«Essentials for the Best!

E
> SCHNEEBERGER Linear Technology – «Essentials for the Best!»

For years the name SCHNEEBERGER

has been synonymous with modern
linear guide technology for the tool- Roggwil, SWITZERLAND Höfen, GERMANY
and machine-building industries.

Thanks to longstanding experience

and our consistent focus on linear
technology we are in a position to offer
our customers technological and
economical benefits for all their
applications.

In accordance with our slogan

Cheb, CZECH REPUBLIC
«Essentials for the Best!», we are
oriented toward the current and
potential needs of worldwide leaders
in the industry and we bring the latest
technological trends into our R & D
work.

• SCHNEEBERGER COMPANIES
• SCHNEEBERGER SALES DEPARTMENTS
• SCHNEEBERGER REPRESENTATIVES
• SCHNEEBERGER SALES AREAS IN THE USA

> A global presence

Our global presence with strong sales and support organizations guar-
antees customer closeness in all the major industrial countries. Apart
from the obvious logistics advantages, being close to the customer
assures intensive on-the-spot support from the initial project design and
planning phase.
•1
> SCHNEEBERGER core competences

With SCHNEEBERGER you have a partner at your side

that can provide sophisticated solutions and extensive
application skills for all your motion and positioning tasks.

Applications know-how
We have gained extensive technological skills from
the many successful projects in various industries. In
cooperation with the customer we evaluate the optimum
products from our standard product range or alternatively
we will define project-specific solutions.

Development know-how
Thanks to our longstanding experience and consistent
concentration on linear technology we are in a position to
further develop our products and solutions in order to
create technological advantages for our customers. FEM
(Finite Element Method) calculations and 3D simulation
show us before the first prototypes whether the required
properties can be achieved.

Manufacturing expertise
The highly precise manufacturing of components, and
the inegration of sub-assemblies and base machines has
always been a core facet of our company. The entire
manufacturing process is subject to demanding and
application-oriented tests and controls.

> Guiding, measuring, driving

Kinematic skills from one source

The range of our standard products encompasses the entire spec-
trum to solve your motion tasks: from countless tried and tested
linear guideways, integrated measuring systems and sophisticated
space-saving modules through to multi-axis platforms for deman-
ding motion processes.

Furthermore, with our existing standard components and systems

we are in a position to offer you complete tailored solutions at
minimal development cost.

•2
 > SCHNEEBERGER products in action

Our products are being successfully used in the

most diverse applications. Here are some of the
most demanding examples:

Measuring and guiding combined

SCHNEEBERGER’s MONORAIL AMS offers a complete product
that combines the measuring and guiding functions in one unit.
Thermal deviations can be reduced because the measuring and
guiding system can be located closer to the processing work.
The benefits of the highly precise and rigid roller guidance as well
as the accuracy and robustness of the measuring system mean
that the product – in this example a grinding machine – can be
used in places where there are extreme operating conditions.

•3
Acceleration up to 300m/s2
The linear guide FORMULA-S was specially developed for applications
where exceptionally high demands are made on the guiding system,
e.g. in respect of acceleration, oscillation, vertical integration, etc. In
this application in a pick-and-place machine these product character-
istics are fully utilised. Thanks to the operation of the FORMULA-S the
occurrence of «cage creep» is fully prevented.

The «dry runner» option is also available with FORMULA-S, so that a

long lifespan in dry run is achieved.

•4
 > SCHNEEBERGER products in action

We at SCHNEEBERGER are keen to continually offer our cus-

tomers more economical and efficient products. We are therefore
ambitiously committed to the further development of products
and our product range, and are intensively involved in the improve-
ment of our manufacturing infrastructure and logistics.

More wafers per hour

Based on a high-precision and extremely stable platform, SCHNEE-
BERGER offers you individually tailored positioning systems, that can
considerably shorten the cycle time during wafer inspection. Combined
with a high-end controller, the full potential of these tried and tested
systems can be fully exploited.

