LSM 6200
LSM 6200
LSM 6200
99MBC095A
SERIES No.544
LSM-6200
Laser Scan
Micrometer
(Display Unit)
User's Manual
Read this User’s Manual thoroughly
before operating the instrument. After reading,
retain it close at hand for future reference.
CONVENTIONS USED IN USER'S MANUAL
Safety Precautions
To operate the instrument correctly and safely, Mitutoyo manuals use various safety signs (Signal
Words and Safety Alert Symbols) to identify and warn against hazards and potential accidents.
Indicates an imminently hazardous situation which, if not avoided, will result in serious
injury or death.
DANGER
Indicates a potentially hazardous situation which, if not avoided, could result in serious
injury or death.
WARNING
Indicates a potentially hazardous situation which, if not avoided, may result in minor or
moderate injury or property damage.
CAUTION
The following signs indicate specific warnings or prohibited actions, or indicate a mandatory action:
Alerts the user to a specific hazardous situation. The given example means “Caution,
risk of electric shock”.
No. 99MBC095A i
CONVENTIONS USED IN USER'S MANUAL
On Various Types of Notes
The following types of notes are provided to help the operator obtain reliable measurement data
through correct instrument operation.
IMPORTANT • An important note is a type of note that provides information essential to the completion
of a task. You cannot disregard this note to complete the task.
• An important note is a type of precaution, which if neglected could result in a loss of
data, decreased accuracy or instrument malfunction/failure.
NOTE A note emphasizes or supplements important points of the main text. A note supplies infor-
mation that may only apply in special cases (e.g.. Memory limitations, equipment configura-
tions, or details that apply to specific versions of a program).
TIP A tip is a type of note that helps the user apply the techniques and procedures described in
the text to their specific needs.
It also provides reference information associated with the topic being discussed.
Mitutoyo assumes no liability to any party for any loss or damage, direct or indirect,
caused by use of this instrument not conforming to this manual.
Information in this document is subject to change without notice.
© Copyright Mitutoyo Corporation2005. All rights reserved.
ii No. 99MBC095A
PRECAUTIONS
1. Safety Precautions
The Measuring Unit connected to the Display Unit uses a very low power laser.
1) An applicable laser product class of the IEC standard: a Class 2 laser product uses a
visible laser (maximum power: 1.3 mW for scanning; laser device: semiconductor laser;
wavelength: 650 nm).
2) Do not look directly into the laser beam. (Even if it seems that no light is being emitted
from the emission window, do not look into it.)
3) If measuring flat objects with mirror finishes, avoid looking at the reflection on the
surface.
4) Close the beam shutter when the instrument is not in use.
5) Do not remove the laser class identification labels attached to the Measuring Unit.
6) Before using this unit, carefully read the “Measuring Unit Specifications” and “Precau-
tions on Use of Laser” sections provided in the manual supplied with the Measuring
Unit.
2. Before making the connection between the Measuring Unit and the Display Unit, turn off the
power. If an optional device is to be connected to this system, make sure that the optional
device is also turned off.
3. Firmly tighten the screws of the cable connectors and interfaces to ensure shielding.
4. Do not touch the terminals of the connectors, otherwise contact may be poor.
5. Positively ground the Display Unit.
6. An error display may appear during operation. However, it may not always indicate a fault. If
an error display appears, consult the “Maintenance and Inspection” section.
7. Unplug the power cord when a system failure is encountered.
Do not open the covers provided on the emission unit and reception unit.
WARRANTY
In the event that the Mitutoyo Laser Scan Micrometer (LSM) should prove defective in
workmanship or material, within one year from the date of original purchase for use, it will
be repaired or replaced, at our option, free of charge upon its prepaid return to us.
If the unit fails or is damaged because of the following causes it will be subject to a repair
change, even if it is still under warranty.
1. Failure or damage due to inappropriate handling or unauthorized modification.
2. Failure or damage due to transport, droppage, or relocation of the machine after
purchase.
3. Failure or damage due to fire, salt, gas, abnormal voltage, or natural catastrophe.
This warranty is effective only where the machine is properly installed and operated follow-
ing this manual.
iv No. 99MBC095A
CONTENTS
CONVENTIONS USED IN USER'S MANUAL ................................................................. i
NOTES FOR EXPORTING ...............................................................................................ii
PRECAUTIONS ...............................................................................................................iii
INSTALLING CONDITIONS ........................................................................................... iv
WARRANTY .................................................................................................................... iv
vi No. 99MBC095A
b. Setting the automatic workpiece detecting function
(Guidance: AWDT) .......................................................... 4-14
c. Setting the number of scans (Guidance: SCAN) ............ 4-15
d. Setting the group judgment (Guidance: GTJ) ................. 4-15
e. Setting the group judgement output (Guidance: GTJ D) ... 4-15
f. Setting the odd-numbered-edge cutting tool measurement
function (Guidance : TOOL) ............................................ 4-16
4.1.2.5 Selecting and setting the function in the B4 mode .............. 4-17
a. Setting the use of RS-232C port
(Guidance: RE-232C) ...................................................... 4-17
b. Setting the RS-232C communication baud rate
(Guidance: BAUD) ........................................................... 4-17
c. Setting the RS-232C communication data bits
(Guidance: LENGTH) ...................................................... 4-17
d. Setting the RS-232C communication parity bit
(Guidance: PARITY) ........................................................ 4-18
e. Setting the delimiter for communication
(Guidance DELIMT) ......................................................... 4-18
f. Setting the RS-232C line control
(Guidance: CONTRL) ...................................................... 4-18
4.1.2.6 Selecting and setting the function in the B5 mode .............. 4-19
a. Setting the RUN input function from the I/O interface
(Guidance: RUN) ............................................................. 4-19
b. Setting the PSET input function from the I/O interface
(Guidance: PSET) ........................................................... 4-19
c. Setting the GO output function from the I/O interface
(Guidance: GO) ............................................................... 4-20
4.1.2.7 Selecting and setting the function in the B6 mode .............. 4-20
a. Setting the use of DCU (Guidance: DCU) ...................... 4-20
4.1.2.8 Setting in the B7 mode (expanded items) ........................... 4-21
a. Setting expanded items (Guidance: ADD) ...................... 4-21
b. Reservation (Guidance: SEG_LIM) ................................. 4-21
c. Reservation (Guidance: SEG_ER0) ................................ 4-21
d. Reservation (Guidance: SEG_COR) ............................... 4-21
e. SHL setting (Guidance: SHL) .......................................... 4-21
f. Setting for detecting dirty protection glass
(Guidance: DIRT) ............................................................ 4-22
g. Setting the measurement mode (Guidance: DLC) .......... 4-22
h. Space for additional functions (Guidance: A.5V) ............ 4-23
i. Space for additional functions (Guidance: A.0V) ............ 4-23
j. Space for additional functions (Guidance: A2.0V) .......... 4-23
k. Setting the STB length of I/O analog interface
(Guidance: STB) .............................................................. 4-23
l. Setting the input software filter (Guidance: IFF) ............. 4-23
m. Setting the application range of calibration
(Guidance: CAL) .............................................................. 4-24
n. Setting the application range of presetting and mastering
(Guidance: PST) .............................................................. 4-24
o. Setting the number of programs to be used
(Guidance: PRGM) .......................................................... 4-24
4.2 Calibration ................................................................................................... 4-25
4.2.1 Calibration gages and gage stand ................................................. 4-25
No. 99MBC095A ix
MEMO
No. 99MBC095A
1 INTRODUCTION
This chapter describes the Laser Scan Micrometer (LSM) models and
nomenclature of the Display unit and the Measuring unit.
1.1 Outline
This system is an accurate, non-contact measurement system capable of measuring workpiece
dimensions at a high speed using a highly directional scanning laser beam.
This non-contact optical measuring system is capable of measuring workpieces which are
difficult to measure with conventional measuring instruments. It performs simple and
accurate measurement of brittle or elastic objects, objects at high temperature, objects which
must be kept clean, and soft objects which may be deformed and suffer dimensional changes
under the measuring forces used.
1.2 Foreword
This user’s manual primarily explains the functions of the Display Unit. For information
about the safety precautions, specifications, dimensions, standard accessories, and options for
each Measuring Unit, refer to the user’s manual supplied with the Measuring Unit.
Models
LSM-500S
LSM-501S
LSM-503S
LSM-506S
LSM-512S
LSM-516S
READ 7 8 9 C
H.CAL 4 5 6 LIMIT
DATA C S.PR
SHIFT C.RUN SET
RUN PRINT
READ 7 8 9 C
H.CAL 4 5 6 LIMIT
P.S V
L.CAL 1 2 3
P.SET
MASTER
0 • +/-
REF
LOCK A.CL STAT
ENT
UNIT M.CL S.E
AC power inlet
ID UNIT 1
SCAN SIG.-1
FOOT
SW.
Fuse holder
ID
AC power inlet
Foot switch
ID Unit Protection cover Analog I/O connector
Signal cable connector
Scanning signal connector
Remote interlock connector RS-232C connector
TIP 1. A label which describes the terminal block name “I/O ANALOG” can be seen if the
protective cover of the Analog I/O terminal block is opened. Use this for wiring.
2. The terminal located at the left end of the power input terminal and marked (by a
symbol ) is the grounding terminal to keep the potential of signal line of this
unit equal with other instrument connected. It is used to enhance resistance
against electrical interference.
LSM-500S
LASER SCAN MICROMETER
LSM-501S
LASER SCAN MICROMETER
ID ID unit
If a Dual-type Add-on Unit is used, install the ID unit in the ID UNIT 2 slot above
the ID UNIT 1.
3. Replace and secure the ID unit protection cover revering the procedures in step 1
above.
Power
ID unit
cord
ID
Switch
5V, 3mA Applicable connector: PJ-2
(Manufacturer: Sato Parts)
NOTE Recovering operation is not guaranteed. Never use this function for other than
emergency stop.
Step 1: Fully open the lens cap and shutter of the Measuring Unit.
Fully open the lens caps and beam shutters of both the emission unit and reception
unit to ready the laser beam for emission.
The lens caps should be completely removed, and the shutters should be as shown in
the diagram below.
Emission window
Shutter window
Shutter
Step 2: Power on
• Turn the power key switch on the Display Unit clockwise until it is in the I
(power on) position and the power is on.
• This unit enters the self check mode and all the LEDs and segments turn on. They
will turn off shortly, and eights will be displayed in the upper display section.
When is displayed across the upper display section, the unit will turn
off shortly. This is followed by the self check on the lower display section.
PROG PROG
• In the lower display section eights will appear sequentially from the left to
right.
• After is displayed across the lower display section, it will
turn off shortly.
PROG PROG
• Measurement is started.
The LD1 ON (LD1 ON and LD2 ON in the dual-unit measurement) LED turns on
and the BUSY LED starts flashing to indicate the measurement has started from
the ready state.
Step 3: When the self check has been completed, the PROG
display shown at the right will appear. To initial-
ize, press the ENT key. When the initialization
process has been completed, the display restors
the initial conditions that existed just after the
power on.
To abort initialization press a key other than the ENT key or turn the power off.
In the former case the initialization process will be aborted and the initial display at
power-on will be restored.
NOTE Initialization will clear all the customer setup data and will restore the factory-setups.
Customize the setups again as necessary.
3.1.1.1 Overview
Unlike light emitted from natural sources, a laser provides extremely fine, rectilinear beams
which do not diffuse (coherent light beams).
Using the properties of the laser beam, the Mitutoyo Laser Scan Micrometer (LSM) moves a
scanning laser beam over the workpiece and determines its dimensions by measuring the
duration in which the beam is obstructed by the workpiece.
Workpiece
Emission unit Reception unit
Motor Colimator lens
Condenser lens
Polygon mirror
Reception
device S
Polygon mirror
Photoelectric element
(reset signal generation) Amplifier
Laser power source Semiconductor laser
MP RS
Motor driving pulse Clock pulse
t t t
Edge signal RS
CPU
TIP In the system block diagram described in the previous page, the laser beam passed
through the collimator lens is made parallel and, at the same time, stopped down so
that the beam diameter is minimized at the measurement position.
EDGE2
Shade 1 SEG2 Shade 1
Shade 3 SEG6
1) Arithmetical average
• If a moving workpiece is measured, the OD of the workpiece is determined by averaging
the measured data taken from each section (a: first measurement, b: second measurement,
.... n: nth measurement) of the workpiece the specified number of averaging times, as
shown below.
first measurement
second measurement
...
nth measurement
a b n
• One of the following number of averaging times can be selected: 1, 2, 4, 8, ....1024, 2048.
(If extra fine wire measurement is specified in the basic setup, the number of averaging
times can be selected from between 16 and 2048.)
• This is suitable for measuring a still object or the run-out of rollers, etc.
2) Moving average
In the moving average method, a measurement interval identical to that in the arithmetical
average is divided into finer sections such as a1 (1st measurement), a2 (2nd measurement), -
- - , an (nth measurement). Each measurement is performed almost in parallel. If, for ex-
ample, the number of averaging times is set to 512, the first measurement requires the
amount of time that corresponds to 512 scans. However, for the second measurement onward,
only the time for 16 scannings is required. With respect to a workpiece with a changing OD,
this method provides data with smooth variation because of the many pieces of data, and also
quickly detects the trend of workpiece OD variation.
an
an measurement
...
...
a2
a2 measurement
a1
a1 measurement
• One of the following number of scans can be selected: 32, 64, 128, ....1024, 2048.
• This method is suitable for the feedback control of wire drawing machines and extruding
machines.
Power ON
Error check
Power ON + SET
SET
6 : Measurement mode
LOCK LOCK
UNIT
, SHIFT
UNIT
H.CAL , L.CAL
Ready state
LOCK
ENT ( UNIT
) Measurement in progress ENT ( H.CAL , L.CAL )
C
(Program being executed)
• Single-run measurement
• Continuous-run
• measurement • SET
S.PR
SET ( PRINT ) • Latch timer • SET
• C MASTER P.S V
• ENT ( LIMIT , REF
, P.SET
)
3.2.1 Program
• A measurement will be automatically performed according to the registered (programmed)
contents including the segment (feature to be measured) and GO/NG judgment criteria,
etc., in advance. Registration is performed in the function setup mode.
• This unit can hold a maximum 100 programs, which may include various settings suitable
for up to hundred kinds of workpieces.
• Program numbers are divided into groups, each of which has up to ten programs and is
referred to as a channel (CH).
These two-digit program numbers define the meanings as shown in the table below.
Program No.
16
Channel No. Individual No.
Application For each channel
0 to 9 0 to 9
• As the expanded basic setup it is possible to select the range of applying calibration.
1. Applies uniformly to the entire 100 programs (factory default).
2. Applies individually to each channel (10 programs).
• With the expanded basic setup it is possible to select the range of applying presetting and
mastering.
1. Applies uniformly to the entire 100 programs (factory default).
2. Applies individually to each channel (10 programs).
3. Applies individually to each program.
• As the expanded basic setup it is possible to select either the “100 Program mode” or “10
program mode”, which limits the number of available programs to ten. (The factory
default setting is the 100 program mode.)
