-OF
4C-ISO-80-OF
4C-ISO-100-OF
4C-ISO-160-OF
4C-ISO-200-OF
4C-ISO-250-OF
2.50
3.00
4.00
6.00
8.00
10.00
Price
3.25
3.50
4.13
5.38
7.38
9.88
B Typ
ISO Reducer Crosses

3
K
Typ
B Typ
Model
Number
Flanges 1 & 2
Type
Arm OD
Flanges 3 & 4
Type Leg OD
4CR-ISO-80-63-OF
4CR-IS0-100-63-OF
4CR-ISO-100-80-OF
4CR-ISO-160-63-OF
4CR-ISO-160-80-OF
4CR-ISO-160-100-OF
4CR-ISO-200-160-OF
ISO-80
ISO-100
ISO-100
IS0-160
ISO-160
ISO-160
ISO-200
ISO-63
IS0-63
IS0-80
ISO-63
ISO-80
ISO-100
ISO-160
3.00
4.00
4.00
6.00
6.00
6.00
8.00
2.50
2.50
3.00
2.50
3.00
4.00
6.00
3.50
4.13
4.13
5.38
5.38
5.38
7.38
3.50
4.00
4.00
5.00
5.00
5.13
6.38
Price
ISO 5-Way Crosses

5th Leg Opposite
Model
Number
B
Typ
5C-ISO-63-OF
5C-ISO-80-OF
5C-ISO-100-OF
5C-ISO-160-OF
5C-ISO-200-OF
5C-ISO-250-OF
Tube
OD
2.50
3.00
4.00
6.00
8.00
10.00
Price
3.25
3.50
4.13
5.38
7.38
9.88
B Typ
ISO-LIT 11/02
ISO FITTINGS
ISO 6-Way Crosses
6th Leg Opposite
Model
Number
Tube
OD
6C-ISO-63-OF
6C-ISO-80-OF
6C-ISO-100-OF
6C-ISO-160-OF
6C-ISO-200-OF
6C-ISO-250-OF
2.50
3.00
4.00
6.00
8.00
10.00
3.25
3.50
4.13
5.38
7.38
9.88
Price
B
Typ
B Typ
ISO Flex Couplings

Model
Number
Flange
Type
Bellows
ID
Free
Length
Compressed
Length
2FC-ISO-250-4
2FC-ISO-300-4
2FC-ISO-400-4
2FC-ISO-600-4
2FC-ISO-800-4
2FC-ISO-1000-10
ISO-63
ISO-80
ISO-100
ISO-160
ISO-200
ISO-250
2.50
3.00
4.00
6.00
8.00
10.00
7.00
7.00
7.00
7.00
7.00
13.50
6.00
6.00
6.00
6.00
6.00
10.50
Price
Free Length
321 Stainless Steel Flex Coupling
ISO Viewports - 7056 Glass

Model
Number
Flange
Type
View Diameter
V
ZV-ISO-63-OF
ZV-ISO-80-OF
ZV-ISO-100-OF
ZV-ISO-160-OF
ZV-ISO-200-OF
ISO-63
ISO-80
ISO-100
ISO-160
ISO-200
1.49
1.49
2.66
3.97
5.60
Price
ISO-LIT 11/02
ISO ADAPTERS
Nor-Cal offers a full line of adapter nipples and conical adapter nipples with ISO flanges. Other flange sizes and combinations are available upon request. They are made from select grade 304 stainless steel to provide the maximum in cleanliness for UHV applications.
Also see CF and Wire Seal and ASA catalogs for other adapter combinations.
ISO Glass Adapters - 7052 Glass / Kovar
Model
Number
Flange
Type
1GA-ISO-63-OF-K
1GA-ISO-80-OF-K
1GA-ISO-100-OF-K
1GA-ISO-160-OF-K
ISO-63
ISO-80
ISO-100
ISO-160
7.36
7.36
10.25
10.88
2.50
3.00
4.00
6.00
Price
ISO Glass Adapters - 7740 Pyrex / Stainless Steel

C
Model
Number
Flange
Type
1GA-ISO-63-OF-P
1GA-ISO-80-OF-P
1GA-ISO-100-OF-P
1GA-ISO-160-OF-P
ISO-63
ISO-80
ISO-100
ISO-160
5.50
6.50
6.50
8.63
2.50
3.00
4.00
6.00
Price
ISO to CF Conical Adapter Nipples
Model
Number
Flange 1
Type
Tube OD
Flange 2
Type
Tube OD
ANC-275-ISO-63-OF
ANC-275-ISO-80-OF
ANC-338-ISO-63-OF
ANC-338-ISO-80-OF
ANC-338-ISO-100-OF
ANC-450-ISO-80-OF
ANC-450-ISO-100-OF
ANC-462-ISO-63-OF
ANC-462-ISO-100-OF
ANC-600-ISO-63-OF
ANC-600-ISO-80-OF
2.75 CF
2.75 CF
3.38 CF
3.38 CF
3.38 CF
4.50 CF
4.50 CF
4.62 CF
4.62 CF
6.00 CF
6.00 CF
ISO-63
ISO-80
ISO-63
ISO-80
ISO-100
ISO-80
ISO-100
ISO-63
ISO-100
ISO-63
ISO-80
1.50
1.50
2.00
2.00
2.00
2.50
2.50
3.00
3.00
4.00
4.00
2.50
3.00
2.50
3.00
4.00
3.00
4.00
2.50
4.00
2.50
3.00
Price
2.83
4.08
2.85
4.10
4.10
4.25
4.25
4.16
4.16
4.31
4.31
ISO-LIT 11/02
ISO ADAPTERS
ISO to CF Adapter Nipples
Model
Number
Flange
1
Flange
2
Tube
OD
AN-450-ISO-63-OF
AN-462-ISO-80-OF
AN-600-ISO-100-OF
AN-800-ISO-160-OF
AN-1000-ISO-200-OF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
10.00 CF
ISO-63
ISO-80
ISO-100
ISO-160
ISO-200
2.50
3.00
4.00
6.00
8.00
Price
1
5.00
ISO to ASA Conical Adapter Nipples

Model
Number
Flange 1
Type Tube OD
Flange 2
Type Tube OD
ANC-ISO-63-OF-ASA-5
ANC-ISO-63-OF-ASA-6
ANC-ISO-63-OF-ASA-7.5
ANC-ISO-80-OF-ASA-5
ANC-ISO-100-OF-ASA-5
ISO-63
ISO-63
ISO-63
ISO-80
ISO-80
ISO-100
ISO-100
ASA-5
ASA-6
ASA-7.5
ASA-5
ASA-7.5
ASA-5
ASA-6
2.50
2.50
2.50
3.00
3.00
4.00
4.00
2.00
3.00
4.00
2.00
4.00
2.00
3.00

O-ring groove is required on ASA flange.
Price
2.88
4.13
4.13
4.13
4.13
4.13
4.13
ISO to ASA Adapter Nipples

Model
Number
Flange
1
AN-ISO-63-OF-ASA-11
AN-ISO-80-OF-ASA-6
AN-ISO-80-OF-ASA-11
AN-ISO-100-OF-ASA-7.5
AN-ISO-100-OF-ASA-9
AN-ISO-100-OF-ASA-11
AN-ISO-160-OF-ASA-9
ISO-63
ISO-80
ISO-80
ISO-100
ISO-100
ISO-100
ISO-160
ISO-160
ISO-200
ISO-200

O-ring groove is required on ASA flange.
Flange
2
ASA-11
ASA-6
ASA-11
ASA-7.5
ASA-9
ASA-11
ASA-9
ASA-11
ASA-11
ASA-13.5
Tube
OD
Price
2.50
3.00
3.00
4.00
4.00
4.00
6.00
6.00
8.00
8.00
5.00
ISO-LIT 11/02
ISO HOSE
Flexible stainless steel vacuum hose is available in 2.5 to 4 inch diameters with ISO flanges. Medium wall hose is available
in standard lengths of 10, 12, 18, 20, 24, 36 and 40 inches, while thick wall is available in 20 and 40 inch lengths. Non-standard
lengths can be supplied upon request. Flex hoses can be found with other flange types or with butt weld fittings in their appropriate
catalog. The flexibility and reliability of these hoses, provided by 321 stainless steel, make them ideally suited for vibration isolation
and roughing and alignment manifolds.
ISO Flexible Stainless Steel Hose - Medium Wall

Length
Nom
ID
Model
Number
Overall
Length
Flange
Type
2.5
Wall
Static Bend
Thickness Radius
FH-250-10-2ISO
FH-250-12-2ISO
FH-250-18-2ISO
FH-250-20-2ISO
FH-250-24-2ISO
FH-250-36-2ISO
FH-250-40-2ISO
10
12
18
20
24
36
40
ISO-63
ISO-63
ISO-63
ISO-63
ISO-63
ISO-63
ISO-63
.012
.012
.012
.012
.012
.012
.012
3.15
3.15
3.15
3.15
3.15
3.15
3.15
3.0
FH-300-10-2ISO
FH-300-12-2ISO
FH-300-18-2ISO
FH-300-20-2ISO
FH-300-24-2ISO
FH-300-36-2ISO
FH-300-40-2ISO
10
12
18
20
24
36
40
ISO-80
ISO-80
ISO-80
ISO-80
ISO-80
ISO-80
ISO-80
.016
.016
.016
.016
.016
.016
.016
3.82
3.82
3.82
3.82
3.82
3.82
3.82
4.0
FH-400-10-2lSO
FH-400-12-2lSO
FH-400-18-2ISO
FH-400-20-2ISO
FH-400-24-2ISO
FH-400-36-2ISO
FH-400-40-2ISO
10
12
18
20
24
36
40
ISO-100
ISO-100
ISO-100
ISO-100
ISO-100
ISO-100
ISO-100
.016
.016
.016
.016
.016
.016
.016
4.45
4.45
4.45
4.45
4.45
4.45
4.45
Price
ISO Flexible Stainless Steel Hose - Thick Wall

Length
Nom
ID
Model
Number
Overall
Length
Flange
Type
2.5
Wall
Static Bend
Thickness Radius
TH-250-20-2ISO
TH-250-40-2ISO
20
40
ISO-63
ISO-63
.020
.020
8.00
8.00
3.0
TH-300-20-2ISO
TH-300-40-2ISO
20
40
ISO-80
ISO-80
.020
.020
9.00
9.00
4.0
TH-400-20-2ISO
TH-400-40-2ISO
20
40
ISO-100
ISO-100
.020
.020
13.00
13.00
Price
ISO-LIT 11/02
NEW PRODUCTS

Thin Wall Flexible


Rings with Screens

ten to forty inches
in 3/4 to 2 inch
diameters.


NW/ISO-LIT 11/02
EVAC CHAIN CLAMPS, METAL SEALS & FLANGES

Aluminum Metal Seals
Nor-Cal Products stocks a complete line of EVAC chain clamps and aluminum metal
seals for converting elastomer seal NW (KF) and ISO flanges to UHV metal seals. They
provide a number of benefits over elastomer seals: reduced outgassing, no permeation,
no hydrocarbons, resistance to radiation and short half-life. EVAC seals are used in
high-energy physics, other UHV applications and, in some circumstances,
cryogenic applications. EVAC seals are reliable in high vibration or
temperature cycling environments. EVAC chain clamps and
tapered flanges are the standard vacuum flange for many
Japanese semiconductor equipment manufacturers.
The advantages over using the standard ISO flange are the
time and space savings during assembly and the flexibility
to form high vacuum or UHV seals.
To install a metal seal on an existing KF flange, simply remove the standard clamp, centering ring
and O-ring assembly. Replace them with an aluminum knife edge seal and chain clamp. (See
drawing.) Standard ISO claw clamps can be used with EVAC aluminum seals to convert ISO
flanges from high vacuum to UHV. Nor-Cal is the only authorized U.S. manufacturer of EVAC tapered flanges. Tapered flanges are similar to NW flanges and are available in 80 and 100mm sizes
from stock. Chain clamps are used to form either elastomer or metal seals with tapered flanges.
Chain Clamps
Nor-Cal Products stocks chain clamps for NW (KF) and EVAC tapered flanges in two
styles: one with Teflon coated aluminum links and an uncoated version. The less expensive
uncoated version is the preferred choice for sealing standard KF flanges with aluminum metal
seals. The uncoated chain clamps can be used with Nor-Cal or other manufacturers KF
flanges with a radius of approximately .060 inches on the outer edge of
the non-sealing side. (See drawing.) Most manufacturers KF flanges
have this feature. If the flanges to be sealed have a sharp edge, the
Radius
.060
Teflon coated chain clamps are required to ensure adequate sealing
force for aluminum metal seals. Both versions use a single, hex head
nut for closure. Stainless steel chain clamps and low cost composite
chain clamps are available for elastomer KF connections.
Chain clamps for NW-63 flanges are similar to the NW-16 to 50 sizes. The style to use with
NW-63 elastomer seals has a single knob for tightening. The clamp used for sealing
aluminum metal seals has a single hex head nut. Both have uncoated aluminum links,
although Teflon coated aluminum versions are available.
Chain clamps for 80 to 100mm tapered flanges are stocked in two styles: one with a single
knob for elastomer seals and another with two Allen head bolts for aluminum metal seals.
Although chain clamps are bakeable to 1500C, the knobs should not be baked above 600C.
Chain clamps for tube sizes up to 28 inches OD can be supplied on request.
Stocked EVAC aluminum seals locate on the

centering ring groove (inner centering) or
outside edge of the flange (outer centering)
depending on the size. (Inner and outer
centering versions are available for all NW
flange sizes.) Aluminum knife-edges are
compressed by the sealing surfaces of the
mating flanges when the chain clamp or ISO
claw clamp is tightened. The resultant seal
has a helium leak rate of less than 1x10-11
standard cc/sec. and can be baked repeatedly
to 1500C. Proper sealing occurs even if the
flanges are slightly scratched or misaligned.
The aluminum alloy is soft enough to make
a good seal with reasonable force but will
not flow at moderate temperatures. EVAC
seals will even work with aluminum flanges.
Normally the seals are for one-time use,
however, by sealing the first time with a low
torque and increasing the torque each time
thereafter, they can be reused up to five times.
If the seal is going to be baked or subject to
vibration or pressure, it should be tightened
to the recommended torque initially.
NW-63 Flanges
Nor-Cal Products stocks blank and bored
NW-63 flanges that are compatible with other
manufacturers KF-63 flanges made to the
ISO 2861 specification. They can be used
with EVAC chain clamps to form elastomer or
aluminum metal seals. Elastomer seals are
formed with ISO-63 centering ring/O-ring
assemblies and elastomer EVAC chain
clamps. Metal seals are formed with EVAC
aluminum seals and metal seal chain clamps.
NW-63 flanges are made from 304 stainless
steel for 2.5 inch OD tube size.
Tapered Flanges
Nor-Cal Products is the only authorized
U.S. manufacturer of EVAC tapered flanges.
These flanges are designed specifically for
use with EVAC chain clamps for elastomer
or aluminum metal seals. High vacuum
seals are formed with a standard ISO centering ring/O- ring assembly and an elastomer
seal EVAC chain clamp. UHV seals are
formed with a metal seal chain clamp and
an aluminum seal. Both blank and bored
304 stainless steel versions are available
from stock in 80 and 100mm sizes for 3 and
4 inch OD tube sizes, respectively. Flanges
for tube sizes up to 28 inches OD or metric
tube sizes can be supplied upon request.
NW/ISO-LIT 11/02