•5
System competence for mechanical engineering
Printed circuits are processed on the 4-axis drilling and milling center in portal construc-
tion. This machine sets standards in its class for efficiency and precision at high operating
rates and low maintenance. The carriage drives are highly dynamic. Despite the resulting
forces and moments on the frame and the guideways, the positioning accuracies of the
drill heads are guaranteed in the µm range. For the frame this means extremely high demands
on the thermal stability and rigidity under high humid conditions.

The chosen integration of the mineral casting product line with SCHNEEBERGER Linear
Technology fulfils these high demands to perfection.

Our MONORAILs have also proven themselves through their high rigidity, great dynamic
and static loading capacity, quiet running and universal sealing of the carriage. For the user,
the MONORAIL is an economical guideway that fully meets all the demands made by
modern mechanical engineering.

•6
> Talk to us about your own vertical integration

It makes no difference how you set out your own manufacturing process,
SCHNEEBERGER is your ideal supplier and partner in every project phase.

We supply you with components defined by you or we will be glad to offer you
comprehensive support right at the design phase or with the machine layout. We
master the entire kinematic process right through to the fully assembled machine
base.

From standard components…

With our highly precise and reliable standard components
we cover a wide range of linear guidance applications.

We are able to design customer-specific adaptations or

functional expansions at attractive conditions.
…through highly integrated positioning
systems…
Our standardized systems and platforms offer efficient
and economical solutions for your positioning tasks. You
benefit from a perfect motion system that permits a simple
integration in your application.

•7
…to final assembled machine structures
Our common focus is on the overall quality of the end
product. Our skill at mastering the unique challenge
of the kinematic process, and the mineral casting of
the machine structure paves the way for huge design
flexibility of innovative system solutions.

Simplified procurement and reduced vertical

integration manufacturing
Leave the entire manufacturing process of the system to us
and reduce your levels of vertical integration and the
resources involved! Our core strategy is to provide you with
increased flexibility and so minimise your risk.

•8
> Our standard products
> Guiding pages 9-11
> Guiding and measuring page 12
> Positioning page 13
> Positioning with actuation pages 14-15

Profiled linear guideways

MONORAIL

MONORAIL BM
with balls
Types BMA, BMB, BMC, BMD, BME,
BMF, BMG
Sizes BM 15, 20, 25, 30, 35, 45

MONORAIL MR
with rollers
Types MRA, MRB, MRC, MRD, MRE
Sizes MR 25, 35, 45, 55, 65, 100

Characteristics of MONORAIL

BM MR
Loading capacity
Rigidity
MONORAIL BZ
Running accuracy
with balls
Type BME Lifespan
Sizes BZ 25, 35
Smooth-running
Displacement resistance
High speeds
Simple installation and maintenance
Requirements on exactitude and
rigidity of surrounding structure
Integrated measuring system
Integrated toothed rack

max. min.
•9
Miniature guideways
MINIRAIL

MINIRAIL standard sizes

with balls
Type MN
Sizes MN 7, 9, 12, 15

MINIRAIL wide sizes

with balls
Type MN
Sizes MN 14, 18, 24, 42

Characteristics of MINIRAIL
Standard Wide
Loading capacity
Rigidity
Smooth running
Requirements on exactitude and
rigidity of surrounding structure
High speeds
High acceleration/oscillations
Clean-room and vacuum suitability
Corrosion resistant
Interchangeability of the carriage

max. min.

• 10
> Our standard products
> Guiding pages 9-11
> Guiding and measuring page 12
> Positioning page 13
> Positioning with actuation pages 14-15

Linear guideways

Type RN Type RNG Type M/V

with rollers with rollers with needles
Lengths 50 to 1500 mm Lengths 50 to 1500 mm Lengths 100 to 1500 mm
Sizes 3, 4, 6, 9, 12 Sizes 4, 6, 9, 12 Sizes 3015, 4020, 5025,
FORMULA-S FORMULA-S 6035, 7040, 8050
Dry runner Dry runner

Characteristics of linear guideways

Type R Type R Type RN Type RNG Type N/O Type M/V

(balls) (rollers) (rollers) (rollers) (needles) (needles)
Loading capacity
Smooth running
Rigidity
Cage constraint control
Requirements on exactitude
and rigidity of surrounding structure
Dry run ability
Small space requirement

max. min.