• As the basic setup it is possible to select either the “Single measurement mode” which
uses 100 programs (10 programs in the 10 program mode) as independent programs or the
“Simultaneous measurement mode” which uses two specific programs as a pair.
NOTE • If the program must be switched to another with the RS-232C/GP-IB command, it
is necessary to use a separate command for the 100 program mode or 10 pro-
gram mode.
For more information about the RS-232C/GP-IB command refer to Section 6.1.2.4
“RS-232C/GP-IB Commands”.
• In the 10 program mode the user can make use of the RS-232C/GP-IB commands
provided for Mitutoyo old models (LSM-6000, 6100) without further modification. It
is advised for the customers, who are operating Mitutoyo old models (LSM-6000,
6100) with the RS-232C communication commands, to use the 10 program mode.
00 & 05
01 & 06
Program
numbers pairs 02 & 07
03 & 08
04 & 09
3 - 10 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
Photo-electric signal
Segment 3 Segment 2
Segment 4
Segment 5 Segment 3
No. 99MBC095A 3 - 11
b) Plate (Sheet)
• In the case of the width measurement of a transparent plate with no chamfer on edges,
measurement may not be possible since acute-edge signals cannot be produced for such
edges.
Photo-electric signal
Measurement is aborted
Ideal edge signal because a sharp edge
can not be determined.
Workpiece W
W0
2. Chamfering
Chamfer the workpiece edge by W. W will vary depending on the model. Always
use values larger than those in the table below.
LSM-503S 0.2 mm
LSM-506S 0.4 mm
LSM-512S 0.8 mm Direction of light is turned,
and is not incidental to the
LSM-516S 1.2 mm
photo-electric element.
3 - 12 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
NOTE Measuring accuracy differs from that of the standard set up.
• Measured data differs with the change of the SHL. Perform calibration again if the
SHL setting has been changed.
• Measurement error can be reduced by performing calibration with the reference
standard, the edges of which have been made in the same condition as those of the
sheet to be measured.
Photo-electric signal
IMPORTANT • When the SHL (signal level for detecting a workpiece) is modified, the measure-
ment accuracy will be inevitably reduced, since the measured data may easily
fluctuate with the edge conditions.
• Once the SHL (signal level for detecting a workpiece) has been modified, always
perform another calibration.
• If an identical edge form is selected for both for the calibration standard and
workpiece (sheet), it may be possible to reduce these measurement errors.
No. 99MBC095A 3 - 13
3.2.4.2 Ultra-fine wire measurement
• In the special ultra-fine wire measuring region, a clear shade can not be obtained because a
workpiece, with a finer diameter than that of the laser beam at the focal position, must be
measured. Therefore, this wire diameter must be calculated according to a special algo-
rithm. This requires the following restrictions to be taken into account in the basic setup
where an ultra-fine wire measurement is designated.
a) Measuring interval (measurement time)
Note that the measurement time for the first measurement becomes 0.02 seconds longer
than the first interval since the wire diameter must be identified at the start of ultra-fine
wire measurement.
• Single-run measurement: (Measurement interval + 0.02 seconds)
• Continuous-run measurement: (Measurement interval + 0.02 seconds) for the first
measurement, and at regular measurement intervals
for the second and subsequent measurements.
b) Number of averaging times
Select a number between 16 and 2048.
c) Designation of the objective portion of workpiece to be measured
Only a segment specification is allowed, but an edge specification is not. If an edge
specification has been made before the setup for the ultra-fine wire measurement is
established, it is automatically changed to segment specification.
In other cases where multiple segments are set for the LSM-500S, the minimum
allowable measuring range begins at 0.1 mm. In addition, if a workpiece measures less
than 0.1 mm, only one segment can be specified.
d) Others
In extra-fine wire measurements, simultaneous measurement, dual measurement
(measurement using two measuring units), workpiece automatic detection, and group
judgment can not be set up. Setups for these functions are automatically canceled.
• The measuring position is a critical factor for ultra-fine wire measurement. Always
perform the measurement at the focal position of laser beam while referring to Section
5.2.2 “Displaying the measuring position”. In other cases where a fine gap is to be
measured, the amount of laser light may be insufficient, resulting in unstable measure-
ments. Refer to Section 4.4, “Recording the Amount of Light”, and store the amount of
light without the workpiece and fixtures in the optical path.
• The following table shows the measuring ranges if “Not performing ultra-fine wire
measurement” is designated on the LSM-500S.
3 - 14 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
IMPORTANT 1. For measuring ultra fine wire with a diameter thinner than that of the laser beam,
the SHL (signal level for detecting a workpiece) needs to be changed according to
the workpiece size (external diameter).
2. Since the SHL is changed to the level most appropriate for the workpiece size,
multiple workpieces or workpiece fixtures existing within the laser scanning range
may disable the detection of a workpiece less than 0.05 mm in diameter. Exercise
care so as not to produce multiple shadows within the scanning range.
3. Also, if the segment is set to 1 or 3, it is not possible to determine the position of
a fine workpiece less than 0.05 mm in diameter, runout, and bending.
No. 99MBC095A 3 - 15
3.2.5 Measurement of an odd-numbered-edge cutting tool
• This function is used to measure the diameter or run-out of cutting tool (drill or end mills,
etc.)that has an odd number (3, 5, ...) of cutting edges.
• When the outside diameter, øD, of an odd-numbered-edge cutting tool is measured, the
measurement errors as shown in the figure below will result if this LSM unit is set to
Segment 2 (normal outside diameter measurement) for measurement.
To avoid these errors, in this case, first install the reference bar as shown below, then
perform the measurement while rotating the odd-numbered-edge cutting tool. Calculate the
outside diameter of the odd-numbered-edge cutting tool by obtaining the difference
between “Peak value of Segment 2+3” and “Bottom value of Segment 3” while the cutting
tool rotates more than one turns from the beginning of measurement.
Then save the bottom value of Segment 3 into memory as many as the number of cutting
edges being set, and calculate the range (maximum - minimum) as the “run-out”.
Odd-numbered-edge cutting tool
Segment 2
(maximum value)
Segment 2+3
øD
Error Segment 3
(minimum value)
Reference bar
• For the measurement examples and setup method refer to Section 5.3.6 “Application of the
odd-numbered-edge cutting tool measurement”.
TIP • As shown in the figure at the right it is also possible to measure with the reference
bar being located in the Segment 1 side.
In this case the “outside diameter”
Reference bar
of the odd-numbered-edge cutting
tool can be calculated by obtaining
Odd-numbered-edge
the difference between “Peak value cutting tool Segment 1
of Segment 1+2” and “Bottom value (minimum value)
(maximum value)
Segment 1+2
3 - 16 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
• If the dual-type add-on unit is mounted, select the type of dual-unit measurement in the
basic setup.
Note that if the type of dual-unit measurement is changed in the basic setup, calibration
values and function setups will be default-set.
• If the dual-type add-on unit is not set, the setup guidance for it will not be displayed.
• Suspended use of Measuring Unit
For repair or adjustment services one of the Measuring Units employed for dual-unit
measurement may be suspended from operation. If this is the case, turn off the power and
disconnect the Measuring Unit. If the Measuring Unit 1 has been disconnected, the
Measuring Unit 2 must be connected to the TRANSMITTER-1 while re-installing the
corresponding ID unit in place. After removal of one measuring unit, designate
in the basic setup (4.1.2.3 Selecting an setting the function in the B2 mode: d. Setting the
dual-unit measurement).
If one Measuring Unit is removed without this designation, “Err-8” will result and the
other Measuring Unit will also become inoperable.
Note that suspending one Measuring Unit will cause the calibration values and function
setups to be reset to their defaults.
• The type of dual-unit measurement includes DW-, DXY-, and DF-types.
No. 99MBC095A 3 - 17
3.2.6.1 DW type
• This setting is used if two workpieces are measured by two measuring units set in parallel.
• On each of the Measuring Units 1 and 2 the measuring position can be selected from
segments 1 to 7 (1 to 3 for measuring a transparent object) or edges 1 to 255.
SEG
1
2
3
4
5 Measuring unit 2
6
7 Display unit
Least significant digit of
program number: 5 - 9
• Calibration
Select each segment for Measuring Unit 1 with the least significant digit of program
number between 0 and 4, and select each segment for Measuring Unit 2 with the least
significant digit of program number between 5 and 9.
3 - 18 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
(X-axis direction)
Least significant digit of
program number: 5 - 9
Measuring unit 2
(Y-axis direction)
• Calibration
Select each segment (between 1 and 3) for Measuring Unit 1 with the least significant
digit of program number between 0 and 4, and select each segment (between 5 and 7) for
Measuring Unit 2 with the least significant digit of program number between 5 and 9.
• Any program number can be assigned to segments 1 to 3 (in the X direction) and segments
5 to 7 (in the Y direction).
• If one segment for each of the X and Y directions are selected (e.g. 2 + 6), calculation is
made possible between the measurements from these segments in the X and Y directions.
The calculation items can be selected in the basic setup by arithmetic addition: (X + Y),
mean outside diameter: (X + Y) / 2, Difference: (X-Y), and film thickness: (X-Y) /2.
No. 99MBC095A 3 - 19
3.2.6.3 DF type
• Used to measure the diameter of a large workpiece using two Measuring Units facing each
other, one stacked on top of the other, or positioned back to back.
• For DF-type measurement the objective portion of the workpiece to be measured should be
selected through segment specification, not by edge specification.
Select segments 1 to 3 for Measuring Unit 1, and select segments 5 to 7 for Measuring
Unit 2.
Display unit
SEG 5 Least significant digit of
Measuring unit 2
program number: 5 - 9
SEG 7
SEG 6 Least significant digit of
Measuring unit 2
SEG 5 program number: 5 - 9
SEG 5
SEG 6 Least significant digit of
Measuring unit 2
SEG 7 program number: 5 - 9
3 - 20 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
Display unit
SEG 5 Least significant digit of
Measuring unit 2
program number: 5 - 9
SEG 7
SEG 6 Least significant digit of
Measuring unit 2
SEG 5 program number: 5 - 9
• Position two Measuring Units back to back as shown in 3) above to measure a transparent
object with the DF-type setup.
Transparent objects may not be measured with units facing each other or stacked one on
top of another.
• For information about techniques to improve the measuring accuracy refer to the measur-
ing unit user’s manual.
• Calibration and combined offset
a) Separate calibration for each Measuring Unit
Perform the calibration after selecting Segment (1 ~ 3) at the Measuring Unit 1 side
with the least significant digit of program number set to between 0 and 4 for Measuring
Unit 1, and Segment (5 ~ 7) at the Measuring Unit 1 side with the least significant digit
of program number set to between 5 and 9 for Measuring Unit 2, respectively.
b) Combined calibration
In addition to being able to perform separate calibration for each Measuring Unit, the
DF-type setup allows the use of combined calibration where segments are assigned over
two Measuring Units.
This combined calibration is effected from either combination of segments (1 + 5) or (1
+ 7).
Note that cancellation of separate calibration will also cancel the combined calibration.
IMPORTANT Since the reflection light from a large-diameter workpiece (skip phenomenon) is
generated in DF-type measurement, the accuracy decreases to some extent, com-
pared with the linearity of each measuring unit. The following figure shows that
undesired values e1 and e2 are generated due to reflected light. The undesired
value (e1, e2) increases with the diameter of the workpiece (e2 > e1). This depends
on the reflectivity of the surface.
Therefore, if each measuring unit is calibrated independently using a small diameter
gage, an error may result if a large diameter is measured.
No. 99MBC095A 3 - 21
Reception lens
e1 θ
S
Workpiece
Photoelectric device
(a) Measuring a small diameter workpiece
Reception lens
e2 θ
Workpiece
3 - 22 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
Outside
diameter
Gap Pitch
Laser
scanning
direction
• This function is only in effect if the necessary setups are made for edge specification in
the basic setup.
• In the function setup designate whether automatic measurement should be performed (for
pitch/outside diameter/gap measurement) or not (manual measurement). Also designate
both the start and finish edges.
• This is available in combination with automatic workpiece detection.
• If automatic measurement has also been selected, the following will take place.
a) In the ready state the first objective portion of the workpiece to be measured will be
displayed.
b) Automatic measurement will be involved in a single-run measurement or continuous-
run measurement.
If “Err-0” (insufficient number of edges to be measured) is detected, the measuring
operation is stopped for the single-run measurement, and the collected measured data is
cleared for continuous measurement to wait for a proper workpiece to be loaded.
c) If the measured data is found to be ±NG, the first source of the ±NG will be displayed
and the measuring operation is stopped. If GO results, the mean of all measurements is
displayed.
d) If the measured data falls within the range of GO, the elapsed measurement time was as
follows:
(Number of measurement edges) x (measurement interval) + (calculation time: 20 ms)
e) The W.P. LED shows the current portion of the workpiece being measured.
No. 99MBC095A 3 - 23
3.2.9 GO/NG judgment
• All the measured data are subject to GO/NG judgment.
To enable, set the GO/NG judgment criteria in advance.
• The following settings can be made in the basic setup.
a) The method of tolerance judgment can be selected from (Lower limit value and upper
limit value), multi-limit selection (7 limits) and (Target value and tolerance values:
upper tolerance value and lower tolerance value).
To output the judgment result with the multi-limit selection it is necessary to select the
optional Second Analog I/O Interface.
b) Simultaneous measurement can be specified. To do this, it is necessary to select the
optional Second Analog I/O Interface for tolerance result output.
c) For (Target value and tolerance values), the user is permitted to select whether the
target value is to be copied to the reference value. If it is, the setup guidance for the
reference value will not appear.
d) Even in the ready state it is possible to select whether tolerance judgment and analog
output are performed. If they are, tolerance judgment and analog output will take place
in the ready state, however, these data are not available for statistical processing.
e) Abnormal data elimination, tolerance judgment, group judgment, and analog output can
be performed in a single-run measurement, zero-run measurement, sample measure-
ment, and continuous-run measurement (with a term specification). The judgment result
will be indicated by the -NG (red LED), GO (green LED), and +NG (red LED) indica-
tors and outputted to the I/O interface and RS-232C (including printer)/GP-IB interface.
f) The following tables show the relationship between the measured data and tolerance
judgment method
1) (Lower and upper limit values)
GO/NG judgment Measurement (judged if both the lower and upper limit values are set)
-NG Measurement < Lower limit value
GO Lower limit value ≤ Measurement < Upper limit value
+NG Measurement ≥ Upper limit value
Measurement (judged if the target value, lower tolerance value and upper
GO/NG judgment
tolerance value are set)
-NG Measurement < (Target value + lower tolerance limit)
(Target value + lower tolerance value) ≤ Measurement < (Target value + upper
GO
tolerance value)
+NG Measurement ≥ (Target value + upper tolerance value)
3 - 24 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
No. 99MBC095A 3 - 25
3.2.10 Abnormal data elimination
• The abnormal data elimination function eliminates measurements that are very different
from those specified for the machined workpiece, from the measurement data (neither the
measurement is displayed nor is data output performed).