NW-16, 25, & 40-MS-A
.276
.175/.157
A
B
Aluminum Metal Seals for NW Flanges
Model
Number
Application
NW-16-MS-A
NW-25-MS-A
NW-40-MS-A
NW-50-MS-A
NW-63-MS-A
NW-16 Flange
NW-25 Flange
NW-40 Flange
NW-50 Flange
NW-63 Flange
1.18
1.58
2.16
..-
0.63
0.96
1.58
1.97
2.68
...2.05
2.76
0.91
1.30
1.89
2.32
3.03
NW-50 & 63-MS-A
Price
.173/.157
.276
C
B
Aluminum Metal Seals for EVAC Tapered Flanges

Model
Number
Application
NW-80-MS-A
NW-100-MS-A
NW-80 Tapered Flange

NW-100 Tapered Flange
4.49
5.28
4.25
5.04
.236
.098/.079
A
D
Price
Aluminum Metal Seals for ISO Flanges

Model
Number
Application
ISO-63-MS-A
ISO-80-MS-A
ISO-100-MS-A
ISO-63 Flange
ISO-80 Flange
ISO-100 Flange
.177/.157
Torque
(lb. in.)
Number
Clamps*
3.74
4.33
5.12
3.47
4.06
4.84
100
100
100
4
6
8
* Use with Nor-Cal ISO double or single claw clamps.
A
D
Price
NW-63 Flanges
Part Number
NW-63-250
NW-63B
.276
Blank
Description
Bored for 2.5 tube OD

Blank
3.43
3.43
B
2.44
.-
C
2.76
2.76
D
2.51
.-
.200
Price
C
B
2.71
.-
.250
.470
D
E
A
Bored
EVAC Tapered Flanges
Blank
Part Number
Description
NW-80-300
NW-80B
NW-100-400
NW-100B

Blank
Blank
4.49
4.49
5.28
5.28
2.87
.3.87
.-
3.27
3.27
4.02
4.02
3.01
.4.01
.-
3.82
.4.61
.-
Price
.453
C
B
.590
.787
D
E
A
Bored
NW/ISO-LIT 11/02

NW-63-CC-AN
NW-16 through -50-CC-AN
NW-16 through -50-CC-TN
A
B
.787
Chain Clamps for NW-16 to 50 Flanges - Aluminum Links

Model
Number
Application
NW-16-CC-AN
NW-25-CC-AN
NW-40-CC-AN
NW-50-CC-AN
Metal or Elastomer Seals

Max.
Torque (lb. in.)
B Temp. Elastomer / Metal Price
A
4.53
4.92
5.32
5.98
2.36
2.76
3.35
4.13
1500C
1500C
1500C
1500C
9 / 22
13 / 26
18 / 39
22 / 44
Chain Clamps for NW-16 to 50 Flanges - TeflonCoated Links*
.157
NW-63-CCV-AN
A
B
.787
Model
Number
Application
NW-16-CC-TN
NW-25-CC-TN
NW-40-CC-TN
NW-50-CC-TN
No radius, metal/elastomer
Max.
Torque (lb. in.)
B Temp. Elastomer / Metal Price
A
4.53
4.92
5.32
5.98
2.36
2.76
3.35
4.13
1500C
1500C
1500C
1500C
*Not Radiation Resistant
9 / 22
13 / 26
18 / 39
22 / 44
Chain Clamps for NW-63 Flanges

Model
Number
.157
Application
NW-63-CCV-AN Elastomer Seals only

NW-63-CC-AN Metal or Elastomer Seals
Max.
Bakeout
1000C
1500C
6.69 4.72
6.30 4.72
Torque (lb. in.)

Elastomer / Metal Price
.22 / 44
Chain Clamps for 80 and 100mm Tapered Flanges

Model
Number
NW-80-CCV-AS
NW-80-CC-TS
NW-100-CCV-AS
NW-100-CC-TS
Application
Elastomer Seals only
Metal Seals only
Elastomer Seals only
Metal Seals only
.
Max.
B Bakeout
A
.
9.61
10.08
-
6.06
6.30
6.77
7.09
Torque
(lb. in.)
150 C
1500C
1500C
1500C
Price
.75
88
1.50
1.50
NW-80-CC-TS
NW-100-CC-TS
200
200
NW-80-CCV-AS
NW-100-CCV-AS
B
NW/ISO-LIT 11/02
NEW PRODUCTS
Larger Radius Elbow Weld Fittings
Nor-Cal offers 45 and 90 Radius Elbows in sizes up to ten inches OD. Radius
elbows offer the highest conductance geometry in a tube bend. These elbows are also
listed in their appropriate catalog as weld fittings or with CF or ISO flanges.
Conical Reducer Nipples

These reducers provide a compact means of reducing to a smaller flange and tube size in
a short distance with minimal loss in conductance. They are also listed in the appropriate
catalog as weld fittings or with CF and ISO flanges.
Conical Adapter Nipples

The same fittings used as a reducer can be ordered as a standard product to adapt an
ASA flange to a CF, ISO or NW flange with minimal loss in conductance. These adapters
are also available with other flange combinations in their appropriate catalog.
ASA-LIT 11/01
ASA FLANGE SYSTEM

Rotatable ASA Flange
Non-rotatable ASA Flange with O-ring groove
Insert
O-ring
Receiver
General Information
Rotatable Flange Option
O-Ring Groove Option
Nor-Cals ASA flanges are manufactured

from specially treated 304 stainless steel.
These flanges mate with standard 150 lb.
ASA flanges or 150 ANSI flanges. They
are available from stock for standard tube
sizes from two to 12 inches. Larger sizes
are available upon request. Nuts and bolts
are used to apply pressure between the
mating flanges and a seal is effected
when a Viton-A O-ring is compressed.
ASA flanges can be baked to 204C
and have a vacuum range of up to 10-8
Torr. Besides being sold separately,
they are available as standards on
nipples, adapters, tees, crosses,
traps, elbows and valves.
Only Nor-Cal offers ASA flanges in rotatable as well as non-rotatable versions.

When components of several systems
are used interchangeably, use of rotatable
flanges is recommended. Assembly is
facilitated by rotation of mating flanges,
to align bolt holes. Non-rotatable ASA
flanges, unlike rotatable, contain both
sealing surface and bolt holes in one
unit rather than two. This makes the
non-rotatable flange less expensive,
and therefore the preferred choice when
mating component orientation is not a
concern. All fittings are priced with
non-rotatable flanges. For fittings with
rotatable flanges, add the difference
between a non-rotatable and rotatable
flange of the desired size. Multiply
by the number of rotatable flanges
required. Be sure to specify
the flange numbers which
are rotatable.
One of each pair of mating ASA flanges

requires an O-ring groove. When ordering
flanges with grooves indicate this by adding -G to the flange model number.
An example would be a rotatable ASA-11
flange bored out for six inch OD tubing
with a groove. The model number would
be ASA-11-600R-G. The same rule applies
when ordering a fitting or adapter flange
with only one ASA flange. An example
would be adapter flange model number
ASA-6-338-200Z-G. When a fitting has
more than one ASA flange, such as a
four-way cross, indicate which flanges
are desired with grooves by using the
flange numbers on the drawing. If, for
example, you desired a cross with
ASA-9 flanges and a six inch tube
OD with grooved flanges on the left
and bottom ports, the model number
would be 4C-ASA-9-600-G1-G3. Add
the appropriate amount for each O-ring
groove to the price of the fitting. Some
rotatable flange sizes are not available
with O-ring grooves.
ASA-LIT 11/01
ASA FLANGES
ASA Non-Rotatable Flanges
Refer to drawings on facing page for dimensional references.
Type
Description
ASA-5
(1.5 ANSI)
Non-rotatable
ASA-6
(2.0 ANSI)
Non-rotatable
ASA-7.5
(3.0 ANSI)
ASA-9
(4.0 ANSI)
Non-rotatable
Non-rotatable
ASA-11
(6.0 ANSI)
Non-rotatable
ASA-13.5
(8.0 ANSI)
Non-rotatable
ASA-16
(10.0 ANSI)
Non-rotatable
Part
Number
ASA-5-000N
ASA-5-200N
ASA-5-250N
ASA-6-000N
ASA-6-300N
ASA-6-350N
ASA-7.5-000N
ASA-7 .5-400N
ASA-9-000N
ASA-9-400N
ASA-9-600N
ASA-11-000N
ASA-11-600N
ASA-11-800N
ASA-13.5-000N
ASA-13.5-800N
ASA-13.5-1000N
ASA-16-000N
ASA-16-1000N
ASA-16-1200N
5.00
5.00
5.00
6.00
6.00
6.00
7.50
7.50
9.00
9.00
9.00
11.00
11.00
11.00
13.50
13.50
13.50
16.00
16.00
16.00
.500
.500
.500
.500
.500
.500
.500
.500
.500
.500
.500
.750
.750
.750
.750
.750
.750
.750
.750
.750
Blank
2.010
2.510
Blank
3.010
3.510
Blank
4.010
Blank
4.010
6.020
Blank
6.020
8.020
Blank
8.020
10.030
Blank
10.030
12.030
1.938
2.438
2.938
3.438
3.910
3.910
5.875
5.875
7.875
7.875
9.875
9.875
11.875
.250
.250
250
.250
.250
.250
.250
.375
.375
.375
.375
.375
.375
3.880
3.880
3.880
4.750
4.750
4.750
6.000
6.000
7.500
7.500
7.500
9.500
9.500
9.500
11.750
11.750
11.750
14.250
14.250
14.250
Bolt Holes
No. Size
4
4
4
4
4
4
4
4
8
8
8
8
8
8
8
8
8
12
12
12
Add suffix -G to model number if O-ring groove is required.
Add for Each

O-Ring Groove
.625
.625
.625
.750
.750
.750
.750
.750
.750
.750
.750
.812
.812
.812
.812
.812
.812
.812
.812
.812
Non-rotatable Blank with O-ring Groove
Non-rotatable Blank
A
F
A
F
Non-rotatable Bored with O-ring Groove
Non-rotatable Bored
A
A
F
B
E
Price
D
C
D
C
ASA-LIT 11/01
ASA FLANGES & HARDWARE

ASA Rotatable Flanges
Refer to drawings on facing page for dimensional references.
Type
Description
ASA-5
(1.5 ANSI)
Rotatable
ASA-6
(2.0 ANSI)
Part
Number
Bolt Holes
No. Size
ASA-5-000R
ASA-5-200R
ASA-5-250R
5.00
5.00
5.00
.500
.500
.500
Blank
2.010
2.510
1.938
2.438
.250
.250
3.880
3.880
3.880
4
4
4
.625
.625
.625
Rotatable
ASA-6-000R
ASA-6-300R
ASA-6-350R
6.00
6.00
6.00
.612
.612
.612
Blank
3.010
3.510
2.938
3.438
.250
.250
4.750
4.750
4.750
4
4
4
.750
.750
.750
ASA-7.5
(3.0 ANSI)
Rotatable
ASA-7.5-000R
ASA-7.5-400R
7.50
7.50
.612
.612
Blank
4.010
3.910
.250
6.000
6.000
4
4
.750
.750
ASA-9
(4.0 ANSI)
Rotatable
ASA-9-000R
ASA-9-400R
ASA-9-600R
9.00
9.00
9.00
.612
.612
.612
Blank
4.010
6.020
3.910
5.875
.250
.250
7.500
7.500
7.500
8
8
8
.750
.750
.750
ASA-11
(6.0 ANSI)
Rotatable
ASA-11-000R
ASA-11-600R
ASA-11-800R
11.00
11.00
11.00
.750
.750
.750
Blank
6.020
8.020
5.875
7.875
.375
.375
9.500
9.500
9.500
8
8
8
.812
.812
.812
ASA-13.5
(8.0 ANSI)
Rotatable
ASA-13.5-000R
ASA-13.5-800R
ASA-13.5-1000R
13.50
13.50
13.50
.750
.750
.750
Blank
8.020
10.030
7.875
9.875
11.750
.375 11.750
.375 11.750
8
8
8
.812
.812
.812
ASA-16
Rotatable
ASA-16-000R
ASA-16-1000R
ASA-16-1200R
16.00
16.00
16.00
.750
.750
.750
Blank
10.030
12.030
9.875
11.875
14.250
.375 14.250
.375 14.250
12
12
12
.812
.812
.812
Add suffix -G to model number if O-ring groove is required.
Add for Each

