3137 Aeng

SEMATECH Design Guidelines for
Gas Box Components
SEMATECH
Technology Transfer 96063137A-ENG
SEMATECH and the SEMATECH logo are registered service marks of SEMATECH, Inc.
Product names used in this publication are for identification purposes only and may be trademarks of their respective companies.
1996 SEMATECH, Inc.
SEMATECH Design Guidelines for Gas Box Components

Technology Transfer # 96063137A-ENG
SEMATECH
June 28, 1996
Abstract:
This document is designed as a manufacturers guideline for standardizing components for gas
boxes, which represent a substantial part of the cost of process tools used in semiconductor
manufacturing. The document provides specifications for electrical and mechanical characteristics
for the most common components of a typical gas box: valves, mass flow controllers (MFCs) and
mass flow meters (MFMs), regulators, filters and purifiers, and pressure transducers. The
information in this guide is intended to benefit SEMATECH member companies in working with
suppliers toward meeting the goal of reducing fluid and gas systems cost of ownership (COO) by
20% in future fabrication facilities. The guidelines are represented in drawings and tables. This
document is in development as an industry standard by Semiconductor Equipment and Materials
International (SEMI). When available, adherence to the SEMI standard is recommended.
Keywords:
Components, Cost of Ownership, Fluid Distribution Systems, Specifications
Authors:
Jim Ammenheuser, Jeff Riddle
Approvals:
Jim Ammenheuser, Author

