MICRO CERAMIC HEATER JAPAN QUALITY

Type MS−1000R MS−1000 MS−M1000 MS−M5 MS−1 MS−2 MS−3 MS−5

Product code MS−1000R MS−1000 MS−M1000 MS−M5 MS−1 MS−2 MS−3 MS−5
Dimension（±0.5） 25×25mm 25×25mm 5×5mm 5×5mm 10×20mm 25×50mm 10×10mm 25×25mm
Leads pitch （23）mm （23）mm （3）mm （3）mm （8）mm （23）mm （8）mm （23）mm
Voltage（AC） 100V 100V 10V 15V 100V 100V 40V 100V
Wattage（※1） 555W 555W 50W 15W 100W 100W 40W 100W
Watt density（※1） 89W/cm2 89W/cm2 200W/cm2 60W/cm2 50W/cm2 8W/cm2 40W/cm2 16W/cm2
Max operating 1000℃
1000℃ 1000℃ 600℃ 500℃ 500℃ 500℃ 500℃
dtemperature （by built-in thermocouple）

Rφ0.3
Built-in thermocouple − − − − − − −
（Pt−PtRh13％）

Accessories（※2） Ceramic tube − − − − − − −

※1 Measurement environment：at room temperature

※2 Accessories, ceramic tubes, are available（φ1.2×φ0.8×5L 20pcs/1case Procduct code：ALMS−1000R）

Caution
1）For thermal insulation and shock absorbing purpose, some cushioning 4）Thermal shock resistance temperature of substrate material is approxi-
material such as ceramic paper is recommended to use when the mately 200deg.C.
whole of heater body is covered with heated material while operation.
Otherwise, there is a case that the heater might be cracked and/or 5）AC（Alternating Curret）to be applied to the heater.
broken due to thermal expansion of heated material.
6）Optional：Temperature controller model No.“SCR-SHQ-A” for optimum
2）Heating up and Cooling down control.
Though the heaters are capable of rapid heating up and rapid cooling
down, gradual fluctuation of operating temperature is recommendable
for long time operation as well as for long-termed operating life.
（Recommend：ramping up 100 deg.C in one minute and cooling down
R e co mme n d a b le
200 deg.C in one minute or more） High speed
3）CAUTION in colder conditions
High precision
When heating up the heater under lower temperature than ambient, High performance
the heater resistance is decreasing and watt density will bacame higher.
This may cause breaking of the heater when applying rated voltages. SCR−SHQ−A
To prevent this kinds of accident, we recommend to start up from lower
voltages by using transformer and increase the voltage gradually.

E-mail：[email protected] 
URL：http://www.sakaguchi.com/gbp/
SN Sales Dept. Phone：+81 3 5624 5054 Fax：+81 3 5624 5043
SN営業部  TEL：03-5624-5054 FAX：03-5624-5043

For quality improvement, we reserve the right to change the product specifications and desigh stated in this brochure without prior notice. 2016-10
 R type thermocouple incorporated in the heater substrate Operating temperature maximum 1000 deg.C.
1000℃ material.
1000℃ Heating element is precisely printed on the Alumina substrate.
More precise controllability for your operation. Lead pins are incorporated with the substrate.
25mm Square 25mm Square
Built-in thermocouple

Dimensions Specifications Dimensions Specifications

Type ：MS−1000R Type ：MS−1000
+ marking of polarity Built-in thermocouple：R（Pt-PtRh）90mm
+30
Product Code ：MS−1000R +30
Product Code ：MS−1000
25±0.5 110 -0 25±0.5 110 -0
Dimension ：25mm×25mm
（±0.5） Dimension ：25mm×25mm（±0.5）
Leads pitch ：
（23）
mm Leads pitch ：（23）mm
＋
25±0.5 （7.5） （23） Voltage ：100V
（AC） 25±0.5 （23） Voltage ：100V
（AC）
Wattage ：555W±25％（at room temp.） Wattage ：555W±25％（a room temp.）
Substrate material（Alumina） 2×φ0.5Ni leads（Polyimide tube※） Watt density ：89W/cm2（at room temp.） Substrate material（Alumina） 2×φ0.5Ni leads（Polyimide tube※） Watt density ：89W/cm2（a room temp.）
（t =2.24±0.5） （t =2.24±0.5）
Flatness：less than 0.3mm
Operating temperature：1000℃（Max/by Built-in thermocouple） Flatness：less than 0.3mm
Operating temperature：1000℃（Max）
Thermocouple ：R φ0.3（Pt−PtRh13％） 1）Operating temperature must be carefully controlled by built-in thermo-
couple due to high watt density.
※Please replace polyimide tube with ceramic tube in case high temperature operation due to the ※Please replace polyimide tube with ceramic tube in case high temperature operation due to the
Accessories ：Ceramic tube φ1.2×φ0.8×5 2）Above mentioned wattage is measured at normal temperature conditions.
heat resistant temperature of polyimide tube is 300 deg.C. heat resistant temperature of polyimide tube is 300 deg.C.
1）Operating temperature must be carefully controlled by built-in thermo- The value will change along with the increase of temperature.
couple due to high watt density. Refer to below chart of resistance variation.
2）Above mentioned wattage is measured at normal temperature conditions.
The value will change along with the increase of temperature.
Refer to below chart of resistance variation.
3）Thermoelectromotive of built-in thermocouple is as per JIS C 1602.