O-Ring Groove
Rotatable Blank
Rotatable Bored
A
F
A
F
B
Price
E
D
C
Rotatable Blank with O-ring Groove
Rotatable Bored with O-ring Groove
A
F
A
F
B
E
D
C
ASA-LIT 11/01
ASA FLANGE HARDWARE

ASA Flange Hardware
Size
ASA-5
ASA-6
ASA-7.5
ASA-9
ASA-11
ASA-13.5
ASA-16
Model
Number Quantity
BA-5
2-231
BA-6
2-238
BA-7.5
2-243
BA-9
2-259
BA-11
2-266
BA-13.5
2-274
BA-16
2-278
4 each
1 each
4 each
1 each
4 each
1 each
8 each
1 each
8 each
1 each
8 each
1 each
12 each
1 each
Description
Price
9
Stainless steel bolts ( 16-12 x 1.5) nuts and washers

Viton O-ring
Viton O-ring
Viton O-ring
Viton O-ring
Stainless steel bolts (34-10 x 2.25) nuts and washers
Viton O-ring
Viton O-ring
Viton O-ring
ASA Flange Hardware for Gate Valves

Size
ASA-6
ASA-7.5
ASA-9
ASA-11
ASA-16
Model
Number Quantity
BA-6GV
4 each
2-238
1 each
BA-7.5GV 4 each
2-243
BA-9GV
1 each
8 each
2-259
1 each
BA-11GV 8 each
2-266
1 each
BA-16GV 12 each
2-278
1 each
Description
Price
Stainless steel bolts (38-16 x 1.0)

and reducer bushings (38 x 34)
Viton O-ring
Viton O-ring
Viton O-ring
Viton O-ring
Viton-A O-ring
ASA-LIT 11/01
ASA FITTINGS
ASA Fittings
Nor-Cal manufactures a complete line of flanged vacuum component fittings. The tube
portions are fabricated from 304 stainless steel. On request, 316 stainless steel can be
supplied. Nor-Cal makes its own elbows, and all tees and crosses are made with the pulledport technique. This allows smooth, crevice-free butt welds to provide the maximum in
cleanliness for UHV applications. Bake-out range is up to 200C. Nor-Cal fittings are also
available with CF (Conflat style), NW (ISO-KF compatible) and ISO flanges.
ASA Half Nipples
Model
Number
Flange
OD
Tube
OD
1N-ASA-5-200
1N-ASA-5-250
1N-ASA-5-250V
1N-ASA-6-300
1N-ASA-7.5-400
1N-ASA-7.5-400V
1N-ASA-9-400
1N-ASA-9-400V
1N-ASA-9-600
1N-ASA-9-600V
1N-ASA-11-600
1N-ASA-11-600V
1N-ASA-11-800
1N-ASA-13.5-800
1N-ASA-13.5-1000
1N-ASA-16-1000
1N-ASA-16-1200
5.00
5.00
5.00
6.00
7.50
7.50
9.00
9.00
9.00
9.00
11.00
11.00
11.00
13.50
13.50
16.00
16.00
2.00
2.50
2.50
3.00
4.00
4.00
4.00
4.00
6.00
6.00
6.00
6.00
8.00
8.00
10.00
10.00
12.00
3.25
3.25
4.00
3.50
4.13
5.12
4.13
5.12
5.25
6.31
5.38
6.44
7.38
7.75
9.88
9.88
9.88
Price
Note: Add suffix -G to model number if O-ring groove is required.
Add for Each

O-Ring Groove
ASA Full Nipples
Model
Number
Flange
OD
Tube
OD
2N-ASA-5-200N
2N-ASA-5-250N
2N-ASA-5-250NV
2N-ASA-6-300N
2N-ASA-7.5-400N
2N-ASA-7.5-400NV
2N-ASA-9-400N
2N-ASA-9-400NV
2N-ASA-9-600N
2N-ASA-9-600NV
2N-ASA-11-600N
2N-ASA-11-600NV
2N-ASA-11-800N
2N-ASA-13.5-800N
2N-ASA-13.5-1000N
2N-ASA-16-1000N
2N-ASA-16-1200N
5.00
5.00
5.00
6.00
7.50
7.50
9.00
9.00
9.00
9.00
11.00
11.00
11.00
13.50
13.50
16.00
16.00
2.00
2.50
2.50
3.00
4.00
4.00
4.00
4.00
6.00
6.00
6.00
6.00
8.00
8.00
10.00
10.00
12.00
Price
Add for Each

O-Ring Groove
6.50
6.50
8.00
7.00
8.26
10.24
8.26
10.24
10.50
12.62
10.76
12.88
14.76
15.50
19.76
19.76
19.76
Note: Add suffix -G if O-ring groove is required and designate

flange location by appropriate flange number; -G1, -G2.
ASA-LIT 11/01
ASA FITTINGS
ASA Reducer Nipples
Model
Number
Flange
1
Flange
2
2NR-ASA-9-5-N
2NR-ASA-9-6-N
2NR-ASA-9-7.5-N
2NR-ASA-11-5-N
2NR-ASA-11-6-N
2NR-ASA-11-7.5-N
2NR-ASA-11-9-N
2NR-ASA-13.5-5-N
2NR-ASA-13.5-6-N
2NR-ASA-13.5-7.5-N
2NR-ASA-13.5-9-N
2NR-ASA-13.5-11-N
2NR-ASA-16-5-N
2NR-ASA-16-6-N
2NR-ASA-16-7.5-N
2NR-ASA-16-9-N
2NR-ASA-16-11-N
2NR-ASA-16-13.5-N
ASA-9
ASA-9
ASA-9
ASA-11
ASA-11
ASA-11
ASA-11
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-5
ASA-6
ASA-7.5
ASA-5
ASA-6
ASA-7.5
ASA-9
ASA-5
ASA-6
ASA-7.5
ASA-9
ASA-11
ASA-5
ASA-6
ASA-7.5
ASA-9
ASA-11
ASA-13.5
Tube
OD
Price
2.00
3.00
4.00
2.00
3.00
4.00
6.00
2.00
3.00
4.00
6.00
8.00
2.00
3.00
4.00
6.00
8.00
10.00
Note: Add suffix -G if O-ring groove is required and designate flange

location by appropriate flange number -G1, -G2. See ASA flange
table for O-ring groove prices.
5.00
4.125
ASA Conical Reducer Nipples

Model
Number
Size
2NRC-ASA-6-5-N
2NRC-ASA-7.5-5-N
2NRC-ASA-7.5-6-N
ASA-6
ASA-7.5
ASA-7.5
Flange 1
Tube OD
Size
Flange 2
Tube OD
3.00
4.00
4.00
ASA-5
ASA-5
ASA-6
2.00
2.00
3.00
Note: Add suffix -G1 to model number if O-ring is required on one flange.
If groove is required on both flanges, designate by adding -G1, -G2.
See ASA flange table for O-ring groove prices.
Price
1
ASA 45 Radius Elbows with Tangents

Model
Number
2KL-ASA-5-N
2KL-ASA-6-N
2KL-ASA-7.5-N
2KL-ASA-9-N
Flange
OD
Tube
OD
5.00
6.00
7.50
9.00
2.00
3.00
4.00
4.00
2.092
3.933
5.027
5.027
Note: Add suffix -G1 to model number if O-ring is required

on one flange. If groove is required on both flanges, designate
by adding -G1, -G2.
Price
Add for Each

O-Ring Groove
B
ASA-LIT 11/01
ASA FITTINGS
ASA 90 Mitered Elbows
Model
Number
Flange
OD
Tube
OD
2E-ASA-5-200NM
2E-ASA-5-250NM
2E-ASA-5-250NMV
2E-ASA-7.5-400NMV
2E-ASA-9-400NMV
2E-ASA-9-600NM
2E-ASA-9-600NMV
2E-ASA-11-600NMV
2E-ASA-11-800NM
2E-ASA-13.5-800NM
2E-ASA-13.5-1000NM
2E-ASA-16-1000NM
5.00
5.00
5.00
7.50
9.00
9.00
9.00
11.00
11.00
13.50
13.50
16.00
2.00
2.50
2.50
4.00
4.00
6.00
6.00
6.00
8.00
8.00
10.00
10.00
3.25
3.25
4.00
5.12
5.12
5.25
6.31
6.44
7.38
7.75
9.88
9.88
Price
Note: Add suffix -G1 to model number if O-ring groove is required

on one flange. If groove is required on both flanges, designate by
adding suffix -G1, -G2.
Add for Each

O-Ring Groove
ASA 90 Radius Elbows
B
R
Model
Number
Flange
OD
Tube
OD
2E-ASA-5-N
2E-ASA-6-N
2E-ASA-9-N
2E-ASA-11-N
2E-ASA-13.5-N
2E-ASA-16-N
5.00
6.00
9.00
11.00
13.50
16.00
2.00
3.00
4.00
6.00
8.00
10.00
3.25
4.75
6.25
9.38
12.38
15.38
3.00
4.50
6.00
9.00
12.00
15.00
Note: Add suffix -G1 to model number if O-ring is required

on one flange. If groove is required on both flanges, designate
by adding -G1,-G2.
Price
Add for Each

O-Ring Groove
ASA-LIT 11/01
ASA FITTINGS
ASA Tees
Model
Number
Flange
OD
Tube
OD
3T-ASA-5-200N
3T-ASA-5-250N
3T-ASA-5-250NV
3T-ASA-7.5-400NV
3T-ASA-9-400NV
3T-ASA-9-600N
3T-ASA-9-600NV
3T-ASA-11-600NV
3T-ASA-11-800N
3T-ASA-13.5-800N
3T-ASA-13.5-1000N
3T-ASA-16-1000N
5.00
5.00
5.00
7.50
9.00
9.00
9.00
11.00
11.00
13.50
13.50
16.00
2.00
2.50
2.50
4.00
4.00
6.00
6.00
6.00
8.00
8.00
10.00
10.00
3.25
3.25
4.00
5.12
5.12
5.25
6.31
6.44
7.38
7.75
9.88
9.88
Price
Add for Each

O-Ring Groove
3
B
Note: Add suffix -G to model number if O-ring groove is required

and designate flange location by appropriate flange number.
Example: -G1, -G2 and/or -G3.
ASA 4-Way Crosses

Model
Number
Flange
OD
Tube
OD
4C-ASA-5-200N
4C-ASA-5-250N
4C-ASA-5-250NV
4C-ASA-7.5-400NV
4C-ASA-9-400NV
4C-ASA-9-600N
4C-ASA-9-600NV
4C-ASA-11-600NV
4C-ASA-11-800N
4C-ASA-13.5-800N
4C-ASA-13.5-1000N
4C-ASA-16-1000N
5.00
5.00
5.00
7.50
9.00
9.00
9.00
11.00
11.00
13.50
13.50
16.00
2.00
2.50
2.50
4.00
4.00
6.00
6.00
6.00
8.00
8.00
10.00
10.00
3.25
3.25
4.00
5.12
5.12
5.25
6.31
6.44
7.38
7.75
9.88
9.88

and designate flange location by appropriate flange number.
Example: -G1, -G2, -G3 and/or -G4.
Price
Add for Each

O-Ring Groove
3
B
ASA-LIT 11/01
ASA FITTINGS
ASA 5-Way Crosses
4
Model
Number
Flange
OD
Tube
OD
5C-ASA-5-200N
5C-ASA-5-250N
5C-ASA-5-250NV
5C-ASA-7.5-400NV
5C-ASA-9-400NV
5C-ASA-9-600N
5C-ASA-9-600NV
5C-ASA-11-600NV
5C-ASA-11-800N
5C-ASA-13.5-800N
5C-ASA-13.5-1000N
5C-ASA-16-1000N
5.00
5.00
5.00
7.50
9.00
9.00
9.00
11.00
11.00
13.50
13.50
16.00
2.00
2.50
2.50
4.00
4.00
6.00
6.00
6.00
8.00
8.00
10.00
10.00
3.25
3.25
4.00
5.12
5.12
5.25
6.31
6.44
7.38
7.75
9.88
9.88
5
1
Price

Designate flange location by appropriate flange number.
Example: -G1, -G2, -G3, -G4 and/or -G5.
Add for Each