If, for example, the grindstone of a centerless grinder is controlled based on the measured
data from the LSM, it is possible that a large measurement error may be created due to the
coolant used with the workpiece.
As shown in the figure below where foreign matter (with a height of h) adheres to within
the averaging region L of the workpiece (with a diameter of D). An abnormal outside
diameter results in the region of l and the displayed measurement will be (D + lh / L). As
the result the grinder is subject to improper control that involves some error.
l
h
D Workpiece
Because the use of this function can eliminate abnormal measurement data generated due
to the adhered foreign matter, the grindstone can be controlled and fed properly.
• Judgment of valid data or abnormal data will be performed at each measurement interval.
Valid data includes those satisfy the following relation: Lower abnormal limit ≤ (Measure-
ment) < Upper abnormal limit. All other data will be discarded as abnormal data.
• The following table shows the relationship between measurements and upper and lower
abnormal limits.
• In the basic setup select whether this abnormal data elimination function should be used. If
it is the setting of (lower abnormal limit, upper abnormal limit, and count value) should be
performed before actual tolerance judgment.
This count value indicates the number of pieces of abnormal data that occurred until the
alarm will be issued. This alarm output will be sent to the optional Second Analog I/O
Interface by CNT form (The alarm will not be issued if the count value is set to zero).
• Abnormal data elimination function effects in single-run and continuous-run measure-
ments.
• If “Err-0” (specified workpiece not present) is displayed in the sample measurement, the
valid data collected will be discarded.
NOTE If a long series of abnormal data appears, measurement can no longer be continued
since most of the measured data must be eliminated. To avoid this problem, always
monitor CNT output.
3 - 26 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
3.2.11 Preset/Zero-set
This function is used to measure the difference between the workpiece and the reference gage
or to measure the workpiece that is larger than the measuring range of the LSM.
a) Preset
• In this system the operation of setting the reference gage dimension is called the
preset operation.
• This function is applied to measure the absolute dimension of a workpiece.
b) Zero-set
• Setting the reference gage dimension to “0.0” for the purpose of comparing it with a
workpiece dimension is called the zero-set.
• This function is applied to measure a deviation from the reference gage dimension.
c) Direction
Depending on the objective portion of measurement of a workpiece, the positive
direction (set as “0”) or negative direction (set as “1”) must be set.
If, for example, the shaded portion of D in the following diagram is measured, the
direction must be set as positive (0). If the highlighted portion (gap) of W is to be
measured for determining the workpiece dimension L, the direction must be specified
as negative (1).
Set as positive (0) Set as negative (1)
Reference piece
D
Workpiece L
Workpiece
Reference plane
• Preset operation takes about 1 second to determine the compensation value by measuring
the reference gage.
• Preset value will be ineffective if the segment or edge number is changed (Preset value is
unique to each segment or edge).
3.2.12 Mastering
• If the objective workpieces are high-precision gages that are machined successively, the
above described preset/zero-set values may need to be fine-adjusted to the master. This
fine-adjustment is called mastering.
After mastering, the total compensation value will be:
(Preset value/zero-set value) + (±Mastering value)
Setting a positive (+) mastering value allows the measurement of a workpiece OD to be
greater than the raw measurement, and setting a negative (-) mastering value allows the
measurement of a workpiece OD to be smaller than the raw measurement.
• Because no measurement is required for this mastering, the reference gauge is not required
either.
• Set the reference gage dimension with the preset function and perform mastering.
No. 99MBC095A 3 - 27
3.2.13 Reference value
• This function is used to output deviations (measured data - reference value) between the
reference value and the actual measurements of a workpiece for the Analog I/O Interface.
Before analog output, set the reference value and the scale value (gain).
• Measured data is outputted as analog signals at a full scale of ±5V.
Analog signal = (Measured data - reference value) x scale value (gain)
• In the basic setup the following conditions can be set.
a) Whether the target value of GO/NG judgment is be copied to the reference value. If this
is selected, the setup guidance for the reference value will not be displayed, so only the
scale value must be set.
b) It is also possible to set so that tolerance judgment and analog output can take place in
the ready state.
• Analog output is automatically enabled if single-run measurement or continuous-run
measurement is performed.
• If the reference value is being set the deviation value will be output for the RS-232C/GP-
IB interface and the printer if single-run measurement or continuous-run measurement is
performed.
RS-232C
Data output condition GP-IB Printer Remark
DCU
0
1 The periodical output timer can be set
2
3 The periodical output timer can be set
4
5 The periodical output timer can be set
6
7
8
9
: Outputted for each measurement if DATA C/RUN or C.RUN key, etc., is pressed.
: Press the DATA C/RUN or C.RUN key to trigger the measurement. The measured data will be outputted if it falls on GO.
: Press the DATA C/RUN or C.RUN key to trigger the measurement. The measured data will be outputted if it falls on –NG.
: No output will be made.
3 - 28 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
3.2.15 Automatic workpiece detection <OD detection method, Position detection method>
• Automatic workpiece detection is performed for continuous-run measurement, where
measurement starts with no specified workpiece present (Err-0), then proceeds to auto-
matic detection of the workpiece, followed by measurement repeated number of times. No
specified workpiece present (Err-5) also refers to the workpiece outside the upper and
lower detection limits.
• Whether automatic workpiece detection is performed is specified in the basic setup mode.
If automatic workpiece detection is specified, the number of scanning times for detection
must be specified from among 1 and 16. Select 16 times if detecting precision workpieces.
If automatic workpiece detection is not specified, no further setting is necessary.
• Automatic workpiece detection setup includes the number of measurement times, invalida-
tion period, upper and lower detection limits. Set both the upper and lower detection
limits.
• To exclude the measured data of such as chamfered portion of the workpiece, invalidation
period can be set within the range from 0.001 sec to 9.999 sec.
1) OD detection method
• This is used to automatically detect a workpiece that enters the laser scanning plane
perpendicularly.
• For actual detection of a workpiece the displayed measurement (after calibration and
preset) is used.
• One session of automatic detection consists of no workpiece being detected, detec-
tion of a workpiece with a dimension that is within the detection range (between the
upper and lower detection limits), an invalidation period required to exclude invalid
dimensions (of chamfered portions, etc.) from the measurement, and effective
measurement for the specified number of times. The final measurement result will be
latched (held) on the display. Once entering the effective measurement the upper and
lower detection limits will no longer be checked.
• The speed of workpiece detection (i.e. the number of scans) can be specified as
either 1 or 16 in the basic setup.
• Use 16 times in the following cases:
* If connecting bars are used between workpieces for feeding convenience and for
setting appropriate intervals between workpieces, and, if the difference in the
outside diameter between the workpiece and the bar is insufficient.
* If the feed rate is low.
• The following diagram is an example where a workpiece with a chamfered outside
diameter of D mm and a length of ᐉ mm moves at a velocity of V mm/s.
ᐉ g Scanning beam
c
D a
No. 99MBC095A 3 - 29
Setting example:
• Lower detection limit: L < (a +D) / 2
• Upper detection limit: H > Upper limit of the measuring range or 1.1 D
(This setting may be omitted.)
• Invalidation period : T > (c / V) ms
• Number of measurements: N < (ᐉ - 2c) x 0.8 (safety factor) / measurement interval / V
2) Position detection method
• This is used to automatically detect a workpiece that enters the measuring region in
the laser scanning plane in the same direction of the scan.
• Workpiece detection is performed with one scan, and 16 scans can not be specified
(If specified in the basic setup, the specification will be ignored).
• One session of automatic detection consists of the detection of no workpiece,
detection of a workpiece edge with a dimension that falls within the detection range
(between the upper and lower detection limits), an invalidation period required to
exclude invalid dimensions from the measurement, and effective measurement for the
specified number of times. Once the effective measurement has been entered, the
upper and lower detection limits will no longer be checked.
• In the following diagram, workpiece positions (a) and (b) result in no workpiece
being present, and in (c) it is judged that a workpiece is present.
Detected edge
(a)
C : Detection range
Measuring region
H
C
(c)
Vmm/S
Setting example:
Assuming the workpiece diameter as D (mm) and the moving speed as V (mm/s):
• Lower detection limit: L > (Laser scanning range - measuring region) / 2
• Upper detection limit: H < (Laser scanning range + measuring region ) / 2 - D (This
setting may be omitted.)
• Invalidation period : Generally set to 0 ms.
• Number of measurements: N = 1
NOTE • Allow a sufficient margin for the lower detection limit, upper detection limit, invali-
dation period, and number of measuring times when setting them. If this surplus is
not sufficient, the measurement may not be achieved.
• If using the sample measurement, specify the number of measuring times to 1.
• The automatic workpiece detection functions in the continuous-run measurement.
3 - 30 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
1 2 3 4 5 6 7 8
Individual Individual Individual Individual Individual Individual Individual Individual
judgment judgment judgment judgment judgment judgment judgment judgment
Output of individual
judgment result Output of Output of Output of Output of Output of Output of Output of
judgment judgment judgment judgment judgment judgment judgment
result 1 result 2 result 3 result 4 result 5 result 6 result 7
• In the basic setup select whether group judgment is to be performed. If it is, then set the
group size (the number of workpieces included in a group), calculation items (mean,
maximum value, minimum value, and range), and group lower limit and upper limit. If
“Not performing group judgment” is selected, the setup guidance for it will not be dis-
played.
• The group judgment will be in effect in a single-run measurement or continuous-run
measurement.
a) For the result display and GO/NG judgment indication each individual measurement
and judgment result will be used.
b) Output of judgment result
1. If only the standard Analog I/O Interface is used
Each individual judgment result will be outputted.
2. If the second Analog I/O Interface is used
Each individual judgment result will be outputted for A-(+NG), A-(GO), and A-(-
NG), and the group judgment result will be outputted for B-(+NG), B-(GO), and B-(-
NG), respectively.
c) RS-232C/GP-IB output
In the basic setup it is possible to set whether the group judgment result data is output-
ted for the RS-232C/GP-IB interface. If it is, the output contents from the group
judgment will be as follows:
P0, ( GO) 12.34567 ... Individual data
P0, ( GO) 12.34560 ... Individual data
P0, (+NG) 12.34600 ... Individual data
GP0, ( GO) 12.34575 ... Group judgment result data
• Each individual piece of measurement data can be the objective of statistical processing,
however, group measurement data will be excluded from statistical processing.
• Even if “Err-0” (specified workpiece not present) occurs, the obtained data will not be
cleared. To abort the measurement, press the C key (or input RESET via the I/O
Interface or the “CL” command via the RS-232C/GP-IB interface).
No. 99MBC095A 3 - 31
3.2.17 Recording the amount of light
• The gap measurement may be unstable if not enough laser beam passes through the gaps.
In the case shown in diagram (a) below, an adequate amount of light can be obtained as
the laser passes through gap (g) above the workpiece, even if the gap (t) is small. How-
ever, in diagram (b) where gap (t) is small, measurement will be affected. In this case,
therefore, it is necessary to have the system record the full amount of light when there is
no obstruction (workpiece or fixture) in the optical path.
g: Gap for the Photo-electric signal
reference beam
Light amount
cannot be detected
t (insufficient duration)
Workpiece Gap
• Normally the amount of incident light is continuously checked so that the counting
operation can follow the change in the amount of incident light. Have the system record
the light amount following 4.4, “Recording the light amount”. It is also necessary to carry
out this operation twice or three times each year since the light amount of the system may
vary.
• If the amount of light is recorded, temperature drift of the measured data becomes larger.
• The minimum size of gap (t) that can be measured depends on each Measuring Unit as
shown below:
3 - 32 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
LD1 ON
-NG GO +NG RUN BUSY
LD2 ON
BUSY LED
RUN LED
GO/NG judgment LEDs
LD oscillation LED
W.P. (Work Position) LED
No. 99MBC095A 3 - 33
3) Display LED
• W.P. (Work Position) LED
LED segments corresponding to a region shaded by the workpiece, which blocks the
laser beam, will turn off. This is used to check if the workpiece is located in the center
of the measuring region.
• LD oscillation LED
1. LD1 ON : Indicates that the laser in the Measuring Unit connected to the
“TRANSMITTER-1” connector is oscillating. If a dual-unit measurement is not
performed (standard specification), only this LED lights and the LD2 LED is off.
2. LD2 ON : Indicates that the laser in the Measuring Unit connected to the
“TRANSMITTER-2” connector is oscillating. This LED also lights for a dual-unit
measurement.
• GO/NG judgment LED
1. -NG : Turns on if the measured data is -NG.
2. GO : Turns on if the measured data is GO.
3. +NG : Turns on if the measured data is +NG.
• RUN LED
Turns on if a single-run measurement, continuous-run measurement or continuous-run
measurement with a term specification is performed.
• BUSY LED
Turns on each time the measured data is updated.
3 - 34 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
No. 99MBC095A 3 - 35
b) If a measurement is read as the setup data by pressing the READ key or if the entry of a
setup value is started with an arrow key and a numeric key is pressed halfway an operation
error will result. See the example above.
1. Enter the setup mode of the offset function. PROG
The least significant digit of the existing offset value
flashes.
2. Enter the key. PROG
3 - 36 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
• Operation error • Operation error • Inverts the sign of the setup value.
+/-
• Cancels the error that occurred • Aborts the measurement and • Cancels the setup value or resets
when the power was turned on. • returns to the ready state. • it to initial value.
• Cancels the latched state and • Cancels the error state.
C • returns to the ready state. • C + power-on will enter the
• initialization mode of the Display
• Unit.
• Shift key • Operation error • Entry of SHIFT + READ
• To enter the function indicated in
• the upper portion of a double- • (to set the light amount detecting
• function key, such as the • function) is valid when the function
SHIFT STAT
key, hold down the SHIFT
• setup item number flashes in the
S.E • function setup mode.
• before pressing the key.
• A foreground program number will
• flash for about 10 seconds.
• Performs single-run measurement • Results in a single-run • Operation error
DATA C • (even in the display-latched state). • measurement error.
RUN • Quits the measuring operation for
• continuous-run measurement.
• Enters in the mode to cancel the • Operation error • Operation error
DATA C previous measurement result.
SHIFT
RUN • To accept the cancellation and
returnto the standby state, press the
ENT key while “CANCEL” is
blinking in the upper display section.
• Starts continuous-run measurement • Quits the measuring operation for • Operation error
• (even in the display-latched state). • continuous-run measurement
C.RUN
• (same as DATA C ).
RUN
No. 99MBC095A 3 - 37
Key name • In the ready state • At single-run measurement • At setup
• In the display-latched state • At continuous-run measurement • Combined use with power-on
• operation
• Enters the function setup mode. • Operation error • Exits from the function setup mode
• and returns to the ready state.
• Enters the state that is entered just
• after the power is turned on, if in
SET
• the basic setup mode.
• SET + power-on is used to enter
• the basic setup mode.
• Directly enters the setup mode for • Operation error
• Press ENT to complete the setup
• GO/NG judgment.