Jeff Riddle, Project Manager
Gary Gettel, Director, Factory Integration
iii
Table of Contents
1
EXECUTIVE SUMMARY........................................................................................................1
1.1 Participation.......................................................................................................................1
INTRODUCTION......................................................................................................................1
2.1 Purpose ..............................................................................................................................1
2.2 Scope .................................................................................................................................2
2.3 Limitations.........................................................................................................................2
TERMINOLOGY ......................................................................................................................3
SUMMARY OF THE GUIDE...................................................................................................4
PROCEDURE............................................................................................................................4
5.1 Valves ................................................................................................................................4
5.2 Regulators..........................................................................................................................6
5.3 MFCs and MFMs ..............................................................................................................8
5.4 Pressure Transducers .......................................................................................................10
5.5 Filters and Purifiers .........................................................................................................11
RELATED DOCUMENTS......................................................................................................12
SEMATECH
iv
List of Figures
Figure 1
Typical Factory Gas System Diagram..........................................................................2
Figure 2
Valve Diagram..............................................................................................................4
Figure 3
Regulator Diagram........................................................................................................6
Figure 4
MFC/MFM Diagram.....................................................................................................8
Figure 5
Pressure Transducer Diagram.....................................................................................10
Figure 6
Filter/Purifier Diagram ...............................................................................................11
List of Tables
Table 1
Guideline Specifications for Particular Components....................................................1
Table 2
Valve Specifications .....................................................................................................5
Table 3
Regulator Specifications...............................................................................................7
Table 4
MFC/MFM Specifications............................................................................................9
Table 5
Pressure Transducer Specifications ............................................................................10
Table 6
Filter/Purifier Specifications.......................................................................................11
SEMATECH
v
Acknowledgements
This guideline was developed by the gas box working group of the Project Technical Advisory
Board (PTAB) for SEMATECHs Facilities and Equipment Subsystems Project (S100). The
authors would like to credit the following 104 participants, representing nine SEMATECH
member companies and 22 SEMI/SEMATECH companies, for creation of this guideline.
Participating companies and persons included the following:
Advanced Micro Devices, Inc.: George Alexander, Do Cao, Skip Coder, David Jensen, Steve
Lewis
Air Products & Chemicals, Inc.: Chuck Schneider, Bob Shay
Applied Materials: Alex Glew, Bill Manofsky, Robert Ozarski, Joe Sommers
Brooks Instrument: Ron Bouley, Deborah Hayward, Tim Wiemels
Digital Equipment Corp.: Steve Cheung, Kipton Hayes
FSI International: Juan Campaneria, Pat Ruether
GaSonics International: James Caughran
Go Controls, Inc.: James Fries, Robert Miller, Marti Whitne
Hewlett-Packard Company: Eric Dod, Daniel Strand
IBM Corporation: Arthur Bristol, Denis Bilodeau, Kurt Carlsen, Robert Desrosiers, Walid
Hatoum, Thom Jagielski, Fred Kern, Homer Selby
Insync Systems, Inc.: Terry Bielss, Bill Culwell, Chris Lantz
Intel Corporation: Rich Fiutko, Eric Radosevich, Michael Visokey, Charles Wong
Jacobs/Sirrine Engineering Inc.: Bob Potter, Mike Worthington
Knowledge Based Systems, Inc.: Ham Hayes
Lam Research Corporation: Douglas DAmico, John Dimartini, Karl Harris, Danny Laureta,
Tony Nguyen, Brian Okamoto, Michael Smith, Mark Taskar, Ken Thralls
Lucent Technologies: Joseph Festa, Miguel Gomez
Microbar Systems, Inc.: Russ Abber
Millipore Corporation: Virg Erwin, Timothy Gillis, Walter Plante, James Snow
MKS Instruments, Inc.: John Dunn, Steve Holland, Howard Mastropiero, Jonathan Skuba
Motorola, Inc.: Vic Mariano, Don Tolliver
Nupro Company: Tony Laurinaitis, Mike Valentine
Pall Corp.: Michael Mesawich
Praxair, Inc.: Tom Nelson, Walter Remson
Rockwell International Corp.: John Anderson
SEMATECH: Paul Fowler, David Sanborn
SEMATECH
vi
SEMATECH Consultants: Don Capo, Edward Etchepare, Bob Smoot, Bill White
SEMI/SEMATECH: Conrad Sorenson
Span Instruments, Inc.: John Jul, Chris Davis, Rod Madsen, KavehZarkar
Stainless Design Corp.: Kevin Brady, Gary Dyal, Don Rodgers
Texas Instruments, Inc.: Eric Erz, Mike Gordon, Steve Hariri, Manny Lele, Michael Kasner,
Miguel Plana, Anthony Wang
Tylan General, Inc.: Joe Cestari, Chris Quartaro
Unit Instruments, Inc.: Mike Doyle, Gary Frank, David Sheriff, Robert Starr
Varian: Jim Stimmell
Veriflo Corporation: Andrew Dribnak
Watkins-Johnson Company: Mike Evanovich, Brian Goodrich, Chris Carris, Reza Sarraf, Dale
Spencer, Don Tran
SEMATECH
1
1
EXECUTIVE SUMMARY
This document a guideline for standardizing mechanical and electrical specifications for each of
the five types of components typically used in a gas box. The aim is to reduce cost of ownership
(COO) for U.S. semiconductor manufacturers. Specifications for the five components (valves,
regulators, mass flow controllers [MFCs]/mass flow meters [MFMs], pressure transducers, and
filters/purifiers) should include the areas listed in Table 1.
Table 1
Guideline Specifications for Particular Components
End-to-End Lengths:
1/4 Integral/fixed male face seal (VCR compatible)
1/4 Swivel male or swivel female face seal (VCR compatible)
1/4 Tube weld (0.25" minimum length for each tube stub)
Overall Component Envelope:
Maximum height
Maximum width
Length
Base to Centerline of Flow Path:
Mounting provisions:
Threaded holes
Pattern
Fittings:
Process
Actuation
Control:
Manual
Pneumatic
Electrical
1.1
Participation
This guideline was developed by the Gas Box Working Group of the Project Technical Advisory
Board (PTAB) for SEMATECHs Facilities and Equipment Subsystems Project (S100). The
group consisted of 104 participants representing nine SEMATECH member companies and 22
SEMI/SEMATECH companies. Participants worked for five months interactively in a virtual
meeting room to achieve consensus.
2
INTRODUCTION
2.1
Purpose
To compete in the world marketplace, U.S. semiconductor manufacturers must reduce the COO
of process tools. A substantial part of that cost is the gas box. Hence, this document is designed
for use by manufacturers of gas boxes and gas box components.
SEMATECH
2
2.2
Scope
The gas box is defined as the gas handling section internal to a process tool and the gas
drop/stick to the process tool. A gas box typically is made up of five types of components:
valves, MFC/MFMs, regulators, filters/purifiers, and pressure transducers. Until now, these have
been developed with criteria based only on performance and cleanliness. It is believed that
standardizing and using standard tolerances for gas box components will reduce the very high
costs of manufacturing, assembling, and maintaining them. Accordingly, this document describes
a maximum envelope for these components and the tolerances to which they will be
manufactured. The aim is to reduce the amount of documentation needed to build a gas box and
enable the end user to standardize component selection. The focus is on standardization of
dimensional and mechanical/electrical connection attributes of 1/4-inch components. This
document excludes gas source panel cabinets housing a compressed cylinder, or multiplexed
components.
Figure 1 shows gas system flow in a typical semiconductor factory.
Process Tool
(3)
(1)
Bulk Supply
(2)
(3)
Distribution (3)
System
(2)
Gas
Interface
Box
Jungle
(3)
(1)
On Site
Generators
(2)
(3)
Chamber
(3)
Environmental
Treatment
(2)
(3)
(3)
Valve Manifold
Boxes
(2)
Point-of-Use
Gas Generation
(2)
(1)
(1)
System
Monitoring
(2)
Gas/Liquid
Cabinets
(2)
Mea sureme nts
(1)
(1)
(2)
(3)
Life Safety
Support Systems
(2)
*(includes particulates, metals, molecular)
Figure 1
2.3
Purity*, Cost, Reliability