O-Ring Groove
ASA 6-Way Crosses

6th Leg Opposite
4
5
1
3
B
Model
Number
Flange
OD
Tube
OD
6C-ASA-5-200N
6C-ASA-5-250N
6C-ASA-5-250NV
6C-ASA-7.5-400NV
6C-ASA-9-400NV
6C-ASA-9-600N
6C-ASA-9-600NV
6C-ASA-11-600NV
6C-ASA-11-800N
6C-ASA-13.5-800N
6C-ASA-13.5-1000N
6C-ASA-16-1000N
5.00
5.00
5.00
7.50
9.00
9.00
9.00
11.00
11.00
13.50
13.50
16.00
2.00
2.50
2.50
4.00
4.00
6.00
6.00
6.00
8.00
8.00
10.00
10.00
3.25
3.25
4.00
5.12
5.12
5.25
6.31
6.44
7.38
7.75
9.88
9.88
Price

Example: -G1, -G2, -G3, -G4, -G5 and/or -G6.
Add for Each

O-Ring Groove
ASA Flex Couplings
Free Length
Model
Number
Flange
OD
2FC-ASA-5-200N-3
2FC-ASA-5-250N-4
2FC-ASA-6-300N-4
2FC-ASA-7.5-400N-4
2FC-ASA-9-400N-4
2FC-ASA-9-600N-4
2FC-ASA-11-600N-4
2FC-ASA-11-800N-4
2FC-ASA-13.5-800N-4
2FC-ASA-13.5-1000N-10
2FC-ASA-16-1000N-10
2FC-ASA-16-1200N-11.8
5.00
5.00
6.00
7.50
9.00
9.00
11.00
11.00
13.50
13.50
16.00
16.00
Bellows Free Compressed

ID Length Length
Price
2.00
2.50
3.00
4.00
4.00
6.00
6.00
8.00
8.00
10.00
10.00
12.00
6.00
7.00
7.00
7.00
7.00
7.00
7.00
7.00
7.00
14.00
14.00
15.87
Add for Each

O-Ring Groove
5.25
6.00
6.00
6.00
6.00
6.00
6.00
6.00
6.00
11.00
11.00
12.87

Example: -G1 and/or -G2.
ASA-LIT 11/01
ASA ADAPTERS
ASA to CF Adapter Flanges
Model
Number
Small Flange
Detail
ASA-5-133-075Z
ASA-5-212-100Z
ASA-5-275-150Z
ASA-6-133-075Z
ASA-6-212-100Z
ASA-6-275-150Z
ASA-6-338-200Z
ASA-7.5-133-075Z
ASA-7.5-212-100Z
ASA-7.5-275-150Z
ASA-7.5-338-200Z
ASA-7.5-450-250Z
ASA-9-133-075Z
ASA-9-212-100Z
ASA-9-275-150Z
ASA-9-338-200Z
ASA-9-450-250Z
ASA-9-462-300Z
ASA-9-600-400Z
ASA-11-133-075Z
ASA-11-212-100Z
ASA-11-275-150Z
ASA-11-338-200Z
ASA-11-450-250Z
ASA-11-462-300Z
ASA-11-600-400Z
ASA-11-800-600Z
133-000NT
212-000NT
275-000NT
133-000NT
212-000NT
275-000NT
338-000NT
133-000NT
212-000NT
275-000NT
338-000NT
450-000NT
133-000NT
212-000NT
275-000NT
338-000NT
450-000NT
462-000NT
600-000NT
133-000NT
212-000NT
275-000NT
338-000NT
450-000NT
462-000NT
600-000NT
800-000NT
ASA Adapters
Large Flange
Detail
ASA-5-000N
ASA-5-000N
ASA-5-000N
ASA-6-000N
ASA-6-000N
ASA-6-000N
ASA-6-000N
ASA-7.5-000N
ASA-7.5-000N
ASA-7.5-000N
ASA-7.5-000N
ASA-7.5-000N
ASA-9-000N
ASA-9-000N
ASA-9-000N
ASA-9-000N
ASA-9-000N
ASA-9-000N
ASA-9-000N
ASA-11-000N
ASA-11-000N
ASA-11-000N
ASA-11-000N
ASA-11-000N
ASA-11-000N
ASA-11-000N
ASA-11-000N
Note: Add suffix -G to model number if O-ring is required

on ASA mating side. See ASA flange table for groove prices.
.62
1.00
1.50
.62
1.00
1.50
2.00
.62
1.00
1.50
2.00
2.50
.62
1.00
1.50
2.00
2.50
3.00
4.00
.62
1.00
1.50
2.00
2.50
3.00
4.00
6.00
.50
.50
.50
.50
.50
.50
.75
.50
.50
.50
.75
.75
.50
.50
.50
.75
.75
.75
.75
.75
.75
.75
.75
.75
.75
.75
.75
Price
Nor-Cal offers a full line of adapter

flanges, adapter nipples and conical
adapter nipples. Other flange sizes and
combinations are available upon request.
They are made from select grade 304
stainless steel to provide the maximum
in cleanliness for UHV applications.
Also see CF/Wire Seal and NW/ISO
catalogs for other adapter combinations.
Large
Flange Detail
B
D
Small
Flange Detail
ASA-LIT 11/01
ASA ADAPTERS
ASA to CF Adapter Nipples
Non-rotatable
Rotatable
5.00
Model
Number
Flange Types
Flange 1
Flange 2
AN-133-ASA-5
AN-133-ASA-6
AN-212-ASA-6
AN-462-ASA-6
AN-133-ASA-7.5
AN-212-ASA-7.5
AN-275-ASA-7.5
AN-133-ASA-9
AN-212-ASA-9
AN-275-ASA-9
AN-338-ASA-9
AN-450-ASA-9
AN-462-ASA-9
AN-600-ASA-9
AN-133-ASA-11
AN-212-ASA-11
AN-275-ASA-11
AN-338-ASA-11
AN-450-ASA-11
AN-462-ASA-11
AN-600-ASA-11
AN-800-ASA-11
AN-133-ASA-13.5
AN-212-ASA-13.5
AN-275-ASA-13.5
AN-338-ASA-13.5
AN-450-ASA-13.5
AN-462-ASA-13.5
AN-600-ASA-13.5
AN-800-ASA-13.5
AN-1000-ASA-13.5
AN-133-ASA-16
AN-212-ASA-16
AN-275-ASA-16
AN-338-ASA-16
AN-450-ASA-16
AN-462-ASA-16
AN-600-ASA-16
AN-800-ASA-16
AN-1000-ASA-16
AN-1325-ASA-16
1.33 CF
1.33 CF
2.12 CF
4.62 CF
1.33 CF
2.12 CF
2.75 CF
1.33 CF
2.12 CF
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
1.33 CF
2.12 CF
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
1.33 CF
2.12 CF
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
10.00 CF
1.33 CF
2.12 CF
2.75 CF
3.38 CF
4.50 CF
4.62 CF
6.00 CF
8.00 CF
10.00 CF
13.25 CF
ASA-5
ASA-6
ASA-6
ASA-6
ASA-7.5
ASA-7.5
ASA-7.5
ASA-9
ASA-9
ASA-9
ASA-9
ASA-9
ASA-9
ASA-9
ASA-11
ASA-11
ASA-11
ASA-11
ASA-11
ASA-11
ASA-11
ASA-11
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-13.5
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16
ASA-16

on ASA Flange. See ASA flanges table for groove prices.
Tube
OD
Price
.75
.75
1.00
3.00
.75
1.00
1.50
.75
1.00
1.50
2.00
2.50
3.00
4.00
.75
1.00
1.50
2.00
2.50
3.00
4.00
6.00
.75
1.00
1.50
2.00
2.50
3.00
4.00
6.00
8.00
.75
1.00
1.50
2.00
2.50
3.00
4.00
6.00
8.00
10.00
ASA-LIT 11/01
ASA ADAPTERS
ASA to CF Conical Adapter Nipples
Model
Number
ANC-212-ASA-5
ANC-275-ASA-5
ANC-275-ASA-6
ANC-338-ASA-5
ANC-338-ASA-6
ANC-338-ASA-7.5
ANC-450-ASA-5
ANC-450-ASA-6
ANC-450-ASA-7.5
ANC-462-ASA-5
ANC-462-ASA-7.5
ANC-600-ASA-5
ANC-600-ASA-6
Flange 1
Type
Tube OD
2.12 CF
2.75 CF
2.75 CF
3.38 CF
3.38 CF
3.38 CF
4.50 CF
4.50 CF
4.50 CF
4.62 CF
4.62 CF
6.00 CF
6.00 CF
1.00
1.50
1.50
2.00
2.00
2.00
2.50
2.50
2.50
3.00
3.00
4.00
4.00
Flange 2
Type
Tube OD
ASA-5
ASA-5
ASA-6
ASA-5
ASA-6
ASA-7.5
ASA-5
ASA-6
ASA-7.5
ASA-5
ASA-7.5
ASA-5
ASA-6
2.00
2.00
3.00
2.50
3.00
4.00
2.00
3.00
4.00
2.00
4.00
2.00
3.00
Price
2.792
2.834
4.084
2.850
4.100
4.100
3.000
4.250
4.250
4.156
4.156
4.313
4.313
Note: Add suffix -G to model number if O-ring groove

is required on ASA flange. See ASA flange table for groove prices.
Non-rotatable
Rotatable
ASA to NW Adapter Nipples

Model
Number
Flange Types
Flange 1
Flange 2
AN-NW-16-ASA-5
AN-NW-16-ASA-6
AN-NW-16-ASA-7.5
AN-NW-16-ASA-9
AN-NW-16-ASA-11
AN-NW-25-ASA-6
AN-NW-25-ASA-7.5
AN-NW-25-ASA-9
AN-NW-25-ASA-11
AN-NW-40-ASA-7.5
AN-NW-40-ASA-9
AN-NW-40-ASA-11
AN-NW-50-ASA-9
AN-NW-50-ASA-11
NW-16
NW-16
NW-16
NW-16
NW-16
NW-25
NW-25
NW-25
NW-25
NW-40
NW-40
NW-40
NW-50
NW-50
Tube
OD
ASA-5
ASA-6
ASA-7.5
ASA-9
ASA-11
ASA-6
ASA-7.5
ASA-9
ASA-11
ASA-7.5
ASA-9
ASA-11
ASA-9
ASA-11
Price
.75
.75
.75
.75
.75
1.00
1.00
1.00
1.00
1.50
1.50
1.50
2.00
2.00
2.00
Note: Add suffix -G to model number if O-ring groove is

required on ASA flange. See ASA flange table for groove prices.
ASA to NW Conical Adapter Nipples

Model
Number
Flange 1
Type Tube OD
Flange 2
Type
Tube OD
ANC-NW-25-ASA-5
ANC-NW-40-ASA-5
ANC-NW-50-ASA-5
ANC-NW-40-ASA-6
ANC-NW-50-ASA-6
ANC-NW-50-ASA-7.5
ASA-5
ASA-5
ASA-5
ASA-6
ASA-6
ASA-7.5
NW-25
NW-40
NW-50
NW-40
NW-50
NW-50
2.00
2.50
2.50
3.00
3.00
4.00
Note: Add suffix -G to model number if O-ring goove is

1.00
1.50
2.00
1.50
2.00
2.00
Price
2.775
2.775
2.775
4.025
4.025
4.025
B
ASA-LIT 11/01
ASA ADAPTERS
ASA to ISO Adapter Nipples
5.00
Model
Number
Flange Types
Flange 1
Flange 2
AN-ISO-63-OF-ASA-11
AN-ISO-80-OF-ASA-6
AN-ISO-80-OF-ASA-11
AN-ISO-100-OF-ASA-9
AN-ISO-160-OF-ASA-9
ISO-63-OF
ISO-80-OF
ISO-80-OF
ISO-100-OF
ISO-100-OF
ISO-100-OF
ISO-160-OF
ISO-160-OF
ISO-200-OF
ISO-200-OF
Tube OD
ASA-11
ASA-6
ASA-11
ASA-7.5
ASA-9
ASA-11
ASA-9
ASA-11
ASA-11
ASA-13.5
Price
2.50
3.00
3.00
4.00
4.00
4.00
6.00
6.00
8.00
8.00

required on ASA Flange. See ASA flange table for groove prices.
ASA to ISO Conical Adapter Nipples
Model
Number
Flange 1
Type
Tube OD
Flange 2
Type Tube OD
ANC-ISO-63-OF-ASA-5
ANC-ISO-63-OF-ASA-6
ANC-ISO-80-OF-ASA-5
ISO-63-OF
ISO-63-OF
ISO-63-OF
ISO-80-OF
ISO-80-OF
ISO-100-OF
ISO-100-OF
ASA-5
ASA-6
ASA-7.5
ASA-5
ASA-7.5
ASA-5
ASA-6
2.50
2.50
2.50
3.00
3.00
4.00
4.00

2.00
3.00
4.00
2.00
4.00
2.00
3.00
Price
2.875
4.125
4.125
4.125
4.125
4.125
4.125
ASA-LIT 11/01
ASA STAINLESS STEEL FLEXIBLE HOSE