• operation and return to the ready
• state.
LIMIT
• Press LIMIT or SET to abort the
• setup operation and return to the
• ready state.
• Performs zero-setting (in the • Operation error • Operation error
• positive direction) if an preset value
P.S V • is not set.
P.SET • If an preset value is set, executes
• the preset function with the preset
• value being set.
• Directly enters the setup for • Operation error
• Press ENT to complete the setup
• mastering.
• operation and return to the ready
MASTER • state.
SHIFT
REF MASTER
• Press REF
or SET
• operation for the scale value takes • setup operation and return to the
• place. • ready state.
• Preset can be set. • Operation error • Operation error
P.S V • Pressing the C and
SHIFT
P.SET
ENT keys clear Preset/Zero-set.
3 - 38 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
No. 99MBC095A 3 - 39
Key name • In the ready state • At single-run measurement • At setup
• In the display-latched state • At continuous-run measurement • Combined use with power-on
• operation
• Enters the HIGH CAL setup mode. • Operation error
• (Input of gage diameter) + ENT
• Enters the detection mode of the • Operation error • If this entry is made when the
• measurement position • function setup item number is
• (focal position). • flashing in the function setup mode,
SHIFT READ • which was accessed by the
• Press READ or SET to restore the
SET key, the setup operation for
• ready state.
• the light amount detection is entered.
• This is used to enter the setup mode • Operation error • Move left key
• for the setup item that is being
• displayed in the upper section of the
• display unit.
• Operation error • Operation error • Move right key
3 - 40 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
Each time the key is pressed, while the setup item is flashing, the setup item
will change sequentially: Segment → Measurement interval → Lower
limit value → Upper limit value → Reference value → Preset
→ Mastering →
If the key is pressed, the setup item will change in the reverse order.
As the displayed setup items vary with the results of the basic setup, refer to Section
5.1.1, “Settings made in the measurement mode”
Step 2: If the upper limit value is going to be canceled, PROG
make the guidance flash.
Step 5: If the ENT key is pressed, the upper limit value PROG
is canceled and system operation returns to the
ready state.
Step 6: After making the guidance flash by pressing PROG
the key, press the and ENT keys to
enter the setup mode for the lower limit value.
Step 7: Press the C key to set the display of the lower PROG
limit value to “0” (can be omitted), then enter a
new lower limit value of “12.34500”.
No. 99MBC095A 3 - 41
1) Each time the numeric key is pressed PROG
the corresponding digit will be 1
PROG
4 5
Step 9: If the ENT key is pressed, the setup data of the PROG
upper limit value is saved in memory, then
operation returns to the ready state.
Step 11:Enter the setup mode for the upper limit value PROG
again.
3) Press the ENT key to save the setup data. The PROG
operation will be automatically return to the
ready state.
3 - 42 No. 99MBC095A
3. DISPLAYS AND KEY OPERATIONS
The following describes how to use the arrow keys using step 7 as an example.
1) Now, the setup data of “0” is displayed as a PROG
result of having pressed the C key.
No. 99MBC095A 3 - 43
8) Press the ENT key to save the setup value in PROG
memory.
PROG
+/-
3 - 44 No. 99MBC095A
4 SETTING UP THE
MEASURING CONDITIONS
Set up the various functions as required to customize the system for the
utmost measurement accuracy.
No. 99MBC095A 4- 1
4.1.1 Outline of the basic setup procedure
Basic setup mode (can be entered by pressing the SET key + Power ON)
Ready state
Expanded basic setup mode (can be entered by pressing the 9 key + Power ON)
B0 to B6 General items
Ready state
PROG
Model name 0 1 2 3 4 5 6 7
LSM-500S 0.01 0.02 0.05 0.1 0.2 0.5 1 10
LSM-501S 0.01 0.02 0.05 0.1 0.2 0.5 1 10
LSM-503S 0.02 0.05 0.1 0.2 0.5 1 10 100
LSM-506S 0.05 0.1 0.2 0.5 1 2 10 100
LSM-512S 0.1 0.2 0.5 1 2 5 10 100
LSM-516S 0.1 0.2 0.5 1 2 5 10 100
Model name 0 1 2 3 4 5 6 7
LSM-500S .000001 .000001 .000002 .000005 .00001 .00002 .00005 .0005
LSM-501S .000001 .000001 .000002 .000005 .00001 .00002 .00005 .0005
LSM-503S .000001 .000002 .000005 .00001 .00002 .00005 .0005 .005
LSM-506S .000002 .000005 .00001 .00002 .00005 .0001 .0005 .005
LSM-512S .000005 .00001 .00002 .00005 .0001 .0002 .0005 .005
LSM-516S .000005 .00001 .00002 .00005 .0001 .0002 .0005 .005
Note 1: The shaded figures show the default setting of each Measuring Unit.
Note 2: Resolutions in the columns of " 0" show those which can be obtained from 32 scans.
Resolutions in the columns with " 1" show those which can be obtained from 16 scans.
Note 3: If the number of scans are set between 1 to 8, the least significant digit of a measurement
will be automatically blanked out where resolution is set to No.0, 1, or 2.
Note 4: Note that setting a too large resolution may often reduce the measuring accuracy.
Where the displayed digits are closely intact and difficult to see, set the number of
blank-out digits or mark the thousandth digit function in the basic setup mode: b0.
IMPORTANT Changing the resolution will cancel all the clibration values (HIGH CAL and LOW
CAL), offset value, mastering, abnormal value eliminating limits, GO/NG judgment
criteria, reference value, and setup values for the automatic workpiece detection.
Therefore, changing of the resolution should be carried out first.
PROG
1
PROG
5
Step 2: Press the ENT key to save the setup data in PROG
memory. ENT
The operation automatically proceeds to B1:
Setting the output function in the ready state.
4 - 10 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
TIP If is selected for the workpiece type, the guidance for the selection of the
segment specification method is not displayed. It is omitted (the segment specifica-
tion process is entered directly).
No. 99MBC095A 4 - 11
TIP If is selected to perform ultra-fine wire measurement, setup guidance for the
following will not be displayed: Setting the simultaneous measurement, setting the
dual-measurement, segment setting, setting the automatic workpiece detection
function, and group judgment.
4 - 12 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
No. 99MBC095A 4 - 13
4.1.2.4 Selecting and setting the function in the B3 mode
a. Setting the abnormal value elimination function (Guidance: )
Set whether to use the abnormal value elimination function.
: Does not use the abnormal value elimination function.
: Use the abnormal value elimination function.
If the number of samples has been set, measurement will be finished when the
measured data within the limit value are obtained for the specified sample
number, and calculation is performed only with the within-the-limit data for
displaying the measurement result.
: Use the abnormal value elimination function.
If the number of samples has been set, measurement will be performed for the
specified sample number and displays the measurement result after a calcula-
tion has been performed only with the within-the-limit data. The message
“Err-0” will be displayed if no data is obtained within the limit value.
(Default setting: )
4 - 14 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
NOTE Even if 16 scans are specified in the position detection method, the actual detecting
operation will be performed with a single scan.
No. 99MBC095A 4 - 15
f. Setting the odd-numbered-edge cutting tool measurement function (Guidance : )
Set whether the odd-numbered-edge cutting tool measurement function is used.
: Does not use the odd-numbered-edge cutting tool measurement function.
: Uses the odd-numbered-edge cutting tool measurement function.
This must be selected when the reference edge is located at the Segment 1 side.
: Uses the odd-numbered-edge cutting tool measurement function.
This must be selected when the reference edge is located at the Segment 3 side.
(Initial setting : )
NOTE If one of the following setup items are selected, “ : Does not use the odd-
numbered-edge cutting tool measurement function” will be automatically accepted as
the intended setting without showing the setup guidance for odd-numbered-edge
cutting tool measurement.
1. Where “ : Moving average” is set for the “B1.e. Setting the averaging
method”.
2. Where “ : Ultra-fine wire measurement” is set for the “B2.b. Setting
whether the Ultra-fine wire measurement is performed”.
3. Where “ : Simultaneous measurement” is set for the “B2.c. Setting the
simultaneous measurement”.
4. Where “ , , or ” is set for the “B2.d. Setting the dual measurement”.
5. Where “ : Edge specification” is set for the “B2.f. Selecting the segment
specification method”.
6. Where “ or ” is set for the “B3.b. Setting the workpiece auto-
matic detection”.
TIP For practical measurement examples refer to Section 5.3.6 “Application of the odd-
numbered-edge cutting tool measurement”.
4 - 16 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
No. 99MBC095A 4 - 17
d. Setting the RS-232C communication parity bit (Guidance: )
Set the parity check method for RS-232C communication.
: Does not use parity check.
: Uses odd parity.
: Uses even parity.
(Default setting: )
4 - 18 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
No. 99MBC095A 4 - 19
c. Setting the GO output function from the I/O interface (Guidance: )
Set whether the GO output from the Analog I/O Interface is used as GO, STB (strobe), or
ACK (acknowledgment). This selection does not apply to the Second Analog I/O Inter-
face, since it has its specific output port. For information about each signal, refer to
Section 6.1.1, “I/O Analog Interface”.
: Used as a GO output.
: Used as a STB output.
: Used as an ACK output.
(Default setting: )
4 - 20 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
IMPORTANT • If expanded items (of the mode of B7) that are not required are displayed, cancel
the display by setting in place of for the expanded item setup.
• For setting in the space for additional function always select which is the
default or . If this setting is carelessly modified, this Unit will operate
unexpectedly such as to disable any measurement.
c. Reservation (Guidance: )
(Default setting: ) PROG
d. Reservation (Guidance: )
(Default setting: ) PROG
No. 99MBC095A 4 - 21
Step 1: Enter a value with numeral keys while the setting PROG
is flashing.
Step 2: Press the ENT key while an entered value is
flashing. After the entry is made, the next setting
item will be displayed.
f. Setting for detecting dirty protection glass (Guidance: )
Sets the function for detecting dirty protection glass. (Functions at power on.)
If the protection glass is dirty, will be displayed. This error display can be
cleared by pressing the C key. The ready state will be entered.
If the protection glass is found to be dirty, refer to Section 8.2, "Measuring Unit".
A warning will be issued if the protection glass has become too dirty and measuring
accuracy will be affected. To ensure precision measurements, clean the protection glass
before any warning is likely to be issued.
: No use of the dirty protection glass detection function.
: Use of the dirty protection glass detection function.
(Default value: )
Step 1: Setting changes between and at PROG
each entry of .
Step 2: Press the ENT key while the setting is flashing.
After the entry is made, the next item to be set
will be displayed.
NOTE A very small workpiece (e.g., smaller than 0.05 mm for the LSM-500S) is likely to be
regarded as a piece of dirt. If a very small workpiece is to be measured, perform a
check with the workpiece removed.
4 - 22 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
No. 99MBC095A 4 - 23
m. Setting the application range of calibration (Guidance: )
Select the range of applying the calibration from “All programs” and “For each channel”.
: Applies uniformly to the entire programs.
: Applies individually to each channel (for every 10 program).
(Initial setting: )
Step 1: Each time the key is pressed, the selection PROG
item will change sequentially as follows:
→
Step 2: If the ENT key is pressed while the target
selection item is blinking, the current setup is
accepted and the operation will automatically
proceed to the next setting.
NOTE When is selected, any programs corresponding to the channel number other
than the one on which the calibration has been performed will take the settings at
shipment, i.e. without being calibrated.
4 - 24 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
4.2 Calibration
The LSM system can be calibrated quite easily and with high accuracy.
No. 99MBC095A 4 - 25
(4) Setting the HIGH CAL gage.
HIGH CAL gages vary in shape depending on the LSM model to be calibrated. Set the
calibration gage so that the calibration guide line ( | ) on the side face of the calibration
gage comes vertical, and so that the center of the calibrated section is measured.
In diagram (a), the calibrated position is at the center of the ( | | ) mark, and the center of
the width (indicated by the arrow mark) in diagram (b).
(a) (b)
ENT
4 - 26 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
Step 4: If the ENT key is pressed to save the HIGH CAL PROG
setup value in memory, the operation automati-
cally returns to the ready state.
Step 8: If the ENT key is pressed to save the LOW CAL PROG
setup value in memory, the operation automati-
cally returns to the ready state.
No. 99MBC095A 4 - 27
IMPORTANT Calibration
1. Before performing a calibration, always perform the necessary setup for the
resolution and dual-unit measurement. If this order is reversed, the set calibration
value may be canceled and the measurement accuracy is not guaranteed.
2. Canceling the HIGH CAL value will also cancel the LOW CAL, offset, and master-
ing values.
3. With only a LOW CAL setup value the compensation calculation does not take
place. This calculation will start when a HIGH CAL (or HIGH CAL and LOW CAL)
value is set.
If a HIGH CAL value is set, the CAL guidance ( ) will turn on in the display unit.
4. A calibration gage is important in that it is critical to the accuracy of the Measuring
Unit. Wipe dust and oil from the gage with a cloth soaked in alcohol or thinner
before using it.
After use, apply a rust preventive oil to its surfaces and store it carefully in a
dedicated case.
5. To confirm the HIGH CAL or LOW CAL setup value, press either the H.CAL or
L.CAL key to enter each setup mode, and press the H.CAL (and SET ) or L.CAL
(and SET ) key to exit to the ready state after the confirmation is over. Do not
perform the setup operation in the confirmation process of the setup data.
6. On the user-supplied calibration gages, the dimensional ratio of a High CAL gage
to a Low CAL gage should be greater than 1.2. Calibration performed with the
calibration gages with diameters that are too close each other may reduce the
measuring accuracy. The calibration gage should be the one which is made of the
same or similar material as that of the workpiece. If a calibration gage of different
material is used, error may be involved in measurement due to the difference in
surface textures or properties.
7. For calibration measurement, no restriction exist for segment specification. If a
gap or displacement needs to be precisely measured, a thickness gage can be
used for calibration. (There will be a slight difference in measured data between
those from OD and gap depending on the segment specified for calibration.)
4 - 28 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
D
B
4.4 How to read-in the amount of light
For measurement of the fine gap where the light passing through it can not be sufficiently
secured it is necessary for the system to read-in the amount of light. For more information
refer to Section 3.2.16, “Recording in the amount of light”.
Step 1: Removal of obstructions
Remove any objects (workpiece and fixture) that obstruct the laser path before
reading in the amount of light.
Step 2: Enter the function setup mode from the ready PROG
state.
Step 3: Press the SHIFT and READ keys while the function PROG
setup number is flashing to enter the light amount
check mode.
Each time the key is pressed the setup
option toggles between (automatic
detection) and (reading in the amount of
light).
No. 99MBC095A 4 - 29
NOTE • Conduct this operation two to three times a year to prevent a change in light
intensity from affecting the measurements.
• Execute this operation as necessary if measurements are significantly affected by
temperature drift.
4 - 30 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
Ready state
SET ( SET SET )
SET
In the basic setup mode, first set whether the workpiece is an opaque or transparent object. If it is an
opaque object, then it is possible to specify the number of segments and edges to be measured.