Cost, Reliability, Materials Construction, Features
Purity*, Temperature, Flow, Pressure
Typical Factory Gas System Diagram
Limitations
Since this document is written for a typical 1/4-inch delivery system, it is assumed that regulated
gas of no greater than 50 psi will be used in furnaces, chemical vapor deposition (CVD) tools,
and etch reactors. The document applies to systems designed for flows no greater than 30 slm.
This document is not intended to dictate how to build a gas box, but only to provide a guideline
to help reduce the cost of gas boxes.
SEMATECH
3
3
TERMINOLOGY
Definitions of terms used in this document are as follows:

Component n: (1) An individual piece or a complete assembly of individual pieces, including
industrial products that are manufactured as independent units, capable of being joined with other
pieces or components. The typical components referred to by the specification are valves,
fittings, regulators, gauges, instrument sensors, a single length of tubing, several pieces of tubing
welded together, tubing welded to fittings, and the like [SEMI F1-90]. (2) The fundamental parts
of an object, its entities, or relationships [SEMATECH]. (3) The hardware and software that
work in sets (functional entities) to perform the operation(s) [SEMATECH].
Filter n: Of a fluid distribution system filter, the assembly consisting of a filter cartridge and
housing. Examples are an integral unit, in which the filter cartridge and element are not separable
and a separable unit, in which the filter cartridge and housing can be disassembled
[SEMATECH].
Gas box n: A subsystem of the factory gas delivery system located at point-of-use, typically
internal to a semiconductor process tool, and utilized to control delivery of process gases into the
processing chamber. Also referred to as gas interface box and gas jungle.
Mass flow controller (MFC) n: A self-contained device (consisting of a transducer, control valve,
and control and signal-processing electronics) commonly used in the semiconductor industry to
measure and regulate the mass flow of gas [SEMI E29-93].
Mass flow meter (MFM) n: A self-contained device, consisting of a mass flow transducer and
signal-processing electronics, commonly used in the semiconductor industry to measure the mass
flow of gas [SEMI E29-93].
Pressure transducer n: A device commonly used in the semiconductor industry to measure gas
pressure. Typically consisting of a sensor and signal-processing electronics, this device allows
for remote indication of gas pressure.
Purifier n: An in-line device used for the removal of homogeneous impurities from gases,
typically consisting of a packed-bed of active solids contained in a stainless steel housing. The
active purification media may remove impurities such as moisture, oxygen, CO, CO2,
hydrocarbons, hydrogen, or nitrogen from specific gases using a variety of chemical reaction,
physisorption, or chemisorption mechanisms. Point-of-use purifiers often contain a particle filter
within the same housing.
Regulator n: A valve designed to reduce a high incoming pressure (for example, from a cylinder)
to a lower outlet pressure by automatically opening to allow flow until a desired, preset pressure
on the outlet side is reached, then automatically throttling closed to stop further pressure
increase[SEMI International Standards 1990, Vol. 1, Glossary].
Valve n : (1) A device that controls the flow or pressure of a gas. Valve functions can include
shutoff, metering, backflow prevention, and pressure relief [SEMI Chemicals/Gases, Vol. 1,
1990 (no longer in print)]. (2) Any component designed to provide positive shutoff of fluid
media with the capability of being externally operated [SEMATECH].
SEMATECH
4
4
SUMMARY OF THE GUIDE
The S100 PTAB working group determined that a guideline for each of the five typical types of
gas box components should include the following items:
1. Physical characteristics unique to each component. This would include a generalized drawing
of the typical device, specific end-to-end lengths, maximum envelope information,
base-to-centerline dimensions, and mounting hole dimensions.
2. Where applicable, electrical connections specific to these components. These would include
pin-outs and types of connectors.
3. Tolerances. These would include quantities that the committee accepted as being the best that
could be achieved without excessive cost penalty.
5
PROCEDURE
Gas box components should comply with the designs provided in the figures of this section.
5.1
Valves
Valves should conform to the design and specifications appearing in Figure 2 and Table 2.
Figure 2
SEMATECH
Valve Diagram
5
Table 2
Valve Specifications
End-to-End Lengths:
2.30"/58.4 mm
2.78"/70.6 mm
1.75"/44.4 mm
Note: The tolerance on length for machined components is 0.005". The tolerance on length for welded components is 0.010"
from the centerline of the base.
Maximum height
5.5"/140 mm
Maximum width
1.5"/38 mm
Length
(see above dimensions)
0.44"/11 mm 0.010"
Mounting Provisions:
Threaded holes
M5
Pattern
1"/25.4 mm bolt circle centered on bottom of base with