ASA Flexible Stainless Steel Hose
Nom
OD
2.5
3.0
4.0
Model
Number
FH-250-12-ASA
FH-250-12-2ASA
FH-250-18-ASA
FH-250-18-2ASA
FH-250-24-ASA
FH-250-24-2ASA
FH-250-36-ASA
FH-250-36-2ASA
FH-300-12-ASA
FH-300-12-2ASA
FH-300-18-ASA
FH-300-18-2ASA
FH-300-24-ASA
FH-300-24-2ASA
FH-300-36-ASA
FH-300-36-2ASA
FH-400-12-ASA
FH-400-12-2ASA
FH-400-18-ASA
FH-400-18-2ASA
FH-400-24-ASA
FH-400-24-2ASA
FH-400-36-ASA
FH-400-36-2ASA
Length
12.0
12.0
18.0
18.0
24.0
24.0
36.0
36.0
12.0
12.0
18.0
18.0
24.0
24.0
36.0
36.0
12.0
12.0
18.0
18.0
24.0
24.0
36.0
36.0
Description
ASA-5 on one port
ASA-5 on both ports
ASA-5 on one port
ASA-5 on both ports
ASA-5 on one port
ASA-5 on both ports
ASA-5 on one port
ASA-5 on both ports
ASA-6 on one port
ASA-6 on both ports
ASA-6 on one port
ASA-6 on both ports
ASA-6 on one port
ASA-6 on both ports
ASA-6 on one port
ASA-6 on both ports
ASA-7.5 on one port
ASA-7.5 on both ports
ASA-7.5 on one port
ASA-7.5 on one port
ASA-7.5 on one port
Note: Add suffix -G1 if O-ring groove is required and designate flange
location by appropriate flange number. Example: -G1 and/or -G2.
Price
Add for Each

O-Ring Groove
Length
Stainless steel vacuum hose is available

in 2.5 to 4.0 inch diameters with ASA
flanges. Standard lengths are 12, 18, 24
and 36 inches with one non-rotatable or
one rotatable and non-rotatable flange.
Be sure to specify if O-ring grooves are
Dimensions in inches required. Non-standard lengths can be
supplied upon request. Flex hoses can be
found with other flange types or with butt
weld fittings in their appropriate catalog.
The flexibility and reliability of these hoses,
provided by 321 stainless steel, make them
ideally suited for vibration isolation and
roughing and alignment manifolds.
ASA-LIT 11/01
GENERAL INFORMATION / NEW PRODUCTS

General Information
Nor-Cal Products has manufactured
stainless steel weld fittings for nearly
forty years. We worked with the Lawrence
Livermore National Laboratory in the 60s
to develop their specification for vacuum
piping, which has become the standard in
the industry. Weld fittings are commonly
used in vacuum roughing lines on semiconductor process equipment and for
forelines and pump exhaust lines in
semiconductor subfabs.
All tees and crosses are fabricated with
the pulled-port technique and full penetration butt welds. This provides crevice-free
weld joints and the maximum in cleanliness for UHV applications. Weld fittings
are available from stock in 304 stainless
steel, and some sizes are stocked in
316L material for additional corrosion
resistance. All weld fittings are available
with various flange combinations.
See appropriate catalog.
Tube Finishes
The standard finish for all weld fittings
is now tumbled, although there are some
fittings that are not available with the
tumbled finish. These weld fittings are
bead-blasted and are designated by a "-B"
suffix on the part number. All weld fittings
can be electropolished on request.
Call for pricing.
New 316 L Weld Fittings

At the request of our customers who
require additional corrosion resistance for
downstream semiconductor applications,
we now stock a variety of weld fittings in
316L stainless steel. We have added tees,
elbows conical reducers and tubing in
the sizes most commonly requested for
forelines and pump exhaust lines.
New 45 and 90
Elbows with Tangents
We have added several 45 and 90 elbows
with tangents to match our competitors
dimensions. Look for the HW suffix for
elbows that match HPS weld fitting dimensions, for example.
WELD-LIT 6/02
BALL SOCKETS / END CAPS & REDUCERS

Ball Sockets
Model
Number
BS-50/30
BS-50/30-G
BS-75/50
BS-75/50-G
ID
Tube
OD
O-Ring
Size
2.00
2.00
3.00
3.00
1.50
1.50
2.00
2.00
1.75
1.75
2.50
2.50
2-224
2-232
Note: G suffix in model number indicates

O-ring and O-ring groove are provided.
Price
Tube
OD
ID
End Caps
Model
Number
Tube
OD
Wall
Thickness
G-2W-050
G-2W-075
G-2W-100
G-2W-150
G-2W-200
G-2W-250
G-2W-300
G-2W-400
G-2W-450
G-2W-600
G-2W-800
.50
.75
1.00
1.50
2.00
2.50
3.00
4.00
4.50
6.00
8.00
.050
.050
.060
.060
.060
.060
.074
.074
.074
.074
.074
.32
.31
.43
.56
.75
.70
.67
.48
.51
.88
.83
Note: End caps are stocked with bead blasted finish.
Price
Tube OD
End Cap Reducers

Model
Number
ECR-075-050
ECR-100-050
ECR-100-075
ECR-150-050
ECR-150-075
ECR-150-100
ECR-200-150
ECR-250-200
ECR-300-150
ECR-300-200
ECR-300-250
ECR-400-200-B
ECR-400-300-B
ECR-600-400-B
ECR-800-600-B
Tube OD
1
.75
1.00
1.00
1.50
1.50
1.50
2.00
2.50
3.00
3.00
3.00
4.00
4.00
6.00
8.00
.50
.50
.75
.50
.75
1.00
1.50
2.00
1.50
2.00
2.50
2.00
3.00
4.00
6.00
2.38
2.38
2.38
2.38
2.38
2.38
2.38
2.38
3.62
3.62
3.62
3.62
3.62
3.62
3.62
Price
WELD-LIT 6/02
CONICAL REDUCERS
Conical reducers provide a compact means of adapting to a smaller diameter tube with
minimal loss in conductance. They are available from stock in 304 stainless steel and
some sizes are stocked in 316L material for additional corrosion resistance. Conical
adapter nipples are available with various flange combinations. See appropriate catalog.
Conical Reducers
Model
Number
B-31W-100-075
B-31W-150-075
B-31W-150-100
B-31W-200-100
B-31W-200-150
B-31W-250-150
B-31W-250-200
B-31W-300-150
B-31W-300-200
B-31W-300-250
B-31W-400-150-B
B-31W-400-200
B-31W-400-250
B-31W-400-300
Tube OD
2
Wall
Thickness
1.00
1.50
1.50
2.00
2.00
2.50
2.50
3.00
3.00
3.00
4.00
4.00
4.00
4.00
.75
.75
1.00
1.00
1.50
1.50
2.00
1.50
2.00
2.50
1.50
2.00
2.50
3.00
1.38
2.38
2.38
2.38
2.38
2.38
2.38
3.62
3.62
3.62
5.25
3.62
3.62
3.62
.065
.065
.065
.065
.065
.065
.065
.065
.065
.065
.065
.065
.065
.065
Price
316L Conical Reducers

Model
Number
B-31W-200-100-316L
B-31W-200-150-316L
B-31W-300-200-316L
B-31W-400-150-316L
B-31W-400-200-316L
Tube OD
2
Wall
Thickness
2.00
2.00
3.00
4.00
4.00
1.00
1.50
2.00
1.50
2.00
2.38
2.38
3.62
5.25
3.62
.065
.065
.065
.065
.065
Price
WELD-LIT 6/02
ELBOWS
Nor-Cal Products offers 45 and 90 radius elbows in sizes up to ten inches OD and
180 return bend radius elbows in sizes up to two inches OD. Radius elbows offer the
highest conductance geometry in a tube bend. All elbows are available from stock in
304 stainless steel, and some sizes are stocked in 316L material for additional corrosion
resistance. We have added several 45 and 90 elbows with tangents to match our
competitors dimensions. Look for the HW suffix for elbows that match HPS weld fitting
dimensions, for example. Elbows are also available with various flange combinations.
See appropriate catalog.
180 Return Bend Radius Elbows

Model
Number
Tube
OD
Wall
Thickness
G-2WU-050
G-2WU-075
G-2WU-100
G-2WU-150
G-2WU-200
.50
.75
1.00
1.50
2.00
.049
.035
.065
.065
.065
.75
1.00
1.50
2.25
3.00
Price
90 Mitered Elbows
Model
Number
E-075M
E-100M
E-150M
E-150MH
E-200M
E-200MH
E-250M
E-250MV
E-300M
E-400M
E-400MV-B
E-500M-B
E-600M-B
E-600MV-B
E-800M-B
E-1000M-B
Tube
OD
.75
1.00
1.50
1.50
2.00
2.00
2.50
2.50
3.00
4.00
4.00
5.00
6.00
6.00
8.00
10.00
Wall
Thickness
.035
.065
.065
.065
.065
.065
.065
.065
.065
.083
.083
.083
.083
.083
.120
.120
1.00
1.88
2.25
2.41
3.00
2.61
3.00
3.75
3.25
3.88
4.87
4.25
5.00
6.06
7.00
9.50
Price
A
Typ.
WELD-LIT 6/02
ELBOWS
90 Radius Elbows
Model
Number
G-2WC-050
G-2WC-075
G-2WC-100
G-2WC-150
G-2WC-200
G-2WC-250
G-2WC-300
G-2WC-400
G-2WC-600-B
G-2WC-800-B
G-2WC-1000-B
Tube
OD
.50
.75
1.00
1.50
2.00
2.50
3.00
4.00
6.00
8.00
10.00
Wall
Thickness
.049
.035
.065
.065
.065
.065
.065
.083
.083
.120
.120
A
.75
1.00
1.50
2.25
3.00
3.75
4.50
6.00
9.00
12.00
15.00
Price
.75
1.00
1.50
2.25
3.00
3.75
4.50
6.00
9.00
12.00
15.00
316L 90 Radius Elbows

Model
Number
Tube
OD
Wall
Thickness
G-2WC-100-316L
G-2WC-150-316L
G-2WC-200-316L
G-2WC-250-316L
G-2WC-300-316L
G-2WC-400-316L
1.00
1.50
2.00
2.50
3.00
4.00
.065
.065
.065
.065
.065
.083
1.50
2.25
3.00
3.75
4.50
6.00
1.50
2.25
3.00
3.75
4.50
6.00
Price
90 Radius Elbows with Tangents

Model
Number
G-2WC-075H
G-2WC-100H
G-2WC-100HW
G-2WC-150H
G-2WC-150HW
G-2WC-150HL
G-2WC-200H
G-2WC-200HL
G-2WC-250H
G-2WC-300H
G-2WC-400H
Tube
OD
.75
1.00
1.00
1.50
1.50
1.50
2.00
2.00
2.50
3.00
4.00
Wall
Thickness
.035
.065
.065
.065
.065
.065
.065
.065
.065
.065
.083
1.42
1.82
2.06
2.41
2.94
4.97
4.06
5.36
5.19
6.31
8.31
1.00
1.50
1.50
2.25
2.25
2.25
3.00
3.00
3.75
4.50
6.00
Price
316L 90 Radius Elbows with Tangents

A Typ.
Model
Number
G-2WC-100H-316L
G-2WC-150H-316L
G-2WC-200H-316L
Tube
OD
1.00
1.50
2.00
Wall
Thickness
.065
.065
.065
1.82
2.41
4.06
1.50
2.25
3.00
Price
WELD-LIT 6/02
ELBOWS
45 Radius Elbows
Model
Number
G-2WK-050
G-2WK-075
G-2WK-075T
G-2WK-100
G-2WK-150
G-2WK-200
G-2WK-250
G-2WK-300
G-2WK-400
G-2WK-600-B
G-2WK-800-B
G-2WK-1000-B
Tube OD
.50
.75
.75
1.00
1.50
2.00
2.50
3.00
4.00
6.00
8.00
10.00
Wall
Thickness
.049
.035
.065
.065
.065
.065
.065
.065
.083
.083
.134
.134
Price
.75
1.00
1.13
1.50
2.25
3.00
3.75
4.50
6.00
9.00
12.00
15.00
45
R
316L 45 Radius Elbows

Model
Number
G-2WK-100-316L
G-2WK-150-316L
G-2WK-200-316L
G-2WK-250-316L
G-2WK-300-316L
G-2WK-400-316L
Tube OD
Wall
Thickness
1.00
1.50
2.00
2.50
3.00
4.00
.065
.065
.065
.065
.065
.083
1.50
2.25
3.00
3.75
4.50
6.00
Price
45 Radius Elbows with Tangents

Model
Number
Tube
OD
Wall
Thickness
G-2KL-075
G-2KL-100
G-2KL-100HW
G-2KL-150
G-2KL-150HW
G-2KL-200
G-2KL-200HW
G-2KL-250
G-2KL-300
G-2KL-400
G-2KL-400HW
.75
1.00
1.00
1.50
1.50
2.00
2.00
2.50
3.00
4.00
4.00
.035
.065
.065
.065
.065
.065
.065
.065
.065
.083
.083
.76
.97
1.19
1.53
1.63
1.84
2.31
3.00
3.68
4.78
4.81
Price
316L 45 Radius Elbows with Tangents