In the basic setup mode either of the two setting methods can be selected.
In the basic setup mode either of the three setting methods can be selected.
In addition, if the abnormal value elimination function will be specified, the limits
for this abnormal value elimination should be set prior to other setup items.
In the basic setup mode it is possible to copy the setup data of a target value to the reference value.
If this is done the setup guidance for the reference value is not displayed.
¥ Gain: (1 to 3)
No. 99MBC095A 4 - 31
Function No. Setup contents
F6 Setting the sample measurement Note1
PROG
4 - 32 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
No. 99MBC095A 4 - 33
4.5.3.1 F0: Setting the segment
Use this function to set the measurement position (segment). The segment specification and
edge specification methods are provided for this purpose. Both can be selected in the basic
setup.
If this setup mode is entered, the previously established data will flash.
Step 2: Press the ENT key to save the setup data PROG
in memory. ENT
Operation automatically proceeds to the
measurement interval setting.
4 - 34 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
2) Edge specification
Step 1: If the edge specification mode is entered, the PROG
previously established manual measurement/
automatic measurement item will be displayed.
TIP 1. If a calibration is performed using the reference gage (placed in SEG2) with the
edge specification active, select Manual measurement: or Automatic
measurement for diameter: , then set the start edge to 2 and end edge to 3.
2. If the checks on the start and end edges, performed at the end of the setup
operation, result in start edge > end edge, exchange the start and end edge data.
If the check result shows that both edge numbers are identical, an error (Err-5)
results. If this occurs, cancel the setup data and begin the setting with the start
edge.
No. 99MBC095A 4 - 35
4.5.3.2 F1: Setting the measurement interval (measurement time)
Use this function to set the measurement interval. This measurement interval should be set
according to the arithmetical average and moving average, whichever is specified in the basic
setup.
1) Arithmetical average (Guidance: )
Each time the key is pressed, the setup option changes in the following order:
→ → → → → → → → → →
→ → . For this example select 1024 times.
Step 2: Press the ENT key to save the setup data in PROG
memory. ENT
The operation automatically proceeds to F2:
Setting the GO/NG judgment criteria.
4 - 36 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
NOTE 1. If “Performing ultra-fine wire measurement” is specified in the basic setup, be-
tween 16 and 2048 times should be selected.
2. A larger number of scans for averaging will improve the repeatability.
If measuring time permits, set the greatest number of scans for averaging pos-
sible.
3. If the number of scans for averaging is set to between 1 and 4, the scan signals
will be thinned for the measurement. This results in a measurement interval of
0.002 to 0.003 second.
No. 99MBC095A 4 - 37
4.5.3.3 F2: Setting the GO/NG judgment criteria
Set the GO/NG judgment criteria according to the tolerance judgment method: (Lower limit
value + Upper limit value), (Multi-stage selection: 7 stages), and (Target value + tolerance),
whichever is specified in the basic setup. If “Using the abnormal value elimination function”
has been specified, the abnormal limit values should be set prior to setting the GO/NG
judgment criteria.
In this example assume that the machining target value is 12.5 +/- 0.01 mm, and that all the
abnormal limits (lower and upper) and GO/NG judgment criteria are canceled (set to 0).
1) Setting the abnormal limit values
Set as follows: Lower abnormal limit = 12.48 mm, Upper abnormal limit = 12.52 mm,
Abnormal value count = 3.
PROG
1 2 . 4 8
Step 5: Enter “3”, which is the setup data for the PROG
abnormal value count. 3
4 - 38 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
2) GO/NG judgment criteria setting (by “Lower limit value and upper limit value”)
In this example assume that the lower limit value is 12.49 mm and that the upper limit
value is 12.51 mm.
PROG
1 2 . 4 9
No. 99MBC095A 4 - 39
3) Setting the GO/NG judgment criteria (by multi-limit selection)
In this example assume the following:
L1=12.49mm
L2=12.494mm
L3=12.498mm
L4=12.502mm
L5=12.506mm
L6=12.51mm
PROG
1 2 . 4 9
PROG
1 2 . 5 1
4 - 40 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
PROG
1 2 . 5
PROG
+/-
No. 99MBC095A 4 - 41
4.5.3.4 F3: Setting the reference value
Set the reference value and/or scale value here. If “Copying the target value to the reference
value” has been specified in the basic setup, the setup guidance for the reference value will
not be displayed, however, setting the scale value is permitted.
In this example assume that the reference value is 12.5 mm, and the scale value is 1.
4 - 42 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
No. 99MBC095A 4 - 43
Table 2: Inch unit (E=25.4 mm) (The upper limit of the analog output must be within the
range of actual measurements)
4 - 44 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
PROG
1 2 . 5
No. 99MBC095A 4 - 45
NOTE How to use the preset function
1. To obtain an preset value, it is necessary to set up the reference gage in place
(the preset value is a compensation value determined from the measurement of
the reference gage). This preset setup takes about 1 second.
2. If the existing setup value is applied, it is not PROG
necessary to carry out the preset. To force the
preset operation using the same data, move the
highlighted digit place with the key. This
makes the preset carried out, since the system
judges the data is changed.
For this operation press the P.S V/P.SET key in the
ready state. With this single key operation preset
will be carried out.
3. So that the maximum displayable range is not exceeded during measurement, the
preset value must be set well within the maximum value shown in the table below.
If measured data exceed the maximum value, “9999999” will be displayed.
Resolution (µm) Maximum value (mm) Resolution (E) Maximum value (E)
.000001/.000002/
0.01/0.02/0.05 ±89.99999 ±8.999999
.000005
0.1/0.2/0.5 ±899.9999 .00001/.00002/.00005/
±89.99999
1/2/5/10/100 ±8999.999 .0001/.0002/.0005/.005
4 - 46 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
RS-232C
Data output condition GP-IB Printer Remark
DCU
0
1 The periodical output timer can be set
2
3 The periodical output timer can be set
4
5 The periodical output timer can be set
6
7
8
9
: Outputted for each measurement if DATA C/RUN or C.RUN key, etc., is pressed.
: Press the DATA C/RUN or C.RUN key to trigger the measurement. The measurement result will be outputted if it
falls on GO.
: Press the DATA C/RUN or C.RUN key to trigger the measurement. The result will be outputted if it falls on –NG.
: No output will be made.
Step 4: Press the ENT key to save the setup data in PROG
memory.
The operation enters the sample measurement
setting.
No. 99MBC095A 4 - 47
4.5.3.8 F6: Setting the sample measurement
Set the conditions for the sample measurement here.
1. Where “Odd-numbered-edge cutting tool measurement function” has been set to
“Disable ( )” in the Basic setup.
For this sample measurement use single-run measurement or continuous-run measurement,
and select either 0, 1 , or 2 to 999 samples.
In this example assume that the number of samples is 50, and the statistical item is range.
4 - 48 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
No. 99MBC095A 4 - 49
4.5.3.9 F7: Automatic workpiece detection setting
Set the conditions for automatic workpiece detection here.
Select between 0 (no automatic workpiece detection) and 999 measurements, and select
between 0 to 9999 ms for the invalidation period.
In this example assume the following:
Number of measuring times =1, Invalidation period = 100 ms (0.1 sec), Lower detection limit
= 12.2 mm, Upper detection limit = 12.8 mm.
4 - 50 No. 99MBC095A
4. SETTING UP THE MEASURING CONDITIONS
Step 3: Select the objective statistical item, Each time the PROG
key is pressed, the setup option will change
in the following order: → →
→ . Since “mean” is to be set in this
example, no key input is necessary at this step.
Step 5: Set the group lower limit in the manner similar to PROG
that of the lower limit setting. Press the ENT key
and the operation automatically proceeds to the
group upper limit setting.
Step 6: Set the group upper limit in the manner similar to PROG
that of the upper limit setting. Press the ENT key
and the operation automatically proceeds to the
segment setting, which is the first stage of this
function setup.
No. 99MBC095A 4 - 51
4.5.3.11 Confirming the function setup contents
Every setting that has been made in the function setup mode can be confirmed using the
ENT key without affecting the existing setup data.
Step 1: In the ready state press the SET and ENT keys PROG
to enter the segment setup mode.
Step 2: Each time the ENT key is pressed, each piece of setup data for segments through
group judgment will be displayed sequentially. Record these data in the List of
Function Setups, at the end of this user's manual.
Step 3: Press the SET key twice to return to the ready state.
4 - 52 No. 99MBC095A
5 MEASUREMENT MODE
Perform your measurement according to the basic setup and measuring
conditions specified.
This chapter describes the items which can be set in the ready state and
gives measurement examples.
PROG
PROG
PROG PROG
PROG PROG
PROG
PROG
Step 2: Each time the key is pressed, the setup guidance for each setup item changes
in the following order: ( → )→
( )→( → )→ → ( →• • • or →
→ )→( )→ →( )→( → ). Press the
ENT key when the desired setup option is flashing. Press the key to reverse
this order.
Step 3: Modify the setup data. The method used to enter data is the same as that used in the
function setup mode.
For practice, modify the preset value from 12.5 mm to 12.34567 mm.
The previously set data is displayed and its least significant digit is flashing.
Enter “12.34567”.
PROG
1 2 . 3 4 5 6 7
TIP 1. In simultaneous measurement the upper section of the display unit shows a
background measurement. However, the setup mode for the foreground program
can be entered by pressing the key.
2. In single measurement, if an important setup item being displayed in the upper
section of the display unit is retained, confirmation of the measuring object and
modification of the setup data is easy.
3. If the SET key is pressed halfway in the setup operation, the operation is sus-
pended and the ready state is restored. This can be used to confirm the setup
data.
4. The last setup item made will be displayed first.
5) LOCK/UNIT key
This key is used to enter the modification mode of the unit of PROG
measurement. If the metric unit is currently being used,
will be flashing; and if the E unit is currently being used,
will be flashing.
If the ENT key is pressed, the unit is changed to that which is currently flashing, then
operation returns to the ready state.
If the LOCK/UNIT key or SET key is pressed halfway in the setup operation, the setup
operation is aborted, and operation returns to the ready state.
The metric to E (1 E = 25.4 mm) conversion table is shown below.
E .0 0 0 0 0 1 * . 0 0 0 0 01 . 0 0 0 0 02 .0 00 0 05 . 0 0 0 01 . 0 0 0 02
E .00005 . 0 0 01 . 0 0 02 . 0 0 05 .005 Ð
Note 1: Theoretically, conversion of a value with an asterisk ("*") into the E system results in a value
of .0000005. On this LSM, the value will be converted into a resolution of .000001.
Note 2: For information about the resolutions that can be selected for each Measuring Unit refer to
Section 4.1.2.1, "Selecting and setting the function in the B0 mode".
PROG PROG
• The displayed value is not defined, but a value that is proportional to the beam diameter at
the measuring position.
Since the measurement is defined at the focal position where the displayed value is the
smallest, take measurements at a position as close to the focal position as possible.
If the measured position is off the focal position, the measurement accuracy will be
reduced.
PROG
Measuring position on Measuring Unit 2
• Check the measurement position in the up/down direction with the W.P. LED.
Record of analog output will facilitate process analysis. Record of analog output
TIP Through the basic setup the following functions are made available in addition to
those above.
1. The display value can be held while the HOLD signal is on, by specifying “HOLD”
input for OFFS signal input of the I/O interface.
2. The analog output signal voltage representing the wire breakage (Err-0) can be
selected from 0V, +5V, and -5V.
5 - 10 No. 99MBC095A
5. MEASUREMENT MODE
• Measurement
Press the C.RUN key. PROG
“ ” is displayed and continuous-run
measurement starts.
Provided that edges 1 through 82 are detected within
-NG GO +NG RUN BUSY
the measuring region and that the measurements of the
edges 2 and 3 are within the detection range, the system
recognizes the workpiece presence and starts actual
measurements after the elapse of invalidation period.
No. 99MBC095A 5 - 11
5.3.4 Applied Measurement with Preset/Zero-Set Functions
The preset function can be applied for converting Laser scan direction Segment 1
the reference gage dimension to a nominal dimen-
sion (Figure a). Segment 2
øD
In Figure a set the preset direction to “0” (positive).
Example of [figure a] Segment 3
[Figure a]
Let D = 20.0005 ± 0.0015 mm
• Basic setup
Set up according to the requirement.
• Function setup
1. Segment = 2
2. Number of scans for averaging = 512
3. GO/NG judgment
a. Lower limit
= 19.9985 mm
b. Upper limit
= 20.0015 mm
4. Preset
a. Set the nominal dimension of the gage to 20.0 mm.
b. Direction = 0 (positive)
• Measurement
The ready state display appears as shown at the right PROG
before the preset is set.
TIP 1. To re-activate the preset function using the existing preset value and direction,
press the P.S V/P.SET key. With this single key operation, preset can be achieved.
2. It is possible to obtain a deviation from the reference gage by presetting (zero-
setting) it to “0.0”.
5 - 12 No. 99MBC095A
5. MEASUREMENT MODE
(negative).
L
Example of [figure b] Workpiece
Let L = 50.0 ± 0.01 mm
Reference surface
• Basic setup
[Figure b]
Set up according to the requirement.
• Function setup
1. Segment = 1
2. Number of scans for averaging = 512
3. GO/NG judgment
a. Lower limit = 49.99 mm
b. Upper limit = 50.01 mm
4. Preset
a. Set to 50.0 mm.
b. Direction = 1 (negative)
• Measurement
The ready state display appears as shown at the right PROG
before the preset is set.
Since the preset has not been set, the gap of segment 1
is measured.
-NG GO +NG RUN BUSY
No. 99MBC095A 5 - 13
3. Applied measurement of preset 3
Set the preset value to 250.0 mm. Since this is a gap PROG
measurement, set the direction to 1 (negative).
5 - 14 No. 99MBC095A
5. MEASUREMENT MODE
No. 99MBC095A 5 - 15
5.3.5 Sample measurement
In addition to the diameter, a roller in a paper-
feed mechanism requires a high machining Knife-edge
accuracy with respect to both the roundness and
cylindricity. Segment 1
Runout: T
5 - 16 No. 99MBC095A
5. MEASUREMENT MODE
• Measurement
In the ready state the gap dimension of segment 1 is PROG
displayed.
No. 99MBC095A 5 - 17
5.3.6 Application of the odd-numbered-edge cutting tool measurement
Segment 2
and end mills) using normal Segment 2,
(maximum value)
Segment 2+3
measurement errors will be produced.
øD
Therefore, in this case, use the “Odd-
numbered-edge cutting tool measurement
function” for measurement.
Error Segment 3
Calculate the target outside diameter from (minimum value)
the data collected with the “Sample mea-
surement” while the workpiece was rotating.
Reference bar
This method can be applied to any outside
diameter measurement of even-numbered-
edge cutting tool and gear teeth, etc. beside
an odd-numbered-edge cutting tool.
(*1): At the stage when “ ” is set from the “Calculation item”, the available
segments will be automatically set and the guidance for that item will not be dis-
played any more.