Recirculating units

Type SR
with rollers
Lengths 32 to 200 mm
Sizes 2, 3, 6, 9, 12
Characteristics of recirculating units

Type SK Type SKD Type SKC Type SR Type NRT

Loading capacity
Smooth running
Rigidity
Requirements on exactitude
and rigidity of surrounding structure
Dry run ability
High operating temperatures

max. min.
• 11
 > Our standard products
> Guiding pages 9-11
> Guiding and measuring page 12
> Positioning page 13
> Positioning with actuation pages 14-15

Integrated measuring system

MONORAIL AMS

MONORAIL AMS incremental MONORAIL AMS incremental

Types for roller MONORAIL MR Types for ball MONORAIL BM
AMSA-30, AMSA-3A, AMSD-3A AMSA-4A, AMSD-4A
Sizes MR 25, 35, 45, 55, 65 Sizes BM 15, 20, 25, 30, 35, 45

MONORAIL AMS absolute MONORAIL AMS long

Types for roller MONORAIL MR Types for roller MONORAIL MR
AMSABS-3A AMSA-3L
Sizes MR 25, 35, 45, 55, 65 Sizes MR 25, 35, 45, 55, 65

Characteristics of MONORAIL AMS

Type Type Type Type Type Type Type
AMSA-30 AMSA-3A AMSA-4A AMSD-3A AMSD-4A AMSABS-3A AMSA-3L
Processing accuracy
High speeds
Simple installation and maintenance
Suitable for MONORAIL MR
Suitable for MONORAIL BM
1Vss interface
Digital interface

max. min.

• 12
> Our standard products
> Guiding pages 9-11
> Guiding and measuring page 12
> Positioning page 13
> Positioning with actuation pages 14-15

Linear tables

Type NKL Type NDN

Single axis layout Single axis layout
Lightweight Stainless steel
Main parts in aluminium Lengths 10 to 80 mm
Lengths 25 to 410 mm Strokes from 5 to 70 mm
Strokes from 10 to 280 mm
FORMULA-S
Dry Runner

Type NFM Type MS

Single axis layout Single axis layout
Table parts in aluminium Stainless steel
Lengths 75 to 250 mm Lengths 10 to 130 mm
Strokes 25 to 150 mm Strokes 6 to 103 mm
FORMULA-S standard for sizes 7-15

Characteristics of linear tables

Type ND Type NDN Type NK Type NKL Type MS
Loading capacity
Rigidity
Smooth running
Cage constraint control optional
Weight-saving design
Corrosion resistant
Acceleration/oscillation

max. min.

• 13
> Our standard products
> Guiding pages 9-11
> Guiding and measuring page 12
> Positioning page 13
> Positioning with actuation pages 14-15

MINIMODULE

Sizes (MINIRAIL) 9, 15, 42 mm

Max. strokes up to 886 mm
Traverse speed up to 5 m/s
Process accuracy up to 1 m < 5µm
Drive synchronous belt

Your advantages at a glance:

» Proven technology and precision in SCHNEEBERGER
MINIRAIL guideways
» Reliable drive by synchronous belts for consistently high
traversing speed
» Very compact design
» Smaller profile section with lowest overall height (10 to
16 mm) available on the market
» High precision and stability thanks to direct bonding of
rail and carriage
» High rigidity thanks to well-proven MINIRAIL guideways
» Individual parts made of corrosion-resistant materials
» Minimum assembly work because it is insertable with-
out adapter part between the surrounding structure and
the MINIRAIL guideway

• 14
> Our standard products
> Guiding pages 9-11
> Guiding and measuring page 12
> Positioning page 13
> Positioning with actuation pages 14-15

High-end positioning platform for Wafer inspection

SCHNEEBERGER has a flexible,

high-precision positioning platform
to meet the highest demands on
precision and stability. Thanks to its
superior design and the SCHNEE-
BERGER components that are tried
and tested in everyday use, this cost-
effective platform has an extremely
stable mechanism that guarantees
the highest efficiency for applica-
tions in the nanometre range, regard-
less of the position.