Model
Number
Tube
OD
Wall
Thickness
G-2KL-100-316L
G-2KL-150-316L
G-2KL-200-316L
G-2KL-300-316L
G-2KL-400-316L
1.00
1.50
2.00
3.00
4.00
.065
.065
.065
.065
.083
.97
1.53
1.84
3.68
4.77
Price
WELD-LIT 6/02
TEES
304 stainless steel tees and reducer tees are fabricated with the pulled-port technique
and full penetration butt welds. This provides crevice-free weld joints and the maximum
in cleanliness for UHV applications. Other sizes are available on request. These fittings
are also offered with various flange combinations. See appropriate catalog.
Tees
Model
Number
A
Typ.
G-7W-050
G-7W-075
G-7W-075T
G-7W-100
G-7W-150
G-7W-150H
G-7W-200
G-7W-200H
G-7W-250
G-7W-250V
G-7W-300
G-7W-400
G-7W-400V
G-7W-500-B
G-7W-600-B
G-7W-600V-B
G-7W-800-B
G-7W-1000-B
Tube
OD
Wall
Thickness
.049
.035
.065
.065
.065
.065
.065
.065
.065
.065
.065
.083
.083
.083
.083
.083
.120
.120
.75
1.00
1.88
1.88
2.25
2.41
3.00
2.61
3.00
3.75
3.25
3.88
4.87
4.25
5.00
6.06
7.00
9.50
.50
.75
.75
1.00
1.50
1.50
2.00
2.00
2.50
2.50
3.00
4.00
4.00
5.00
6.00
6.00
8.00
10.00
Price
Reducer Tees
Model
Number
1
2
M
Typ.
A
Typ.
G-7WR-100-050
G-7WR-100-075
G-7WR-150-050
G-7WR-150-075
G-7WR-150-100
G-7WR-200-050
G-7WR-200-075
G-7WR-200-100
G-7WR-250-150
G-7WR-250-200
G-7WR-300-150
G-7WR-300-200
G-7WR-300-250
G-7WR-400-150-B
G-7WR-400-200-B
G-7WR-400-250-B
G-7WR-400-300-B
G-7WR-500-400-B
G-7WR-600-150-B
G-7WR-600-200-B
G-7WR-600-250-B
G-7WR-600-400-B
G-7WR-600-500-B
G-7WR-800-600-B
Tube 1 & 2
Arm OD
1.00
1.00
1.50
1.50
1.50
2.00
2.00
2.00
2.50
2.50
3.00
3.00
3.00
4.00
4.00
4.00
4.00
5.00
6.00
6.00
6.00
6.00
6.00
8.00
Tube 3
Leg OD
.50
.75
.50
.75
1.00
.50
.75
1.00
1.50
2.00
1.50
2.00
2.50
1.50
2.00
2.50
3.00
4.00
1.50
2.00
2.50
4.00
5.00
6.00
1.88
1.88
2.25
2.25
2.25
3.00
3.00
3.00
3.00
3.00
3.25
3.25
3.25
3.88
3.88
3.88
3.88
4.25
5.00
5.00
5.00
5.00
5.00
7.00
1.00
1.12
1.25
1.38
2.13
1.50
1.63
2.38
2.75
3.25
3.00
3.50
3.25
3.50
4.00
3.75
3.75
4.38
4.50
5.00
4.75
4.88
4.75
6.00
Price
WELD-LIT 11/01
CROSSES
304 stainless steel crosses and reducer crosses are offered in a wide range of sizes
as standard products. All crosses are fabricated with the pulled-port technique and
full penetration butt welds. This provides crevice-free weld joints and the maximum
in cleanliness for UHV applications. As always, other sizes are available on request.
These fittings are offered with various flange combinations. See appropriate catalog.
4-Way Crosses
Model
Number
G-9W-050
G-9W-075
G-9W-100
G-9W-150
G-9W-150H
G-9W-200
G-9W-200H
G-9W-250
G-9W-250V
G-9W-300
G-9W-400
G-9W-400V
G-9W-500-B
G-9W-600-B
G-9W-600V-B
G-9W-800-B
G-9W-1000-B
Tube
OD
.50
.75
1.00
1.50
1.50
2.00
2.00
2.50
2.50
3.00
4.00
4.00
5.00
6.00
6.00
8.00
10.00
Wall
Thickness
.049
.035
.065
.065
.065
.065
.065
.065
.065
.065
.083
.083
.083
.083
.083
.120
.120
.75
1.00
1.88
2.25
2.41
3.00
2.61
3.00
3.75
3.25
3.88
4.87
4.25
5.00
6.06
7.00
9.50
Price
A
Typ
5-Way Crosses
Model
Number
G-10W-075
G-10W-100
G-10W-150
G-10W-200
G-10W-250
G-10W-250V
G-10W-300-B
G-10W-400-B
G-10W-400V-B
G-10W-500-B
G-10W-600-B
G-10W-600V-B
G-10W-800-B
G-10W-1000-B
Tube
OD
.75
1.00
1.50
2.00
2.50
2.50
3.00
4.00
4.00
5.00
6.00
6.00
8.00
10.00
Wall
Thickness
.035
.065
.065
.065
.065
.065
.065
.083
.083
.083
.083
.083
.120
.120
1.00
1.88
2.25
3.00
3.00
3.75
3.25
3.88
4.87
4.25
5.00
6.06
7.00
9.50
Price
A
Typ
WELD-LIT 6/02
CROSSES
6-Way Crosses
Model
Number
A
Typ.
Tube
OD
G-11W-075
G-11W-100
G-11W-150
G-11W-200
G-11W-250
G-11W-250V
G-11W-300-B
G-11W-400-B
G-11W-400V-B
G-11W-500-B
G-11W-600-B
G-11W-600V-B
G-11W-800-B
G-11W-1000-B
Wall
Thickness
.035
.065
.065
.065
.065
.065
.065
.083
.083
.083
.083
.083
.120
.120
1.00
1.88
2.25
3.00
3.00
3.75
3.25
3.88
4.87
4.25
5.00
6.06
7.00
9.50
.75
1.00
1.50
2.00
2.50
2.50
3.00
4.00
4.00
5.00
6.00
6.00
8.00
10.00
Price
Reducer Crosses
Model
Number
M
Typ.
A
Typ.
G-9WR-100-050
G-9WR-100-075
G-9WR-150-050
G-9WR-150-075
G-9WR-150-100
G-9WR-200-050
G-9WR-200-075
G-9WR-200-150
G-9WR-250-150
G-9WR-250-200
G-9WR-300-150
G-9WR-300-200
G-9WR-300-250
G-9WR-400-150-B
G-9WR-400-200-B
G-9WR-400-250-B
G-9WR-400-300-B
G-9WR-500-400-B
G-9WR-600-150-B
G-9WR-600-200-B
G-9WR-600-250-B
G-9WR-600-300-B
G-9WR-600-400-B
G-9WR-600-500-B
G-9WR-800-600-B
Tube 1 & 2
Arm OD
1.00
1.00
1.50
1.50
1.50
2.00
2.00
2.00
2.50
2.50
3.00
3.00
3.00
4.00
4.00
4.00
4.00
5.00
6.00
6.00
6.00
6.00
6.00
6.00
8.00
Tube 3 & 4
Leg OD
.50
.75
.50
.75
1.00
.50
.75
1.50
1.50
2.00
1.50
2.00
2.50
1.50
2.00
2.50
3.00
4.00
1.50
2.00
2.50
3.00
4.00
5.00
6.00
1.88
1.88
2.25
2.25
2.25
3.00
3.00
3.00
3.00
3.00
3.25
3.25
3.25
3.88
3.88
3.88
3.88
4.25
5.00
5.00
5.00
5.00
5.00
5.00
7.00
1.00
1.12
1.25
1.38
2.13
1.50
1.63
2.50
2.75
3.25
3.00
3.50
3.25
3.50
4.00
3.75
3.75
4.38
4.50
5.00
4.75
4.75
4.88
4.75
6.00
Price
WELD-LIT 6/02
10
STAINLESS STEEL TUBING

Nor-Cals consumption of stainless
steel tubing for its own products makes
it possible to offer 304 and 316L stainless
steel tubing lengths up to 20 feet.
304 stainless steel tubing standard finishes
are white pickled (Number 1 unpolished),
bright annealed or polished O.D. and I.D.,
depending on the size.
316L stainless steel tubing is offered
with a bright annealed finish only.
Bright annealed and polished tubing has
been pickled and passivated. Polished
tube can be described as No. 4 polished.
The surface meets ASTM A 270, and has
received a 150 grit polish on the O.D.
and 180 grit on the I.D. Special cleaning,
materials and surface finishes are
available for an additional charge.
Stainless Steel Tubing

Model
Number
Surface
Finish
SST-050
SST-075
SST-100
SST-125
SST-150
SST-162
SST-175
SST-200
SST-250
SST-300
SST-400
SST-500
SST-600
SST-800
SST-1000
SST-1200
Bright annealed
Bright annealed
Polished ID & OD
Bright annealed
Polished ID & OD
Bright annealed
Bright annealed
Polished ID & OD
Polished ID & OD
Polished ID & OD
Polished ID & OD
White pickled
White pickled
White pickled
White pickled
White pickled
Tube
OD
.50
.75
1.00
1.25
1.50
1.62
1.75
2.00
2.50
3.00
4.00
5.00
6.00
8.00
10.00
12.00
Tube
ID
Wall
Thickness
.402
.680
.870
1.120
1.370
1.490
1.630
1.870
2.370
2.870
3.834
4.834
5.834
7.760
9.760
11.760
.049
.035
.065
.065
.065
.065
.065
.065
.065
.065
.083
.083
.083
.120
.120
.120
* Cutting charge: $15.00 per piece from 1 to 10 pieces

To order specify length required in feet as follows:
SST-150-3.0, SST-400-20.0
Price per Ft.

(add cut chg.*)
316L Stainless Steel Tubing

Model
Number
Surface
Finish
Tube
OD
Tube
ID
Wall
Thickness
SST-075-316L
SST-100-316L
SST-150-316L
SST-200-316L
SST-250-316L
SST-300-316L
SST-400-316L
Bright annealed
Bright annealed
Bright annealed
Bright annealed
Bright annealed
Bright annealed
Bright annealed
.75
1.00
1.50
2.00
2.50
3.00
4.00
.680
.870
1.370
1.870
2.370
2.870
3.834
.035
.065
.065
.065
.065
.065
.083
* Cutting charge: $15.00 per piece from 1 to 10 pieces

To order specify length required in feet as follows:
SST-150-316L-3.0, SST-400-316L-20.0
Price per Ft.

(add cut chg.*)
WELD-LIT 6/02
11
FLEXIBLE STAINLESS STEEL HOSE

Flexible Stainless Steel Hose
Nom
OD
.75
Model
Number
Length
FH-075-12
FH-075-18
FH-075-24
FH-075-36
12
18
24
36
1.00
FH-100-12
FH-100-18
FH-100-24
FH-100-36
12
18
24
36
1.50
FH-150-12
FH-150-18
FH-150-24
FH-150-36
12
18
24
36
2.00
FH-200-12
FH-200-18
FH-200-24
FH-200-36
12
18
24
36
2.50
FH-250-12
FH-250-18
FH-250-24
FH-250-36
12
18
24
36
3.00
FH-300-12
FH-300-18
FH-300-24
FH-300-36
12
18
24
36
4.00
FH-400-12
FH-400-18
FH-400-24
FH-400-36
12
18
24
36
Price
Length
Stainless steel vacuum hose is available in

.75 to 4 inch diameters in standard lengths
of 12, 18, 24 and 36 inches. The flexibility
and reliability of these hoses, provided by
321 stainless steel, makes them ideally
suited for vibration isolation and roughing
and alignment manifolds.
Intermediate lengths, protective stainless
steel braiding and thick and thin walled flex
hose can be supplied upon request. Refer
to the appropriate catalog for NW, ASA, CF
and ISO flanged flex hose.
WELD-LIT 6/02
THERMAL PRODUCTS
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HC-SERIES HEATER JACKET SPECIFICATIONS

Silicone Rubber
Outer Jacket
Heater Jackets Greatly Improve

Vacuum Line Performance
Nor-Cal is Your Source for Stock Standard
and Custom Heater Jackets
Heater jackets, controllers and accessories from Nor-Cal Products
reduce build-up of semiconductor process by-products in valves
and other exhaust line components, while reducing particle
generation and system downtime.
Features
Benefits
Even heating up to 200C

Easy on, easy off with
reclosable fasteners
Tight contact fit
Silicone rubber construction
Modular heating system
UL recognized construction
Trimable materials
Integrates with standard
control consoles
Built-in insulation
1 year warranty
Fewer particles, reduced

system downtime
Improved heat transfer
minimizing cold spots
Clean room compatible
Combine standard parts
to cover custom lines
Adjustable temperatures
Snap
Fastener
Silicone Sponge Insulation
Heating Element
Silicone Rubber
Physical Specifications
Heater and jacket material is a
reinforced silicone rubber fabric
Insulation material: 1/4 inch
closed-cell silicone rubber foam.
Color: grey insulation and outer jacket, red heater
Fasteners: snap type: 1/2 inch nominal diameter metal
construction with nylon cover
Thermocouple pocket is built-in to all straight length
heaters three inches long and greater, one per heater
Self-adhesive kapton thermocouples are available for
heaters without thermocouple pockets
Nominal thickness: .35 inch (0.80 inch including snaps)
Maximum operating temperature 200C
Electrical Specifications
Watt density: 1 to 2 W/in2 typical
120 V / 240 V standard, other voltages available
Power lead wires: 4 in. #18 AWG UL 1180/CSA Teflon
insulated, rated 10A, leadwire pair encapsulated in
reinforced silicone rubber sleeving
Connectors: positive locking Amp Universal
Mate-N-Lok connector, 3 position, rated 10A.
Other connectors available on request
Heaters are interconnectable up to a 10A circuit
Thermocouple pocket is
built-in to all straight length
heaters three inch long and
greater. Shown with optional
thermocouple installed.
All trimable jackets

allow for up to one inch
of insulation to be removed.
This allows you to cover
almost any line completely.
Typical Steady State Outer Surface Temperature vs.