(*2): It is necessary to measure the workpiece (odd-numbered-edge cutting tool) while
rotating it. Determine the number of averaging times depending on the number of
workpiece revolutions.
(In this example it is assumed that the number of workpiece revolutions is approxi-
mately 4 rpm.)
5 - 18 No. 99MBC095A
5. MEASUREMENT MODE
• Measurement:
Step 1: In the stand-by state the indicated value includes PROG
errors (i.e. it is smaller than the actual dimension),
since the measured value of Segment 2 is displayed.
At this stage begin rotating the workpiece.
-NG GO +NG RUN BUSY
Measuring time
Number of averaging times Number of workpiece revolutions
(Time required for one revolution)
32 16 rpm approx 3.8 sec
64 8 rpm approx 7.5 sec
128 4 rpm approx 15 sec
256 2 rpm approx 30 sec
512 1 rpm approx 60 sec
1024 0.5 rpm approx 120 sec
• The more the number of averaging times, the repeatability will be more stable. In
order to measure at a highest accuracy, set this number of averaging times as
large as possible (the number of revolutions is as small as possible).
No. 99MBC095A 5 - 19
5.3.6.2 Odd-numbered-edge cutting tool run-out measurement
Measure the run-out of the cutting edge of the odd-numbered-edge cutting tool as follows.
As shown in the figure below, set the measuring rage so as to separately contain each cutting
edge.
Measure the minimum value of Segment 3 in each edge measuring range through the
“Sample measurement”.
Calculate the range (maximum - minimum) of the measured data as many as the number of
cutting edges being set, and display the result as the measured data of “Run-out”.
This method can be applied to any run-out measurement of even-numbered-edge cutting tool
and gear teeth (teeth tips), etc. beside an odd-numbered-edge cutting tool.
Segment 3
(Minimum value)
Measuring range of
cutting edge 1
Reference bar
(*1): At the stage when “ ” is set from the “Calculation item”, the available
segments will be automatically set and the guidance for that item will not be dis-
played any more.
(*2): It is necessary to measure the workpiece (odd-numbered-edge cutting tool) while
rotating it. Determine the number of averaging times depending on the number of
workpiece revolutions.
(In this example it is assumed that the number of workpiece revolutions is approxi-
mately 4 rpm.)
5 - 20 No. 99MBC095A
5. MEASUREMENT MODE
• Measurement:
Step 1: In the stand-by state the indicated value includes PROG
errors (i.e. it is smaller than the actual dimension),
since the measured value of Segment 2 is displayed.
Set the start point of “Measuring range of cutting
-NG GO +NG RUN BUSY
edge 1” to the measuring point.
TIP For the relationship between “Number of workpiece revolutions” and “Number of
averaging times” refer to Section 5.3.6.1 “Odd-numbered-edge cutting tool outside
diameter measurement”.
No. 99MBC095A 5 - 21
5.3.7 Applied measurement with automatic workpiece detection
If a workpiece of the specified range of dimension enters the measuring region, measurement
will be automatically started.
L
a b
D = 5.0 ±0.0015 mm, L = 12 mm, chamfer a = 0.5 mm, b = 0.5 mm, and V = 50 mm/s.
• Basic setup
Select the OD detection method for automatic workpiece detection, and specify 16 for the
detecting speed (number of scans).
• Function setup
1. Segment = 2
2. Number of scans for averaging = 512
Set to the maximum value of (Measurement interval) < (L- 2a) / V.
3. GO/NG judgment
a. Lower limit = 4.9985 mm
b. Upper limit = 5.0015 mm
4. Analog output
a. Reference value = 5.0 mm
b. Scale value = 1
To be set if used.
5. Automatic workpiece detection
a. Number of measurements n = 1
b. Invalidation period t = 50 ms
t > (a / V)
c. Lower detection limit L = 4.9 mm
Set using the dimension excluding the chamfered portion.
d. Upper detection limit H = 5.1 mm
5 - 22 No. 99MBC095A
5. MEASUREMENT MODE
• Measurement
The diagram at the right indicates that no workpiece is PROG
present in the measuring region in the ready state.
No. 99MBC095A 5 - 23
5.3.8 Applied measurement on a stepped round bar
In this example 10 stepped round bars are measured øA øB
and the results are statistically processed. If ±NG
measurement is obtained, it will be automatically
printed out.
In the figure at the right suppose the following:
øA: ø6 ±0.01 mm
øB: ø10h70-0.015 mm
• Basic setup
1. Set the resolution to 0.1 µm.
2. Specify the RS-232C port as the printer port.
• Function setup
• Measurement PROG
Perform a single-run measurement for the A dimension
by program No.00 after setting the workpiece in place.
The measured data will be displayed and the GO/NG
-NG GO +NG RUN BUSY
judgment result will be outputted.
5 - 24 No. 99MBC095A
5. MEASUREMENT MODE
Each time the ENT key is pressed, the statistical processing item changes in the following
order: Number of samples: → Standard deviation: → Maximum value: →
Minimum value: → Mean: → Range: → Number of samples: .
STAT. DATA
PROGRAM NO. = 1
N 10
AVG 9.993,6
MAX 10.000,1
MIN 9.984,9
R 0.015,2
S.D 0.006,99
No. 99MBC095A 5 - 25
MEMO
5 - 26 No. 99MBC095A
6 INTERFACE UNIT
This chapter describes the setup method and functions provided with the
I/O analog interface and RS-232C interface of this unit.
B1 B6
2.7KΩ
Connected to the inside (+24V)
Input signal
(OFFS, RUN, RES)
• Input low-level signals between 0 and 1 V. Generally drive this circuit with an open
collector-type transistor.
• Maximum current drawn from the input signal terminal is 12 mA.
51Ω
Output signal
(GO, -NG, +NG, STS)
GND
TIP 1. If “Err-0” (specified workpiece not present) occurs, the following remedies are
taken:
• ±NG and GO signals are turned OFF if this error occurs.
• Single-run measurement and zero-run measurement will be terminated without
outputting the results.
• During continuous-run measurement or continuous-run measurement with term
specification ACK remains ON. The measurement can be resumed after “Err-0” is
rectified.
2. Connecting the second I/O interface will disable the input circuit/output circuit of
the standard interface.
(Analog output can be used.)
Signal lines
To FG Shielding wire
• Observe the following precautions when relays are used for control circuits. Use
the following diagram when designing the control circuit.
1. Several kV of current may be induced the moment the relay is turned OFF,
which may cause relay-driven components to be damaged. Or, the induced
voltage may cause the system to malfunction. Always insert protective compo-
nents such as diodes in the circuit.
2. To drive equipment that operates on alternative current, always implement a
protective circuit (spark killer) to protect the relay contacts. In general, if the
current load is caused by induction, add protective circuit (A) or (B).
3. Refer to the manual of each relay for selection. It describes the method of
calculating the protection circuit (or selection of protective parts) depending on
the load.
+24V
R1
GO/NG judgment result output R2
Q1
D1 K K Load
(A) (B)
GND
0V
Recommended values:
Suppose that the sensitivity of a relay is 50 mA, the following design is recom-
mended:
• R1: 4.7 kΩ, R2: 4.7 kΩ
• Q1: 2SA953 (Manufacturer: NEC, etc.)
• D1: 10D10 (Manufacturer: Japan Inter, etc.)
STB TSO
TAD
TDO
GO, ±NG
• Zero-run measurement
RES
TIN TIN
RUN
TAD TAD
ACK
STB TSO
TDO
GO, ±NG
• Continuous-run measurement
RES
TIN TIN
RUN
TAD TAD
ACK
TBO TBC TBC
STB
TSO TSO TSO
TDO
GO, ±NG
RUN
ACK
STB
TSO TSO
TDO TDO
GO, ±NG
HOLD
TIN or more
• Response time
• Other
1. Use negative-true logic pulses of TIN or more for the input signals.
2. RES signal clears the previous measurement result and interrupts the measuring
operation.
3. Simultaneous input of multiple signals is not accepted.
4. During measurement only RES, RUN or HOLD signals are accepted.
NOTE 1. Zero-run measurement is enabled only if the RUN input is set to “S.RUN” in the
basic setup.
2. While the HOLD signal is ON, the GO, ±NG, STB and analog output signals are
held without being updated.
6.1.2.1 Specifications
• Applicable plug connector: D-sub 9 pin (Female) (Manufacturer: AMP, HD-20/747951-
1)or equivalent.
1 5
6 9
• Communication specifications
TIP 1. DTR and RTS signals from the LSM will be ON immediately after power on.
2. DSR signals to the LSM are always ignored.
Example 2 Flow control method (handshake method controlled by CTS, DSR, DTR, and RTS signals)
Personal computer (PC-9801) LSM: specified as a terminal (DTE)
specified as a terminal (DTE)
Example 3 3-Wire method (teletype protocol using TxD, RxD and SG)
Personal computer (PC-AT compatible) LSM: specified as a terminal (DTE)
specified as a terminal (DTE)
*1: Pin Nos. 4 and 6 of the printer-side connector are internally connected.
*2: Possible to use a straight-type cable (In this case, it is not necesary to install wirings
shown by the dotted lines) .
NOTE 1. The signals names and pin assignment described here may be different from that
of the user’s devices. Refer to the user’s manual of your own device when
making connections.
2. For this connection always use cables that have a shielding net. Both ends of this
shielding net should be connected (grounded) to the RS-232C connector case.
If the system malfunctions due to external interference noises or high frequency
noise emitted by the system causes interference on radios, TVs, or other, use
shielded wires with mesh.
• This section describes the reception commands used by the RS-232C and GP-IB interfaces
and the response (transmission) commands that correspond to the reception commands.
The data section of each command consists of ASCII codes.
• The GP-IB commands includes additional “SRQ”, “NSRQ”, and “PR” commands.
• Use the following command subscriptions, symbols and supplement descriptions when you
read Section 6.1.2.5 “List of commands”.
6 - 10 No. 99MBC095A
6. INTERFACE UNIT
• Command symbols
TIP 1. To ensure compatibility with the LSM-6100 Display Unit, this system ignores the
following commands without treating them as ER6, but uses “OK”.
• Memory switch command (UP0 uvxyz, UP1 uvxyz, UP2 uvxyz)
• The MNL command is assumed to be identical to the MNH command.
2. If the setup data is “0”, it allows the corresponding function to be disabled. To set
“0” as a numerical value, use “0.0”.
Example 1 “SET, PS0” ................... Preset function is disabled.
Example 2 “SET, PS0.0” ................ Preset function is enabled.
3. Setup data or measured data is denoted by ±ddd.dddd.
• The first (most significant) digit is a sign. For commands that do not specifically
designate the polarity, such as the calibration command, only a positive sign is
accepted. However, these positive signs do not have to be specified.
• Any decimal place is selectable.
An integer can be entered without using a decimal point.
4. “Ppp” command can be appended to the following commands to be treated as a
single command: “SET”, “R”, “CR”, “STAT”, “RP”.
Example: P00, R
P06, STAT
In order to change “Ppp” (5.Program Number) with “Pp”, which is compatible with
old model, change the setting of Expanded basic setup from “7PRGM” to “10”.
No. 99MBC095A 6 - 11
6.1.2.5 List of commands
6 - 12 No. 99MBC095A
6. INTERFACE UNIT
No. 99MBC095A 6 - 13
6.1.2.6 List of response commands if an error occurs
Remark: “ER6” or “ER9” may occur in the first communication right after the start up. If this happens, repeat the command transmission of
“CL” until the reception of “OK” is confirmed.
6 - 14 No. 99MBC095A
6. INTERFACE UNIT
be appended.
b. Where the reference value is set, a deviation (, DEV±ddd.dddd) is appended.
This deviation value is derived from (Measured data - Reference value).
c. In the simultaneous measurement the foreground measurement is followed by the
background measurement after a comma (,) is inserted between them.
d. On the GP-IB, SRQ (or NSRQ), LOCAL (or REMOT) is added after ST depending on∆
b. MNnnnn → MNHnnnn
c. LL ~ LH ±ddd.dddd → N ±ddd.dddd, LO ±ddd.dddd, UP ±ddd.dddd
∆ ∆ ∆ ∆ ∆ ∆
e. PS ±ddd.dddd
∆ → PSM ±ddd.dddd ∆
RNGddd.dddd,S.Dddd.dddd
• “nnnnnn” implies the number of statistical data pieces, which is maximum 100,000. Data
pieces that exceed this limit will be excluded from the statistical data.
4) (RA FORMAT) : Data format for automatic workpiece detection AUT, Nmmm, Dtttt,
L±ddd.dddd, H±ddd.dddd
No. 99MBC095A 6 - 15
6.1.2.8 Other commands
2) Each of the D, R, CR, RP, STAT, and RA commands can be appended with an “*”.
If appended with an “*”, these commands have a fixed data length that is not zero-sup-
pressed.
6 - 16 No. 99MBC095A
6. INTERFACE UNIT
(1) CL
(a) Format: CL
(b) Description: Functions same as the C key on the Display Unit.
This releases the error state, performs single-run measurement, zero-run
measurement, continuous-run measurement, and releases the measurement
result display latch.
(c) Example: Reception command CL
Transmission command OK
(2) MM, E
(a) Format: MM
E
(b) Description: MM: Sets the display unit to mm.
E: Sets the display unit to E (inch).
(c) Example: Reception command MM or E
Transmission command OK
(3) P
(a) Format: Ppp (pp: program number)
(b) Description: Program number is changed to the specified one.
(c) Example: Reception command P05
Transmission command OK
(4) HC, LC
(a) Format: HC+ddd.dddd
LC+ddd.dddd
(b) Description: Calibrates the LSM.
If the supplied gage is set in position and this command is executed, the
proportion of the actually measured gage dimension to the entered value is
calculated and the resultant constant is stored in memory, then the “OK”
response will be issued. It requires several seconds.
(c) Example: Reception command HC24.0005 Transmission command OK
Reception command LC 0.9995 Transmission command OK
(d) Supplement: Negative setup data results in ER2
No. 99MBC095A 6 - 17
(5) SG sssssss, SG aaa-bbb
(a) Format: SG sssssss (sssssss: SEG No. Number of digits should be between 1 and 7.
Duplicated number must not be specified.)
SG aaa-bbb (aaa: start edge, bbb: finish edge. The range is between 1 and 255
for both edges. However, aaa should not be identical to bbb.)
(b) Description: Setting the segment (measuring position).
Two types of setting are available; segment specification and edge specification.
(c) Example: Reception command SG2 Response command OK
Reception command SG2-65 Response command OK
(d) Supplement: • Segments and edges should be set in the basic setup.
• sssssss can be set with 7 digits or less.
Ex.) SG 1234567, SG 24, SG3, etc.
• aaa and bbb should be set within 3 digits.
Ex.) SG1-2, SG 2-33, SG 111-255, etc.
The order of the start edge and finish edge can be reversed.