Your advantages at a glance:

» Lower initial costs
» Minimum integration expenditure
» Nanometre stability irrespective
Using the SCHNEEBERGER positioning platform as a base of position
design we offer you individual solutions, that are not just avail-
» Consistently high process speed
able faster, but can also position in a time and with a stability
» Less positioning errors
which would have been impossible before.
» More wafers per hour!
Thanks to the extraordinary «step-and-settle» performance you
will achieve shorter cycle times for your applications, higher
quality and thereby greater productivity.
Travel

Settling time

Settling time

Time
SCHNEEBERGER system
Other systems
Motion time

• 15
> Our complete positioning systems

What you can expect from us

Advisory services. A competent partner from the very start.

Our goal is to work with a customer from an early phase in order
to guarantee the maximum degree of system integration. This
enables you to benefit from our experience and our technolog-
ical advance in the development of complex positioning sys-
tems. Our on-the-spot agent is available for initial contact.

Development. Intelligent approaches to solve your problem.

Our engineering team develops systems that meet challenging
specifications. Using powerful 3D CAD software, all parts of the
installation are designed realistically and can be simulated. In
this way, we can identify complex problems at the design stage
and produce optimized solutions.

Logistics. An essential part of our product.

Logistics, – particularly in the extremely cyclical semi-
conductor industry – requires the maximum degree
of flexibility. For this reason, we maintain intensive
Manufacturing and series production. logistical contacts with our customers. Via our active
Precision and process reliability. supplychain, we are in a position to submit proposals
The ultra-precise manufacture of structural that satisfy the manifold demands on reliability and
components and the assembly of sub- flexibility. We understand our business in the demand-
assemblies is a core competence that goes ing world of logistics – test us, we will be happy to
back many years at SCHNEEBERGER. In prove it to you.
this field, we have an unparalleled degree
of technological expertise. Clean room or Support. Whenever you need us.
vacuum applications are assembled in our We offer our customers competent, expert support
special assembly shops that meet clean whenever they need it. Either on the spot using our
room classification 1,000. international network or through modern means of
communication – we take care of you. Our customers
appreciate our open and honest style of communica-
tion. We are proud to be able to foster truly long-
term partnerships anew every day. For our commit-
ment, we also received the Partnership Award from
KLA-Tencor.
• 16
> Our complete positioning systems

Semi-conductor sector

SCHNEEBERGER builds custom-designed systems that

are decisive for the manufacturing processes involved in
semi-conductor production. With their microscopically
small structures, these products have to be fully tested with
high precision. The cost-effective production of even faster
processors and even more compact memory chips than
those we are familiar with today can only be achieved in
this way.

Modern production processes for integrated circuits are at

the limits of what is technically feasible. New processes are
being continuously developed in order to further improve
and to accelerate production processes. Frequently, the
yield attained by new processes like these and the resul-
tant semi-conductor chips is often very modest in the intro-

ductory phase. As the cost-effective utilisation

of production plant capacity is the goal, quality
control and a pro-active influence on processes are
becoming increasingly important on the basis of
results.

As a manufacturer of quality-control systems,

SCHNEEBERGER plays an important role in
the semi-conductor industry. Demands on the
resolution and precision of measuring and image-
processing systems are on the increase together
with the gradual miniaturisation of semi-conductor
structures.

Owing to their central function in the manufacturing

process, these positioning systems permit the
industrial production of semi-conductor structures
and guarantee the cost-effectiveness of production
lines costing billions.