Internal Temperature for Silicone Rubber Heaters,
1/4 inch Insulation, 20C Ambient
Self-adhesive kapton
thermocouples are available
for heaters without
thermocouple pockets.
THERMAL-LIT 11/01
PROCESS BENEFITS & APPLICATIONS

Many semiconductor processes can benefit from heated foreline and exhaust lines.
Silicon nitride and TEOS LPCVD and aluminum or tungsten metal etch are the most
common processes requiring heated pump lines.
Silicon Nitride and TEOS LPCVD
Aluminum or Tungsten Metal Etch
For silicon nitride LPCVD, heating the line over 110C from the
process to the dry-pump can greatly reduce the amount of solids
which build up in the line. TEOS LPCVD lines should be heated
to 150C. This extends PM intervals and reduces wafer defects
in the process chamber by up to 10 times.
Preventative maintenance schedules can be extended several
times, meaning larger numbers of runs between line cleanings.
The heated foreline will no longer catch the majority of the
condensable by-products, which can sublimate in the pump.
For most applications, it is highly recommended that the drypump is protected by a foreline trap upstream from the pump
(reference 2 and 4 on chart below). Nor-Cal offers standard and
custom water-cooled and particulate foreline traps for most
semiconductor applications.
When heating lines for metal etch applications, keeping the lines
above 90C can greatly reduce the metal and salt build-up. This
minimizes wafer defects and extends preventative maintenance
schedules. For metal etch, heating both the foreline from the
process tool to the pump, and the pump exhaust line to the
scrubber will yield the best results (reference 1 on chart below).
Heating other components, such as pump mufflers, is also
beneficial and helps to reduce downtime.
Variations in process equipment, process parameters and component
temperature ratings will dictate different system solutions. Always review
equipment specifications and process parameters before determining
temperature specifications and heated line design. Failure to follow the
required specifications and parameters could result in equipment
damage or undesired process results.
Typical Variations of Foreline

and Exhaust Configurations
1
Heated foreline to pump

and heated exhaust line to
scrubber. No foreline trap
Heated foreline to foreline

trap before pump
Heated foreline to pump

and heated exhaust to
foreline trap after pump
Heated foreline to foreline trap
Refer to the Nor-Cal Foreline Traps catalog

for more information on line design.
THERMAL-LIT 11/01
DESIGNING HEATED FORELINE & EXHAUST SYSTEMS

HEATED FORELINE
Line Measurement
To achieve the maximum benefit from your Nor-Cal heating
system, 100% heated coverage is needed. To accomplish this,
measurement of the vacuum line is necessary.
For best results, please contact your Nor-Cal representative to

set up an appointment to measure your line. Use the following
guidelines to develop an approximate measurement that can be
used for component selection and control zone layout.
NOTE: To measure quickly, start at one end of the line and work
your way to the other end. Measure one component at a time.
Drawings of each component are not necessary if detailed
measurement notes are taken.
DIAMETER: Verify the diameter of your line by measuring the
circumference (distance around the outside of the tubing) of a
common straight section within the line.
4
3
2
Diameter
Circumference
1.50"
4.71"
2.00"
6.28"
3.00"
9.42"
4.00"
12.57"
STRAIGHT SECTIONS: Measure the length of a

straight section referencing the backside of the flange
or the centerline of the butt-weld joint.
45 and 90 ELBOWS: Measure the L dimension

from the backside of the flange to the centerline of
the opposing leg. Please refer to specific heater
drawings located in this product guide.
TEE: Measure the length L as shown in this guide.
Trimable Lengths
for Test Ports
and Gauges
Gate Valve Heater
Bellows Heater
MEASUREMENT & SELECTION

HC-FLG-400-ISO-3 (3X)
5.7
90
Elbow
4.0
HC-2WC-400-3
6.0 R
5.5
4
5
.25 Test
Port
45
Elbow
6.5
45 Elbow Heater
2.0
HC-400-6T-3
FLANGE: Note flange type

and measure dimensions.
HC-400-6-3
VALVES and OTHER SHAPES:

Nor-Cal has a large selection
of existing heater designs for
valves, reducers and other
miscellaneous components.
Flange Heater
14.0
24 inch Straight
Section
6.0 R
FLEXIBLE SECTIONS:
Measure the outer diameter
of the bellows and the length
as shown in the specific heater
drawings located in this product
guide. Note: the length must be
measured under compression
with full vacuum pulled. If there
is a noticeable twisting on the
flexible section, adjustment of
the line may be needed for
proper heater installation.
HC-2WK-400-3
HC-400-12T-3
2.0
11.4
THERMAL-LIT 11/01

HEATED EXHAUST LINE
Heater Jacket Selection

After measuring your system using the instructions above,
choose the heater segments you will need to cover your
exhaust line from this product guide. List the model
numbers with your notes.
Trimable heaters solve the problem of odd straight section
lengths. For example, for a 14.5 inch section, combine a 12
inch trimable and a 3 inch heater. The 12 inch heater can be
cut to a minimum of 11 inches. Cut .5 inch from the 12 inch
heater to make a 11.5 inch length. Place cut edge towards
the 3 inch heater to maximize temperature uniformity.
7
6
5
4
Zone Layout and Heater Installation

Heaters can be connected together end-to-end in
order to form a larger single circuit which then can
be controlled as one zone.
A single line may contain multiple zones, depending on the
length and the complexity. Use the following rules of thumb
when grouping sets of heaters into zones.
The maximum amperage per zone is 10 amps, or 1200 watts.
Please use the part number list to calculate the total wattage
of your heated line. Dividing by 1080 will give you the
approximate number of zones required.
Split the zones at natural break points, such as

at a flange, elbow or valve.
Each component, such as a gate valve, needs to be
controlled with a separate control circuit. This is due
to the difference in thermal mass between them and
lengths of tubing.
Temperature sensors (thermocouples) can be placed
easily in any straight heater three inches long and up.
These heaters have a built-in thermocouple pocket
for easy installation of the sensor. Self-adhesive
kapton thermocouples are available for heaters
without thermocouple pockets.
Remove labels and residual glue with methanol or
another solvent before attaching the heater jacket.
Operating the heater on a component with a label can
cause discoloration or scorching of the jacket and may
cause the label to ignite and damage the heater.
When choosing where to place the thermocouples
for each zone, start at the process tool, placing the first
thermocouple two to four feet from the outlet of the process.
The jacket should fit tightly for optimum heat transfer.
Loose areas can draw higher wattage and damage the
insulation and/or heater element. Note: Heater must
be attached to the component when in operation.
Do not immerse the heaters in water or cleaning solutions.
2 inch by 1.5 inch Conical Reducer
90 Elbow
Y Heater
Ball Valve Heater
Flange Heater
Trimable Length
36 inch Straight Section
A helpful Heater Design Worksheet is posted on our

Website at www.n-c.com. Look under Thermal Products.
THERMAL-LIT 11/01
HC-SERIES HEATER JACKETS

Straight Tube Heater Jackets - 1.5 O.D.
Model
Number
Length
"L"
HC-150-2-3
HC-150-2T-3
HC-150-3-3
HC-150-3T-3
HC-150-4-3
HC-150-4T-3
HC-150-5-3
HC-150-5T-3
HC-150-6-3
HC-150-6T-3
HC-150-12-3
HC-150-12T-3
HC-150-18-3
HC-150-24-3
HC-150-24T-3
HC-150-30-3
HC-150-36-3
HC-150-36T-3
2.00
2.00
3.00
3.00
4.00
4.00
5.00
5.00
6.00
6.00
12.00
12.00
18.00
24.00
24.00
30.00
36.00
36.00
Watts
@ 120V
14
7
22
14
29
22
36
29
43
36
85
78
128
170
163
213
255
248
Features
Price
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Tube O.D.
(Heater I.D.)

Standard heaters feature a .25 inch
wall silicone rubber sponge insulation
Trimable heaters have a one inch
cut-to-length section at one end
All heaters listed are designed for 120 volt
operation. Other voltages available
A thermocouple pocket is built-in
to all straight length heaters three
inches long or greater
Thermocouple pocket allows installation
of the temperature sensor
.50 inch silicone rubber sponge
insulation available
Model
Number
Length
"L"
HC-200-2-3
HC-200-2T-3
HC-200-3-3
HC-200-3T-3
HC-200-4-3
HC-200-4T-3
HC-200-5-3
HC-200-5T-3
HC-200-6-3
HC-200-6T-3
HC-200-7T-3
HC-200-8T-3
HC-200-9T-3
HC-200-10T-3
HC-200-11T-3
HC-200-12-3
HC-200-12T-3
HC-200-18-3
HC-200-24-3
HC-200-24T-3
HC-200-30-3
HC-200-36-3
HC-200-36T-3
2.00
2.00
3.00
3.00
4.00
4.00
5.00
5.00
6.00
6.00
7.00
8.00
9.00
10.00
11.00
12.00
12.00
18.00
24.00
24.00
30.00
36.00
36.00
Watts
@ 120V
19
10
29
19
38
29
48
38
57
47
57
68
75
85
95
114
104
170
227
217
283
340
330
Features
Price
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
THERMAL-LIT 11/01

Model
Number
Length
"L"
HC-300-2-3
HC-300-2T-3
HC-300-3-3
HC-300-3T-3
HC-300-4-3
HC-300-4T-3
HC-300-5-3
HC-300-5T-3
HC-300-6-3
HC-300-6T-3
HC-300-12-3
HC-300-12T-3
HC-300-18-3
HC-300-24-3
HC-300-24T-3
HC-300-30-3
HC-300-36-3
HC-300-36T-3
2.00
2.00
3.00
3.00
4.00
4.00
5.00
5.00
6.00
6.00
12.00
12.00
18.00
24.00
24.00
30.00
36.00
36.00
Watts
@ 120V
24
12
36
24
48
36
59
48
71
59
141
129
213
283
271
354
425
413
Features
Heater Design Worksheet

Price
Consider the following questions

when designing your heated lines.
Trimable
Trimable
What type of components will you be heating?

Do you have a sample part available for fitting?
Are drawings available?
Trimable
What is the application temperature?
Trimable
What is the maximum component temperature?
Trimable
Trimable
What is the maximum external temperature?
Trimable
What voltage will power heater?
Trimable
Will temperature need to be adjusted?

(Accuracy : +/- 10% T/S, +/- 3C T/C)

Model
Number
Length
"L"
HC-400-2-3
HC-400-2T-3
HC-400-3-3
HC-400-3T-3
HC-400-4-3
HC-400-4T-3
HC-400-5-3
HC-400-5T-3
HC-400-6-3
HC-400-6T-3
HC-400-7T-3
HC-400-8T-3
HC-400-9T-3
HC-400-10T-3
HC-400-11T-3
HC-400-12-3
HC-400-12T-3
HC-400-18-3
HC-400-24-3
HC-400-24T-3
HC-400-30-3
HC-400-36-3
HC-400-36T-3
2.00
2.00
3.00
3.00
4.00
4.00
5.00
5.00
6.00
6.00
7.00
8.00
9.00
10.00
11.00
12.00
12.00
18.00
24.00
24.00
30.00
36.00
36.00
Watts
@ 120V
32
16
48
32
63
48
79
63
95
79
95
114
130
146
157
189
173
283
377
361
472
566
550
Features
Are there any special instructions such as safety

requirements, unique environment or other issues?
Are you using thermocouples or thermostats?
If using thermocouples, what type and lead length?
Price
Trimable
Trimable
Trimable
What length power cable is required?

Do you have special power requirements?
Are there multiple temperature zones?
Cost of Ownership
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Trimable
Please calculate the following information

so we may provide you with approximate
cost of ownership for your system.
Average number of maintenance intervals per month
Average length of each maintenance session (hours)
Cost of maintenance (labor rate per hour)
Trimable
How many maintenance and operating

personnel are involved
Trimable
Cost of downtime (lost production in $$ per hour)
Cost of current replacement parts

and/or refurbishing services per month
A complete printable heater design worksheet is

located on our website under Thermal Products.
THERMAL-LIT 11/01

Standard heaters feature .25 inch silicone rubber sponge insulation
Elbow and tee heaters will fit both butt-weld and flanged style tubing elbows
.50 inch silicone rubber sponge insulation is available. Call for information
90 Radius Elbow Heater Jackets

Model
Number
HC-2WC-150-3
HC-2WC-150HW-3
HC-2WC-200-3
HC-2WC-200HW-3
HC-2WC-300-3
HC-2WC-300HW-3
HC-2WC-400-3
HC-2WC-400HW-3
Tube
O.D.
Length
"L"
Radius
"R"
Watts
@ 120V
1.5
1.5
2.0
2.0
3.0
3.0
4.0
4.0
2.00
2.68
2.75
3.81
4.00
5.81
5.50
7.81
2.25
2.25
3.00
3.00
4.50
4.50
6.00
6.00
25
36
45
65
93
141
149
217
Features
Price
With Tangent
With Tangent
With Tangent
With Tangent
45 Radius Elbow Heater Jackets

Model
Number
HC-2WK-150-3
HC-2KL-150HW-3
HC-2WK-200-3
HC-2KL-200HW-3
HC-2WK-300-3
HC-2KL-300HW-3
HC-2WK-400-3
HC-2KL-400HW-3
Tube
O.D.
Length
"L"
Radius
"R"
Watts
@ 120V
1.50
1.50
2.00
2.00
3.00
3.00
4.00
4.00
0.69
1.38
1.00
2.06
1.37
3.18
2.00
4.31
2.25
2.25
3.00
3.00
4.50
4.50
6.00
6.00
13
23
23
44
47
95
70
148
Features
Price
With Tangent
With Tangent
With Tangent
With Tangent
Tee Heater Jackets