(6) MN
(a) Format: MN nnnn (nnnn: Number of scans, between 1 and 2048)
(b) Description: Set the averaging method to the arithmetical average, and specify the number
of scans to nnnn (2n, where n= 0 to 11).
(c) Example: Reception command MN 1024
Response command OK
NOTE The number of scans must be between 16 and 2048 if the ultra-fine wire measure-
ment is specified in the basic setup.
(7) MNH
(a) Format: MNH nnnn(nnnn: Number of scans, between 32 and 2048)
(b) Description: Set the averaging method to the moving average, and specify the number of
scans with nnnn. nnnn is 2n, where n= 5 to 11.
(c) Example: Reception command MNH 1024
Response command OK
(d) Supplement: MNL command is as same as MNH command
(8) STR
(a) Format: STR
(b) Description: Data that has been set by the RS-232C command will be erased from memory
if the power is off. To retain the data after the power off, use this command to
save the critical measuring conditions in memory. But the “ST” and “NST”
command will not be saved.
(c) Example: Reception command STR
Response command OK
(9) LOCK
(a) Format: LOCK
(b) Description: Locks the keyboard of this machine to prevent accidental operation.
To release this key lock state, use the UNLOCK command.
(c) Example: Reception command LOCK
Response command OK
(d) Supplement: Lock set by this command can not be released with key operation.
6 - 18 No. 99MBC095A
6. INTERFACE UNIT
(10) UNLOCK
(a) Format: UNLOCK
(b) Description: Releases the key lock state and enables key operations again.
(c) Example: Reception command UNLOCK
Response command OK
(11) SHL
(a) Format: SHL pp (pp: threshold level, 5 to 95%)
(b) Description: If “Performing the ultra-fine wire measurement” is specified in the basic setup,
designating this command results in ER6.
Used to measure such as the width of a tape, which has a good transparency.
(c) Example: Reception command SHL 50
Response command OK
(d) Supplement: Refer to Section 3.2.4.1, “Transparent object (Workpiece that transmits light)”.
ST ∆
(13) SET
(a) Format: SET
Segment specification *1 , SG sssssss
Edge specification *1 , SG aaa-bbb
Number of scans for arithmetical average , MN nnnn
Measurement interval number at moving average , MS m
Number of scans for moving average , MNH nnnn
Lower abnormal limit *2 , EL±ddd.dddd
Upper abnormal limit *2 , EH±ddd.dddd
Abnormal count value *2 , CNT aaa
Lower limit *1 , LL±ddd.dddd
Upper limit *1 , LH±ddd.dddd
, L1±ddd.dddd
Multi-limit selection value *1 , L2 • • • •
, L6±ddd.dddd
Target value *1 , N±ddd.dddd
Lower tolerance limit *1 , LO±ddd.dddd
Upper tolerance limit *1 , UP±ddd.dddd
Reference value *3 , REF±ddd.dddd
Scale value , SCLc
Positive preset *4 , PS±ddd.dddd
Negative preset *4 , PSM±ddd.dddd
Data output condition *5 , PRr
Periodic data output timer , PRT ttt
No. 99MBC095A 6 - 19
Number of sample measurements , SMP nnn
Sample measurement • Maximum value *6 , MAX
• Minimum value *6 , MIN
• Range *6 , RNG
• Mean *6 , AVG
Group size subject to judgment *2 , GN nn
Lower tolerance limit of group judgment *2 , GLL±ddd.dddd
Upper tolerance limit of group judgment *2 , GLH±ddd.dddd
Statistical items for group judgment : Maximum value *2, 6 , GMX
: Minimum value *2, 6 , GMN
: Mean *2, 6 , GAG
: Range *2, 6 , GRG
(b) Description: This sets the measuring conditions.
• Each of the commands that follow the SET command must be delimited by a
comma (,).
• A command which doesn’t need a setting change can be eliminated.
• Approximately 0.5 second is required for this command to be processed.
(c) Example: Reception command SET, SG2, M4, LL 5.988, LH 6.010, REF0
∆ ∆
RS-232C
Data output condition
GP-IB Printer Remark
(PR No.)
DCU
0 — —
1 — The periodical output timer can be set
2 —
3 — The periodical output timer can be set
4 —
5 The periodical output timer can be set
6
7 —
8 —
9
: Outputs data for each measurement.
: Performs measurement and outputs data when a GO measurement results.
: Performs measurement and outputs data when a ±NG measurement results.
— : No output
6 - 20 No. 99MBC095A
6. INTERFACE UNIT
(14) R
(a) Format: R
(b) Description: If the number of samples is set between 1 and 999, this command executes
single-run measurement and transmits the measurement result in conformity
with DATA FORMAT as the response command.
(c) Example: Reception command R
Response command P00, 12.3456
(15) CR, CL
(a) Format: CR
CL
(b) Description: CR: If the number of samples is set between 1 and 999, this command executes
continuous-run measurement. However, it does not respond to the “CR”
command.
• It transmits the measured results in conformity with DATA FORMAT for
the response command.
CL: Terminates continuous-run measurement.
(c) Example: Reception command Response command
CR None
• Outputs as the response, the measurement results according to the data
output conditions in conformity with DATA FORMAT.
CL OK
(16) R, STOP
(a) Format: R
STOP
(b) Description: R: If the number of samples is set to 0, this command executes zero-run
measurement. However, it does not respond to “R” command.
STOP: Terminates the zero-run measurement, and transmits the measurement
results in conformity with DATA FORMAT as the response.
(c) Example: Reception command R
STOP
Response command P00, 12.3456
(17) D
(a) Format: D
(b) Description: Transmits as the response the last display of data in the ready state or latched
data not in conformity with DATA FORMAT.
This command is used to transmit the previous data, while the R command is
used to execute measurement then the results are transmitted.
(c) Example: Reception command D
Response command (DATA FORMAT)
(20) STAT
(a) Format: STAT
(b) Description: Requests the statistical processing data. The statistical processing data will be
cleared when the power is off.
(c) Example: Reception command STAT
Response command STAT DATA, P00, N100, AVG12.0001,
∆
(21) AUT
(a) Format: AUT, Nmmm, Dtttt, L±ddd.dddd, H±ddd.dddd
(b) Description: Set the conditions of automatic workpiece detection with the following data to
follow “AUT” and delimited by a comma (,).
Lower and upper detection limits for the position detection method do not
require a “-” sign, so it will be ignored if specified.
• Responds only when the automatic workpiece detection has been set in the
basic setup.
• N mmm (mmm: number of measurement times between 1 and 999. If “0” is
specified, automatic workpiece detection is not performed.)
• Dtttt (tttt: Invalidation period between 0 and 9999 ms)
• L±ddd.dddd (±ddd.dddd: Lower detection limit)
• H±ddd.dddd (±ddd.dddd: Upper detection limit)
(c) Example: Reception command AUT, N50, D15, L9.5, H12.3
Response command OK
(22) AUT, S
(a) Format: AUT, S
(b) Description: Where “Performing the automatic workpiece detection” is specified in the basic
setup, and if this command is received, “S” will be responded each time a
workpiece is detected.
If this setup is not made in the basic setup, designating this command results
in ER6.
(c) Example: Reception command AUT, S
Response command OK
(23) RA
(a) Format: RA
(b) Description: Transmits as the response the conditions of the automatic workpiece detection
using RA FORMAT.
(c) Example: Reception command RA
Response command AUT, N50, D15, L9.5, H12.3
6 - 22 No. 99MBC095A
6. INTERFACE UNIT
(24) PR
(a) Format: PR
(b) Description: • Dedicated command for GP-IB.
• Used to print the measured data on the optional printer.
• It is necessary to set the RS-232C port to the printer port in the basic setup
in advance. Without this setup, designating this command results in ER6.
(c) Example: Reception command PR
Response command None (printed on the printer)
No. 99MBC095A 6 - 23
6.2 Optional Interface
Into the option slot either of the Digimatic Code Output Unit, Second I/O Analog, BCD, and
GP-IB Interface Units can be mounted.
It is also possible to perform measurement with two Measuring Units at a time if the optional
dual-type add-on unit is mounted on them.
RS-232C
Data output condition GP-IB Printer Remark
DCU
0 — —
1 — The periodical output timer can be set
2 —
3 — The periodical output timer can be set
4 —
6 - 24 No. 99MBC095A
6. INTERFACE UNIT
2) Data output
a. When a data send request comes from the external equipment such as the Digimatic Data
Processor to the LSM, the measurement data will be outputted through this interface by
the following timing.
DIGIMATIC CODEOUT
9 1 9 1
10 2 10 2
OUTPUT-1 OUTPUT-2
Consisting of Quantity
Digimatic Output unit 1
Connecting cable 1
No. 99MBC095A 6 - 25
6.2.1.3 I/O specifications
The following are the I/O specifications of the Digimatic code output interface.
10 2
• Pin assignment
Inside of interface
20K
Pin No.5
20K
High: MIN 3.5V
Low: MAX 0.4V
Inside of interface
6 - 26 No. 99MBC095A
6. INTERFACE UNIT
1) When a data request is transmitted from a Digimatic data processor to the LSM
2) When a data read request is transmitted from the LSM to the Digimatic data processor
TIP • The DP-series Digimatic Data Processor takes approximately 2 seconds for
processing each data. Therefore, do not issue a data output request at an interval
less than 2 seconds.
• Data will not be outputted while an error message is shown on the LSM display.
• If the Digimatic Data Processor shows an error message, check the number of
digits (of the sent data) below decimal point. For detail refer to Section 6.2.1.5
“Data format”.
• If the DP-1VR is connected, set the “INTERFACE” setting of the DP-1VR to
“COMPATIBLE”. For details, refer to the user’s manual of “DP-1VR”.
No. 99MBC095A 6 - 27
6.2.1.5 Data format
Digimatic data format consists of measured data which is made up of 13 hexadecimal digits
using 0 to F, each 4 bits (of binary data) long. The data is output serially, starting from the
LSB (Least Significant Bit) of the LSD (Least Significant Digit) to the MSB (Most Signifi-
cant Bit) of the MSD (Most Significant Digit). The 13 digits have the following content.
d6 MSD
d7
d8 Measured data
d9 (6 digits of BCD)
d10
d11 LSD
-0
X 10 : 0 (0000)
X 10 -1: 1 (0001)
Decimal point -2: 2 (0010)
d12 X 10
position -3
X 10 : 3 (0011)
-4
X 10 : 4 (0100)
-5
X 10 : 5 (0101)
mm : 0 (0000)
inch : 1 (0001)
mm (+NG) : 2 (0010)
Unit
mm (GO) : 3 (0011)
d13 (GO/±NG
mm (-NG) : 4 (0100)
judgment results)
inch (+NG) : 5 (0101)
inch (GO) : 6 (0110)
inch (-NG) : 7 (0111)
6 - 28 No. 99MBC095A
6. INTERFACE UNIT
No. 99MBC095A 6 - 29
6.2.2 Second Analog I/O Interface
This interface deals with two pairs of GO/NG judgment result output, one set of analog
output and control input. This is suitable for simultaneous measurement, multi-limit selection,
and group judgment operations.
NOTE This interface has jumper pins (for short-circuiting between Pins 1 and 2 of JP1) on
the upper surface of the board. However, never modify the existing setting, since this
is for future expansion.
TP3
TP1
TP2
36 19
ALG 0V FG I/O
Consisting of Quantity
Second Analog I/O interface 1
Connector 1
Connecting cable 1
6 - 30 No. 99MBC095A
6. INTERFACE UNIT
1) Specifications
• Pin assignment
18 1
Applicable connecter
57-30360 (or the equivalent product by DDK or Amphenor, etc.)
This is the standard accessory of this interface.
36 19
a. Pin assignment
Pin No. Signal name I/O direction Pin No. Signal name I/O direction
1 +5V (Internal power) — 19 GND (Internal power) —
2 COM (IN) — 20 COM (IN) —
3 b0 P0 IN 21 b1 P1 IN
4 b2 P2 IN 22 b3 P3 IN
5 PRG P4 IN 23 B_L7 OUT
6 SHIFT IN 24 PRINT IN
7 RUN T.RUN IN 25 RESET IN
8 (A_-NG) A_L1 OUT 26 (A_GO) A_L2 OUT
9 (A_+NG) A_L3 OUT 27 A_L4 OUT
10 A_L5 OUT 28 A_L6 OUT
11 B_-NG GTJ_-NG B_L1 OUT 29 B_GO GTJ_GO B_L2 OUT
12 B_+NG GTJ_+NG B_L3 OUT 30 B_L4 OUT
13 B_L5 OUT 31 B_L6 OUT
14 A_+NG A_L7 OUT 32 A_-NG (A_L1) OUT
15 A_GO (A_L2) OUT 33 ACK OUT
16 ER0 OUT 34 STB OUT
17 COM (OUT) — 35 COM (OUT) —
18 CNT OUT 36 FG —
No. 99MBC095A 6 - 31
NOTE • Between Pin No.8 and Pin No.32, between Pin No.15 and Pin No.26, between Pin
No.2 and Pin No.20, and between Pin No.17 and Pin No.35 are connected
internally.
• When the 100 program method is selected, use the signal “b0” to “b3” and “PRG”
to select the program number.
• When the 10 program method is selected, use the signal “P0” to “P4” to select the
program number.
100 or 10 program method is selected in the Expanded Basic setup.
• In single measurement judgment, results will be outputted to “A” and “B”.
• In simultaneous measurement, judgment result from the program Nos.x0 to x4 will
be outputted to “A”, and that from the program Nos.x5 to x9 will be outputted to
“B”, respectively.
• When group judgment is selected, each individual judgment result will be output-
ted to “A”, and the group judgment result will be outputted to “GTJ” (“B”).
• When “LL-LH” or “N-UL” method is selected, “+NG”, “GO”, “-NG” are used to
output of judgment.
• When “L1-L6” method is selected, “L1” to “L7” are used to output of judgment.
Method of judgment is selected in the Basic setup.
2) Input signal
Signal Description
RESET Clears the result display or interrupts measurement.
RUN Used to start signal run measurement when “5 RUN” is set to “S.RUN” or “C.RUN”.
Used to start and stop zero run measurement when “5 RUN” is set to “S.RUN” or “C.RUN”
Used as “T.RUN” type input signal when “5 RUN” is set to “T.RUN”.
They are selected by the Basic setup
RUN + RESET Used to start continuous run measurement when “5 RUN” is set to “S.RUN” or “C.RUN”.
/b0 to 3 + PRG To select program number Px0 to Px9.
/b0 to 3 + SHIFT + PRG To select channel number P0x to P9x.
/P0 to 4 To select program number P0 to P4 when “7 PRGM” is set to “10”.
SHIFT + /P0 to 4 To select program number P5 to P9 when “7 PRGM” is set to “10”.
SHIFT + RUN PSET: Presetting will be performed using the already set preset value and preset direction
If those Preset conditions are not set, zero-setting in.
HOLD: Can be set as “HOLD” signal by the basic setup (“5 PSET”).
PRINT Used to printout the measurement result when “4 RS-232C” is set to “PRN” by the basic setup.