minimum two threaded holes 180 apart and 45 off of
the vertical or horizontal axis.
One hole in each of upper left and lower right quadrants
when looking at the bottom of the valves, with the inlet
on the left and the outlet on the right
Fittings:
Process
Actuation
Control:
Manual
1/4" face seal (VCR compatible)

1/8" NPT
Handle within envelope.
Pneumatic
Nominal Actuation Pressure 75 psig.
Electrical
n/a
SEMATECH
6
5.2
Regulators
Regulators should conform to the design and specifications appearing in Figure 3 and Table 3.
Figure 3
SEMATECH
Regulator Diagram
7
Table 3
Regulator Specifications
010 SLM Regulators
End-to-End Lengths:
1/4 integral/fixed male face seal (VCR compatible)
1/4 swivel male or swivel female face seal (VCR compatible)
1030 SLM Regulators
2.78"/70.6 mm
3.70"/94 mm
1/4 tube weld (0.25" minimum length for each tube stub)
Maximum height
5.5"/140 mm
5.5"/140 mm
Maximum width
1.5"/38 mm
2.0"/51 mm
Length
0.44"/11 mm 0.010"
0.75"/19 mm 0.010"
Threaded holes
M5
M5
(Same pattern defined above

for valves in Table 2 and
Figure 2)
Two threaded holes, centered

on bottom of base, in line with
flow path, spaced 0.88/
22.4 mm between centers
face seal (VCR compatible)
n/a
n/a
Handle within envelope
Handle within envelope
Pneumatic
n/a
n/a
Electrical
n/a
n/a
Pattern
Fittings:
Process
Actuation
Control:
Manual
SEMATECH
8
5.3
MFCs and MFMs
MFCs and MFMs should conform to the design and specifications appearing in Figure 4 and
Table 4.
Figure 4
SEMATECH
MFC/MFM Diagram
9
Table 4
MFC/MFM Specifications
End-to-End Lengths:
Form Factor 1
Form Factor 2
4.88" / 124 mm
4.17" / 106 mm
1/4 swivel male or swivel female face seal (VCR

compatible)
Maximum Height
5.5"/140 mm
Maximum Width
Length
1.5"/38 mm
1.5"/38 mm
(See above dimensions)
0.49"/12.4 mm 0.010"
0.49"/12.4 mm 0.010"
Threaded Holes
Pattern
Fittings:
Process
M5
M5
(Same pattern defined for

valves in Table 2 and
Figure 2)
(Same pattern defined for

valves in Table 2 and
Figure 2)
face seal (VCR compatible) face seal (VCR compatible)
Actuation
Control:
Manual
Pneumatic
Electrical
n/a
n/a
n/a
n/a
n/a
n/a
9-pin sub D connector, analog signal pin out as follows:

Pin 1:
Pin 2:
Pin 3:
Pin 4:
Pin 5:
Pin 6:
Pin 7:
Pin 8:
Pin 9:
5.5"/140 mm
Valve Closed (Ground)

05 V DC Flow Signal Output
+15 V DC Power Supply
Power Common
-15 V DC Power Supply
05 V DC Setpoint Input
Output Common
Setpoint Common
Valve Test Point /Purge (Ground)
SEMATECH
10
5.4
Pressure Transducers
Pressure transducers should conform to the design and specifications appearing in Figure 5 and
Table 5.
Figure 5
Table 5
Pressure Transducer Diagram