Model
Number
Tube
O.D.
Length
"L"
Watts
@ 120V
1.50
2.00
3.00
4.00
2.00
2.75
3.00
3.63
37
69
99
140
HC-7W-150-3
HC-7W-200-3
HC-7W-300-3
HC-7W-400-3
Price
B
Tube O.D. (Heater I.D.)
Conical Heater Jackets

Model
Number
HC-200-150-3
HC-300-200-3
HC-400-200-3
HC-400-300-3
Length
"L"
Watts
@ 120V
1.50
2.00
2.00
3.00
2.00
3.00
4.00
4.00
1.38
2.42
2.63
2.60
12
24
31
36
Price
Tube O.D.
(Heater I.D.)
THERMAL-LIT 11/01
HC SERIES HEATER JACKETS & ACCESSORIES

Flange Heater Jackets
Model
Number
Flange
Type
Nominal
Tube O.D.
Watts
@120V
HC-FLG-150-NW-3
HC-FLG-200-NW-3
HC-FLG-300-ISO-3
HC-FLG-400-ISO-3
NW-40
NW-50
ISO-80
ISO-100
1.5
2.0
3.0
4.0
10
15
35
82
Price
.25 inch silicone rubber sponge insulation
For both NW flanges and ISO clamp flanges
.50 inch silicone rubber sponge insulation available
Flange Insulators
Model
Number
Flange
Type
Nominal
Tube O.D.
HI-FLG-150-NW-1
HI-FLG-200-NW-1
HI-FLG-300-ISO-1
HI-FLG-400-ISO-1
NW-40
NW-50
ISO-80
ISO-100
1.5
2.0
3.0
4.0
Price
.25 inch silicone rubber sponge insulation
For both NW flanges and ISO clamp flanges.
.50 inch silicone rubber sponge insulation available
Heater Jacket Accessories

Thermocouples and Cables*
Model
Number
Description/Features
HC-TC-PLG-K
HC-TC-K-1
HC-TC-K-8
HC-TC-K-KAP-4
HC-TC-K-KAP-8
HC-TC-CRD-K-6
HC-TC-CRD-K-10
HC-TC-CRD-K-25
K-type panel mount jack, .50 inch NPT

K-type with one foot lead and mini-connector
K-type with eight foot lead and mini-connector
K-type kapton with four foot lead and mini-connector
K-type kapton with eight foot lead and mini-connector
K-type thermocouple extension cable with connectors
Length
in Feet
Price
6
10
25
*Most items available in J-type also. Call for pricing and information
Control Cables and Accessories

Model
Number
Description/Features
HC-PLG
HC-PCRD-6
HC-PCRD-10
HC-PCRD-25
HT-CRD-6
HT-CRD-10
HC-JCRD-6
HC-JCRD-12
HC-PLG-JCRD
Termination plug for end of last heater

Power cable from temperature control console to heater
Power cable from wall plug to AMP connector
Power cable from wall plug to AMP connector
Power cable, male 3-pin. Use with HC-PLG-JCRD below
Power cable, male 3-pin. Use with HC-PLG-JCRD below
Female power receptacle, 3-pin, fits .50 NPT
Self-adhesive Kapton thermocouple
Length
in Feet
Price
6
10
25
6
10
6
12
THERMAL-LIT 11/01
HC-SERIES GAS LINE HEATER JACKETS & INSULATORS

Nor-Cals upstream gas line heaters and insulators offer quick delivery from stock for
heating gas delivery lines,such as BCL3 and WF6. They are made from silicone rubber
heater material insulated with closed cell silicone rubber sponge and feature quick ON/
OFF installation with snap closures. Heaters can be linked/daisy chained to a maximum
of 10 amps. Insulators trim-to-fit to insure 100% line coverage. UL Listed.
Optional
Heater watt density of 2.5 W/in2
Thermocouple
Meets UL94HB flammability requirements
Lead pair extends 3 inches past
Silicone Rubber
each end of the heaters
Outer Jacket
Snap
Optional thermocouples #30 AWG,
Fastener
type J, Teflon insulated
Flexible elbow heaters fit
Warning: Upstream gas line heater jackets are not designed for
any radius elbow
hazardous locations or for outdoor locations. They are not deSilicone
yyyyyy
;;;;;;
;;;;;;
yyyyyy
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Heating
Element
Silicone
Rubber
Sponge
Insulation
signed for total or partial immersion and should only be installed

on grounded metallic tubing systems or GFI protected circuit.
Upstream Gas Line Heater Jackets

Thermocouple
Option
Available
Model
Number
HC-025-2WC-1-1
HC-025-2WC-5-1
HC-025-6-1
HC-025-6-TC-1
HC-025-9-1
HC-025-9-TC-1
HC-025-12-1
HC-025-12-TC-1
HC-025-18-1
HC-025-18-TC-1
HC-025-24-1
HC-025-24-TC-1
HC-025-36-1
HC-025-36-TC-1
HC-050-6-1
HC-050-6-TC-1
HC-050-9-1
HC-050-9-TC-1
HC-050-12-1
HC-050-12-TC-1
HC-050-18-1
HC-050-18-TC-1
HC-050-24-1
HC-050-24-TC-1
HC-050-36-1
HC-050-36-TC-1
Tube
O.D.
Watts
Length @120V
.25
.25
.25
.25
.25
.25
.25
.25
.25
.25
.25
.25
.25
.25
.50
.50
.50
.50
.50
.50
.50
.50
.50
.50
.50
.50
6.0
9.0
6.0
6.0
9.0
9.0
12.0
12.0
18.0
18.0
24.0
24.0
36.0
36.0
6.0
6.0
9.0
9.0
12.0
12.0
18.0
18.0
24.0
24.0
36.0
36.0
12
18
12
12
18
18
24
24
36
36
48
48
72
72
24
24
36
36
48
48
72
72
96
96
144
144
Features
Price
Elbow w/two 1.0 tangents

Elbow w/one 5.0 tangent
Straight
Straight w/Type J Thermocouple
Straight
Straight
Straightw/Type J Thermocouple
Straight
Straight
Straight
Straight
Straight
Straight
Straight
Straight
Straight
Upstream Gas Line Insulators

Model
Number
HI-025-18T
HI-050-18T
HI-025-7W-M
HI-050-7W-M
HI-025-2WC-M
HI-050-2WC-M
Tube
O.D.
.25
.50
.25
.50
.25
.50
Length
Features
18.0
18.0
Straight
Straight
Micro-tee
Micro-tee
Micro-elbow
Micro-elbow
Price
THERMAL-LIT 11/01
HEATER CONTROLLERS
Nor-Cal is your source for temperature
controllers. Full control of the process
is available through front panel controls
including set points and alarms.
PC control is available on select
controllers using standard software
programs. Thermostat control, thermal
fuses, up-to-temperature sensors, etc.
are available on request.
1, 2, 4, 8, 16 and 32 zones standard.
Custom zoning available
100 V to 240 V Line voltage
Sensor Input for various
thermocouple types
Nema 4, 4x and 12 enclosure
Digital readout display on most models
Programmable alarm output
Timer available on select models
RS232 or RS485 serial communication
available on most multi-zone controllers
Three year warranty
UL and CSA agency approvals
HC-935 Heater Controllers
Pre-programmed controllers are available with alarms,

remote communication packages and other custom
features. (16 zone MLS controller shown)
The Effect of Temperature Excursion on Heater Life

PID Controllers result in temperature control accuracy of
2C, and extend heater element life by up to 10x.
THERMOSTAT
PID Control with SCR Burst Firing
Although the lowest cost initially, this device creates

the highest 3 year operating cost due to heater
failure caused by high temperature excursions.
The highest cost initially, this device operates at the lowest

cost over a 3 year period due to it's ability to eliminate
temperature excursions, extending heater life up to 10 times.
160C
160C
155C
155C
150C
150C
145C
145C
140C
140C
Process Set Point: 150C Overshoot: 9C Droop: 9C
HC-935 series digital indicating controllers are available with a single temperature sensor input from a thermocouple or
RTD sensor, and dual control outputs.
The outputs may operate in a variety of
modes including: heat, cool, alarm and
timer.
The timer function operates in a choice
of delay-ON, delay-OFF, signal-ON or
signal-OFF modes. Front panel lock
capability rounds out the feature set.
HC-935 controllers are available for
one, two and four zones.
Features
1/32 DIN package

NEMA 4X
Countdown timer
Programmable alarms
Universal power supply
Small panel footprint
0.25% accuracy
Worldwide flexibility
Low cost multi-zone
temperature control
Process Set Point: 150C Overshoot: 1C Droop: 1C
Heater Controllers
Model
Number
Description
HC-935A-1-1
HC-935S-1-1
HC-935A-2-1E
HC-935A-4-1E
HC-MLS2-8-1
HC-MLS2-16-1
HC-MLS2-32-1
Self-contained microprocessor-based temperature control console. LED display.

Single multi-zone controller. RS232/485 compatible. Call for specifications.
16 zone control. Call for specifications.
32 zone control. Call for specifications.
Max. Output
Watts@120V
Zones
960
1200
1900
1900
Call
Call
Call
1
1
2
4
8
16
32
Price
THERMAL-LIT 11/01
CUSTOM THERMAL COMPONENTS
Custom Components
The experience gained designing heaters for our standard products has
allowed us to provide thermal components for special applications. We
have drawn from a number of heating technologies (silicon, fiberglass,
cartridge, strip, band, tubular and thick film) in order to provide the
most cost-effective solutions. Examples include heated traps,
internal heaters for vacuum chambers, gas delivery systems, ion
pump heaters, UHV bakeout tents for vacuum chambers, Kapton
and tube heaters for heating inside the vacuum chamber and
heater jackets for specific agency compliance, i.e. CE, NEC 427,
Semi S2-93 and others.
High Temperature
Cloth Heater Jackets
Nor-Cal offers a complete line of high temperature
cloth heater jackets and insulators. Heating elements are helical wound resistive
wire on a fiberglass core. This allows the wire to expand during thermal cycling with
minimal metal fatigue. Jackets with fiberglass insulation and fiberglass based cloth
can attain temperatures up to 482C. Various types and thicknesses of insulation can
be specified to meet specific requirements. A major benefit of cloth heater jackets is
their durability and ease of removal/reinstallation for system cleaning and maintenance.
Nor-Cal cloth heater jackets are sewn for an exact fit upon the piece to be heated
or insulated. A helpful heater design worksheet is available on our
Website at www.n-c.com.
Genesis Heaters and Insulators

The unique, CE certified Genesis modular heater provides 120C or 150C internal
temperatures in valves or fittings at a fraction of the cost of a silicone heater. Genesis
heaters use thick film technology to provide uniform heat throughout the component.
Each heater contains a control set point and a resetable high temperature shut off. The
1.5 and 2.0 inch sizes also have a low temperature alert that can be connected to a
remote alarm. Each thermostat can be replaced without destroying the heater. The
same heater can be attached to a valve body or fitting with two screws. A trim-to-fit,
molded insulator covers the heated component and mating flanges. These clean room
compatible insulators are constructed of .50 inch thick molded silicone. When in use,
the exterior surface remains touch-safe. Genesis Insulators meet UL 94 V-O requirements.
Teflon is a registered trademark

of E.I. du Pont de Nemours & Company.
Amp Mate-N-Lok is a registered
trademark of the Amp Company.
UL is a registered trademark of
Underwriters Laboratories, Inc.
THERMAL-LIT 11/01

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INTRODUCTION

Manufacturing, Sales and Corporate Offices, Yreka, California

fittings, valves, foreline traps, feedthroughs,

Nor-Cal was mainly an

Research and Development, San Diego, California

Semiconductor process equipment in the service chase of a 200mm fab

Thin film deposition systems

Heated forelines and pump exhaust lines in semiconductor subfab

SALES & MARKETING

Nor-Cal Products sales representatives and

Left to Right: Per Cederstav, Senior Product Manager

Access the latest new

Left to Right: Chris Thackeray, Design Engineer;

Research & Development

Soldering Printed Circuit Boards (PCBs)

Inventor 3-D CAD model of

Chem cleaning vacuum chambers

components. This electrochemical

Electropolishing vacuum chamber

Valve assembly in Class 1000 clean room

GTAW Fusion Welding

Mechanical inspection of process chamber with Coordinate Measuring Machine (CMM)

Chamber Qualification Test Bench

parts with on-time delivery, competitive

It is our belief that quality is built into a product.

We are all participants in the creation of a quality

Building quality into Nor-Cal

Intellisys adaptive pressure controllers and throttle

Our Series II sample transfer and manipulation devices

Electrical & Liquid

Zero-length viewports are offered with fully annealed

Flanges and Weld Fittings

All standard components can be modified for your specific application.

CUSTOM PRODUCTS & SERVICES

Our valves are offered with a number of options,

Because we manufacture tees, elbows and other

Comprehensive Downstream Solutions

Foreline traps, thermal products, Intellisys pressure

ORDER INFORMATION / WARRANTY

Products manufactured by Nor-Cal Products, Inc.

Merchandise may be returned at the sole discretion

How to place an Order

Expendable items such as tubes, heaters,

The following registered

Load Lock Chamber

Nor-Cals electropolished load lock

Thin Film Coating

These components come with our strong

XYZ Precision Manipulator

CUSTOM CHAMBERS & WELDMENTS

Nor-Cal Products has earned a reputation

As an indication of commitment to quality and

Our engineers design from customer specifications, sketches

Because we manufacture tees, elbows and

Machining procedures are consistent with

UHV Research Chamber

GTAW Fusion Welding

Ultra High Vacuum

GTAW fusion welding is used exclusively for a vacuum-tight metal bond.