• 17
Large-format system sector

Large-format positioning systems like those

manufactured by SCHNEEBERGER for the flat
panel display industry or the printed circuit board
industry, can only be made as precisely and as
robustly as our customers require thanks to
our many years of expertise in these fields. The
contrast between the mechanical size of a
system and the microscopically small units of
control structures is the greatest challenge in the
engineering of such systems. The end products
in large format manufacturing systems are often
inspected even before delivery and assembly.
Visual inspection using image-recording sys-
tems between the individual manufacturing
stages and at the end of production is an impor-
tant part of quality control for the manufacturers.

An electrical test at the end of production is

usually accompanied by costs and requires the
full range of CAD data as well as an automatic
testing machine that contacts and tests all
signal paths.

Optical tests are comparatively faster and

more economical and can be carried out with
a very high degree of precision thanks to
SCHNEEBERGER systems. This gives the
manufacturers of large-format products a rele-
vant economic advantage.

The automatic optical inspection of flat panel

displays or printed circuit boards has become
standard in the industry in recent years.
Thanks to its high-end positioning system,
SCHNEEBERGER puts the manufacturers of
this inspection equipment at the leading edge
of technology.

Our positioning systems meet the highest

demands both on camera systems as well as
on scanner systems.

• 18
> Our application-specific products

SCHNEEBERGER mineral casting

SCHNEEBERGER mineral casting is not only an alternative

to conventional cast-iron or steel constructions, but in
many instances it is by far the superior technology. This is
demonstrated also by its economical advantages:
SCHNEEBERGER mineral casting components have a
short delivery time and are up to 30% cheaper.

Our longstanding experience in mineral casting and its

diversity of application possibilities makes us a strong
partner for machine and plant builders. Our customer and
application support starts at the construction phase
because, thanks to FEM (Finite Element Method), we are
able to simulate the effects of dynamic and static loads
without the need for costly prototypes. In this way we can
verify the desired characteristics of the cast components
and overall thermal behaviour.

0.217
0.192
0.149
0.107
0.064
0.021
-0.021
-0.064 Y
-0.107
-0.149
Z X
-0.192

Assembly in the µm range

Every machine designer knows that fitting linear guides with µm
accuracy is a demanding task. To us, however, it is a core skill
involving special technology and processes which guarantees
the precision and repeatable accuracy required. We can call on
our extensive expertise where mineral casting and linear guides
are concerned.

• 19
Specific overall solutions

The optimisation of logistics processes and the continual

improvement and simplification of manufacturing and
assembly procedures are essential economical factors in
the machine and plant building sector.

Our engineering and manufacturing competence encom-

passes the entire process, from production of complete
sub-assemblies, from positioning systems with integrated
controller unit and drive, through to mineral-casting and
to the final assembly of the machine base. These inter-
connected SCHNEEBERGER skills guarantee optimal use
of resources and the best possible advantage of current
technologies.

Your advantages at a glance:

» The overlapping know-how in mineral casting and
positioning offers the utmost potential for customer-
specific and economically superior overall solutions
» The tight integration of linear technology and min-
eral casting enables a flexible development of
tailored solutions
» The engineering expertise of our consultants covers
the total solution
» As customer you benefit from more efficient, seam-
lessly integrated processes, from design to pro-
duction and right through to delivery of the ready-
to-install assemblies

• 20
> Our application-specific products

Special components to your own specifications

Exceptional challenges frequently call for tailored

solutions. «SCHNEEBERGER Special Components» is a
flexible manufacturing range that offers rational special-
purpose products.

We produce according to your own specifications at fair

market prices:
» Guides for special machine building
» Modified standard guides as individual items and
series
» Replacement guides for machine refurbishments

We guarantee short throughput times for prototypes and

on-schedule series supplies.

The product range comprises:

» Linear roller guideways in special dimensions
» Linear slide guideways with various coatings
» Special parts

> www.schneeberger.com

You will find more information about our

products and applications – with illustrations –
on our website.

• 21