Pressure Transducer Specifications
End-to-End Lengths:
2.24"/56.9 mm
1/4 swivel male or swivel female face seal (VCR compatible)
3.05"/77.5 mm
1.85"/47.0 mm
Note: The tolerance on length for machined components is 0.005". The tolerance on length for welded components is
0.010" from the centerline of the base.
Maximum height
Maximum width
Length
Threaded holes
Pattern
Fittings:
Process
Actuation
Control:
Manual
5.5"/140 mm
1.5"/38 mm
0.50"/12.7 mm 0.010"
n/a
n/a
n/a
n/a
Pneumatic
n/a
Electrical
4-pin Bendix connector, analog signal pin out as follows:

Pin A : + 420 mA excitation, + power input
Pin B : pressure output/signal output
Pin C : optional (open if not used)
Pin D : - 420 mA negative, power and signal/ground
SEMATECH
11
5.5
Filters and Purifiers
Filters and purifiers should conform to the design and specifications appearing in Figure 6 and
Table 6.
Figure 6
Table 6
Filter/Purifier Diagram
Filter/Purifier Specifications
End-to-End Lengths:
3.31"/84 mm
Maximum Diameter
Length
Threaded Holes
Pattern
Fittings:
Process
Actuation
Control:
Manual
1.5"/38 mm
n/a
none required
n/a
n/a
Face seal (VCR compatible)
n/a
None required
n/a
Pneumatic
n/a
Electrical
n/a
SEMATECH
12
6
RELATED DOCUMENTS
In pursuit of standard designs for gas box components, the reader may benefit from the following
perviously published SEMATECH documents:
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
12.
13.
14.
15.
16.
SEMASPEC Test Method for Determination of Helium Leak Rate for Gas Distribution
System Components, Technology Transfer #90120391B-STD
SEMASPEC Test Method for Determination of Regulator Performance Characteristics for
Gas Distribution System Components, Technology Transfer #90120392B-STD
SEMASPEC Test Method for Determination of Filter Flow Pressure Drop Curves for Gas
Distribution System Components, Technology Transfer #90120393B-STD
SEMASPEC Test Method for Determination of Valve Flow Coefficients for Gas
Distribution System Components, Technology Transfer # 90120394B-STD
SEMASPEC Test Method for Determination of Cycle Life of Automatic Valves for Gas
Distribution System Components, Technology Transfer #90120395-STD
SEMASPEC Test Method for Determination of Total Hydrocarbon Contribution by Gas
SEMASPEC Test Method for Determination of Moisture Contribution by Gas Distribution
SEMASPEC Test Method for Determination of Oxygen Contributionby Gas Distribution
SEMASPEC Test Method for Determination of Inonic/Organic Extractables for Gas
SEMASPEC Test Method for Determination of Surface Roughness by Contact Profilometry
for Gas Distribution Systems Components, Technology Transfer #90120400B-STD
SEMASPEC Test Method for Scanning Electron Microscope (SEM) Analysis of Metallic
Surface Condition for Gas Distribution System Components, Technology Transfer
#90120401B-STD
SEMASPEC Test Method for Energy Dispersing X-Ray (EDX) Analysis of Metallic Surface
Condition for Gas Distribution System Components, Technology Transfer
#90120402B-STD
SEMASPEC Test Method for XPS Analysis of Surface Composition and Chemistry of
Electropolished Stainless Steel Tubing for Gas Distribution System Components,
Technology Transfer #90120403A-STD
SEMASPEC Test Method for Determination of Surface Roughness by Scanning Tunnelling
Microscopy (STM) for Gas Distribution System Components, Technology Transfer
#90120404B-STD
SEMASPEC Test Method for AES Analysis of Surface and Oxide Composition of
Electropolished Stainless Steel Tubing for Gas Distribution Systems Components,
Technology Transfer #90120573B-STD
SEMASPEC Guide to Provisional Test Methods for Mass Flow Controllers (MFCs),
SEMATECH
13
17.
SEMASPEC Provisional Test Method for Determining Accuracy, Linearity, Repeatability,

