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    Swagelok Gas Filters Ultra High Putity

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    The document discusses ultrahigh-purity gas filters from Swagelok. The filters use Membralox ceramic filtration technology to remove particles greater than 99.9999999% at 0.003 μm. They are available in flow rates up to 2700 std L/min and various end connection and housing sizes.

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    Swagelok Gas Filters Ultra High Putity

    Uploaded by

    totcsab
    400 views4 pages
    The document discusses ultrahigh-purity gas filters from Swagelok. The filters use Membralox ceramic filtration technology to remove particles greater than 99.9999999% at 0.003 μm. They are available in flow rates up to 2700 std L/min and various end connection and housing sizes.

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    Swagelok Gas Filters Ultra High Putity Ultratiszta szűrők

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    The document discusses ultrahigh-purity gas filters from Swagelok. The filters use Membralox ceramic filtration technology to remove particles greater than 99.9999999% at 0.003 μm. They are available in flow rates up to 2700 std L/min and various end connection and housing sizes.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    400 views4 pages

    Swagelok Gas Filters Ultra High Putity

    Uploaded by

    totcsab
    The document discusses ultrahigh-purity gas filters from Swagelok. The filters use Membralox ceramic filtration technology to remove particles greater than 99.9999999% at 0.003 μm. They are available in flow rates up to 2700 std L/min and various end connection and housing sizes.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    of 4

    www.swagelok.

    com

    Ultrahigh-Purit y
    Gas Filte rs

    SCF Se r ie s
    Membralox ceramic filtration technology
    Genuine Swagelok VCR face seal fittings
    Particle removal rating greater than 99.9999999 % at 0.003 m at maximum flow rate
    Flow rates to 2700 std L/min

    Ultrahigh-Purity Gas Filters

    SCF Series UHP Filters

    Membralox Ceramic Filtration Technology

    The Swagelok SCF series UHP gas filter is designed to


    meet the stringent requirements of SEMI E49.8-96. With
    the proprietary Membralox ceramic element and 316L VAR
    stainless steel housing, the SCF series UHP filter is a solution
    for many demanding gas filtering applications.

    The Membralox ceramic element is a multilayered filter


    medium. The material is a high-purity alumina with a precisely
    controlled pore structure.

    Features

    The Membralox ceramic element is an extruded multiflow


    channel block or tubular structure. The flow channels within
    the structure are coated with precisely controlled membrane
    layers. A final sintering process fuses the layers together.
    The result is a filter element that is designed to minimize
    particle shedding and provide enhanced flow characteristics.
    The removal rating of the filter is greater than 99.9999999 %
    at 0.003 m when tested in accordance with SEMI F38-0699.

    High particle removal efficiency


    Exceptionally low particle

    shedding
    Superior moisture dry-down

    The Membralox ceramic element provides both high


    temperature and chemical resistance, along with superior
    particle removal and outgassing characteristics.

    characteristics
    Extremely low outgassing
    Outstanding chemical

    compatibility
    High differential pressure rating
    Inline, all-welded construction
    Maximum flow rates: 30, 225, 600, 900, and 2700 std L/min
    Gas Flow

    End connections: 1/4, 1/2, and 3/4 in. integral male VCR

    face seal fittings; 1/4 in. female VCR face seal fittings
    Industry-standard lengths; see Ordering Information and

    Dimensions.

    Materials of Construction
    Ceramic element: high-purity alumina
    Gasket: high-density PTFE
    Housing: 316L VAR stainless steel/SEMI F200305 HighPurity, 20% minimum elongation allowed

    The ceramic element is a multichannel


    block or tubular configuration of highpurity alumina.

    A scanning electron microscope image


    shows the two membrane layers of
    the filter element: ultrafine and fine (as
    shown from top to bottom).

    Technical Data
    Maximum Flow
    Rate at
    Removal Rating
    std L/min (std ft3/min)

    Filtration
    Area
    cm2 (in.2)

    30 (1.0)

    10 (1.6)

    225 (7.9)

    20 (3.1)

    600 (21)

    70 (11)

    900 (31)

    150 (23)

    2700 (95)

    450 (70)

    Pressure Rating
    at 37C (100F), psig (bar)
    Working

    Differential

    3000

    2500

    (206)

    (172)

    Temperature
    Rating
    C (F)

    200
    (400)

    Removal
    Rating

    Internal
    Surface
    Finish

    Electropolished
    and finished
    > 99.9999999 %
    to a roughness
    at 0.003 m
    average of 5in.
    (0.13 m) Ra

    Ultrahigh-Purity Gas Filters

    Flow Rate at Pressure Drop


    Maximum Flow Rate: 30 std L/min

    Maximum Flow Rate: 225 std L/min

    Nominal Inlet Pressures


    58.0 psig (3.9 bar)