PRINT + RESET The statistical processing results will be printed, and then all statistical memory will be cleared.
SHIFT + RESET The “ER7” command will be output from the RS-232C. Use this as a timing signal.
NOTE All input signal must be off before the new input signal is on.
During measurement only “RESET”, “RUN” (as stop), “PRINT” or “HOLD” signals are
accepted.
6 - 32 No. 99MBC095A
6. INTERFACE UNIT
NOTE All input signal must be off before the new input signal is on.
However, signal “b0” to “b3” and “SHIFT” is able to be on before signal “PRG” is on.
4) Output signal
Signal Description
A_-NG, A_GO, • Output of GO/-NG judgment result when “1 JDG.M” is set to “LL-LH” or “N-UL”.
• And multi-limit judgment result when “1 JDG.M” is set to “L1-L6”.
A_+NG
• Data for program Px0 to Px4 will be output in the simultaneous-program measurement.
A_L1_to_L7
B_-NG, B_GO, • Output of GO/-NG judgment result when “1 JDG.M” is set to “LL-LH” or “N-UL”.
• And multi-limit judgment result when “1 JDG.M” is set to “L1-L6”.
B_+NG
• The output signal is equivalent to “A” in the signal-program measurement.
B_L1_to_L7 • Data for program Px5 to Px9 will be output in the simultaneous-program measurement.
• Single or simultaneous-program measurement are selected by basic setup (“2 PROG”).
ER0 • This is usually set to ON (LOW level) but turns to OFF (HIGH level) when a segment
error occurs.
GTJ_-NG, GTJ_GO, • Outputs the results of group in group judgment. (Basic setup “3 GTJ”=“USE”)
GTJ_+NG
ACK • This is set to ON (LOW level) during measurement (single-run or continuous-run).
STB • Before outputting a judgment result, this will be output (Low) as a cofirming signal.
CNT • Turns Low level if abnormal data to be discarded occurred successively.
• It is need the setting of “2 CNT” by Function setup. And “3 ADE” is set to “USE” or
“USE2” by Basic setup.
No. 99MBC095A 6 - 33
• Input circuitry
2.2K(1W)
COM (IN): External supply
(5~24V) voltage terminal
Input signal
• Output circuitry
Output signal (30V,10mA or less)
COM (OUT)
COM (IN) 2
+ +
Power supply
LED lamp
+
24V DC
–
+NG 14
-NG 32
GO 15
COM (OUT) 35
S.RUN or T.RUN
RUN 7
RESET
RESET 25
RUN+RESET (C.RUN)
6 - 34 No. 99MBC095A
6. INTERFACE UNIT
GO 15 INPUT
+
STB 34 INPUT
–
RUN 7 OUTPUT
RESET 25 OUTPUT
Power supply
+ +
24V DC
Lamp
or
K1 –
D1 Buzzer
–
+NG 14
K1
–NG 32
COM (OUT) 35
D1: 10EDA10 (Nihon Inter Electronics)
TIP • When Err-0 occurs, judgment output are all set to OFF.
• The single-run measurement and zero-run measurement will be interrupted by Err-
0 and the measurement mode will be terminated without outputting the results.
• During the continuous-run measurement, the ACK is set to ON, even if an Err-0
occur. Measurement continues after the error is rectified.
No. 99MBC095A 6 - 35
9) I/O timing chart
• Single-run measurement
TIN
Program
number TIN
RESET
TIN TIN TIN
RUN
TAD TBO
ACK
STB TSO
TAD
TDO
Judgment
• Zero-run measurement
TIN
RESET
TIN TIN TIN
RUN
TAD TAD
ACK
STB TSO
TAD
TDO
Judgment
• Continuous-run measurement
TIN
Program
number TIN TIN
RUN
TIN
RESET TIN
TAD TAD
ACK TBO TBC TBC
STB TSO
TAD TDO
Judgment
STB TSO
TAD TDO
Judgment
6 - 36 No. 99MBC095A
6. INTERFACE UNIT
STB TSO
TAD TDO TDO
Judgment
HOLD
TIN or more
• Response time
NOTE In order to input multiple signals at same time, the interval between the input signals
must be “Ter” or less.
No. 99MBC095A 6 - 37
• Measurement interval (Tmr) and Strobe length (TSO)
6 - 38 No. 99MBC095A
6. INTERFACE UNIT
1) Specification
• Pin assignment
ALG 0V FG
• Output circuit
560Ω
ALG
0V
NOTE 1. Always use a braided shielding wire cable as the analog cable, and positively
ground the braided shielding wire to the FG terminal.
2. If wiring the Analog output connector, do not directly touch the output terminals by
hand, which has static charges, because the internal circuit may be damaged by
static discharge. Discharge the static energy by touching the metallic surface of
the Display unit in advance. In addition, unplug the power cord from the outlet
before commencing wiring.
3. After wiring has been completed, close the protective cover.
No. 99MBC095A 6 - 39
6.2.3 BCD interface
This interface outputs data in parallel format. The output data consists of a positive true
logic/negative true logic signal and a decimal number (BCD)/Hexadecimal number (HEX).
1
Jumper switch: JP1
JP3
JP1
JP2
1
1
SW1
1
BCD I/F
18 1
36 19
Consisting of Quantity
BCD interface 1
Connector (57-30360) 1
Connecting cable 1
6 - 40 No. 99MBC095A
6. INTERFACE UNIT
6.2.3.3 Specification
1) BCD specifications
• Pin assignment
18 1
36 19
Pin No. Signal name Pin No. Signal name Pin No. Signal name
} } }
1 1 13 1 25 1
2 2 0 14 2 3 26 2 6
X 10 X 10 X 10
3 4 15 4 27 4
4 8 16 8 28 8
} }
5 1 17 1 29 Err-0 (segment error)
6 2 1 18 2 4 30 HOLD (input)
X 10 X 10
7 4 19 4 31 F/R (Switching foreground / background)
8 8 20 8 32 STB (strobe output)
} }
9 1 21 1 33 EXT.Vcc (power supply for external device)
10 2 2 22 2 5 34 +POLE (polarity display)
X 10 X 10
11 4 23 4 35 GND (signal GND)
12 8 24 8 36 FG (Frame GND)
• Applicable connector
57-30360 (or the equivalent product by DDK or Amphenor, etc.)
This is the standard accessory of this interface.
No. 99MBC095A 6 - 41
2) Selection of functions to be used
• Selection of jumper switches
¥ Jumper switch
1
JP1
JP2
1 PIN
1
3 PIN JP3
JP3
1
1
JP1
JP2
JP1 JP2 3 PIN
JP3
1 PIN
1
1
Make between No. 1 and 2 pins
1 2 3
or between No.2 and 3 pins
SW1
short-circuited using
ON
a short-circuiting plug.
¥ DIP switch
1 2 3
SW1
ON
Select a positive true logic/negative true logic signal and a decimal number (BCD)/
Hexadecimal number (HEX) for the data output.
6 - 42 No. 99MBC095A
6. INTERFACE UNIT
3) Output signal
SW1: Circuit 3
4) Input signal
SW1: Circuit 2
10K
F/R, HOLD
SW1: Circuit 3
No. 99MBC095A 6 - 43
• Example A: Connect to logic
R
OUTPUT
DC Power Supply
INPUT
+
–
GND GND
EXT.Vcc Vcc
DC Power Supply
INPUT OUTPUT
–
GND GND
DATA_0 1 INPUT
DC Power Supply
ER0 29 INPUT
+
STB 32 INPUT
–
COM (OUT)
GND 35
PLC
LSM BCD
6 - 44 No. 99MBC095A
6. INTERFACE UNIT
5) Timing chart
• BCD : Ready state in normal measuring mode.
H
HOLD L
BCD DATA
H
STB L
TSO TIN TIN
H
STB L
TIN TIN
H
STB L
TAD TAD
No. 99MBC095A 6 - 45
6.2.4 GP-IB interface
• This interface unit conforms to the IEEE standard 488-1978.
• The subset of this interface does not include the controller function. Consequently, it can
not output data directly to a printer with a GP-IB interface.
GP-IB I/F
12 1
1 8
24 13
Consisting of Quantity
GP-IB interface 1
Connecting cable 1
6 - 46 No. 99MBC095A
6. INTERFACE UNIT
6.2.4.3 Specification
1) Specification
• Pin assignment
12 1
24 13
• Applicable connector
IEEE-488 based.
2) DIP switch settings
ON 1 2 3 4 5 6 7 8
Delimiter:
The above example sets to "CR+LF+EOI".
My address:
The above example sets the address to "2".
(0-1 EH are available in hexadecimal number)
• List of delimiters
Delimiter Circuit
6 7 8
CR+LF ON ON OFF
CR ON OFF OFF
LF OFF ON OFF
CR+LF & EOI ON ON ON
CR & EOI ON OFF ON
LF & EOI OFF ON ON
EOI OFF OFF ON
No. 99MBC095A 6 - 47
TIP • What is “My address” ?
Each of the commonication devices which are on the same GP-IB has an specific
address (number) with which it is identified.
• What is a “delimiter” ?
The delimiter is a signal (or a set of signals) that represents the end of the data.
6 - 48 No. 99MBC095A
6. INTERFACE UNIT
6.2.4.4 Functions
The GP-IB interface functions include the following.
OK 0 RSV 0 0 0 0 0 0
ERROR 0 RSV 0 0 1 Error No.
DATA 0 RSV 0 1 0 NG GO 1
• RSV becomes “1” when this interface is in the service request state.
No. 99MBC095A 6 - 49
6.2.4.5 Operations
1) The GP-IB interface unit for the LSM is basically a listener that receives various com-
mands, and a talker that transmits response commands. For further information on recep-
tion commands and response commands, refer to the description in Sec. 6.1.2.4.
2) When receiving an IFC (Inter Face Clear), the GP-IB interface is initialized.
• Remote state will be canceled to local state.
• Local lockout state (LLO) will be canceled.
• Service request (SRQ) transmission will be disabled.
3) When the GP-IB interface receives an REN (Remote ENable) signal followed by other
commands, the interface enters the remote state. In the remote state, only the C key
can be operated.
4) When the GP-IB interface receives an LLO (Local LOckout) as a multi-statement and
other commands, the interface enters into local lockout state. In this local lockout state, all
the key operations are prohibited.
(This state can be released by inputting an IFC (Inter Face Clear) from the host computer.)
5) However in the remote state or local lockout state, I/O operations, except for key entries,
will operate as usual.
6) When the GP-IB interface receives a GET command) as a multi-statement, the single-run
measurement or zero-run measurement will commence.
Zero-run measurement can be terminated by inputting another GET command.
7) This interface unit (as a talker) does not output unless a transmission command has been
received.
8) When this interface unit receives an SRQ command, it is ready to transmit the service
request and the SRQ lamp lights.
• When this interface transmits a response (sending data from this interface), send a
service request signal (SRQ) to ready the controller for data reception.
• When the GP-IB interface receives an SPE (Serial Poll Enable) from the controller, the
interface outputs the SRQ status byte on the data bus, which describes the content of
the request.
• In the service request state, the interface does not output the OK or ER0 – 7 commands
as a response command, but only sends the SRQ status byte to describe the conditions.
9) Just after power on transmit a “CL” command as the first communication command and
repeat this until a response of “OK” is received.
6 - 50 No. 99MBC095A
6. INTERFACE UNIT
1) Safety check
• Turn the power key switch to off position (marked as “O”), then remove the key switch.
• Unplug the power cord from the inlet on the rear panel of the Display Unit.
Protection plate
No. 99MBC095A 6 - 51
3) Installing the interface
• If installing more than two optional interfaces, install them in the order below:
a. Digimatic Output Unit
b. Second Analog I/O, BCD, or GP-IB interface
c. Dual-type add-on unit
• Remove the protection plate from where each interface is to be installed.
• Install each interface unit inside the display unit following 6.3.1 through 6.3.2.
• Be sure to tighten the fixing screws of each interface unit.
4) Replacing the cover
Replace the cover which has been removed at step (2) and fit it with four screws.
CN14
10
Connect the connecting cable to CN14.
6 - 52 No. 99MBC095A
7 INSPECTION AND
MAINTENANCE
This chapter describes the method of maintenance and troubleshooting, as
well as the contents of the error messages and remedies.
Screwdriver
Functions Edge specification Trans- Ultra-fine Automatic Abnormal Sample Odd- Moving Group
combinations
Manual Automatic parent wire mea- workpiece value measure- numbered- average judgment
measure- measure- object surement detection elimination ment edge cutting
ment ment measure- tool measure-
ment ment
Edge Manual
specif- measure- Ñ Ñ Ñ Ñ
ication ment
Automatic
measure- Ñ Ñ Ñ Ñ Ñ Ñ Ñ Ñ
ment
Transparent object Ñ
Ñ Ñ
measurement
Ultra-fine wire Ñ
Ñ Ñ Ñ Ñ
measurement
Automatic workpiece
Ñ Ñ
detection
Abnormal value
Ñ
elimination
Sample measurement Ñ
Odd-numbered-edge cutting
Ñ Ñ Ñ Ñ Ñ
tool measurement
Moving average Ñ Ñ Ñ Ñ
Group judgment Ñ Ñ Ñ
TIP1: Ò Ó indicates permitted combinations, and ÒÑÓ indicates combinations that are not permitted.
TIP2: The averaging number setting is limited to between 16 and 2048 for ultra-fine wire measurement.
TIP3: The averaging number setting is limited to between 32 and 2048 for moving averaging mode.
TIP4: The segment number setting is limited to between 1 and 3 for measurement of a transparent object.
Moving average Ñ Ñ Ñ Ñ
Group judgment Ñ Ñ Ñ Ñ
TIP1: Ò Ó indicates permitted combinations under the restrictions shown in the Òa.Ó section. ÒÑÓ indicates combinations that are not permitted.
TIP2: The averaging number setting is limited to between 16 and 2048 for ultra-fine wire measurement.
TIP3: The averaging number setting is limited to between 32 and 2048 for moving averaging mode.
TIP4: The segment number setting is limited to between 1 and 3 for measurement of a transparent object.
: 4/ : 5/ : 6/ :7
B1 a. Output in the ready state : Neither GO/NG judgment nor analog output is made/
b. Analog output voltage at Err-0 : Output voltage 0V/ : Output voltage +5V
: Output voltage -5V
: Displays Ò0Ó.
f. Method of GO/NG judgment : Judges with the lower limit and upper limit
: Transparent object
: Simultaneous measurement
( ) e. Calculation on DXY-type ( )
: Sum/ : Mean
: Difference
: Edge specification
: Use.
( ) c: Number of scans ( )
: 16 times / : 1 time
LOW CAL : LOW CAL gage = Max.7 digits in the Cancel (0)
positive direction only.
: Manual measurement ( to )
: Automatic pitch measurement Ñ ( to )
: Automatic OD measurement ( to )
Statistical item
detection*
Invalidation period = 0 to 9999
Free ( )
Lower detection limit = Sign + max. 7 digits
Ñ
: Mean / : Maximum value