Characteristics (for reference ) Characteristics (for reference )

Heating performance Resistance variation Heating performance Resistance variation
1100 5.0 1100 5.0
100V 100V
Resistance variation（×times）

Resistance variation（×times）
1000 1000
4.0 4.0
900 900

800 3.0 800 3.0

Temperature（℃）

Temperature（℃）

700 700
2.0 2.0
600 50V 600

500 500
1.0 1.0
400 400

300 0.0 300 0.0

0 200 400 600 800 1000 0 200 400 600 800 1000
200 Temperature（℃） 200 Temperature（℃）
100 10V 100

0 0
0 1 2 4 6 8 10 12 14 0 1 2 3 4 5 6
Time（min.） Time（min.）

【Measurement conditions】 【Measurement conditions】 Temperature sencor

▼

Heater position：in the air Center of heater on ceramic fiber. Heater

Temperature：Measured by built-in thermocouple Ceramic fiber

1 2
 Only 5mm square but operating temperature upto maximum 5mm square and oprating temperature upto maximum
1000℃ 1000 deg.C.
600℃ 600 deg.C.
Heating element is precisely printed on the Alumina substrate. Heating element is precisely printed on the Alumina substrate.
5mm Square 5mm Square
Lead pins are incorporated with the substrate. Lead pins are incorporated with the substrate.

Dimensions Specifications Dimensions Specifications

Type ：MS−M1000 Type ：MS−M5
+30 Product Code ：MS−M1000 +30 Product Code ：MS−M5
5±0.5 110 -0 5±0.5 110 -0
Dimension ：5mm×5mm
（±0.5） Dimension ：5mm×5mm（±0.5）
5±0.5 （3） 5±0.5 （3）
Leads pitch ：
（3）mm Leads pitch ：（3）mm
Substrate material（Alumina） 2×φ0.5Ni leads（Polyimide tube※） Voltage ：10V
（AC） Substrate material（Alumina） 2×φ0.5Ni leads（Polyimide tube※） Voltage ：15V
（AC）
（t =1.75±0.5） （t =1.75±0.5）
Wattage ：50W±25％
（at room temp.） Wattage ：15W±25％（a room temp.）
Flatness：less than 0.3mm Flatness：less than 0.3mm
Watt density ：200W/cm2（at room temp.） Watt density ：60W/cm2（a room temp.）
Operating temperature：1000℃
（Max） Operating temperature：600℃（Max）
1）Operating temperature must be carefully controlled by built-in thermo- 1）Operating temperature must be carefully controlled by built-in thermo-
couple due to high watt density. couple due to high watt density.
※Please replace polyimide tube with ceramic tube in case high temperature operation due to the ※Please replace polyimide tube with ceramic tube in case high temperature operation due to the
2）Above mentioned wattage is measured at normal temperature conditions. 2）Above mentioned wattage is measured at normal temperature conditions.
heat resistant temperature of polyimide tube is 300 deg.C. heat resistant temperature of polyimide tube is 300 deg.C.
The value will change along with the increase of temperature. The value will change along with the increase of temperature.
Refer to below chart of resistance variation. Refer to below chart of resistance variation.

Characteristics (for reference ) Characteristics (for reference )

Heating performance Resistance variation Heating performance Resistance variation
1100 5.0 1100 3.5
10V
Resistance variation（×times）

Resistance variation（×times）
1000 1000 3.0
4.0
900 900
2.5
800 3.0 800
Temperature（℃）

Temperature（℃）

2.0
700 700
2.0 15V 1.5
600 600
1.0
500 500
1.0
400 400 0.5

300 0.0 300 0.0

0 200 400 600 800 1000 0 100 200 300 400 500 600
200 Temperature（℃） 200 Temperature（℃）
100 100

0 0
0 1 2 3 0 0.5 1 1.5
Time（min.） Time（min.）

【Measurement conditions】 Temperature sencor

▼
【Measurement conditions】 Temperature sencor
▼

Center of heater on ceramic fiber. Heater Center of heater on ceramic fiber. Heater
Ceramic fiber Ceramic fiber
3 4
 Dim ei s ions D i m e i si on s
500℃ 20±0.5 110 -0
+30
500℃ 10±0.5 110 -0
+30

10±0.5 （8） 10±0.5 （8）

10mm×20mm Substrate material（Alumina） 2×φ0.5Ni leads（Polyimide tube※） 10mm×10mm Substrate material（Alumina） 2×φ0.5Ni leads（Polyimide tube※）
（t =1.75±0.5） （t =1.75±0.5）
Flatness：less than 0.3mm Flatness：less than 0.3mm
※Please replace polyimide tube with ceramic tube in case high temperature operation due to the ※Please replace polyimide tube with ceramic tube in case high temperature operation due to the
heat resistant temperature of polyimide tube is 300 deg.C. heat resistant temperature of polyimide tube is 300 deg.C.