    72.5 psig (4.9 bar)

    Nominal Inlet Pressures


    43.5 psig (2.9 bar)

    Nitrogen Flow, std ft3/min

    Pressure Drop, psi

    Pressure Drop, psi

    Pressure Drop, bar

    Nominal Inlet Pressures

    90.0 psig (6.2 bar)

    30.0 psig (2.0 bar)

    Nitrogen Flow, std L/min

    Pressure Drop, psi

    Pressure Drop, psi

    90.0 psig (6.2 bar)

    Nitrogen Flow, std ft3/min

    Pressure Drop, bar

    Nitrogen Flow, std ft3/min

    Nitrogen Flow, std L/min

    Maximum Flow Rate: 2700 std L/min


    Nominal Inlet Pressures
    60.0 psig (4.1 bar)

    90.0 psig (6.2 bar)

    Pressure Drop, bar

    Nitrogen Flow, std ft3/min

    Pressure Drop, psi

    43.5 psig (2.9 bar)

    Maximum Flow Rate: 900 std L/min

    Nominal Inlet Pressures

    Nitrogen Flow, std L/min

    72.5 psig (4.9 bar)

    Nitrogen Flow, std L/min

    Maximum Flow Rate: 600 std L/min

    30.0 psig (2.0 bar)

    29.0 psig (1.9 bar)

    58.0 psig (3.9 bar)

    Nitrogen Flow, std ft3/min

    Nitrogen Flow, std L/min

    30.0 psig (2.0 bar)

    14.5 psig (0.9 bar)

    Pressure Drop, bar

    29.0 psig (1.9 bar)

    Pressure Drop, bar

    14.5 psig (0.9 bar)

    Ordering Information and Dimensions


    Dimensions, in inches (millimeters), are for reference only and are subject to change.
    3 in. (76.2 mm) Filters30 and 225 std L/min
    C dia

    All Other Filters


    B hex

    C dia

    B hex

    Maximum
    Flow Rate
    std L/min

    End Connection
    Inlet and Outlet

    Ordering
    Number

    Dimensions, in. (mm)


    A

    3 in. (76.2 mm) Filters


    30

    225

    600

    1/4 in. integral male VCR fitting

    SS-SCF3-VR4-P-30

    1/4 in. integral male VCR fitting


    and 1/4 in. female VCR fitting

    SS-SCF3-VR4FR4-P-30

    1/4 in. integral male VCR fitting

    SS-SCF3-VR4-P-225

    1/4 in. integral male VCR fitting


    and 1/4 in. female VCR fitting

    SS-SCF3-VR4FR4-P-225

    3.31
    (84.1)

    0.88

    0.80

    (22.4)

    (20.3)

    1.23

    1.18

    (31.2)

    (30.0)

    1/2 in. integral male VCR fitting

    SS-SCF3-VR8-P-225

    1/4 in. integral male VCR fitting

    SS-SCF3-VR4-P-600

    1.42

    1.67

    1/2 in. integral male VCR fitting

    SS-SCF3-VR8-P-600

    (36.1)

    (42.4)

    5 in. (127 mm) Filters


    900

    1/4 in. integral male VCR fitting

    SS-SCF5-VR4-P-900

    5.00

    0.93

    1.67

    1/2 in. integral male VCR fitting

    SS-SCF5-VR8-P-900

    (127)

    (23.6)

    (42.4)

    11.2

    (23.6)

    1.67

    (284)

    1.29

    (42.4)

    11 in. (279 mm) Filters


    1/2 in. integral male VCR fitting

    SS-SCF11-VR8-P-2700

    2700
    3/4 in. integral male VCR fitting

    SS-SCF11-VR12-P-2700

    0.93

    (32.8)

    Testing

    Cleaning and Packaging

    Every SCF series filter is helium leak tested to a maximum


    leak rate of 9 3 10 9 std cm3/s.

    Every SCF series filter is processed in accordance with


    Swagelok Ultrahigh-Purity Process Specification (SC-01),
    MS0661.

    The SCF series filter design has been helium leak tested to
    a maximum leak rate of 2 3 10 10 std cm3/s.

    Safe Product Selection


    When selecting a product, the total system design must
    be considered to ensure safe, trouble-free performance.
    Function, material compatibility, adequate ratings,
    proper installation, operation, and maintenance are the
    responsibilities of the system designer and user.
    Caution: Do not mix or interchange parts with those of
    other manufacturers.

    Warranty Information
    Swagelok products are backed by The Swagelok Limited
    Lifetime Warranty. For a copy, visit swagelok.com or contact
    your authorized Swagelok representative.

    Swagelok, IGC, VCRTM Swagelok Company


    MembraloxTM Pall Corporation
    2008 Swagelok Company
    Printed in U.S.A., GLI
    September 2008, R4
    MS-02-156

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