Short Term Reproducibility, Hysterisis and Deadband of Thermal Mass Flow Controllers,
Technology Transfer # 92071221B-STD
18. SEMASPEC Provisional Test Method for Determining Reproducibility and Zero Drift for
Thermal Mass Flow Controllers (MFCs), Technology Transfer #92071222B-STD
19. SEMASPEC Provisional Test Method For Determining Warm-Up Time of Mass Flow
Controllers (MFCs), Technology Transfer #92071223B-STD
20. SEMASPEC Provisional Test Method For Determining Reliability of a Mass Flow
Controller (MFC), Technology Transfer #92071224B-STD
21. SEMASPEC Provisional Test Method For Verification of Calibration Accuracy and
Calculation of Conversion Factors For a Mass Flow Controller Using Surrogate Gases,
22. SEMASPEC Provisional Test Method For Determining Particle Contribution by Mass
Flow Controllers (MFCs), Technology Transfer #92071226B-STD
23. SEMASPEC Provisional Test Method for Determining Moisture, Oxygen, and Total
Hydrocarbon Contribution/Retention by Mass Flow Controllers (MFCs), Technology
Transfer #92071227B-STD
24. SEMASPEC Provisional Test Method For Determining Mass Flow Controller (MFC)
Performance Characteristics from Ambient and Gas Temperature Effects, Technology
Transfer #92071228B-STD
25. SEMASPEC Provisional Test Method For Determining Pressure Effects on Indicated and
Actual Flow for Mass Flow Controllers (MFCs), Technology Transfer #92071229B-STD
26. SEMASPEC Provisional Test Method For Determining Steady-State Supply Voltage Effects
for Mass Flow Controllers (MFCs), Technology Transfer #92071230B-STD
27. SEMASPEC Provisional Test Method for Evaluating the Electromagnetic Susceptibility of
Thermal Mass Flow Controllers (MFCs), Technology Transfer #92071231B-STD
28. SEMASPEC Provisional Test Method for Determining Attitude Sensitivity of Mass Flow
Controllers (Mounting Position), Technology Transfer #92071232B-STD
29. SEMASPEC Provisional Test Method for Determining the Corrosion Resistance of Mass
Flow Controllers (MFCs), Technology Transfer #92071233B-STD
SEMATECH
SEMATECH Technology Transfer

2706 Montopolis Drive
Austin, TX 78741
http://www.sematech.org

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SEMATECH Design Guidelines for

Gas Box Components

1996 SEMATECH, Inc.

SEMATECH Design Guidelines for Gas Box Components

June 28, 1996

Components, Cost of Ownership, Fluid Distribution Systems, Specifications

Jim Ammenheuser, Jeff Riddle

Jim Ammenheuser, Author

SUMMARY OF THE GUIDE...................................................................................................4

Technology Transfer # 96063137A-ENG

Typical Factory Gas System Diagram..........................................................................2

Pressure Transducer Diagram.....................................................................................10

Filter/Purifier Diagram ...............................................................................................11

Guideline Specifications for Particular Components....................................................1

Valve Specifications .....................................................................................................5

Pressure Transducer Specifications ............................................................................10

Technology Transfer # 96063137A-ENG

Technology Transfer # 96063137A-ENG

Guideline Specifications for Particular Components

Technology Transfer # 96063137A-ENG

Mea sureme nts

*(includes particulates, metals, molecular)

Purity*, Cost, Reliability

Typical Factory Gas System Diagram

Technology Transfer # 96063137A-ENG

Definitions of terms used in this document are as follows:

Technology Transfer # 96063137A-ENG

SUMMARY OF THE GUIDE

Technology Transfer # 96063137A-ENG

1/4 Swivel male or swivel female face seal (VCR compatible)

(see above dimensions)

Base to Centerline of Flow Path:

1"/25.4 mm bolt circle centered on bottom of base with

1/4" face seal (VCR compatible)

Nominal Actuation Pressure 75 psig.

Technology Transfer # 96063137A-ENG

Technology Transfer # 96063137A-ENG

1030 SLM Regulators

(see above dimensions)

(see above dimensions)

Base to Centerline of Flow Path:

(Same pattern defined above

Two threaded holes, centered

face seal (VCR compatible)

face seal (VCR compatible)

Handle within envelope

Handle within envelope

Technology Transfer # 96063137A-ENG

MFCs and MFMs

Technology Transfer # 96063137A-ENG

1/4 swivel male or swivel female face seal (VCR

(See above dimensions)

(See above dimensions)

(Same pattern defined for

(Same pattern defined for

face seal (VCR compatible) face seal (VCR compatible)

9-pin sub D connector, analog signal pin out as follows:

Technology Transfer # 96063137A-ENG

Valve Closed (Ground)