S pe c ific a t io n s C har a ct eris t ics ( f or ref erence ) S p e c i fi c a ti on s Ch a ra c te ri sti c s (for re fe re n c e )

Type ：MS−1 Heating performance Resistance variation Type ：MS−3 Heating performance Resistance variation
Product code ：MS−1 600 3.0
Product code ：MS−3 600 3.0

Resistance variation（×times）

Resistance variation（×times）
Dimension ：10mm×20mm
（±0.5） 50V 2.5
Dimension ：10mm×10mm
（±0.5） 40V 2.5
500 500
2.0 2.0
Leads pitch ：（8）
mm Leads pitch ：（8）mm
Temperature（℃）

Temperature（℃）
400 1.5 400 20V 1.5
Voltage ：100V（AC） Voltage ：40V
（AC）
30V 1.0 1.0
Wattage ：100W±25％
（a room temp.） 300 Wattage ：40W±25％
（a room temp.） 300

0.5 0.5
Watt density ：50W/cm2（a room temp.） Watt density ：40W/cm2（a room temp.）
200 200
0.0 0.0
Operating temperature：500℃（Max） 0 100 200 300 400 500 Operating temperature：500℃（Max） 0 100 200 300 400 500

100 Temperature（℃） 100 Temperature（℃）

1）Operating temperature must be carefully controlled by 1）Operating temperature must be carefully controlled by
built-in thermocouple due to high watt density. built-in thermocouple due to high watt density.
2）Above mentioned wattage is measured at normal temp- 0
0 2 4 6 8 10
2）Above mentioned wattage is measured at normal temp- 0
0 2 4
erature conditions. The value will change along with the Time（min.） erature conditions. The value will change along with the Time（min.）
increase of temperature. Refer to below chart of resis- Temperature sencor increase of temperature. Refer to below chart of resis- Temperature sencor
【Measurement conditions】 ▼ 【Measurement conditions】 ▼
tance variation. Heater tance variation. Heater
Center of heater on ceramic fiber. Center of heater on ceramic fiber.
Ceramic fiber Ceramic fiber

Dim ei s ions D i m e i si on s
500℃ 50±0.5 110
+30
-0
500℃ 25±0.5 110 -0
+30

25mm×50mm 25±0.5 （23）

25mm×25mm 25±0.5 （23）

Substrate material（Alumina） 2×φ0.5Ni leads（Polyimide tube※） Substrate material（Alumina） 2×φ0.5Ni leads（Polyimide tube※）
（t =1.75±0.5） （t =1.75±0.5）
Flatness：less than 0.3mm Flatness：less than 0.3mm
※Please replace polyimide tube with ceramic tube in case high temperature operation due to the ※Please replace polyimide tube with ceramic tube in case high temperature operation due to the
heat resistant temperature of polyimide tube is 300 deg.C. heat resistant temperature of polyimide tube is 300 deg.C.

S pe c ific a t io ns C har act eris t ics ( f or ref erence ) S p e c i fi c a ti on s Ch a ra c te ri sti c s (for re fe re n c e )

Type ：MS−2 Heating performance Resistance variation Type ：MS−5 Heating performance Resistance variation
600 3.0 600 3.0
Product code ：MS−2 Product code ：MS−5
Resistance variation（×times）

Resistance variation（×times）
100V 2.5 100V 2.5
Dimension ：25mm×50mm
（±0.5） 500 Dimension ：25mm×25mm
（±0.5） 500
2.0 2.0
Leads pitch ：（23）mm Leads pitch ：（23）mm
Temperature（℃）

Temperature（℃）
400 1.5 400 1.5
Voltage ：100V（AC） Voltage ：100V
（AC）
50V 1.0 1.0
Wattage ：100W±25％
（a room temp.） 300 Wattage ：100W±25％
（a room temp.） 300
50V
0.5 0.5
Watt density ：8W/cm2（a room temp.） 200
Watt density ：16W/cm2（a room temp.） 200
0.0 0.0
Operating temperature：500℃（Max） 0 100 200 300 400 500
Operating temperature：500℃（Max） 0 100 200 300 400 500

100 Temperature（℃） 100 Temperature（℃）

1）Operating temperature must be carefully controlled by 1）Operating temperature must be carefully controlled by
built-in thermocouple due to high watt density. built-in thermocouple due to high watt density.
2）Above mentioned wattage is measured at normal temp- 0 2）Above mentioned wattage is measured at normal temp- 0
0 2 4 6 8 10 0 2 4 6 8 10
erature conditions. The value will change along with the Time（min.） erature conditions. The value will change along with the Time（min.）
Temperature sencor Temperature sencor
increase of temperature. Refer to below chart of resis- 【Measurement conditions】 ▼
increase of temperature. Refer to below chart of resis- 【Measurement conditions】 ▼
Heater Heater
tance variation. Center of heater on ceramic fiber. tance variation. Center of heater on ceramic fiber.
5 Ceramic fiber Ceramic fiber 6